• Title/Summary/Keyword: Deformation of surface Roughness

검색결과 139건 처리시간 0.029초

CMP 컨디셔너의 다이아몬드 입자 모양이 연마 패드 표면 형상 제어에 미치는 영향 (Effect of Diamond Abrasive Shape of CMP Conditioner on Polishing Pad Surface Control)

  • 이동환;이기훈;정선호;김형재;조한철;정해도
    • Tribology and Lubricants
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    • 제35권6호
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    • pp.330-336
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    • 2019
  • Conditioning is a process involving pad surface scraping by a moving metallic disk that is electrodeposited with diamond abrasives. It is an indispensable process in chemical-mechanical planarization, which regulates the pad roughness by removing the surface residues. Additionally, conditioning maintains the material removal rates and increases the pad lifetime. As the conditioning continues, the pad profile becomes unevenly to be deformed, which causes poor polishing quality. Simulation calculates the density at which the diamond abrasives on the conditioner scratch the unit area on the pad. It can predict the profile deformation through the control of conditioner dwell time. Previously, this effect of the diamond shape on conditioning has been investigated with regard to microscopic areas, such as surface roughness, rather than global pad-profile deformation. In this study, the effect of diamond shape on the pad profile is evaluated by comparing the simulated and experimental conditioning using two conditioners: a) random-shaped abrasive conditioner (RSC) and b) uniform-shaped abrasive conditioner (USC). Consequently, it is confirmed that the USC is incapable of controlling the pad profile, which is consistent with the simulation results.

연삭 가공면의 표면성상에 관한 연구 (A Study on Surface Integrity in Ground Layers)

  • 김경년;정재천;차일남
    • 한국정밀공학회지
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    • 제8권4호
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    • pp.64-75
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    • 1991
  • The design of structures of modern industry has developed to satisfy stringent service, realiability and safety. Up to now, geometric profile which means surface foughness and dimension accuracy is mainly treated in manufacturing process of work surface. But it is inevitable to evaluate changes of surface geometry as well as the nature of alterations in surface layers because surface of workpiece changes as a result of phase transformation, chemical changes, plastic deformation and stress changes. This paper is to present principal data for safety design by verifying the effect of grinding conditions and method in grinding layers and to explain the method of measuring surface integrity. In this paper, structural steel(SM20C) is used as a workpiece. Of integrity, surface roughness in view of surface texture is analyzed by frequency domain and residual stress, structures and defect of ground layers in view of surface metallurgy are investigated.

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시험도로 아스팔트 포장의 공용성 변화 분석 (Performance Evaluation of Asphalt Concrete Pavements at Korea Expressway Corporation Test Road)

  • 서영국;권순민
    • 대한토목학회논문집
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    • 제28권1D호
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    • pp.35-43
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    • 2008
  • 본 연구는 지난 4년간 한국도로공사 시험도로 아스팔트 포장의 주요 손상인자의 정량화와 그 변화를 다루고 있다. 포장상태조사 장비인 ARAN(Automatic Road Analyzer)을 이용하여 준공 직후인 2002년 12월부터 2006년 10월까지 총 5차례에 걸쳐 아스팔트 전단면에 대해 노면상태를 측정하고 소성변형, 균열손상, 그리고 종단평탄성을 중심으로 그 결과를 분석하였다. 실내시험을 통해 시험도로의 아스팔트 혼합물의 온도와 하중 재하속도에 대한 선형점탄성 거동을 비교하고, 표층용 혼합물인 ASTM 19mm에 대해서는 동탄성계수에 미치는 공극률의 영향도 검토하였다. 일반 밀입도 표층 단면의 차륜부에서 추출한 시편의 공극률을 측정하여 시험도로 포장의 다짐도 변화를 추정하였으며 이를 바탕으로 다짐도-포장 손상의 관계를 검토하였다. 교통하중과 포장 손상과의 연관성 분석 결과 소성변형과 균열을 포함한 노면 손상의 증가는 교통하중이 재하되는 시기와 바로 일치하지는 않았으며 오히려 온도와 같은 환경에 더 영향을 받는 것으로 관측되었다. 반면에 노면 평탄성은 공용년수가 증가 하면서 교통하중에 민감하게 반응하였으며 환경인자와의 상관성은 매우 낮은 것으로 나타났다.

