• Title/Summary/Keyword: Deposition Hole

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FIELD EMISSION FROM TRIODE FIELD EMITTER WITH PLANAR CARBON-NANOPARTICLE CATHODE

  • Park, Kyung-Ho;Seo, Woo-Jong;Lee, Soon-Il;Koh, Ken-Ha
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.309-312
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    • 2002
  • Triode field emitters with planar-carbon-nanopaticle (CNP) cathodes were successfully fabricated using the conventional photolithography and the hotfilament chemical vapor deposition. Electron emission from a CNP triode emitter with a 12-${\mu}m$-diameter gate hole started at the gate voltage of 45 V, and the anode current reached the level of ${\sim}120$ nA at the gate voltage of 60 V, respectively. For the quantitative analysis of the Fowler-Nordheim (F-N) type emission from a CNP triode emitter, we carried out 2dimensional numerical calculation of electrostatic potential using the finite element method. As it turned out, a radial variation of electric field was very important to account for the emission from a planar emitting layer. By assuming the graphitic work function of 5 eV for CNPs, we were able to extract a consistent set of F-N parameters, together with the radial position of emitting sites.

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A study of planarization in polysilicon MEMS structure (폴리실리콘 MEMS 구조물의 평탄화에 관한 연구)

  • Jeong, Moon-Ki;Park, Sung-Min;Jung, Jae-Woo;Jeong, Hae-Do;Kim, Hyoung-Jae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.362-363
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    • 2005
  • The objectives of this paper are to achieve good planarization of the deposited film and to improve deposition efficiency of multi-layer structures by using surface-micromaching process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages and disadvantages of CMP for MEMS structures are observed respectively by using the test patterns with structures larger than 1 um line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of slurries: ILD1300 and Nalco2371. And then, the experiments were conducted based on the pretest.

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Thermal-mechanical sensitivity analysis for the near-field of HLW repository (고준위 폐기물 처분장 near-field에 대한 열-역학적 민감도 분석)

  • 권상기;최종원;강철형
    • Tunnel and Underground Space
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    • v.13 no.2
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    • pp.138-152
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    • 2003
  • Three-dimensional computer modeling using FLAC3D had been carried out fur evaluating the thermal-mechanical stability of a high-level radioactive waste repository excavated in several hundred deep location. For effective modeling, a FISH program was made and the geological conditions and rock properties achieved from the drilling sites in Kosung and Yusung areas were used. Sensitivity analysis fer the stresses and temperatures from the modeling designed utilizing fractional factorial design was carried out. From the sensitivity analysis, the important design parameters and their interactions could be determined. From this study, it was found that deposition hole spacing is the most important parameter on the thermal and mechanical stability. The second and third most important parameters were disposal tunnel and buffer thickness.

Development of Simple Solvent Treating Methods to Enhance the Efficiency of Small-Molecule Organic Solar Cells

  • Kim, Jin-Hyun;Heo, Il-Su;Gong, Hye-Jin;Yu, Yeon-Gyu;Yim, Sang-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.276-276
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    • 2012
  • The interface morphology of organic active layers is known to play a crucial role in the performance of organic photovoltaic (OPV) cells. Especially, a controlled nanostructure with a large contact area between electron donor (D) and acceptor (A) layers is necessary to improve the power conversion efficiency (PCE) of the cells since the short exciton diffusion lengths in organic semiconductors limit the charge (hole and electron) separation before excitons recombination. In this work, we developed simple solvent treating methods to fabricate a nanostructured DA interface and applied them to enhance the PCE of ZnPc/C60 based small molecule OPV cells. Interestingly, it was observed that the solvent treatment on the donor layer prior to the deposition of the acceptor layer resulted in a significant decrease in PCE, which was due to an existence of undesirable voids at the DA interface. Instead, the solvent vapor treatment after the DA bilayer formation led to densely packed and well dispersed DA contacts. Consequently, 3-fold enhancement of PCE as compared to the untreated bilayer cell was accomplished.

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Ferromagnetism and p-type Conductivity in Laser-deposited (Zn,Mn)O Thin Films Codoped by Mg and P

  • Kim, Hyo-Jin;Kim, Hyoun-Soo;Kim, Do-Jin;Ihm, Young-Eon;Choo, Woong-Kil;Hwang, Chan-Yong
    • Journal of Magnetics
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    • v.12 no.4
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    • pp.144-148
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    • 2007
  • We report on the observation of p-type conductivity and ferromagnetism in diluted magnetic semiconductor $(Zn_{0.97}Mg_{0.01}Mn_{0.02})O:P$ films grown on $SiO_2/Si$ substrates by pulsed laser deposition. The p-type conduction with hole concentration over $10^{18}cm^{-3}$ is obtained by codoping of Mg and P followed by rapid thermal annealing in an $O_2$ atmosphere. Structural and compositional analyses for the p-type $(Zn_{0.97}Mg_{0.01}Mn_{0.02})O:P$ films annealed at $800^{\circ}C$ indicates that highly c-axis oriented homogeneous films were grown without any detectable formation of secondary phases. The films were found to be transparent in the visible range. The magnetic measurements clearly revealed an enhancement of room temperature ferromagnetism by p-type doping.

