• Title/Summary/Keyword: Diamond IC

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Operation Analysis of Downstream Intersections at Urban Freeway Off-ramps (도시고속도로 진출램프 하류부교차로 운영 분석 (중동 IC 사례 분석을 중심으로))

  • Jeon, Jae-Hyeon;Kim, Young-Chan;Jeoung, Young-Je
    • Journal of Korean Society of Transportation
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    • v.26 no.4
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    • pp.7-16
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    • 2008
  • Severe congestion is happening at urban freeway off-ramps in Seoul. Major causes of congestion at off-ramps are a shortage of capacity and inefficient signal operations at the downstream intersection at off-ramps. It is necessary to control congestion by improving design or operations in the downstream intersection. In this study, the authors analyzed the case of the Jungdong interchange that was improved for design in the downstream intersection. When a freeway and an arterial road cross, diamond interchanges are usually selected with a single-point urban interchange (SPUI) as an alternative. To compare the effectiveness of a diamond interchange with a SPUI, the authors applied these two configurations to the Jungdong interchange using a simulation. The result of the analysis shows that congestion at off-ramps in diamond interchanges can be reduced by improving signal operations such as the application of "4 phase with overlaps" and that diamond interchanges are more efficient than a SPUI with a frontage road. Efficient operation of the downstream intersection by these findings can minimize congestion of not only the downstream intersection but also the freeway mainline.

Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP

  • Lee, Hyo-Sang;DeNardis, Darren;Philipossian, Ara;Seike, Yoshiyuki;Takaoka, Mineo;Miyachi, Keiji;Furukawa, Shoichi;Terada, Akio;Zhuang, Yun;Borucki, Len
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.2
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    • pp.67-72
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    • 2007
  • High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.

Patterning of CVD Diamond Films For MEMS Application

  • Wang, Xiaodong;Yang, Yirong;Ren, Congxin;Mao, Minyao;Wang, Weiyuan
    • Journal of the Korean Vacuum Society
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    • v.7 no.s1
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    • pp.167-170
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    • 1998
  • To apply diamond films in microelectromechanical systems(MEMS), it is necessary to develop the patterning technologies of diamond films in the micrometer scale. In this paper, three different kinds of technologies for patterning CVD diamond films carried out by us were demonstrated: selective growth by improved diamond nucleation in DC bias-enhanced microwave plasma chemical vapor deposition (MPCVD) system, selective growth of seeding using diamond-particle-mixed photoresist, and selective etching of oxygen ion beam using Al as the mask. It was show that high selectivity and precise patterns had been achieved, and all the processes were compatible with IC process.

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Bonding and Etchback Silicon-on-Diamond Technology

  • Jin, Zengsun;Gu, Changzhi;Meng, Qiang;Lu, Xiangyi;Zou, Guangtian;Lu, Jianxial;Yao, Da;Su, Xiudi;Xu, Zhongde
    • The Korean Journal of Ceramics
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    • v.3 no.1
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    • pp.18-20
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    • 1997
  • The fabrication process of silicon-diamond(SOD) structure wafer were studied. Microwave plasma chemical vapor deposition (MWPCVD) and annealing technology were used to synthesize diamond film with high resistivity and thermal conductivity. Bonding and etchback silicon-on-diamond (BESOD) were utilized to form supporting substrate and single silicon thin layer of SOD wafer. At last, a SOD structure wafer with 0.3~1$\mu\textrm{m}$ silicon film and 2$\mu\textrm{m}$ diamond film was prepared. The characteristics of radiation for a CMOS integrated circuit (IC) fabricated by SOD wafer were studied.

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Design of the New Insecticidal Active Molecule against Diamond-Back Moth (Plutella Xylostella Linnaeus) (배추좀나방(Plutella Xylostella Linnaeus)에 대한 새로운 살충활성 분자의 설계)

  • Cho, Yun-Gi;Choi, Woo-Young;Sung, Nack-Do
    • Korean Journal of Agricultural Science
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    • v.34 no.2
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    • pp.171-179
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    • 2007
  • The new insecticidal active molecules from the based on the holographic quantitative structure-activity relationships (HQSAR) between a series of $1-(R_1)-2-(n-octyl)-3-(R_2)$, $3-(R_3)-pseudothiourea$ derivatives and their insecticidal activities against Diamond-back moth (Plutella Xylostella Linnaeus) were designed and discussed quantitatively. The most active molecule from the based graphical analyses of atomic contribution maps with the optimized HQSAR C-1 model ($q^2=0.764$ & $r^2{ncv}=0.942$) was 1-(n-butyl)-2-(t-butyl)-3,3-diisopropylpseudothiourea (P1: $pI_{50}=5.30$, $IC_{50}=1.397ppm$). Therefore, it is suggested that the new designed molecule would increased the activity as much as 23.5 times as compared to X=n-octyl substituent 17($pI_{50}=4.00$, $IC_{50}=32.86ppm$) which was the highest active molecule in training set compounds.

