• Title/Summary/Keyword: Deposition Path

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Ion beam etching of sub-30nm scale Magnetic Tunnel Junction for minimizing sidewall leakage path

  • Kim, Dae-Hong;Kim, Bong-Ho;Chun, Sung-Woo;Kwon, Ji-Hun;Choi, Seon-Jun;Lee, Seung-Beck
    • Proceedings of the Korean Magnestics Society Conference
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    • 2011.12a
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    • pp.29-30
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    • 2011
  • We have demonstrated the fabrication of sub 30 nm MTJ pillars with PMA characteristics. The multi-step IBE process performed at $45^{\circ}$ and $30^{\circ}$, using NER resulted in almost vertical side profiles. There deposition on the sidewalls of the NER prevented lateral etching of the resist hard mask allowing vertical MTJ side profile formation without any reduction in the lithographically defined resist lateral dimensions. For the 28nm STT-MTJ pillars, the measured TMR ratio was 13 % with resistance of 1 $k{\Omega}$, which was due to remaining redeposition layers less than 0.1 nm thick. With further optimization in multi-step IBE conditions, it will be possible to fabricate fully operating sub 30 nm perpendicular STT-MTJ structures for application to future non-volatile memories.

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DEPTH AND LAYOUT OPTIMIZATIONS OF A RADIOACTIVE WASTE REPOSITORY IN A DISCONTINUOUS ROCK MASS BASED ON A THERMOMECHANICAL MODEL

  • Kim, Jhin-Wung;Koh, Yong-Kwon;Bae, Dae-Seok;Choi, Jong-Won
    • Nuclear Engineering and Technology
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    • v.40 no.5
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    • pp.429-438
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    • 2008
  • The objective of the present study is the depth and layout optimizations of a single layer, high level radioactive waste repository in a discontinuous rock mass with special joint set arrangements. A single layer repository model, considering variations in the repository depths, pitches, and tunnel spacings, is used to analyze the thermomechanical interaction behavior. It is assumed that the repository is constructed in saturated granite with joints; the PWR spent fuel in a disposal canister is installed in a deposition drift which is then sealed with compacted bentonite; and the backfill material is filled in the repository tunnel. The decay heat generated by the high level radioactive wastes governs the thermomechanical behavior of the near field rock mass of the repository. The temperature and displacement behavior of the repository is influenced more by the pitch variations than the tunnel spacing and repository depth. However, the stress behavior is influenced more by the repository depth variations than the pitch and tunnel spacing. For the final selection of the tunnel spacing, pitch, and repository depth, other aspects such as the nuclide migration through a groundwater flow path, construction costs, operation costs, and so on should be considered.

Prediction of Erosion Rate in Passages of a Turbine Cascade with Two-Phase flow (터빈익렬 유로에서 2상 유동에 따른 삭마량 예측)

  • Yu, Man Sun;Kim, Wan Sik;Cho, Hyung Hee
    • 유체기계공업학회:학술대회논문집
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    • 1999.12a
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    • pp.301-308
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    • 1999
  • The present study investigates numerically particle laden flow through compressor cascades and a rocket nozzle. Engines are affected by various particles which are suspending in the atmosphere. Especially in the case of aircraft aviating in volcanic, industrial and desert region including many particles, each components of engine system are damaged severely. That damage modes are erosion of compressor blading and rotor path components, partial or total blockage of cooling passage and engine control system degradation. Numerical prediction and experimental data, erosion rates are predicted for two materials - ceramic, soft metal - on compressor blade surface. Aluminum oxide ($Al_2O_3$) Particles included in solid rocket propelant make ablative the rocket motor nozzle and imped the expansion processes of propulsion. By the definition of particle deposition efficiency, characteristics of particles impaction are considered quantitatively Stoke number is defined over the various particle sizes and particle trajectories are treated by Lagrangian approach. Particle stability is considered by definition of Weber number in rocket nozzle and particle breakup and evaporation is simulated in a rocket nozzle.

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Characterization of structural and field-emissive properties of diamond films in terms of growth conditions and additive gases (증착변수 및 첨가가스에 따른 다이아몬드 박막의 구조적 물성 및 전계방출 특성의 변화 분석)

  • Park, Jae-Hyun;Lee, Tae-Hoon;Park, Chang-Kyun;Seo, Soo-Hyung;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2003.07c
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    • pp.1571-1573
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    • 2003
  • Diamond films including nanocystalline and graphite phase are grown by microwave plasma chemical vapor deposition using $N_2$ additives and negative substrate bias at growth step. The microstructure of the films is controlled by changing $N_2$ gas ratio and negative bias. Defects and grain boundaries between diamond and graphite are proposed to be crucial factors for forming the conducting path of electron emissions. The effect of growth parameters on the film microstructure are investigated by Raman spectroscopy and scanning electron microscopy(SEM). Electron emission characteristics are also examined in terms of the film growth conditions.

