• 제목/요약/키워드: Diamond etching

검색결과 101건 처리시간 0.023초

제 5급 와동에서의 단일용기 상아질 접착제와 자가 산부식 접착제의 상아질에 대한 침투도 평가 (A CONFOCAL MICROSCOPIC STUDY ON DENTINAL INFILTRATION OF ONE-BOTTLE ADHESIVE SYSTEMS AND SELF-ETCHING PRIMING SYSTEM BONDED TO CLASS V CAVITIES)

  • 김형수;박성호
    • Restorative Dentistry and Endodontics
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    • 제27권3호
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    • pp.257-269
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    • 2002
  • Objective : The purpose of this study was to evaluate the resin infiltration into dentin of one-bottle adhesive systems and self-etching primer bonded to Class V cavities using confocal laser scanning microscope(CLSM). Material and Methods : Forty Class V cavities were prepared from freshly extracted caries-free Human teeth. These teeth were divided into two groups based on the presence of cervical abrasion: Group I, cervical abrasion : Group II, wedge-shaped cavity preparation. Resin-dentin interfaces were produced with two one-bottle dentin bonding systems-ONE COAT BOND(OCB; Coltene$^R$) and Syntac$^R$SPrint$^{TM}$(SS; VIVADENT)-, one self-etching priming system-CLEARFIL$^{TM}$ SE BOND (SB : KURARAY)- and one multi-step dentin bonding system-Scotchbond$^{TM}$Multi-Purpose (SBMP, 3M Dental Products)-as control according to manufacturers' instructions. Cavities were restored with Spectrum$^{R}$(Dentsply). Specimens were immersed in saline for 24 hours and sectioned longitudinally with a low-speed diamond disc. The resin-dentin interfaces were microscopically observed using CLSM. The quality of resin-infiltrated dentin layers were evaluated by five dentists using 0~4 scale. Results : Confocal laser scanning microscopal investigations using primer labeled with rhodamine B showed that the penetration of the primer occurred along the cavity margins. Statistical analysis using one-way ANOVA followed by Duncan's Multiple Range test revealed that the primer penetration of the group 2(wedge-shaped cavity preparation) was more effective than group 1(cervical abrasion) and that of the gingival interfaces was more effective than the occlusal interfaces. In the one-bottle dentin bonding systems, the resin penetration score of OCB was compatible to SBMP, but those of SS and self-etching priming system, SB were lower than SBMP.

Hydrophobicity and Nanotribological Properties of Silicon Channels coated by Diamond-like Carbon Films

  • Pham, Duc Cuong;Na, Kyung-Hwan;Pham, Van Hung;Yoon, Eui-Sung
    • KSTLE International Journal
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    • 제10권1_2호
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    • pp.1-5
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    • 2009
  • This paper reports an investigation on nanotribological properties of silicon nanochannels coated by a diamond-like carbon (DLC) film. The nanochannels were fabricated on Si (100) wafers by using photolithography and reactive ion etching (RIE) techniques. The channeled surfaces (Si channels) were then further modified by coating thin DLC film. Water contact angle of the modified and unmodified Si surfaces was examined by an anglemeter using the sessile-drop method. Nanotribological properties, namely friction and adhesion forces, of the Si channels coated with DLC (DLC-coated Si channels) were investigated in comparison with those of the flat Si, DLC-coated flat Si (flat DLC), and Si channels, using an atomic force microscope (AFM). Results showed that the DLC-coated Si channels greatly increased hydrophobicity of silicon surfaces. The DLC coating and Si channels themselves individually reduced adhesion and friction forces of the flat Si. Further, the DLC-coated Si channels exhibited the lowest values of these forces, owing to the combined effect of reduced contact area through the channeling and low surface energy of the DLC. This combined modification could prove a promising method for tribological applications at small scales.

