• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1273-1274
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• 2007

In this paper, a Optical Voltage Transformer has been designed and fabricated to improve temperature stability caused by materials properties and insulation in measuring system, using single crystal $Bi_{12}SiO_{20}$ as Pockels effect cells for Gas Insulated Switchgear[GIS] System. LD[wavelength: 850nm] was used as optical source, InGaAs as optical detector to measure optical power, Polarizing Beam Splitter as Polarizer and Analyzer, and Multi-mode Optical-fiber[62.5/$125{\mu}m$] as Light transmission line. OPT was assembled in order to pockels effect, and adopted direct electric field type. The linearity of OPT maintains variation for applied voltage range from 100V - 3000V during the test of electric property, As the temperature was changed from $25^{\circ}C$ to $60^{\circ}C$. the result of this study shows that characteristics of OPT are good, and it can be reflected for practical optical sensors in GIS system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.412-414
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• 2003

This paper is about research of scintillator layer, which is used for Hybrid method to increase electric signals in a-Se, the material of Direct method. In case of the thermal evaporation, CsI has column structure which is an disadvantage as scintillator. But it decreases scattering of incident X-ray, has better Light output intensity than other scintillation materials. CsI was made by Thermal evaporation. The Doping material, Na, 0.1, 0.3, 0.5, 0.7g were added in each sample. Analysis of absorbed wavelength, PL(Photoluminescence), Light output intensity, SEM, and XRD analysis were performed to analyze optical characteristics. Doping rate of CsI:Na to use as scintillation layer in a-Se based detector could be optimized.

• Transactions on Electrical and Electronic Materials
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• v.6 no.2
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• pp.63-66
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• 2005

Several ways for monitoring the soundness of ZnO lightning arresters have been suggested, and all of which are based on the measurement of leakage current since it is well known that the resistive leakage current is a main indicator of arrester deterioration. In this paper, we proposed an algorithm to measure the resistive leakage current, which is quite different from the conventional method that eliminates capacitive current from the total leakage current. The proposed algorithm is based on that the magnitudes of the resistive leakage current are equal at the same applied voltage levels. To confirm the reliability of the algorithm, we fabricated a leakage current detector and designed an analysis program. Experimental results showed that the method does not need a complex circuitry and is useful to analyze the resistive leakage current.

• Nuclear Engineering and Technology
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• v.50 no.6
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• pp.929-936
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• 2018

A basic characterization of uranium samples was performed using gamma- and X-ray spectroscopy. The studied uranium samples were eight types of certified reference materials with $^{235}U$ enrichments in the range of 1-97%, and the measurements were performed over 24 h using a high-resolution and high-purity planar germanium detector. A general peak analysis of the spectrum and the $XK_{\alpha}$ region of the uranium spectra was carried out by using HyperGam and HyperGam-U, respectively. The standard reference sources were used to calibrate the spectroscopy system. To obtain the absolute detection efficiency, an effective solid angle code, EXVol, was run for each sample. Hence, the peak activities and isotopic activities were determined, and then, the total U content and $^{234}U$, $^{235}U$, and $^{238}U$ isotopic contents were determined and compared with those of the certified reference values. A new method to determine the model age based on the ratio of the activities of $^{223}Ra$ and $^{235}U$ in the sample was studied, and the model age was compared with the known true age. In summary, the present study developed a method for basic characterization of uranium samples by nondestructive gamma-ray spectrometry in 24 h and to obtain information on the sample age.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.271.1-271.1
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• 2013

Titania is usually used in sun-screens, tooth paste, and other daily used objects as a pigment. However, scientists have focused on titania as photocatalyst due to its excellent activities. By fabricating vanadium doped TiO2 and CuOx co-catalyzed TiO2 nano-size filter, the degradation level of the volatile organic compound (VOC) concentration was tested using 365nm UV LED as light source in a closed chamber. Main purpose for this test is to evaluate the activities of various catalysts for degrading the VOCs which are detrimental to human body and toluene and p-xylene were chosen in the VOC removal test. Target gas materials were injected into the test chamber with dry air as carrier gas which was flowed into the gas washer bottle filled with liquid form of VOC substance. When the VOC gas flows into the chamber, it is circulated by 200 mm fan in order to contact with the set-up filter on the aluminum holder. Target gas concentration in the chamber was monitored using VOC detector (miniRae3000, Raesystems) which was also placed inside the chamber. With the measured concentration, the VOC degradation efficiency and the degradation rate were evaluated and used to compare the catalytic activities.