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Simulating Depositional Changes in River and It's Prediction (그래픽 모사기법을 이용한 하천 변천의 재현과 예측)

  • Lee, Young-Hoon
    • Economic and Environmental Geology
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    • v.27 no.6
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    • pp.579-592
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    • 1994
  • A case study is presented where a fluvial system is modeled in three dimensions and compared to data gathered from a study of the Arkansas River. The data is unique in that it documents changes that affected a straight channel that was excavated within the river by the U.S. Army Corps of Engineers. Excavation plan maps and sequential aerial photographs show that the channel underwent massive deposition and channel migration as it returned to a more natural, meandering path. These records illustrate that stability of fluvial system can be disrupted either by catastrophic events such as floods or by subtle events such as the altering of a stream's equilibrium base level or sediment load. SEDSIM, Stanford's Sedimentary Basin Simulation Model, is modified and used to model the Arkansas River and the geologic processes that changed in response to changing hydraulic and geologic parameters resulting from the excavation of the channel. Geologic parameters such as fluid and sediment discharge, velocity, transport capacity, and sediment load are input into the model. These parameters regulate the frequency distribution and sizes of sediment grains that are eroded, transported and deposited. The experiments compare favorably with field data, recreating similar patterns of fluid flow and sedimentation. Therefore, simulations provide insight for understanding and spatial distribution of sediment bodies in fluvial deposits and the internal sedimentary structure of fluvial reservoirs. These techniques of graphic simulation can be contributed to support the development of the new design criteria compatible with natural stream processes, espacially drainage problem to minimize environmental disruption.

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The effect of Na2MoO4 addition on the formation and corrosion resistance of Cr-electroplated layer of low carbon steel (저탄소강의 크롬도금층 형성 및 내식성에 미치는 Na2MoO4 첨가의 영향)

  • Bae, Ki Chang;Kim, Kiwook;Kim, Juho;Lee, Junghoon
    • Journal of the Korean institute of surface engineering
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    • v.55 no.1
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    • pp.18-23
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    • 2022
  • Presence of cracks in electrodeposited hard chromium layer, which provide a path of corrosive media to steel substrate, is a serious issue in metal finishing with chromium electroplating. In this study, we added sodium molybdate in an electrolyte for chromium electroplating bath. 130g/L of sodium molybdate in Sargent bath for chromium electroplating causes a codepostion of molybdenum with chromium in a rage of 0.61 ~ 3.14 wt.%. The co-deposited molybdenum enhances the crystallinity of chromium layer, thus the hardness is slightly decreases by the addition of molybdate in electrolyte. However, due to the co-deposition of molybdenum, a crack-free chromium layer could be electrodeposited. Such crack-free chromium layer shows a significantly improved corrosion resistance.

Thermal CVD of Silica Thin Film by Organic Silane Compound (유기 실란화합물을 이용한 SiO2 박막의 열CVD)

  • Kim, Byung-Hoon;Ahn, Ho-Geun;Imaishi, Nobuyuki
    • Applied Chemistry for Engineering
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    • v.10 no.7
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    • pp.985-989
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    • 1999
  • Silica($SiO_2$) thin film was synthesized by a low pressure metal organic chemical vapor deposition(LPMOCVD) using organic silane compound. Triethyl orthosilicate was used as a source material. Operation pressure was 1~100 torr at outlet of the reactor and deposition temperature was $600{\sim}900^{\circ}C$. The experimental results showed that the high reaction temperature and high source gas concentration led to higher growth rate of $SiO_2$. The step coverage of films on micro-scale trenches was fairly good, which resulted from the phenomena that the condensed oligomers flow into the trenches. We estimated a reaction path that the source gas polymerizes and produces oligomers (dimer, trimer, tetramer, etc.), which diffuse and condense on the solid surface. The chemical species in the gas phase at the outlet of reactor tube were analyzed by quadrapole mass spectrometer. The peaks, assigned to be monomer, dimer of source gas and geavier molecules, were observed at 650 or $700^{\circ}C$. At higher temperature($900^{\circ}C$), the peaks of the heavy molecules disappeared, because almost all the source gas and intermediate(polymerized oligomer) molecules were oxidized or condensed on colder tube wall.