비구면 유리렌즈 성형용 SiC 코어의 DLC 코팅에 관한 연구 (A Research on DLC Thin Film Coating of a SiC Core for Aspheric Glass Lens Molding)

  • 박순섭;원종호
    • 한국정밀공학회지
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    • 제27권12호
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    • pp.28-32
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    • 2010
  • Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

표면 부식 처리한 WS2 입자를 첨가한 Cu/Sn계 다이아몬드 마이크로 블레이드의 절삭특성 (Evaluation of Dicing Characteristics of Diamond Micro-blades with Cu/Sn Binder Including Etched WS2 Particles)

  • 김송희;장재철
    • 한국표면공학회지
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    • 제46권1호
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    • pp.22-28
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    • 2013
  • $WS_2$ particles were added to micro-diamond blades with Cu/Sn binding metal as lubricants to improve cutting efficiency. It was found in previous works that the added $WS_2$ lubricant could reduce remarkably the momentary energy consumption during dicing tests but increased wear rate slightly owing to weak bonding between lubricant particles and bond metals. In the present work, the surface of $WS_2$ lubricant particles were etched for activating the surface of $WS_2$ particles that provide even distribution of particles during powder mixing process and improvement of wetting at the interfaces between $WS_2$ particles and molten Cu/Sn bond metals during pressurized sintering so that could provide the improved strength of micro-blades and result in extended life. Chipping behavior of workpiece with the types of micro-blades including $WS_2$ were compared because it is important in semiconductor and micro-packaging industries to control average roughness and straightness of sliced surface which is closely related with quality.

반도체 플라즈마 식각 장치의 부품 가공 연구 (A Study of Machining Optimization of Parts for Semiconductor Plasma Etcher)

  • 이은영;김문기
    • 반도체디스플레이기술학회지
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    • 제19권4호
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    • pp.28-33
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    • 2020
  • Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

Synthesis and Light Emission from ZnO-Coated Silicon Nanorods

  • Kim, Hyun-Su;Jin, Chang-Hyun;Park, Sung-Hoon;Kim, Hyoun-Woo;Lee, Chong-Mu
    • Bulletin of the Korean Chemical Society
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    • 제33권7호
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    • pp.2333-2337
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    • 2012
  • We report the synthesis and thermal annealing of Si-core/ZnO-shell nanorods using a two-step process comprising the metal-assisted electroless etching of Si and the sputter deposition of ZnO. Transmission electron microscopy and X-ray diffraction analysis showed that the cores of the annealed core-shell nanorods were single crystal diamond cubic-type Si, whereas the shells of the annealed core-shell nanorods were single crystal wurtzite-type ZnO. The PL spectra of Si nanorods consisted of a broad red emission band and a weaker blue emission band. The major emission band of Si nanorods was shifted from 700 nm (in the red region) to 440 nm (in the violet region) by ZnO coating. The violet emission of the core-shell nanorods was enhanced in intensity considerably by annealing in an oxidizing atmosphere. The origin of the PL enhancement by annealing is also discussed.

Fiber network with superhydrophilic Si-DLC coating

  • 김성진;문명운;이광렬;김호영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.363-363
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    • 2010
  • The high capillarity of a plastic fiber network having superhydrophilic Si-DLC coating is studied. Although the superhydrophilic surface maximize wetting ability on the flat surface, there remains a requirement for the more wettable surface for various applications such as air-filters or liquid-filters. In this research, the PET non-woven fabric surface was realized by superhydrophilic coating. PTE non-woven fabric network was chosen due to its micro-pore structure, cheap price, and productivity. Superhydrophobic fiber network was prepared with a coating of oxgyen plasma treated Si-DLC films using plasma-enhanced chemical vapor deposition (PECVD). We first fabricated superhydrophilic fabric structure by using a polyethylene terephthalate (PET) non-woven fabric (NWF) coated with a nanostructured films of the Si-incorporated diamond-like carbon (Si-DLC) followed by the plasma dry etching with oxygen. The Si-DLC with oxygen plasma etching becomes a superhydrophilic and the Si-DLC coating have several advantages of easy coating procedure at room temperature, strong mechanical performance, and long-lasting property in superhydrophilicity. It was found that the superhydrophobic fiber network shows better wicking ability through micro-pores and enables water to have much faster spreading speed than merely superhydrophilic surface. Here, capillarity on superhydrophilic fabric structure is investigated from the spreading pattern of water flowing on the vertical surface in a gravitational field. As water flows on vertical flat solid surface always fall down in gravitational direction (i.e. gravity dominant flow), while water flows on vertical superhydrophilic fabric surface showed the capillary dominant spreading.

