• Title/Summary/Keyword: Deposited metal

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Study on the fabrication of a polycrystalline silicon (pc-Si) seed layer for the pc-Si lamelliform solar cell (다결정 실리콘 박형 태양전지를 위한 다결정 실리콘 씨앗층 제조 연구)

  • Jeong, Hyejeong;Oh, Kwang H.;Lee, Jong Ho;Boo, Seongjae
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.75.2-75.2
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    • 2010
  • We studied the fabrication of polycrystalline silicon (pc-Si) films as seed layers for application of pc-Si thin film solar cells, in which amorphous silicon (a-Si) films in a structure of glass/Al/$Al_2O_3$/a-Si are crystallized by the aluminum-induced layer exchange (ALILE) process. The properties of pc-Si films formed by the ALILE process are strongly determined by the oxide layer as well as the various process parameters like annealing temperature, time, etc. In this study, the effects of the oxide film thickness on the crystallization of a-Si in the ALILE process, where the thickness of $Al_2O_3$ layer was varied from 4 to 50 nm. For preparation of the experimental film structure, aluminum (~300 nm thickness) and a-Si (~300 nm thickness) layers were deposited using DC sputtering and PECVD method, respectively, and $Al_2O_3$ layer with the various thicknesses by RF sputtering. The crystallization of a-Si was then carried out by the thermal annealing process using a furnace with the in-situ microscope. The characteristics of the produced pc-Si films were analyzed by optical microscope (OM), scanning electron microscope (SEM), Raman spectrometer, and X-ray diffractometer (XRD). As results, the crystallinity was exponentially decayed with the increase of $Al_2O_3$ thickness and the grain size showed the similar tendency. The maximum pc-Si grain size fabricated by ALILE process was about $45{\mu}m$ at the $Al_2O_3$ layer thickness of 4 nm. The preferential crystal orientation was <111> and more dominant with the thinner $Al_2O_3$ layer. In summary, we obtained a pc-Si film not only with ${\sim}45{\mu}m$ grain size but also with the crystallinity of about 75% at 4 nm $Al_2O_3$ layer thickness by ALILE process with the structure of a glass/Al/$Al_2O_3$/a-Si.

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Analysis of Particle Laden Flow and Erosion Rate Around Turbine Cascade (터빈 익렬 주위에서의 부유입자 유동 및 마모량 해석)

  • 김완식;조형희
    • Journal of the Korean Society of Propulsion Engineers
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    • v.2 no.2
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    • pp.14-23
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    • 1998
  • The present study investigates numerically particle laden flow through compressor cascade. In general, a lot of turbine engines are affected by various particles which are suspending in the atmosphere. Especially in the case of aircraft aviating in volcanic, industrial and desert region including many particles, each components of engine system are damaged severely. That damage modes are erosion of compressor binding and rotor path components, partial or total blockage of cooling passage and engine control system degradation.. Initial damages can not be serious but cumulation of damages influences on safety of aircraft control and economical maintenance cost of engine system can be increased. When dust, materials and volcanic particles in the atmosphere flow in the compressor, it is necessary to predict damaged and deposited region of compressor blades. To the various flow inlet angle, predictions of particles trajectory in compressor cascade by Lagrangian method are presented and impulses by impaction of particles at blade surface are calculated. By the definition of particle deposition efficiency, characteristics of particles impact are considered quantitatively. With these prediction and experimental data, erosion rates are predicted for two materials - ceramic, soft metal - on compressor blade surface. Improvements like coating of blade surface could be found, by above prediction.

