• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.50 no.9
• /
• pp.438-443
• /
• 2001

In the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control, within-wafer-non-uniformity, and the possible defects such as pad oxide damage and nitride residue. The defect like nitride residue and silicon (or pad oxide) damage after STI-CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI fill and STI-CMP were discussed. Consequently, we could conclude that law trench depth and high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.20-23
• /
• 2002

In silicon wafer manufacturing process, the grinding process has been adopted to improve the quality of wafer such as flatness, roughness and so on. This paper describes the effect of grinding process on the surface quality of wafer. The experiments are carried out by high precision in fred grinder with air bearing spindle. The relationship between the inclination of chuck table and the flatness of wafer is investigated, and the effect of grinding conditions including wheel speed, table speed, and feed rate on damage depth and roughness of wafer is also investigated. The experimental results show that there is close relationship between the inclination of the chuck table and the flatness of wafer, and the grinding conditions within this paper little affect the flatness of wafer and relatively high affect the damage depth of wafer.

• Journal of the Korean institute of surface engineering
• /
• v.45 no.6
• /
• pp.278-283
• /
• 2012

This investigation evaluated the effect of cavitation condition on electrochemical characteristics of 304 stainless steel, which is widely used for marine environment. The cavitation test with time were conducted on 304 stainless steel in seawater solution. Surface morphologies of specimen were observed by scanning electron microscope (SEM) and 3D microscope. Pitting depth, weight loss and damage rate were analyzed after each cavitation experiment. The surface damage was more severe as the current density increased. A dramatical increase in the damage depth and weight loss was observed after 7 hours of cavitation experiment.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2023.05a
• /
• pp.267-268
• /
• 2023

Out of an estimated 7 million buildings nationwide, approximately 38% of them have been standing for over 30 years, and this number is expected to continue to increase. Additionally, due to the Building Act, safety inspections will be mandatory for approximately 70,000 buildings annually, leading to an increase in demand for building safety inspections. However, the current building safety diagnosis heavily relies on manpower, making it difficult to diagnose locations that are hard to access, and requiring lengthy investigation periods. Therefore, this paper presents the basic research results of a non-contact concrete damage depth estimation technique using laser technology aimed at remote building safety diagnosis and shortening investigation periods.

• Earthquakes and Structures
• /
• v.8 no.4
• /
• pp.821-841
• /
• 2015

This paper proposes a two-stage imaging approach for quantitative inspection of damages in metallic plates using the fundamental anti-symmetric mode of ($A_0$) Lamb wave. The proposed approach employs a number of transducers to transmit and receive $A_0$ Lamb wave pulses, and hence, to sequentially scan the plate structures before and after the presence of damage. The approach is applied to image the corrosion damages, which are simplified as a reduction of plate thickness in this study. In stage-one of the proposed approach a damage location image is reconstructed by analyzing the cross-correlation of the wavelet coefficient calculated from the excitation pulse and scattered wave signals for each transducer pairs to determine the damage location. In stage-two the Lamb wave diffraction tomography is then used to reconstruct a thickness reduction image for evaluating the size and depth of the damage. Finite element simulations are carried out to provide a comprehensive verification of the proposed imaging approach. A number of numerical case studies considering a circular transducer network with eight transducers are used to identify the damages with different locations, sizes and thicknesses. The results show that the proposed methodology is able to accurately identify the damage locations with inaccuracy of the order of few millimeters of a circular inspection area of $100mm^2$ and provide a reasonable estimation of the size and depth of the damages.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2003.10a
• /
• pp.213-219
• /
• 2003

As the 2-D hydraulic experimental results for the submerged rubble-mound structure, we have concerned with their stability/function characteristics of structures by the effects of wave force, scour/deposition at the toe and wave transmission ratio at the lee-side sea. And as to investigate the variation characteristics of wave transmission ratio which depended to a geometrical structure of the submerged breakwater profiles, the critical conditions for the depth of submergence and crest width obviously presented. In summary, there results lead us to the conclusions that the wave control capabilities of submerged breakwaters by the variation of the submergence depth is high about 4 time degrees at the efficiency than the that of crest width. The destruction of covering block at the crest generated at the region which located between maximum damage curve, it maximum damage/failure station from the toe of the structure were 0.2L. As the wave transmission coefficient and the slope of the structure increase, the damage/failure ratio and the maximum scour depth at the toe was extended, respectively. When maximum scour depth happened. The destruction of covering block which located at the toe generated at the front slope destruction. Finally, it was found from the results that the optimization of structure may be obtained by the efficiently decision of the submergence depth and crest width in the permissible range of wave transmission ratio.

