• Title/Summary/Keyword: Deposition time

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The Study on Deposition and Characteristics of Pt-Co Alloy Thin Films for RTD Temperature Sensors (측온저항체 온도센서용 Pt-Co 합금박막의 증착과 특성에 관한 연구)

  • Chung, Gwiy-Sang;Noh, Sang-Soo
    • Journal of Sensor Science and Technology
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    • v.7 no.1
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    • pp.45-50
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    • 1998
  • Platinum-Cobalt alloy thin films were deposited on $Al_{2}O_{3}$ substrate by magnetron cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on the $Al_{2}O_{3}$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under various conditions, the input power, working vacuum, annealing temperature and time, and also after annealing these films. The resistivity and sheet resistivity of these films were decreased with increasing the annealing temperature. At input power of Pt : $4.4\;W/cm^{2}$, Co : $6.91\;W/cm^{2}$, working vacuum of 10 mTorr and annealing conditions of $800^{\circ}C$ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was $15{\mu}{\Omega}{\cdot}cm$ and $0.5{\Omega}/{\square}$, respectively and the TCR value of Pt-Co alloy thin films with thickness of $3000{\AA}$ were $3740ppm/^{\circ}C$ in the temperature range of $25{\sim}600^{\circ}C$. These results indicate that Pt-Co alloy thin films have potentiality for the RTD temperature sensors.

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Effect of Sampling Cassettes Type used in Sampling of Airborne Carbon Nanotube(CNT) to Electrostatic Loss (공기 중 탄소나노튜브 시료채취 시 사용하는 카세트 종류가 벽면 손실에 미치는 영향)

  • Ham, Seunghon;Kim, Songha;Lee, Jinho;Lee, Naroo;Yoon, Chungsik
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.27 no.3
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    • pp.180-186
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    • 2017
  • Objectives: The purposes of this study were to compare the surface resistance of cassettes according to the material, and to evaluate the wall deposition of carbon nanotubes(CNTs) by electrostatic loss in the inner wall of the cassette. Methods: Surface resistance was measured for three types of cassettes(25 mm polypropylene conductive cowl, 25 mm and 37 mm clear styrene cassettes) with a surface resistance meter. Also, electrostatic wall loss was measured at different weights of CNTs depending on the cassette. CNTs were laid on a weight dish with the cassette for five minutes to provide sufficient time to attach on the wall. Wipe sampling was performed to collect CNTs deposited on the wall and elemental carbon, known as a surrogate for CNTs, was analyzed. Results: The cassette with conductive materials(18% of black carbon) showed the lowest surface resistance($<1.21{\times}10^3{\Omega}$). Cassettes made from clear polystyrene showed the relatively highest surface resistance(25 mm: $10.02{\times}10^9{\Omega}$, 37 mm: $10.59{\times}10^9{\Omega}$). This means that particles are more likely to stick to the internal wall of styrene cassettes due to electrostatic electricity. This may lead to an underestimation of the airborne concentration of CNTs. The experiment showed that EC was not detected when using a 25 mm conductive cowl cassette, while EC was detected at the internal wall of 25 mm and 37 mm polystyrene cassettes. Conclusions: This study confirms that cassettes with a conductive cowl have low surface resistance and are more appropriate for CNT sampling. In addition, this finding could be applied for other types of particulate, especially regarding electrostatic charge and sampling.

Novel Graphene Volatile Memory Using Hysteresis Controlled by Gate Bias

  • Lee, Dae-Yeong;Zang, Gang;Ra, Chang-Ho;Shen, Tian-Zi;Lee, Seung-Hwan;Lim, Yeong-Dae;Li, Hua-Min;Yoo, Won-Jong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.120-120
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    • 2011
  • Graphene is a carbon based material and it has great potential of being utilized in various fields such as electronics, optics, and mechanics. In order to develop graphene-based logic systems, graphene field-effect transistor (GFET) has been extensively explored. GFET requires supporting devices, such as volatile memory, to function in an embedded logic system. As far as we understand, graphene has not been studied for volatile memory application, although several graphene non-volatile memories (GNVMs) have been reported. However, we think that these GNVM are unable to serve the logic system properly due to the very slow program/read speed. In this study, a GVM based on the GFET structure and using an engineered graphene channel is proposed. By manipulating the deposition condition, charge traps are introduced to graphene channel, which store charges temporarily, so as to enable volatile data storage for GFET. The proposed GVM shows satisfying performance in fast program/erase (P/E) and read speed. Moreover, this GVM has good compatibility with GFET in device fabrication process. This GVM can be designed to be dynamic random access memory (DRAM) in serving the logic systems application. We demonstrated GVM with the structure of FET. By manipulating the graphene synthesis process, we could engineer the charge trap density of graphene layer. In the range that our measurement system can support, we achieved a high performance of GVM in refresh (>10 ${\mu}s$) and retention time (~100 s). Because of high speed, when compared with other graphene based memory devices, GVM proposed in this study can be a strong contender for future electrical system applications.

