Effect of Diamond Abrasive Shape of CMP Conditioner on Polishing Pad Surface Control |
Lee, Donghwan
(Dept. of Mechanical Engineering, Pusan National University)
Lee, Kihun (Dept. of Mechanical Engineering, Pusan National University) Jeong, Seonho (Dept. of Mechanical Engineering, Pusan National University) Kim, Hyungjae (Precision Manufacturing and Control R&D Group, Dongnam Division, Korea Institute of Industrial Tech) Cho, Hanchul (Precision Manufacturing and Control R&D Group, Dongnam Division, Korea Institute of Industrial Tech) Jeong, Haedo (Dept. of Mechanical Engineering, Pusan National University) |
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