• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Journal of Intelligence and Information Systems
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• 제7권2호
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• pp.143-151
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• 2001

This paper investigates the development of a neural network based system for automated signature authentication that relies on an autoregressive characterization for the segments of a signature. The primary contributions of this work are tow-fold: a) the development of the neural network architecture and the modalities of training it, b) adaptation of the dynamic time warping algorithm to fomulate a new method for enabling consistent segmentation of multiple signatures from the same writer. The performance of the signature verification system has been tested using a sizable database that includes a comprehensive set of simulated and realistic forgeries. False Acceptance and False Rejection error rates of 0.78% and 1.6% respectively were obtained in tests conducted using 1920 skilled forgeries.

• The Journal of the Acoustical Society of Korea
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• 제19권1호
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• pp.11-15
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• 2000

Speaker adaptive continuous speech recognition for the RM speech corpus is described in this paper. Learning of hidden markov models for the reference speaker is performed for the training data of RM corpus. For the evaluation, evaluation data of RM corpus are used. Parts of another training data of RM corpus are used for the speaker adaptation. After dynamic time warping of another speaker's data for the reference data is accomplished, error back propagation neural network is used to transform the spectrum between speakers to be recognized and reference speaker. Experimental results to get the best adaptation by tuning the neural network are described. The recognition ratio after adaptation is substantially increased 2.1 times for the word recognition and 4.7 times for the word accuracy for the best.

• Journal of the Korea Society of Computer and Information
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• 제15권6호
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• pp.73-80
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• 2010

Vocabulary recognition system is providing inaccurate vocabulary and similar phoneme recognition due to reduce recognition rate. It's require method of similar phoneme recognition unrecognized and efficient feature extraction process. Therefore in this paper propose phoneme likelihood error correction improvement system using based on phoneme feature Bhattacharyya distance measurement. Phoneme likelihood is monophone training data phoneme using HMM feature extraction method, similar phoneme is induced recognition able to accurate phoneme using Bhattacharyya distance measurement. They are effective recognition rate improvement. System performance comparison as a result of recognition improve represent 1.2%, 97.91% by Euclidean distance measurement and dynamic time warping(DTW) system.

• The Korean Journal of Applied Statistics
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• 제33권6호
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• pp.791-804
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• 2020

Residential electricity consumption can be predicted more accurately by utilizing the realtime household electricity consumption reference that can be collected by the AMI as the ICT developed under the smart grid circumstance. This paper studied the model that predicts residential power load using the ARIMA, TBATS, NNAR model based on the data of hour unit amount of household electricity consumption, and unlike forecasting the consumption of the whole households at once, it computed the anticipated amount of the electricity consumption by aggregating the predictive value of each established model of cluster that was collected by the households which show the similiar load profile. Especially, as the typical time series data, the electricity consumption data chose the clustering analysis method that is appropriate to the time series data. Therefore, Dynamic Time Warping and Periodogram based method is used in this paper. By the result, forecasting the residential elecrtricity consumption by clustering the similiar household showed better performance than forecasting at once and in summertime, NNAR model performed best, and in wintertime, it was TBATS model. Lastly, clustering method showed most improvements in forecasting capability when the DTW method that was manifested the difference between the patterns of each cluster was used.

• Korean Journal of Ecology and Environment
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• 제54권4호
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• pp.390-397
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• 2021

The time series data of rotifer community focusing on the species number and total density were collected from 29 reservoirs located at Jeonnam Province from 2008 to 2016 quarterly. The reservoirs had similar weather condition during the study period, but their sizes and water qualities were different. To analyze the temporal dynamics of rotifer community, the medians, ranges, outliers and coefficient of variation (CV) value of rotifer species number and abundance were compared. For the temporal trend analysis, time series of each reservoir data were compared and clustered using the dynamic time warping function of the R package "dtwclust". Small-sized reservoirs showed higher variability in rotifer abundance with more frequent outliers than large-sized reservoirs. On the other hand, apparent pattern was not observed for the rotifer species number. For the temporal pattern of rotifer density, COD, phytoplankton abundance fluctuation, and cladoceran abundance fluctuation have been suggested as potential factor affecting the rotifer abundance dynamics.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• 제20권2호
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• pp.13-20
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• 2020