다구찌 방법을 이용한 다발압출 금형설계에 관한 연구 (A Study on the Die Set Design for Multi-Hole Extrusion Process Using Taguchi Method)

  • 조성진;이재원
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 추계학술대회 논문집
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    • pp.322-325
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    • 2000
  • In the previous report1), the grinding characteristics of quartz were investigated. In this paper, the grinding mechanisms of brittle materials including ceramics and quartz are modeled and a new parameter SDR(Surface roughness Direction Ratio) is proposed to characterize the grinding mechanisms of such materials. A set of experiments were performed to verify the effectiveness of the suggested parameter. The experimental results indicate that the plastic deformation is the dominant material removal mode at the grinding conditions which show the higher value of SDR. In the case of quartz, the material was removed by brittle fracture in a lower value of SDR and by plastic deformation in a higher value of it. SDR is not affected by wheel mesh size when brittle fracture occured. But in the plastic deformation case, SDR value increases with wheel mesh size.

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조립형 드릴의 성능 평가 (Performance of Assembled-type Drills)

  • 양해정;이재학;서정환
    • 한국생산제조학회지
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    • 제24권2호
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    • pp.238-243
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    • 2015
  • Recently, the use of assembled-type drills as environmentally friendly products has expanded because the shanks of drills can be reused by replacing the tip when the tools are worn or cut. In addition to their precision and endurable stiffness with respect to the cutting force, assembled-type drills need no stricture because of thermal deformation, which makes replacement easily. In this study, we developed novel assembled-type drills and compared their characteristics, such as the precision, stiffness, and thermal deformation, with those of conventional drills. The new drills exhibited a precision over IT 8 class and no changes in dimensions due to thermal deformation, such that we can change the assembly easily with durability.

연삭 가공시 공작물의 열변형과 새로운 노즐의 개발 (Development of the New Type Nozzle and the Thermal Deformation at Workpiece in Grinding)

  • 김남경;안국찬
    • 한국안전학회지
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    • 제11권3호
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    • pp.10-19
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    • 1996
  • Grinding temperature and thermal deformation(dimensional error) are studied theoretically and experimentally. The propose of this research is clarified loading phenomena and residual stress In order to guide nozzle's efficiency. The main results to be obtained are as follows ; 1) When grinding condition Is high efficient grinding, FEM program is developed about grinding heat and dimensional error. 2) Thermal deformation depend on temperature distribution is in good agreement with experimental results in case of little grinding energy flux but is comparatively in good agreement with in case of large (3.5$\times$10$^{6}$ J/m). 3) In terms of high efficient grinding at field(table speed 4m/min), grinding fluid (dilution 5/100) obtained a good workpiece quality and decreased a grinding temperature. 4) A surface roughness, dimensional error, residual stress and loading phenomena with guide nozzle are decreased and these results obtained a good workpiece quality.

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자동차용 강판의 표면 텍스처링 효과에 따른 고성형성 연구 (Analysis of the High Formability of Automotive Steel Sheets by the Surface Texturing Effect)

  • 윤승채;여인웅;조민행
    • 대한금속재료학회지
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    • 제50권1호
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    • pp.8-12
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    • 2012
  • This study aims to analyze the formability property of surface texturing processed automotive steel sheet for improving the sheet forming property. In the paper, the effect of cavities fabricated using the laser surface texturing technique on automotive high strength steel sheets was studied. The frictional behavior of the sheet drawing is a function of interface parameters such as sheet surface roughness, holding force, contact pressure, etc. For these reasons, automotive steel researchers want to optimize the surface topography of automotive steel sheets in order to enhance the formability. Therefore, this study presents the behavior of deformation of a laser surface texturing steel sheet by considering the frictional operation during the deep drawing process.

