• 제목/요약/키워드: Degree Distribution

검색결과 2,315건 처리시간 0.028초

회전형 CMP장비의 속도 및 마찰력 분포 해석 (Velocity and Friction Force Distribution in Rotary CMP Equipment)

  • 김형재;정해도;이응숙;신영재
    • 한국정밀공학회지
    • /
    • 제20권5호
    • /
    • pp.29-38
    • /
    • 2003
  • As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

IMPROVEMENT OF DISTRIBUTION OF COERCIVITY IN CO-CR FILMS DEPOSSSITED BY FACING TARGETS SPUTTERING

  • Takayama, Seiryu;Nakagawa, Shigeki;Kim, Kyung-Hwan;Naoe, Masahiko
    • 한국표면공학회지
    • /
    • 제29권6호
    • /
    • pp.644-647
    • /
    • 1996
  • The distribution of coercivity in the thickness direction were investigated by using Kerr hysteresis loop tracer for the Co-Cr films deposited by Facing Targets Sputtering apparatus. It was found that the difference between the coercivities of surface layer and initial growth layer H$_c$$\bot$(S)-H$_c$$\bot$(I) correlated strongly with $\Delta$H$_o$, shich represents the degree of distribution of coercivity. Furthermore, the Cr content was varied in order to improve the coercivity of imitial growth layer H$_c$$\bot$(I) and distribution of coercivity. H$_c$$\bot$(I) took a maximum value of 750 Oe and the distribution of coercivity became sharper at the Cr content of 25at. %.

  • PDF

배전시스템의 신뢰도에 관한 연구 (A Study on the Reliability of Electric Power Distribution System)

  • 김경철;최홍규;원진희
    • 조명전기설비학회논문지
    • /
    • 제16권3호
    • /
    • pp.61-66
    • /
    • 2002
  • 배전시스템은 고 신뢰도가 요구되는 사례시스템이다. 신뢰도는 정해진 기간과 운전 조건하에서 설비나 시스템이 적절히 자기 기능을 할 수 있는 확률로 정의된다 수용가에서 배전시스템의 성능을 예측하고 검증하기 위한 기본적인 신뢰지수는 평균고장률, 평균고장기간, 평균 활용률 등이 포함된다 본 논문에서는 EDSA의 배전계통 신뢰도 평가 프로그램을 이용하여 배전 시스템의 기본적인 신뢰도 평가지수를 구하고, 수지식 사례 배전시스템을 개선시키기 위한 방법으로 환상식 시스템으로 구성을 변경시켜 수치적으로 얼마나 높은 신뢰도가 얻어졌는지를 보여준다.

Influence of fracture characters on flow distribution under different Reynold numbers

  • Wang, Jing;Li, Shu-Cai;Li, Li-Ping;Gao, Cheng-Lu
    • Geomechanics and Engineering
    • /
    • 제14권2호
    • /
    • pp.187-193
    • /
    • 2018
  • Water inrush through the destruction of water resisting rock mass structure was divided into direct water inrush, key block water inrush and splitting water inrush. In the direct water inrush, the Reynolds numbers has a significant effect on the distribution of the water flow and vortex occurred in the large Reynolds numbers. The permeability coefficient of the fracture is much larger than the rock, and the difference is between 104 and 107 times. The traditional theory and methods are not considering the effect of inertia force. In the position of the cross fracture, the distribution of water flow can only be linearly distributed according to the fracture opening degree. With the increase of Reynolds number, the relationship between water flow distribution and fracture opening is studied by Semtex.

비정규분포하에서의 효과적 공정관리를 위한 기술체계동향 연구 (A Study of Technology Trends for Effective Process Control under Non-Normal Distribution)

  • 김종걸;엄상준;김영섭;고재규
    • 대한안전경영과학회:학술대회논문집
    • /
    • 대한안전경영과학회 2008년도 추계학술대회
    • /
    • pp.599-610
    • /
    • 2008
  • It is an important and urgent issue to improve process capability in quality control. Process capability refers to the uniformity of the process. The variability in the process is a measure of the uniformity of output. A simple, quantitative way to express process capability, the degree of variability from target in specification is defined by process capability index(PCI). Almost process capability indices are defined under normal distribution. However, these indices can not be applied to the process of non-normal distribution including reliability. We investigate current research on the process of non-normal distribution, and advanced method and technology for developing more reliable and efficient PCI. Finally we suggest the perspective for future study.

