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http://dx.doi.org/10.6117/kmeps.2020.27.3.077

Measurement of Mechanical Properties of Thin Film Materials for Flexible Displays  

Oh, Seung Jin (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Ma, Boo Soo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Kim, Hyeong Jun (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Yang, Chanhee (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Kim, Taek-Soo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Publication Information
Journal of the Microelectronics and Packaging Society / v.27, no.3, 2020 , pp. 77-81 More about this Journal
Abstract
Commercialization of flexible OLED displays, such as rollable and foldable displays, has attracted tremendous interest in next-generation display markets. However, during bending deformation, cracking and delamination of thin films in the flexible display panels are the critical bottleneck for the commercialization. Therefore, measuring mechanical properties of the fragile thin films in the flexible display panels is essential to prevent mechanical failures of the devices. In this study, tensile properties of the metal and ceramic nano-thin films were quantitatively measured by using a direct tensile testing method on the water surface. Elastic modulus, tensile strength, and elongation of the sputtered Mo, MoTi thin films, and PECVD deposited SiNx thin films were successfully measured. As a result, the tensile properties were varied depending on the deposition conditions and the film thickness. The measured tensile property values can be applied to stress analysis modeling for mechanically robust flexible displays.
Keywords
Tensile Test; Thin Film; Mechanical Property; Rollable display; Foldable display;
Citations & Related Records
Times Cited By KSCI : 6  (Citation Analysis)
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