• Korean Journal of Fisheries and Aquatic Sciences
• /
• v.36 no.5
• /
• pp.528-534
• /
• 2003

The 2-D hydraulic experimental results for the submerged rubble-mound structure, we have been concerned with the slability/function characteristics of the structures by the effects of wave force, scour/deposition at the toe and the wave transmission ratio at the lee-side sea. So, to investigate the variation characteristics of the wave transmission ratio which depended on a geometrical structure of the submerged breakwater profiles, the critical conditions for the depth of submergence and crest width were obviously presented. In summary, the results lead us to the conclusion that the wave control capabilities of submerged breakwaters by the variation of the submergence depth is higher than about 4 times the degree at the efficiency than the that of crest width. The destruction of the covering block at the crest generated at the region which was located between the maximum and minimum damage curve, and it's maximum damage/failure station from the toe of the structure was $0.2\;L_s.$ As the wave transmission coefficient and the slope of the structure increase, the damage/failure ratio and the maximum scour depth at the toe was extended, respectively. When the maximum scour depth happened, the destruction of the covering block which was located at the toe generated at the front of the submerged rubble-mound breakwater. Finally, it was found from the results that the optimization of the structure may be obtained by the efficient decision of the submergence depth and crest width in the permissible range of the wave transmission ratio.

• Proceedings of the Computational Structural Engineering Institute Conference
• /
• 1991.04a
• /
• pp.61-67
• /
• 1991

Conventional aseismic design methods of reinforced concrete frame all but disregard the state of damage over the entire building frame. This paper presents an automated damage-contorlled design method, which aims for uniform damage distribution throughout the entire building frame, as measured by the individual mumber damage indexes. Three design parameters, namely the longitudinal steel ratio, the confinement steel ratio and the frame member depth, were studied for their influence on the frame responce to an earthquake. The usefulness of this design method is demonstrated with a four story example office building predicting the extent of structural damage.

• Journal of Korea Water Resources Association
• /
• v.55 no.12
• /
• pp.1125-1135
• /
• 2022

Damages by heavy snow does not occur very often, but when it does, it causes damage to a wide area. To mitigate snow damage, it is necessary to know, in advance, the depth of snow that causes damage in each region. However, snow depths are measured at observatory locations, and it is difficult to understand the spatial distribution of snow depth that causes damage in a region. To understand the spatial distribution of snow depth, the point measurements are interpolated. However, estimating spatial distribution of snow depth is not easy when the number of measured snow depth is small and topographical characteristics such as altitude are not similar. To overcome this limit, satellite images such as Synthetic Aperture Radar (SAR) can be analyzed using Differential Interferometric SAR (DInSAR) method. DInSAR uses two different SAR images measured at two different times, and is generally used to track minor changes in topography. In this study, the spatial distribution of snow depth was estimated by DInSAR analysis using dual polarimetric IW mode C-band SAR data of Sentinel-1B satellite operated by the European Space Agency (ESA). In addition, snow depth was estimated using geostationary satellite Chollian-2 (GK-2A) to compare with the snow depth from DInSAR method. As a result, the accuracy of snow cover estimation in terms with grids was about 0.92% for DInSAR and about 0.71% for GK-2A, indicating high applicability of DInSAR method. Although there were cases of overestimation of the snow depth, sufficient information was provided for estimating the spatial distribution of the snow depth. And this will be helpful in understanding regional damage-causing snow depth.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.242-242
• /
• 2010

Si(100) 표면에 이온을 일정한 에너지로 dose량을 동일하게 유지하고, dose rate만을 변화시켜가며 주입한 후에 depth profile과 damage, 그리고 sheet resistance를 조사하였다. 일정한 에너지로 이온을 주입하여도 dose rate의 변화에 따라서 depth profile에 변화를 보이는 것을 확인할 수 있었고 sheet resistance역시 dose rate변화에 비례하여 변화하는 것을 확인할 수 있었다. 본 연구는 Crystal-TRIM program으로 computer simulation 하여 damage profile의 결과를 통해 dose rate가 클수록 시료 표면 근처에 잔류 damage의 양이 높게 나타나는 것을 알 수 있었고 그 잔류 damage의 표면근방 분포가 sheet resistance에 직접적인 영향을 미친다는 것을 확인할 수 있었다.