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단결정 다이어몬드 공구를 이용한 Micro-V 홈 가공기구 (Mechanism of Micro-V Grooving with Single Crystal Diamond Tool)

  • 박동삼;서태일;김정근;성은제;한진용;이은상;조명우;최두선
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1223-1227
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    • 2005
  • Fine microgroove is the key component to fabricate micro-grating, micro-grating lens and so on. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. This study deals with the creation of ultra-precision micro grooves using non-rotational diamond tool and CNC machining center. The shaping type machining method proposed in the study allows to produce V-shaped grooves of $40\mu{m}$ in depth with enough dimensional accuracy and surface. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. Experimental results showed that large amplitude of cutting forces and AE appeared at the beginning of every cutting path, and cutting forces had a linear relation with the cross-sectional area of uncut chip thickness. From the results of this study, proposed micro V-grooving technique could be successfully applied to forming the precise optical parts like prism patterns on light guide panel of TFT-LCD.

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열순환이 상아질 접착제의 결합 내구성에 미치는 영향 (THE EFFECT OF THERMOCYCLING ON THE DURABILITY OF DENTIN ADHESIVE SYSTEMS)

  • 문영훈;김종률;최경규;박상진
    • Restorative Dentistry and Endodontics
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    • 제32권3호
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    • pp.222-235
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    • 2007
  • 이 논문의 목적은 열순환이 4종 상아질 접착 시스템의 결합 내구성에 미치는 영향을 측정한 것이다. 제3대구치의 상아질층을 노출시킨 후, 무작위로 8개군으로 나눈다: 3단계 산부식 시스템 (Scotchbond Multi-Purpose Plus; SM, All Bond-2 ; AB), 2 단계 산부식 시스템 (Single Bond; SB, One Step plus, OS), 2단계 자가부식 시스템 (Clearfil SE Bond; SE, AdheSE; AD), 1 단계 자가부식 시스템 (Promp L-Pop ; PL, Xeno III; XE). 8개 군에 각 상아질 접착제를 제조사의 지시에 따라 도포하고 복합레진 (Z250)을 적층한 후, 광조사한다. $37^{\circ}C$ 증류수에서 24시간 보관한 후, 각 군마다 정해진 프로그램으로 0, 1000, 2000회 열순환한 후, 저속 diamond saw로 $1\times1mm$ 막대형 시편을 제작한다. Universal testing machine (EZ-test; Shimadzu, Japan)으로 미세인장 결합강도를 측정하였고, 유의수준 0.05 level에서 ANOVA / Duncan's test로 통계분석 하였다. 상아질측 파단면과 접착계면에 대한 주사전자현미경 관찰을 시행하였다. 이 연구의 결과는 다음과 같다; 1. 3단계 상아질 접착제의 결합강도는 열순환 전후에 통계학적으로 유의한 변화를 나타내지 않았다. 2단계 산부식형 상아질 접착제의 결합강도는 열순환 처리에 의하여 유의하게 감소되었다. 2. 2단계 자가부식형 접착제 (SE)의 결합강도가 가장 높았고, 1단계 자가부식 접착제 (PL, XE)는 실험군 중 가장 낮은 결합강도를 보였다. 3. 모든 접착제는 주로 접착성 파괴가 발생하였고, 열순환에 의하여 산부식형 접착제는 접착성 파괴가, 1단계 자가부식형 접착제에서는 혼합형 파괴가 증가하는 경향을 나타내었다. 이상의 결과로, 상아질 접착제의 접착단계/과정이 결합내구성에 영향을 미침을 알 수 있었다. 따라서 접착과정의 단순화가 반드시 접착에 효과적이라고 할 수 없다.

자기 조립 분자막의 표면파손특성 및 미세 금속 구조물 제작에의 응용 (Surface Damage Characteristics of Self-Assembled Monolayer and Its Application in Metal Nano-Structure Fabrication)

  • 성인하;김대은
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 제35회 춘계학술대회
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    • pp.40-44
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    • 2002
  • The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.

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