• Title/Summary/Keyword: Deposition property

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Electrochemical Sensor for Non-Enzymatic Glucose Detection Based on Flexible CNT Fiber Electrode Dispersed with CuO Nanoparticles (산화구리 나노입자가 분산된 CNT fiber 유연 전극 기반의 글루코스 검출용 비효소적 전기화학센서)

  • Min-Jung Song
    • Korean Chemical Engineering Research
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    • v.61 no.1
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    • pp.52-57
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    • 2023
  • This study is a basic research for the development of high performance flexible electrode material. To enhance its electrochemical property, CuO nanoparticles (CuO NPs) were introduced and dispersed on surface of CNT fiber through electrochemical deposition method. The CNT fiber/CuO NPs electrode was fabricated and applied to electrochemical non-enzymatic glucose sensor. Surface morphology and elemental composition of the CNT fiber/CuO NPs electrode was characterized by scanning electron microscope (SEM) with energy dispersive X-ray spectrometry (EDS). And its electrochemical characteristics were investigated by cyclic voltammetry, electrochemical impedance spectroscopy and chronoamperometry. The CNT fiber/CuO NPs electrode exhibited the good sensing performance for glucose detection such as high sensitivity, wide linear range, low detection limit and good selectivity due to synergetic effect of CNT fiber and CuO NPs. Based on the unique property of CNT fiber, CuO NPs were provide large surface area, enhanced electrocatalytic activity, efficient electron transport property. Therefore, it is expected to develop high performance flexible electrode materials using various nanomaterials.

Effect of Electron Beam Irradiation on the Opto-Electrical and Transparent Heater Property of ZnO/Cu/ZnO Thin Films for the Electric Vehicle Application (전자빔 조사에 따른 ZnO/Cu/ZnO 박막의 전기광학적 특성 및 전기자동차용 투명 발열체 특성)

  • Yeon-Hak Lee;Min-Sung Park;Daeil Kim
    • Korean Journal of Materials Research
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    • v.33 no.11
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    • pp.497-501
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    • 2023
  • ZnO/Cu/ZnO (ZCZ) thin films were deposited at room temperature on a glass substrate using direct current (DC) and radio frequency (RF, 13.56 MHz) magnetron sputtering and then the effect of post-deposition electron irradiation on the structural, optical, electrical and transparent heater properties of the films were considered. ZCZ films that were electron beam irradiated at 500 eV showed an increase in the grain sizes of their ZnO(102) and (201) planes to 15.17 nm and 11.51 nm, respectively, from grain sizes of 13.50 nm and 10.60 nm observed in the as deposited films. In addition, the film's optical and electrical properties also depended on the electron irradiation energies. The highest opto-electrical performance was observed in films electron irradiated at 500 eV. In a heat radiation test, when a bias voltage of 18 V was applied to the film that had been electron irradiated at 500 eV, its steady state temperature was about 90.5 ℃. In a repetition test, it reached the steady state temperature within 60 s at all bias voltages.

Infrared Detector Using Pyroelectrics

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • v.4 no.4
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    • pp.147-150
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    • 2006
  • The thin film of PbTiO3 is fabricated at substrate temperature of 100-150$^{\circ}C$. The infrared spectrum of the ferroelectric thin film is measured as temperature of thermal treatment, 400 - 550$^{\circ}C$. According to infrared spectrum analysis, there are absorption bands at a nearby wave number of 1000 $\sim$ 400 cm-l and the thin film treated by temperature of 550$^{\circ}C$ has absorption bands of wave number 500 cm-l similar to infrared response property of PbTiO3 powder. The pyroelectric infrared detector is fabricated after deposition of Pt and PbTiO3 thin film on Si wafer by sputtering machine. The measured remnant polarization are 11.5-12.5$\muC/cm2$, breakdown electric field Ec is 100-120KV/cm, and voltage responsivity and detectivity is -280V/W, -108cm Hz/W.

a-Si:H Image Sensor for PC Scanner

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • v.5 no.2
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    • pp.116-120
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    • 2007
  • In this paper, the image sensor using the a-Si:H TFT is proposed. The optimum amorphous silicon thin film is deposited using plasma enhanced chemical vapor deposition (PECVD). TFT and photodiode both with the thin film are fabricated and form image sensor. The photodiode shows that $I_{dark}\;is\;{\sim}10^{-13}\;A,\;I_{photo}\;is\;{\sim}10^{-9}\;A\;and\;I_{photo}/I_{dark}\;is\;{\sim}10^4$, respectively. In the case of a-Si:H TFT, it indicates that $I_{on}/I_{off}\;is\;10^6$, the drain current is a few ${\mu}A\;and\;V_{th}\;is\;2{\sim}4$ volts. For the analysis on the fabricated image sensor, the reverse bias of -5 volts in ITO of photodiode and $70 {\mu}sec$ pulse in the gate of TFT are applied. The image sensor with good property was conformed through the measured photo/dark current.

Effect of Si Addition on the Corrosion Resistance of Diamond-Like Carbon (DLC) Films

  • Kim, Woo-Jung;Kim, Jung-Gu;Park, Se-Jun;Lee, Kwang-Ryeol
    • Corrosion Science and Technology
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    • v.4 no.6
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    • pp.226-230
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    • 2005
  • Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of r.f. plasma-assisted chemical vapor deposition (r.f. PACVD) technique, using mixtures of benzene ($C_6H_6$) and silane ($SiH_4$) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on corrosion property in the simulated body fluid environment through the electrochemical test. It was found that corrosion to resistance of Si-DLC coatings with increasing Si content are improved owing to high $sp^3$ bonding.