  • PDF

용매 함량이 내충격성 폴리스티렌의 형태구조 및 고무 입도분포에 미치는 영향 (Effect of Solvent Content on Morphology and Rubber Particle Size Distribution of High Impact Polystyrene)

  • 정한균;박정신;장대석;이성재
    • 폴리머
    • /
    • 제26권3호
    • /
    • pp.307-315
    • /
    • 2002
  • 폴리스티렌의 취약한 성질을 개선한 내충격정 폴리스티렌 (HIPS)의 내충격성에 영향을 주는 요소는 분산된 고무상 입자의 크기 및 입도분포, 분자량, 형태구조, 그래프트율 등이다. 이에 따라 HIPS의 물성은 영향을 받으므로 이를 조절하거나 파악하는 것은 중요하다. 본 연구에서는 HIPS의 벌크-용액중합에서 용매함량이 고무입자의 형태구조 및 입도분포, 최종 물성에 미치는 영향에 대하여 고찰하였다. 먼저 중합 진행에 따른 분산상의 입도분포를 측정함으로써 상역전 현상의 변화 추이를 파악하여 전중합 시간을 결정하였다. 중합시 분산용매는 적절한 양에 도달하기 전까지는 고무입자의 크기가 증가하였으며, 그 후에는 점차적으로 감소하였다. 고무상의 형태구조는 분산용매가 증가함에 따라서 그래프트율이 증가하는 형태구조로 바뀌는 것으로 사료된다. 분산용매가 첨가됨에 따라 유변물성 및 인장물성이 취약해졌는데, 이는 분산용매에 의한 사슬이동반응이 매트릭스상인 폴리스티렌의 분자량을 감소시킨 점과 잔류 용매의 존재 때문이었다. 하지만 내충격성은 분산입자의 크기가 증가한 경우 향상되는 경향을 보였다.

Simple Sequence Repeat (SSR) and GC Distribution in the Arabidopsis thaliana Genome

  • Mortimer Jennifer C;Batley Jacqueline;Love Christopher G;Logan Erica;Edwards David
    • Journal of Plant Biotechnology
    • /
    • 제7권1호
    • /
    • pp.17-25
    • /
    • 2005
  • We have mined each of the five A. thaliana chromosomes for the presence of simple sequence repeats (SSRs) and developed custom perl scripts to examine their distribution and abundance in relation to genomic position, local G/C content and location within and around transcribed sequences. The distribution of repeats and G/C content with respect to genomic regions (exons, UTRs, introns, intergenic regions and proximity to expressed genes) are shown. SSRs show a non-random distribution across the genome and a strong association within and around transcribed sequences, while G/C density is associated specifically with the coding portions of transcribed sequences. SSR motif repeat number shows a high degree of variation for each SSR type and a high degree of motif sequence bias reflecting local genome sequence composition. PCR primers suitable for the amplification of identified SSRs have been designed where possible, and are available for further studies.

음양인 유형분류에 관한 연구 (설문지를 중심으로) (A Study on the Pattern Distribution of Yin-Yang Ren [음양인] (Used on Questionnaire))