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Paleomagnetic Study of the Daedong Group in the Choongnam Coal Field (충남탄전에 분포하는 대동층군에 대한 고지자기학적 연구)

  • Min, Kyung Duck;Um, Jeong-Gi;Kim, Dong Wook;Choi, Yong Hoon;Lee, Youn Soo;Nishimura, Susumu
    • Economic and Environmental Geology
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    • v.25 no.1
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    • pp.87-96
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    • 1992
  • Paleomagnetic study on the sedimentary rocks in the Choongnam Coal Field has been carried out to determine the direction of declination and inclination of NRM and position of paleomagnetic pole, and to investigate the geotectonism and geomagnetic stratigraphy of the sedimentary rocks in the Daedong Group. As a result of paleomagnetic study, the study area can be divided tectonically into two blocks by Baegunsa fault, namely northwestern and southeastern blocks. Site mean declination and inclination of Baegunsa and Seoungjuri Formations in the northwestern block are $23.2^{\circ}$ and $54.9^{\circ}$, respectively. Those of Amisan, Jogyeri, Baegunsa and Seoungjuri Formations in the southeastern block show normal direction with declination and inclination of $-22.1^{\circ}$ and $11.2^{\circ}$, and reversed direction with those of $158.5^{\circ}$ and $-12.6^{\circ}$, respectively. Average paleomagnetic pole position in the northwestern block is located at $212.9^{\circ}E$ and $71.1^{\circ}N$, and that in the southeastern block at $345.7^{\circ}E$ and $53.3^{\circ}N$. This difference suggests relative rotation of about $45^{\circ}$ between two blocks. The paleolatitude of Daedong Group at the time of sedimentation is $5.6^{\circ}N$ much lower than present latitude of $37.7^{\circ}N$. Compared with worldwide Mesozoic paleomagnetic polarity stratigraphy, Amisan Formation is correlated with the lower boundary of Nuanetsi reversal zone in Graham interval, and Baegunsa and Seoungjuri Formations are correlated with just upper part of the upper boundary of Nuanetsi reversal zone, and their geologic ages are Late Triassic to Early Jurassic. The position of paleomagnetic pole acquired from Daedong Group in the study area is different from those in other places. This may be attributed to the different tectonic movement by Daebo Orogeny occurred after the deposition of Daedong Group.

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Occurrence of the lowermost part of the Yucheon Group and its SHRIMP U-Pb ages in Hyeonpoong and Bugok areas (현풍-부곡일원 최하부 유천층군의 산상과 SHRIMP U-Pb 연대)

  • Ghim, Yong Sik;Ko, Kyoungtae;Lee, Byung Choon
    • Economic and Environmental Geology
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    • v.53 no.4
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    • pp.397-411
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    • 2020
  • The Cretaceous Yucheon Group is volcano-sedimentary successions that are formed by volcanic activities of the Gyeongsang Volcanic Arc. Lack of the detailed field researches on the Yucheon Group results in poor understanding of the formation time and the tempo-spatial development of the volcanic arc. Also, this causes difficulties to reconstruct the depositional history from the Sindong and Hayang groups to the Yucheon Group. In this study, we conducted field research targeting to the interface between topmost part of the Hayang Group and the lowermost part of the Yucheon Group from Hyeonpoong to Bugok areas. We also identified depositional timing of the lowermost part of the Yucheon Group using SHRIMP U-Pb zircon age dating. This Yucheon Group is composed of tuff and lapilli tuff, conformably overlying the Jindong Formation. The results of SHRIMP U-Pb zircon age are 97 to 96 Ma, indicating cessation of deposition of the Hayang Group at 97 to 96 Ma by input of pyroclastic materials into the Jinju Subbasin during the explosive volcanic eruptions from the Gyeongsang Volcanic Arc. In comparison with field researches and results of LA-ICP-MS zircon U-Pb age dating (88-85 Ma) of the lowermost part of the Yucheon Group in Gyeongju areas, the volcanic activities that formed Yucheon Group and their influence ranges varied tempo-spatially. This is probably due to distance difference from the volcanic arc or establishment of the paleo-drainage system from the Gyeongsang Volcanic Arc to nearby lowlands.