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Micro Cracking and Elastic/Plastic Transition Radii Associated with Indenting on Ceramics by Diamond Indenter (경취재료에 있어 압자압입시의 균열진전에 관한 연구)

  • Park, G.H.
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.5
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    • pp.164-172
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    • 1996
  • In hard and brittle materials as advanced ceramics indented by a hard indenter, the indenter's transition radius, was defined as critical radius which distinguishes the occurrence of the first plastic deformation from the elastic cracking as the first damaging event, is analytically and experimentally investigated. The analytical result is shown that the critical load, which not enlarge pre-existing cracks as the form of median crack beneath a indenter, is constant, and is determined by the order of $k_{IC}$$^{4}$ $P_{Y}$$^{3}$(where, $K_{IC}$ , $P_{Y}$are the fracture toughness of materials and the applied pressure by indenting, respectively). And the size of transiton radii were experimentally obtained with the similar values to the analytical results.lts..

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Cutting Efficiency and Mechanical Characteristics of Diamond Micro-blades Containing WS2 Lubricant (WS2 윤활제를 첨가한 마이크로 다이아몬드 블레이드의 절삭성능과 기계적 특성)

  • Kim, Song-Hee;Jang, Jae-Cheol
    • Journal of the Korean institute of surface engineering
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    • v.45 no.1
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    • pp.37-42
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    • 2012
  • $WS_2$ powder was added to the Cu/Sn bond metal of diamond micro-blades for machining of semi-conductor and IC chips to improve cutting efficiency. The effect of $WS_2$ additive on cutting efficiency was investigated and compared with the micro-blades with $MoS_2$ developed in previous research. Flexural strength, frictional coefficient, and wear resistance of blades decreased with $WS_2$ but wear depth increased. It was found that the blades including $WS_2$ consumed less momentary energy than the blades containing $MoS_2$ during dicing test. Micro-blades containing $WS_2$ exhibited lower flexural strength than the blades with $MoS_2$ resulting from higher amount of sintering defects relevant to the less effectiveness of $WS_2$ on fluidity. The effect of $WS_2$ and $MoS_2$ on fluidity during sintering was analyzed in terms of mismatching degree between the longitudinal direction of lubricant particles and the perpendicular direction to the compact loading. The blade with 8.1 vol.% of $WS_2$ showed the best cutting efficiency.

Parabolic mirror test using Computer Generated Hologram (Computer Generated Hologram을 이용한 포물명경 형상측정)

  • 김성하;곽종훈;최옥신;송재봉;이윤우;이인원
    • Korean Journal of Optics and Photonics
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    • v.11 no.2
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    • pp.80-84
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    • 2000
  • Parabolic almninium mlITOr of m.5('||'&'||'cent; 50 nun) was fabncated by a diamond tummg machine. Computer generated hologram (CGH) for the test of parabolic mirror was encoded by binary phase hologram Approximation of curved fringe to line was made by staircase encoding. After fringe data 1ransformed mto a Post Scnpt file. magnified master CGH was printed by a laser printer, and then it reduced to the photographIc film. Parabolic mirror was tested by Twyman-Green interferometer with CGH at VIewing arm. Its experimental result was compared with those of surface profile and auto-collimatIon test, and then the errors were analyzed.

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The Effect of Graphite and MoS2 on Endurance and Cutting Performance of Diamond Micro Blades (다이아몬드 마이크로블레이드의 내구성과 절삭성능에 미치는 흑연과 MoS2의 첨가효과)

  • Moon, Jong-Chul;Kim, Song-Hee
    • Journal of the Korean institute of surface engineering
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    • v.41 no.6
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    • pp.335-340
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    • 2008
  • Cutting performance and wear behavior were studied with the diamond micro-blade of Cu/Sn bond materials containing various amount of lubricant materials such as graphite and $MoS_2$. Measurement of instantaneous electric power consumption for cutting glass workpiece at the constant velocity was conducted and proposed as a method to assess cutting efficiency. The energy consumption of micro-blade for glass cutting decreased with the content of graphite and $MoS_2$ while wear amount of blade in volume increased with the amount of lubricant addition during the dicing test. It is because that hardness, flexural strength, and fracture toughness ($K_{IC}$) reduced with the amount of lubricant addition. Blades with $MoS_2$ additive showed higher mechanical properties than those with graphite additives when the same amount of the lubricant additive in wt.% was added. Due to the lower density of graphite than $MoS_2$, higher volume fraction of graphite could result in stronger effect on lowering electric power consumption by reducing the friction between blade and work piece however increasing wear rate due to the reduction in strength and fracture toughness. Adhesive wearing mode of micro blade could be remarkably improved by the addition of graphite as well as $MoS_2$.