Improvement of Spray Coating Uniformity using ESD Electrodes (ESD 전극을 이용한 분무코팅 균일도 개선에 관한 연구)

  • Dang, Hyun-Woo;Yang, Seong-Wook;Doh, Yang-Hoi;Choi, Kyung-Hyun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.2
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    • pp.118-124
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    • 2016
  • In this study, experiments are conducted to improve spray coating uniformity by using second and third electrodes based on the electrospray atomization mechanism. The uniformity of fabricated thin films can be improved by adjusting the design of the second electrode. The implementation of the second electrode with an elongated hole and a bending angle of $90^{\circ}$ results in highly uniform films. In addition, induced area to substrate is increased by lowering the applied voltage using the third electrode with a round rod shape. A linear correlation between applied voltage and induced area is confirmed. Thin film thickness and surface roughness are measured after the fabrication of thin films through the electrospray process. It is confirmed that a thin film is formed having an average thickness of 273.44 nm, a thickness uniformity of less than 10%, and a surface roughness of 3 nm.

Consumable Approaches of Polysilicon MEMS CMP

  • Park, Sung-Min;Jeong, Suk-Hoon;Jeong, Moon-Ki;Park, Boum-Young;Jeong, Hae-Do;Kim, Hyoung-Jae
    • Transactions on Electrical and Electronic Materials
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    • v.7 no.4
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    • pp.157-162
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    • 2006
  • Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

Estimation of nuclear heating by delayed gamma rays from radioactive structural materials of HANARO

  • Noh, Tae-yang;Park, Byung-Gun;Kim, Myong-Seop
    • Nuclear Engineering and Technology
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    • v.50 no.3
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    • pp.446-452
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    • 2018
  • To improve the accuracy and safety of irradiation tests in High flux Advanced Neutron Application ReactOr (HANARO), the nuclear energy deposition rate, which is called nuclear heating, was estimated for an irradiation capsule with an iridium sample in the irradiation hole in order. The gamma rays emitted from the radioisotopes (RIs) of the structural materials such as flow tubes of fuel assemblies and heavy water reflector tank were considered as radiation source. Using the ORIGEN2.1 code, emission rates of delayed gamma rays were calculated in consideration of the activation procedure for 8 years and 2 months of HANARO operation. Calculated emission rates were used as a source term of delayed gamma rays in the MCNP6 code. By using the MCNP code, the nuclear heating rates of the irradiation capsules in the inner core, outer core, and heavy water reflector tank were estimated. Calculated nuclear heating in the inner core, outer core, and heavy water reflector tank were 200-260 mW, 80-100 mW, and 10 mW, respectively.

Electrode-Evaporation Method of III-nitride Vertical-type Single Chip LEDs

  • Kim, Kyoung Hwa;Ahn, Hyung Soo;Jeon, Injun;Cho, Chae Ryong;Jeon, Hunsoo;Yang, Min;Yi, Sam Nyung;Kim, Suck-Whan
    • Journal of the Korean Physical Society
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    • v.73 no.9
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    • pp.1346-1350
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    • 2018
  • An electrode-evaporation technology on both the top and bottom sides of the bare vertical-type single chip separated from the traditional substrate by cooling, was developed for III-nitride vertical-type single chip LEDs with thick GaN epilayer. The post-process of the cooling step was followed by sorting the bare vertical-type single chip LEDs into the holes in a pocket-type shadow mask for deposition of the electrodes at the top and bottom sides of bare vertical-type single chip LEDs without the traditional substrate for electrode evaporation technology for vertical-type single chip LEDs. The variation in size of the hole between the designed shadow mask and the deposited electrodes owing to the use of the designed pocket-type shadow mask is investigated. Furthermore, the electrical and the optical properties of bare vertical-type single chip LEDs deposited with two different shapes of n-type electrodes using the pocket-type shadow mask are investigated to explore the possibility of the e-beam evaporation method.

Meander Flume Outlet Sediment Scour Analysis of a Boxed Culvert

  • Thu Hien Thi Le;VanChienNguyen;DucHauLe
    • Proceedings of the Korea Water Resources Association Conference
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    • 2023.05a
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    • pp.35-35
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    • 2023
  • The main reason for its instability is sediment scouring downstream of hydraulic structures. Both physical and numerical models have been used to investigate the influence of soil properties on scour hole geometry. Nevertheless, no research has been conducted on resistance parameters that affect sedimentation and erosion. In addition, auxiliary structures like wing walls, which are prevalent in many real-world applications, have rarely been studied for their impact on morphology. The hydraulic characteristics of steady flow through a boxed culvert are calibrated using a 3D Computational Fluid Dynamics model compared with experimental data in this study, which shows a good agreement between water depth, velocity, and pressure profiles. Test cases showed that 0.015 m grid cells had the lowest NRMSE and MAE values. It is also possible to quantify sediment scour numerically by testing roughness/d50 ratios (cs) and diversion walls at a meander flume outlet. According to the findings, cs = 2.5 indicates a close agreement between numerical and analytical results of maximum scour depth after the culvert; four types of wing walls influence geometrical deformation of the meander flume outlet, resulting in erosion at the concave bank and deposition at the convex bank; two short headwalls are the most appropriate solution for accounting for small changes in morphology. A numerical model can be used to estimate sediment scour at the meander exit channel of hydraulic structures based on the roughness parameter of soil material and headwall type.

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