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Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISHFET

  • Ahn, Ho-Kyun;Kim, Hae-Cheon;Kang, Dong-Min;Kim, Sung-Il;Lee, Jong-Min;Lee, Sang-Heung;Min, Byoung-Gue;Yoon, Hyoung-Sup;Kim, Dong-Young;Lim, Jong-Won;Kwon, Yong-Hwan;Nam, Eun-Soo;Park, Hyoung-Moo;Lee, Jung-Hee
    • ETRI Journal
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    • v.38 no.4
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    • pp.675-684
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    • 2016
  • This paper demonstrates the effect of fluoride-based plasma treatment on the performance of $Al_2O_3/AlGaN/GaN$ metal-insulator-semiconductor heterostructure field effect transistors (MISHFETs) with a T-shaped gate length of $0.20{\mu}m$. For the fabrication of the MISHFET, an $Al_2O_3$ layer as a gate dielectric was deposited using atomic layer deposition, which greatly decreases the gate leakage current, followed by the deposition of the silicon nitride layer. The silicon nitride layer on the gate foot region was then selectively removed through a reactive ion etching technique using $CF_4$ plasma. The etching process was continued for a longer period of time even after the complete removal of the silicon nitride layer to expose the $Al_2O_3$ gate dielectric layer to the plasma environment. The thickness of the $Al_2O_3$ gate dielectric layer was slowly reduced during the plasma exposure. Through this plasma treatment, the device exhibited a threshold voltage shift of 3.1 V in the positive direction, an increase of 50 mS/mm in trans conductance, a degraded off-state performance and a larger gate leakage current compared with that of the reference device without a plasma treatment.

Impedance Spectroscopy Analysis on the LaAlO3/SrxCa1-xTiO3/SrTiO3 Hetero-Oxide Interface System

  • Park, Da-Hee;Kwon, Kyoung-Woo;Park, Chan-Rok;Choi, Yoo-Jin;Bae, Seung-Muk;Baek, Senug-Hyub;Kim, Jin-Sang;Hwang, Jin-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.188.2-188.2
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    • 2015
  • The presence of the conduction interface in epitaxial $LaAlO_3/SrTiO_3$ thin films has opened up challenging applications which can be expanded to next-generation nano-electronics. The metallic conduction path is associated with two adjacent insulating materials. Such device structure is applicable to frequency-dependent impedance spectroscopy. Impedance spectroscopy allows for simultaneous measurement of resistivity and dielectric constants, systematic identification of the underlying electrical origins, and the estimation of the electrical homogeneity in the corresponding electrical origins. Such unique capability is combined with the intentional control on the interface composition composed of $SrTiO_3$ and $CaTiO_3$, which can be denoted by $SrxCa1-_xTiO_3$. The underlying $Sr_xCa1-_xTiO_3$ interface was deposited using pulsed-laser deposition, followed by the epitaxial $LaAlO_3$ thin films. The platinum electrodes were constructed using metal shadow masks, in order to accommodate 2-point electrode configuration. Impedance spectroscopy was performed as the function of the relative ratio of Sr to Ca. The respective impedance spectra were analyzed in terms of the equivalent circuit models. Furthermore, the impedance spectra were monitored as a function of temperature. The ac-based characterization in the 2-dimensional conduction path supplements the dc-based electrical analysis. The artificial manipulation of the interface composition will be discussed towards the electrical application of 2-dimensional materials to the semiconductor devices in replacement for the current Si-based devices.

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Gold and Silver Mineralization of the Soowang Ore Deposits in Muju, Korea (무주 수왕광상의 금-은 광화작용)

  • Park, Hee-In;Youn, Seok-Tai
    • Journal of the Korean earth science society
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    • v.25 no.6
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    • pp.484-494
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    • 2004
  • The Soowang Au-Ag deposits occur as quartz veins which filled fissures in middle Cretaceous porphyritic granite an/or gneiss of the Precambrian Sobaegsan gneiss complex. The paragenetic studies suggest that vein filling can be divided into four identifiable stages (I to IV). Stage I is the main sulfide stage, characterized by the deposition of base-metal sulfide and minor electrum. Stage II is the electrum stage, whereas stage III represents a period of the deposition of silver-bearing sulfosalts and minor electrum. Stage IV is the post ore stage. Mineralogical and fluid inclusion evidences suggest that mineralization of the Soowang deposits were deposited by the cooling of the fluids from initial high temperatures 300$^{\circ}C$ to later low temperatures 150$^{\circ}C$. The salinity of the fluids were moderate, ranging from 10.4wt.% equivalent NaCl in sphalerite to 3.1wt.% equivalent NaCl in barite. The gold-silver mineralization of the Soowang mine occurred at temperatures between 140 and 250$^{\circ}C$ from fluids with log $fs_2$ from -12 to -18 atm. A consideration of the pressure regime during ore deposition, based on the fluid inclusion evidence of boiling, suggests lithostatic pressure of less than 210 bars. This pressure condition indicates that vein system of the Soowang deposit formed at depth around 800 m below the surface at the time of gold-silver mineralization.