Effect of Current Density on Nickel Surface Treatment Process (니켈 표면처리공정에서 전류밀도 효과분석)

  • Kim, Yong-Woon;Joeng, Koo-Hyung;Hong, In-Kwon
    • Applied Chemistry for Engineering
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    • v.19 no.2
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    • pp.228-235
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    • 2008
  • Nickel plating thickness increased with the electric current density, and the augmentation was more thick in $6{\sim}10A/dm^2$ than low current. Hull-cell analysis was tested to evaluate the current density. Optimum thickness was obtained at a temperature of $60^{\circ}C$, and the pH fluctuation of 3.5~4.0. Over the Nickel ion concentration of 300 g/L, plating thickness increased with the current density. The rate of decrease in nickel ion concentration was increased with the current density. The quantity of plating electro-deposition was increased at the anode surface, which was correlated with the increase of plating thickness. The plating thickness was increased because of the quick plating speed. However, the condition of the plating surface becomes irregular and the minuteness of nickel plating layer was reduced with the plating rate. After the corrosion test of 25 h, it was resulted in that maintaining low electric current density is desirable for the excellent corrosion resistance in lustered nickel plating. According to the program simulation, the thickness of diffusion layer was increased and the concentration of anode surface was lowered for the higher current densities. The concentration profile showed the regular distribution at low electric current density. The field plating process was controlled by the electric current density and the plating thickness instead of plating time for the productivity. The surface physical property of plating structure or corrosion resistance was excellent in the case of low electric current density.

Aging Effect on the Antimicrobial Activity of Nanometal (Au, Ag)-Titanium Dioxide Nanocomposites (Aging 효과에 따른 나노메탈(Au, Ag)-이산화티탄 복합체의 항균 활성도)

  • Park, Hye-Rim;Lee, Sang-Wha;Yoo, In-Sang
    • Applied Chemistry for Engineering
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    • v.23 no.3
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    • pp.293-296
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    • 2012
  • Nanocomposites were fabricated as titanium dioxide ($TiO_2$) doped with nanometals (Au, Ag) by sonochemical reduction method and sol-gel method in order to investigate their antimicrobial activities. Then, the antimicrobial activity of the resulting samples was compared by the measurement of colony numbers survived on the agar plate incubated for 24 h after the loading E. coli on the solid-state media with the nanocomposites. The initial antimicrobial activity of the metal (Au, Ag)-doped $TiO_2$ was higher than that of the pristine $TiO_2$. Afterwards the nanocomposite samples were kept at $4^{\circ}C$ for a long time and the aged samples exhibited the different antimicrobial activity. With the elapse of aging times, Ag-doped $TiO_2$ with $TiO_2$ coating ($Ag-TiO_2$@$TiO_x$) exhibited the higher antimicrobial activity than those of $Ag-TiO_2$and $Au-TiO_2$. The $TiO_2$ coating on the $Ag-TiO_2$ may prevent the oxidation of Ag nanometals and stabilize colloidal nanocomposites.

Texturing Multi-crystalline Silicon for Solar Cell (태양전지용 다결정실리콘 웨이퍼의 표면 처리용 텍스쳐링제)

  • Ihm, DaeWoo;Lee, Chang Joon;Suh, SangHyuk
    • Applied Chemistry for Engineering
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    • v.24 no.1
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    • pp.31-37
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    • 2013
  • Lowering surface reflectance of Si wafers by texturization is one of the most important processes for improving the efficiency of Si solar cells. This paper presents the results on the effect of texturing using acidic solution mixtures containing the catalytic agents to moderate etching rates on the surface morphology of mc-Si wafer as well as on the performance parameters of solar cell. It was found that the treatment of contaminated crystalline silicon wafer with $HNO_3-H_2O_2-H_2O$ solution before the texturing helps the removal of organic contaminants due to its oxidizing properties and thereby allows the formation of nucleation centers for texturing. This treatment combined with the use of a catalytic agent such as phosphoric acid improved the effects of the texturing effects. This reduced the reflectance of the surface, thereby increased the short circuit current and the conversion efficiency of the solar cell. Employing this technique, we were able to fabricate mc-Si solar cell of 16.4% conversion efficiency with anti-reflective (AR) coating of silicon nitride film using plasma-enhanced chemical vapor deposition (PECVD) and Si wafers can be texturized in a short time.