The Dielectric Properties of the PZT Multilayered Thin Films for FRAM (FRAM 응용을 위한 PZT 다층 박막의 유전 특성)

  • Nam, Sugn-Pill;Lee, Sang-Chul;Lee, Sang-Heon;Bea, Seon-Gi;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1618-1620
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    • 2004
  • The $Pb(Zr_{0.4}Ti_{0.6})O_3/Pb(Zr_{0.6}Ti_{0.4})O_3$ [PZT(4060)/(6040)] multilayered thin films were deposited by RF Sputtering method on the Pt/Ti/$SiO_2$/Si substrate. This procedure was repeated several times to form PZT(4060)/(6040) heterolayerd thin films. The effects on the structural and dielectric properties of PZT multilayered thin films were investigated. The MFM(Metal Ferroelectric Metal) type capacitors were made using the PZT(4060)/(6040) multilayered thin films deposited with optimum deposition condition. An enhanced dielectric property was observed in the PZT(4060)/(6040) multilayered thin films. The relative dielectric constant and dielectric loss at 100Hz of the PZT(4060)/(6040)-5 multilayered thin films were about 1106 and 0.016, respectively.

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Synthetic Strategy and Optical Property Characterization of Complex Nanorods: Plasmon Wave Guide and Solar Cell

  • Park, Sung-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.111-111
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    • 2012
  • In this talk, we represent a novel approach to investigating intra-nanorod surface plasmon coupling with control over block compositions. The multi-component rod-like nanostructures, which consist of optically active components (Au and Ag) and optically less active component (for example, Ni) in UV-vis-NIR spectral window, showed interesting optical response depending on each block length and the total length of the structure. By controlling the composition and relative lengths of the blocks that comprise these structures, we can tailor the overall optical properties. Depending on the relative fraction of Au and Ag blocks, the intensity of the transverse modes varied without noticeable peak shifts. However, the strong intraparticle surface plasmon coupling resulted in the collective appearance of longitudinal LSP modes, including higher-order modes. The experimental observations were confirmed by theoretical calculation, using a discrete dipole approximation method. In addition, we will briefly discuss how single nanorod solar cells can be synthesized by using by using electrochemical deposition and AAO hard templates.

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Tungsten Silicide ($WSi_2$) for Alternate Gate Metal in Metal-Oxide-Semiconductor (MOS) Devices (금속-산화막-반도체 소자에서 대체 게이트 금속인 텅스텐 실리사이드의 특성 분석)

  • 노관종;윤선필;양성우;노용한
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.64-67
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    • 2000
  • Tungsten silicide(WSi$_2$) is proposed for the alternate gate electrode of ULSI MOS devices. Good structural property and low resistivity of WSi$_2$ deposited by a low pressure chemical vapor deposition(LPCVD) method directly on SiO$_2$ is obtained after annealing. Especially, WSi$_2$-SiO2 interface remains flat after annealing tungsten silicide at high temperature. Electrical characteristics of annealed WSi$_2$-SiO$_2$-Si(MOS) capacitors were improved in view of charge trapping.

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Preparation of a PVDF (Polyvinylidene Fluoride) Thin Film Grown by Using the Method of Electric Field Application (전계인가법을 이용한 PVDF 박막의 제작과 특성에 대한 연구)

  • 장동훈;강성준;윤영섭
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.76-79
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    • 2000
  • The 3$\mu\textrm{m}$-thick PVDF (Polyvinyiidene fluoride) thin film have been prepared using physical vapor deposition with electric field, and its FT-IR specrum, dielectric property and electric conduction phenomenon have been investigated. Since the characteristic peaks ate detected at 509.45 and 1273.6〔cm〕 in the FT-IR spectrum, we are confirmed that the ${\beta}$ -phase is dominant in the PVDF thin film. In the results of dielectric properties, the PVDF thin film shows anomalous dispersion, i.e. gradual decrease of dielectric constant with increase of frequency, and also that the dielectric absorption point changes from 200Hz to 7000Hz with increasing temperature of thin film, which is consistent with the Debye's theory. The activation energy (ΔH) obtained from temperature dependence of dielectric loss is 21.64 ㎉/㏖. We confirm that the electric conduction mechanism of PVDF thin film is dominated by ionic conduction by investigating the dependence of the leakage current of the thin film on the temperature and the electric field.

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Effect of post-annealing treatment on the properties of ZnO thin films grown by PLD (PLD로 증착한 ZnO 박막의 후열처리 효과 연구)

  • Bae, Sang-Hyuck;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.04a
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    • pp.125-128
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    • 2000
  • ZnO thin films on silicon substrates have been deposited by pulsed laser deposition technique(PLD). A Nd:YAG laser was used with the wavelength of 355 nm. In order to investigate the effect of oxygen post-annealing treatment on the property of ZnO thin films, deposited film has been annealed at the substrate temperature of $440^{\circ}C$. After post-annealing treatment in the oxygen ambient, the stoichiometry of ZnO film has been characterized be improved which results in higher UV emission intensity of photoluminescence.

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