  • 이상범;최경미;박영배
    • 대한한의학회지
    • /
    • 제25권1호
    • /
    • pp.1-20
    • /
    • 2004
  • Objectives : Based on the analysis of Yin-Yang[음양] characteristics and symptoms, each person is classified into Yin-Yang. Also the validity of the result is statistically analized. Methods : From Feb. to May. 2003, the data were collected through a questionnaire given to 690 patients. The questionnaire was composed of 34 items which were about personality, habit, sweat, response to coldness, thirst, bowel, urine, physical shape, and menstruation for women only. SD(Semantic Differential Technique) used for each item, each item is measured as a contrast of two opposite symptoms. Reliability analysis was used to select items and categories. Based on means of items in each category the Yin-Yang index was developed. The validity of Yin-Yang index was investigated using classification and clustering analysis. In statistical analysis, SPSS V10.0.7 PC was used. Results : The obtained results are summarized as follows: 1) We constructed Yin-Yang index based on the middle point of the sum of categorical means. Then we classified each person into Yin or Yang. 2) To investigate the validity of the distribution of personal Yin-Yang degree, the crosstabulation of results from clustering and classification was used. The hit ratio for classification was much higher than Maximum Chance Criterion($C_{max}$), and concurrence in crosstabulation was successful. Therefore we can infer that the distribution of Yin-Yang was valid. Conclusions : Based on Yin-Yang characteristics and symptoms, we was analyzed personal degree of Yin-Yang, and confirmed the validity of its distribution. Therefore this index can be used further for Bian-Zheng [변증] and classification of the constitution.

  • PDF

Response transformation factors and hysteretic energy distribution of reinforced concrete braced frames

  • Herian A. Leyva;Eden Bojorquez;Juan Bojorquez;Alfredo Reyes;Fabrizio Mollaioli;Omar Payan;Leonardo Palemon;Manual A. Barraza
    • Structural Engineering and Mechanics
    • /
    • 제90권3호
    • /
    • pp.313-323
    • /
    • 2024
  • Most of existing buildings in Mexico City are made of reinforced concrete (RC), however, it has been shown that they are very susceptible to narrow-band long duration ground motions. In recent years, the use of dual systems composed by Buckling Restrained Braces (BRB) has increased due to its high energy dissipation capacity under reversible cyclical loads. Therefore, in this work the behavior of RC buildings with BRB is studied in order to know their performance, specifically, the energy distribution through height and response transformation factors between the RC and simplified systems are estimated. For this propose, seven RC buildings with different heights were designed according to the Mexico City Seismic Design Provisions (MCSDP), in addition, equivalent single degree of freedom (SDOF) systems were obtained. Incremental dynamic analyses on the buildings under 30 narrow-band ground motions in order to compute the relationship between normalized hysteretic energy, maximum inter-story drift and roof displacement demands were performed. The results shown that the entire structural frames participate in energy dissipation and their distribution is independent of the global ductility. The results let propose energy distribution equations through height. Finally, response transformation factors between the SDOF and multi degree of freedom (MDOF) systems were developed aimed to propose a new energy-based approach of BRB reinforced concrete buildings.

온도조건이 뽕나무깍지벌레의 발육 및 수내분포에 미치는 영향 (Effects of Temperatures on Development and Distribution of Mulberry scale, Pseudaulacaspis pentagona, within Tree)

  • 박종대;김규진
    • 한국응용곤충학회지
    • /
    • 제29권4호
    • /
    • pp.238-243
    • /
    • 1990
  • 핵과류를 가해하는 깍지벌레중 우점종인 뽕나무깍지벌레에 대한 용도조건이 충 발육 및 수관내분포에 미치는 영향과 월풍과의 관계를 구명하기 위하여 연구한 결과는 다용과 같다. 온도에 따른 각 stage의 성장비는 생육온도 범위의 항온에서는 크게 영향을 미치지 않았으며 각 stage의 발육영점과 유효적산온도는 난이 각각 $12.3^{\circ}C$, 46.9일도, 1령약총 $10.8^{\circ}C$, 183.8 일도, 2령약충 $9.8^{\circ}C$, 188.2일도였으며 총 약충 기간에서는 $10.3^{\circ}C$, 383.0일도이었다. 자성충의 수명은 $18^{\circ}C$, $22^{\circ}C$, $26^{\circ}C$, $30^{\circ}C$에서 각각 39.6일, 28.4일, 18.1일, 15.7일이었고 포란수 및 산란수는 각각 83.0개, 75.0개이었다. 또한 각 stage의 생육적온은 22~$26^{\circ}C$ 범위이었으며 $35^{\circ}C$에서는 부화되지 않았다. 여름철에 수관내 충의 밀도는 69.6%로 가지의 하향면에서 가장 높았으며 월동 자성충의 분포비율은 NE-SE변에서 가장 높았고 월동기간중 성충의 사충율은 36.2%이었다.

  • PDF