Hydrothermal Au-Ag Mineralization of the Oknam Mine in the Northern Sobaegsan Massif (북부 소백산 육괴 지역에 부존하는 옥남 광산의 열수 금-은 광화작용)

  • Yun, Seong-Taek;Chi, Se-Jung;So, Chil-Sup;Heo, Chul-Ho
    • Economic and Environmental Geology
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    • v.31 no.5
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    • pp.389-398
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    • 1998
  • The Au-Ag deposit of the Oknam mine occurs as gold-silver-bearing rhodochrosite veins in biotite schist and phyllite of the Precambriam Yulri Group. Five stages of ore deposition are recognized, each showing a definite mineral assemblage. General mineral parageneses in veins (stage III) associated with gold and silver vary inwardly from the vein margin: arsenopyrite + pyrite $\Rightarrow$ sphalerite+chalcopyrite+galena+gold $\Rightarrow$ ga1ena+Ag-bearing minerals. Fluid inclusion data indicate that temperature and salinity of ore fluids overally decreased with time: $345^{\circ}{\sim}240^{\circ}C$ and 3.4~7.8 wt. % NaCl equiv during stage I (quartz vein mineralization), $313^{\circ}{\sim}207^{\circ}C$ and 2.3~8.7 wt.% NaCl equiv during manganese-bearing carbonate stages (II and III), and $328^{\circ}{\sim}213^{\circ}C$ and 3.6-5.4 wt.% NaCl equiv during stage IV (quartz vein mineralization). The ore fluids probably evolved through repeated pulses of boiling and later mixing with cooler and more dilute meteoric waters. Fluid inclusion data and geologic arguments indicate that pressures during the mineralization were in the range of 90 to 340 bars. Gold occurs as silver-rich electrums (21 to 29 atom. % Au) and was deposited at temperatures between $300^{\circ}$ and $240^{\circ}C$. Thermochemical calculations suggest that gold was deposited as a combined result of increase in pH and decreases in temperature, $fs_2$ and $fo_2$.

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Genetic Environments of Hydrothermal Copper Deposits in Ogsan Mineralized Area, Gyeongsangbukdo Province (경북 옥산지역 열수동광상의 성인연구)

  • Choi, Seon-Gyu;Choi, Sang-Hoon;Yun, Seong-Taek;Lee, Jae-Ho;So, Chil-Sup
    • Economic and Environmental Geology
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    • v.25 no.3
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    • pp.233-243
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    • 1992
  • Ore mineralization of the Hwanghak copper deposit in the Ogsan area occurred in three stages of quartz (stage I and II) and calcite (stage III) veining along fissures in Early Cretaceous sedimentary rocks. Ore minerals are pyrite, pyrrhotite, chalcopyrite (dominant), sphalerite, hematite, galena, and Ag-, Pb-, and Bi-sulfosalts. These were deposited during the first stage at temperatures between $370^{\circ}C$ and < $200^{\circ}C$ from fluids with salinities between 0.5 and 7.6 equiv. wt. % NaCl. There is evidence of boiling and this suggests pressures of less than 180 bars during the first stage. Equilibrium thermodynamic interpretation accompanying with mineral paragenesis and fluid inclusion data indicates that copper precipitation in the hydrothermal system occurred due to cooling and changing in chemical conditions ($fs_2$, $fo_2$, pH). Gradual temperature decrease from $350^{\circ}$ to $250^{\circ}C$ of ore fluids by boiling and mixing with less-evolved meteoric waters mainly led to copper deposition through destabilization of copper chloride complexes. Sulfur isotope values of sulfide minerals decrease systematically with paragenetic time from calculated ${\delta}^{34}S_{H_2S}$ values of 8.2 to 4.7‰. These values, together with the observed change from sulfide-only to sulfide-hematite assemblages and fluid inclusion data, suggest progressively more oxidizing conditions, with a corresponding increase of the $sulfate/H_2S$ ratio of hydrothermal fluids. Measured and calculated hydrogen and oxygen isotope valutls of ore-forming fluids suggest meteoric water dominance, approaching unexchanged meteoric water values.

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