FRP 선박 외판재의 연삭마모 특성에 관한 상대재 거칠기의 영향 (Effect of Counterpart Roughness on Abrasive Wear Characteristics of Side Plate of FRP Ship)

  • 김형진;고성위;김재동
    • 한국해양공학회지
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    • 제22권6호
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    • pp.35-40
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    • 2008
  • The effect of counterpart roughness on abrasive wear characteristics of side plate materials of FRP ship, which were composed of glass fiber and unsaturated polyester resin composites, were investigated at ambient temperature by pin-an-disc friction test. The friction coefficient, wear rate and cumulative wear volume of these materials against SiC abrasive paper were determined experimentally. The wear rate of these materials decreased rapidly with sliding distance and then maintained a constant value. It was increased as counterpart roughness was rougher in a wear test. The cumulative wear volume tended to increase nonlinearly with sliding distance and depended on applied load and sliding speed for these composites. It could be verified by SEM photograph of fracture surface that major failure mechanisms were overlapping layers, microcutting, deformation of resin, delamination, and cracking.

나노스케일 워터젯 가공에 대한 분자시뮬레이션 연구 (Molecular Simulation of Nano-Scale Waterjet Machining)

  • 이상훈;김현준;김태욱
    • Tribology and Lubricants
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    • 제39권5호
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    • pp.216-219
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    • 2023
  • This study employs molecular dynamics simulations to investigate the material behavior of workpieces in waterjet machining processes. To gain fundamental insights into waterjet machining, simulations were conducted using pure water, excluding abrasive particles. The simulation model comprised thousands of water molecules interacting with a single crystal metal workpiece. Water molecule clusters were imparted with various velocities to initiate collisions with the metal workpiece. The material behavior of the metal surface was analyzed with respect to the applied velocity conditions, considering the intricate interplay between water molecules and the workpiece at the atomic scale. The results demonstrated that the machining of the metal workpiece occurred only when water molecules were endowed with velocities above a certain threshold. In cases where energy was insufficient, the metal workpiece exhibited a slight increase in surface roughness due to mild plastic deformation, without undergoing substantial material removal. When machining occurred, the ejection of material revealed a 3-fold symmetric pattern, confirming that material removal in waterjet machining of the metal workpiece is primarily driven by plastic deformation-induced material ejection. This research provides crucial insights into the mechanisms underlying waterjet machining and enhances our understanding of material behavior during the process. The findings can be valuable in optimizing waterjet machining techniques.

Average Flow Model을 이용한 Kurtosis에 따른 Flow Factors에 관한 연구 (Effects of Kurtosis on the Flow Factors Using Average Flow Model)

  • 강민호;김태완;구영필;조용주
    • Tribology and Lubricants
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    • 제17권3호
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    • pp.236-243
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    • 2001
  • In this study, flow factors are evaluated in terms of kurtosis using random rough surface generated numerically. As h/$\sigma$become large ø$\sub$x/, ø$\sub$y/, ø$\sub$fp/, approach to 1 and ø$\sub$s/, ø$\sub$fs/ to 0 asymptotically regardless of kurtosis. ø$\sub$x/, ø$\sub$y/, ø$\sub$fp/ increase with increasing kurtosis in the mixed lubrication regime. ø$\sub$s/, ø$\sub$fs/ is associated with an additional flow transport due to the combined effect of sliding and roughness. As h/$\sigma$ decreases ø$\sub$s/, ø$\sub$fs/ increase up to a certain point, and then decrease toward zero. This behavior can be attributed to the increasing number of contacts in the mixed lubrication regime. ø$\sub$x/ in the presence of elastic deformation on the surface is larger than ø$\sub$x/ in the absence of it because local film thickness(h$\sub$T/) increases by elastic deformation.