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Surface state Electrons as a 2-dimensional Electron System

  • Hasegawa, Yukio
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.156-156
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    • 2000
  • Recently, the surface electronic states have attracted much attention since their standing wave patterns created around steps, defects, and adsorbates on noble metal surfaces such as Au(111), Ag(110), and Cu(111) were observed by scanning tunneling microscopy (STM). As a typical example, a striking circular pattern of "Quantum corral" observed by Crommie, Lutz, and Eigler, covers a number of text books of quantum mechanics, demonstrating a wavy nature of electrons. After the discoveries, similar standing waves patterns have been observed on other metal and demiconductor surfaces and even on a side polane of nano-tubes. With an expectation that the surface states could be utilized as one of ideal cases for studying two dimensionakl (sD) electronic system, various properties, such as mean free path / life time of the electronic states, have been characterized based on an analysis of standing wave patterns, . for the 2D electron system, electron density is one of the most importnat parameters which determines the properties on it. One advantage of conventional 2D electron system, such as the ones realized at AlGaAs/GaAs and SiO2/Si interfaces, is their controllability of the electrondensity. It can be changed and controlled by a factor of orders through an application of voltage on the gate electrode. On the other hand, changing the leectron density of the surface-state 2D electron system is not simple. On ewqy to change the electron density of the surface-state 2D electron system is not simple. One way to change the electron density is to deposit other elements on the system. it has been known that Pd(111) surface has unoccupied surface states whose energy level is just above Fermi level. Recently, we found that by depositing Pd on Cu(111) surface, occupied surface states of Cu(111) is lifted up, crossing at Fermi level around 2ML, and approaches to the intrinsic Pd surface states with a increase in thickness. Electron density occupied in the states is thus gradually reduced by Pd deposition. Park et al. also observed a change in Fermi wave number of the surface states of Cu(111) by deposition of Xe layer on it, which suggests another possible way of changing electron density. In this talk, after a brief review of recent progress in a study of standing weaves by STM, I will discuss about how the electron density can be changed and controlled and feasibility of using the surface states for a study of 2D electron system. One of the most important advantage of the surface-state 2D electron system is that one can directly and easily access to the system with a high spatial resolution by STM/AFM.y STM/AFM.

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Evaluation on the nutrient concentration changes along the flow path of a free surface flow constructed wetland in agricultural area (농업지역에 조성된 자유수면형 인공습지의 유로에 따른 영양염류의 변화 평가)

  • Mercado, Jean Margaret R.;Maniquiz-Redillas, Marla C.;Kim, Lee-Hyung
    • Journal of Wetlands Research
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    • v.15 no.2
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    • pp.215-222
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    • 2013
  • In this study, the nutrient concentration changes along the hydrologic flow path of a free water surface flow constructed wetland (CW) treating agricultural stream runoff was investigated. Dry sampling was performed from April 2009 to November 2011 at five locations representing each treatment units of the CW. Grab water samples were analyzed for nitrogen forms such as total nitrogen (TN), total Kjeldahl nitrogen, nitrate, and ammonium; and phosphorus forms including total phosphorus (TP) and phosphate. Findings revealed that the physical properties such as temperature, dissolved oxygen and pH affected the TP retention in the CW. High nutrient reduction was observed after passing the first sedimentation zone indicating the importance of settling process in the retention of nutrients. However, it was until the 85% of the length of the CW where nutrient retention was greatest indicating the deposition of nutrients at the alternating shallow and deep marshes. TN and TP concentration seemed to increase at the final sedimentation zone (FSZ) suggesting a possible nutrient source in this segment of the CW. It was therefore recommended to reduce or possibly remove the FSZ in the CW for an optimum performance, smaller spatial allocation and lesser construction expenses for similar systems.

A Study on the Validation of Effective Angle of Particle Deposition according to the Detection Efficiency of High-purity Germanium Gamma-ray Detector (고순도 저마늄 감마선 검출기의 검출효율에 따른 유효입체각 검증에 관한 연구)

  • Chang, Boseok
    • Journal of the Korean Society of Radiology
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    • v.14 no.4
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    • pp.487-494
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    • 2020
  • The distance between the source and the detector, the diameter of the detector, and the volume effect of the radiation source result in a change in solid angle at the detector entrance, which affects the determination of detection efficiency by causing a difference in path length within the detector. A typical analysis method for calculating solid angles was useful only for a source (60Co) with a simple geometric structure, so in this experiment, the distance between the detector and the source was measured by switching on for up to 25 cm with the reference point of window cap 0.5 cm. In addition, 450 and 1000 ㎖ Marinelli beaker of standard volumetric sources were closely adhered to the detector. For circular point sources co-axial with the detector, the change in the solid angle to the distance from the detector window is equal to half the square radius of the source versus the square radius of the detector, if the resulting relationship of the calculation analysis results in the detector being less than the radius of the source. Since the solid angular difference is 0.5 the result of Monte Carlo is acceptable. The relationship between detector and source distance is shown. Solid angles have been verified to decrease rapidly with distance. Measurement and simulation results for a volumetric source show a difference of ±1.01% from a distance of 0 cm and less than 4 % when the distance is reduced to 5 and 10 cm. It can be seen that the longer distance, the smaller efficiency angle, and the exponential increase in attenuation as the energy decreases, is reflected in the calculation of efficiency. Thus, the detection efficiency has proved sufficient for the use of solid angle and Monte Carlo codes.