• Korean Journal of Geomatics
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• v.4 no.1
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• pp.1-8
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• 2004

In the middle-resolution remote sensing, the Ground Sampled Distance (GSD) that the detector senses and samples is generally larger than the actual size of the objects (or materials) of interest, and so several objects are embedded in a single pixel. In this case, as it is impossible to detect these objects by the conventional spatial-based image processing techniques, it has to be carried out at sub-pixel level through spectral properties. In this paper, we explain the sub-pixel analysis algorithm, also known as the Linear Spectral Mixing (LSM) model, which has been experimented using the Hyperion data. To find Endmembers used as the prior knowledge for LSM model, we applied the concept of the convex geometry on the two-dimensional scatter plot. The Atmospheric Correction and Minimum Noise Fraction techniques are presented for the pre-processing of Hyperion data. As LSM model is the simplest approach in sub-pixel analysis, the results of our experiment is not good. But we intend to say that the sub-pixel analysis shows much more information in comparison with the image classification.

• Journal of Magnetics
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• v.18 no.3
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• pp.311-316
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• 2013

Digital image processing has increasingly been implemented in nanostructural analysis and would be an ideal tool to characterize the morphology and position of self-assembled magnetic nanoparticles for high density recording. In this work, magnetic nanoparticles were synthesized by the modified polyol process using $Fe(acac)_3$ and $Pt(acac)_2$ as starting materials. Transmission electron microscope (TEM) images of as-synthesized products were inspected using an image processing procedure. Grayscale images ($800{\times}800$ pixels, 72 dot per inch) were converted to binary images by using Otsu's thresholding. Each particle was then detected by using the closing algorithm with disk structuring elements of 2 pixels, the Canny edge detection, and edge linking algorithm. Their centroid, diameter and area were subsequently evaluated. The degree of polydispersity of magnetic nanoparticles can then be compared using the size distribution from this image processing procedure.

• Journal of Radiation Protection and Research
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• v.43 no.4
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• pp.137-142
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• 2018

Background: Gamma-ray detectors having a thin window of a material with low atomic number can increase the true coincidence summing effects for radionuclides emitting X-rays or gamma-rays. This effect can make efficiency calibration or spectrum analysis more complicated. In this study, a Cu shield was tested as an X-ray filter to neglect the true coincidence summing effect by X-rays and gamma-rays in gamma-ray spectrometry, in order to simplify gamma-ray energy spectrum analysis. Materials and Methods: A Cu shield was designed and applied to an n-type high-purity germanium detector having an $X-{\gamma}$ summing effect during efficiency calibration. This was tested using a commercial, certified mixed gamma-ray source. The feasibility of a Cu shield was evaluated by comparing efficiency calibration results with and without the shield. Results and Discussion: In this study, the thickness of a Cu shield needed to avoid true coincidence summing effects due to $X-{\gamma}$ was tested and determined to be 1 mm, considering the detection efficiency desired for higher energy. As a result, the accuracy of the detection efficiency calibration was improved by more than 13% by reducing $X-{\gamma}$ summing. Conclusion: The $X-{\gamma}$ summing effect should be considered, along with ${\gamma}-{\gamma}$ summing, when a detection efficiency calibration is implemented and appropriate shielding material can be useful for simplifying analysis of the gamma-ray energy spectra.

• Progress in Medical Physics
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• v.31 no.3
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• pp.81-98
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• 2020

This review aims to provide a brief, comprehensive overview of advanced technologies of nuclear medicine physics, with a focus on recent developments from both hardware and software perspectives. Developments in image acquisition/reconstruction, especially the time-of-flight and point spread function, have potential advantages in the image signal-to-noise ratio and spatial resolution. Modern detector materials and devices (including lutetium oxyorthosilicate, cadmium zinc tellurium, and silicon photomultiplier) as well as modern nuclear medicine imaging systems (including positron emission tomography [PET]/computerized tomography [CT], whole-body PET, PET/magnetic resonance [MR], and digital PET) enable not only high-quality digital image acquisition, but also subsequent image processing, including image reconstruction and post-reconstruction methods. Moreover, theranostics in nuclear medicine extend the usefulness of nuclear medicine physics far more than quantitative image-based diagnosis, playing a key role in personalized/precision medicine by raising the importance of internal radiation dosimetry in nuclear medicine. Now that deep-learning-based image processing can be incorporated in nuclear medicine image acquisition/processing, the aforementioned fields of nuclear medicine physics face the new era of Industry 4.0. Ongoing technological developments in nuclear medicine physics are leading to enhanced image quality and decreased radiation exposure as well as quantitative and personalized healthcare.