Degradation Mechanisms of Organic Light-emitting Devices with a Glass Cap (유리 덮개로 보호된 OLED소자의 발광특성 저하 연구)

  • Yang Yong Suk;Chu Hye Yong;Lee Jeong-Ik;Park Sang-He;Hwang Chi Sun;Chung Sung Mook;Do Lee-Mi;Kim Gi Heon
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.64-72
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    • 2006
  • We demonstrated organic light-emitting devices (OLEDs) based on the organic thin-film materials such as tris-(8-hydroxyquinoline) aluminum $(Alq_3)$. The structure of OLEDs was vacuum deposited upon transparent and thin glass substrates pre-coated with a transparent, conducting indium tin oxide thin film. The luminance characteristics, current, capacitance, and dispersion factor for degraded OLEDs, which were made by various bias currents $(0.5mA\;{\leq}\;I_{Bias}\;{\leq}9mA)$, are studied. The current dependences of lifetime were divided at approximately 2mA, and they represented nearly linear behaviors but had different slopes in a logarithmic plot of lifetime versus bias current. With lighting OLEDs, the anomaly of capacitance, as shown in the CV curve, occurred because of two factors, polarization in the bulk of organic materials and the interface between the metal and organic layers. In decayed OLEDs that had lower bias currents of less than 2mA, it was found that the degradation of luminance was related to both the decrease of polarization and to the lowering of the injection barrier.

Characterization, Cloning and Expression of the Ferritin Gene from the Korean Polychaete, Periserrula leucophryna

  • Jeong Byeong Ryong;Chung Su-Mi;Baek Nam Joo;Koo Kwang Bon;Baik Hyung Suk;Joo Han-Seung;Chang Chung-Soon;Choi Jang Won
    • Journal of Microbiology
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    • v.44 no.1
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    • pp.54-63
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    • 2006
  • Ferritin is a major eukaryotic protein and in humans is the protein of iron storage. A partial gene fragment of ferritin (255 bp) taken from the total RNA of Periserrula leucophryna, was amplified by RT-PCR using oligonucleotide primers designed from the conserved metal binding domain of eukaryotic ferritin and confirmed by DNA sequencing. Using the $^{32}P-labeled$ partial ferritin cDNA fragment, 28 different clones were obtained by the screening of the P. leucophryna cDNA library prepared in the Uni-ZAP XR vector, sequenced and characterized. The longest clone was named the PLF (Periserrula leucophryna ferritin) gene and the nucleotide and amino acid sequences of this novel gene were deposited in the GenBank databases with accession numbers DQ207752 and ABA55730, respectively. The entire cDNA of PLF clone was 1109 bp (CDS: 129-653), including a coding nucleotide sequence of 525 bp, a 5' -untranslated region of 128 bp, and a 3'-noncoding region of 456 bp. The 5'-UTR contains a putative iron responsive element (IRE) sequence. Ferritin has an open reading frame encoding a polypeptide of 174 amino acids including a hydrophobic signal peptide of 17 amino acids. The predicted molecular weights of the immature and mature ferritin were calculated to be 20.3 kDa and 18.2 kDa, respectively. The region encoding the mature ferritin was subcloned into the pT7-7 expression vector after PCR amplification using the designed primers and included the initiation and termination codons; the recombinant clones were expressed in E. coli BL21(DE3) or E. coli BL21(DE3)pLysE. SDS-PAGE and western blot analysis showed that a ferritin of approximately 18 kDa (mature form) was produced and that by iron staining in native PAGE, it is likely that the recombinant ferritin is correctly folded and assembled into a homopolymer composed of a single subunit.

Microwave Detector Using $YBa_2Cu_3O_{7-x}$ Grain Boundary Junction ($YBa_2Cu_3O_{7-x}$ 결정입계 접합을 이용한 마이크로파 감지소자)

  • Sin, Jung-Sik;Jo, Chang-Hyeon;Hwang, Du-Seop;Kim, Yeong-Geun;Wi, Dang-Mun;Cheon, Seong-Sun;Sin, U-Seok;Bae, Seong-Jun;Hong, Seung-Beom
    • Korean Journal of Materials Research
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    • v.4 no.6
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    • pp.681-686
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    • 1994
  • Microwave Detector Using $YBa_{2}Cu_{3}O_{7-x}$, Grain Boundary Junction $YBa_{2}Cu_{3}O_{7-x}$ superconductor thin films were deposited on $LaAIO_{3}$ (100) single crystal substrates using a metal organic chemical vapor deposition (MOCVD) method. These films showed the critical temperature of about 9OK and critical current density of over $10^5/A \textrm{cm}^2$at 77K. These films showed granular structure with 0.5~1.5$\mu \textrm{m}$ grains. Bridge-type junctions, 6$\mu \textrm{m}$ in width and 6pm in length, were fabricated using the photolithography and the Ar ion milling techniques. Current-voltage (I-V) characteristics of these junctions with the microwave irradiation at 77K were studied. The critical current densities decreased as the irradiated microwave power increased. When microwaves were irradiated on the bridge at 77K. the I-V charateristics showed constant voltage stcp(Shapiro steps) at $\Delta$=nho/2e.

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Distribution of Organic Carbon, Organic Nitrogen, and Heavy Metals in Lake Shihwa Sediments (시화호 퇴적물의 유기탄소, 유기질소 및 중금속 함량과 분포)

  • Kang, Jeong-Won;Hang, Dae-Byuk;Park, Yong-Ahn;Choi, Jung-Hoon
    • The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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    • v.5 no.4
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    • pp.276-284
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    • 2000
  • Distributions of organic carbon (Co$_{org}$), organic nitrogen (N$_{org}$), and heavy metals (Zn, Pb, Cr, Cu, Mn) were investigated in Lake Shihwa sediments. Surface and core samples were collected in April and September, 1997 and March, 1998 for the study. The results show that these components contents are variable with sampling timeand station. In surface sediments, both Co$_{org}$ and N$_{org}$ have similar distribution pattern in which their high contents found in stations located near the land, indicating that the streams and industrial wastes seem to act as point sources. The C$_{org}$ contents are linearly related with those of heavy metals. It appears, therefore, that the distribution of heavy metals may be partly controlled by a complex interplay of biogenic, terrestial, and anthropogenic factors. The C/N ratios from three stations are in the range of 3-32, with an average of 13.2. Vertical profiles of heavy metals in sediment cores are similar to those of C$_{org}$ and N$_{org}$. Copper content of sediments is enriched compared to that of reported value before dike construction, but Zn and Mn are not deposited considerably. Especially, Pb content show less variable. Currently, anthropogenic effects of industrial complex may not reached to drainage gate area where heavy metal contents are comparable with those adjacent to coastal sediments.

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Measurement of Mechanical Properties of Thin Film Materials for Flexible Displays (플렉서블 디스플레이용 박막 소재 물성 평가)

  • Oh, Seung Jin;Ma, Boo Soo;Kim, Hyeong Jun;Yang, Chanhee;Kim, Taek-Soo
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.3
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    • pp.77-81
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    • 2020
  • Commercialization of flexible OLED displays, such as rollable and foldable displays, has attracted tremendous interest in next-generation display markets. However, during bending deformation, cracking and delamination of thin films in the flexible display panels are the critical bottleneck for the commercialization. Therefore, measuring mechanical properties of the fragile thin films in the flexible display panels is essential to prevent mechanical failures of the devices. In this study, tensile properties of the metal and ceramic nano-thin films were quantitatively measured by using a direct tensile testing method on the water surface. Elastic modulus, tensile strength, and elongation of the sputtered Mo, MoTi thin films, and PECVD deposited SiNx thin films were successfully measured. As a result, the tensile properties were varied depending on the deposition conditions and the film thickness. The measured tensile property values can be applied to stress analysis modeling for mechanically robust flexible displays.