One of the major issues surrounding big data is the availability of massive time-based or telemetry data. Now, the appearance of low cost capture and storage devices has become possible to get very detailed time data to be used for further analysis. Thus, we can use these time data to get more knowledge about the underlying system or to predict future events with higher accuracy. In particular, it is very important to define custom tailored contract offers for many households and businesses having smart meter records and predict the future electricity usage to protect the electricity companies from power shortage or power surplus. It is required to identify a few groups with common electricity behavior to make it worth the creation of customized contract offers. This study suggests big data transformation as a side effect and clustering technique to understand the electricity usage pattern by using the open data related to smart meter and KNIME which is an open source platform for data analytics, providing a user-friendly graphical workbench for the entire analysis process. While the big data components are not open source, they are also available for a trial if required. After importing, cleaning and transforming the smart meter big data, it is possible to interpret each meter data in terms of electricity usage behavior through a dynamic time warping method.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제9권1호
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• pp.358-377
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• 2015

In this paper, we propose a novel approach for trajectory recovery. Our system uses a triangulation procedure for skeletonization and graph theory to extract the trajectory. Skeletonization extracts the polyline skeleton according to the polygonal contours of the handwritten characters, and as a result, the junction becomes clear and the characters that are touching each other are separated. The approach for the trajectory recovery is based on graph theory to find the optimal path in the graph that has the best representation of the trajectory. An undirected graph model consisting of one or more strokes is constructed from a polyline skeleton. By using the polyline skeleton, our approach accelerates the process to search for an optimal path. In order to evaluate the performance, we built our own dataset, which includes testing and ground-truth. The dataset consist of thousands of handwritten characters and word images, which are extracted from five handwritten documents. To show the relative advantage of our skeletonization method, we first compare the results against those from Zhang-Suen, a state-of-the-art skeletonization method. For the trajectory recovery, we conduct a comparison using the Root Means Square Error (RMSE) and Dynamic Time Warping (DTW) in order to measure the error between the ground truth and the real output. The comparison reveals that our approach has better performance for both the skeletonization stage and the trajectory recovery stage. Moreover, the processing time comparison proves that our system is faster than the existing systems.

• KIPS Transactions on Software and Data Engineering
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• 제2권10호
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• pp.723-730
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• 2013

This paper presents the design of an arm gesture recognition system using Kinect sensor. A variety of methods have been proposed for gesture recognition, ranging from the use of Dynamic Time Warping(DTW) to Hidden Markov Models(HMM). Our system learns a unique HMM corresponding to each arm gesture from a set of sequential skeleton data. Whenever the same gesture is performed, the trajectory of each joint captured by Kinect sensor may much differ from the previous, depending on the length and/or the orientation of the subject's arm. In order to obtain the robust performance independent of these conditions, the proposed system executes the feature transformation, in which the feature vectors of joint positions are transformed into those of angles between joints. To improve the computational efficiency for learning and using HMMs, our system also performs the k-means clustering to get one-dimensional integer sequences as inputs for discrete HMMs from high-dimensional real-number observation vectors. The dimension reduction and discretization can help our system use HMMs efficiently to recognize gestures in real-time environments. Finally, we demonstrate the recognition performance of our system through some experiments using two different datasets.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제15권11호
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• pp.3950-3969
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• 2021

Radio Frequency (RF)-based indoor localization technologies play significant roles in various Internet of Things (IoT) services (e.g., location-based service). Most such technologies require that all the devices comply with a specified technology (e.g., WiFi, ZigBee, and Bluetooth). However, this requirement limits its application scenarios in today's IoT context where multiple devices complied with different standards coexist in a shared environment. To bridge the gap, in this paper, we propose a cross-technology localization approach, which is able to localize target nodes using a different type of devices. Specifically, the proposed framework reuses the existing WiFi infrastructure without introducing additional cost to localize Non-WiFi device (i.e., ZigBee). The key idea is to leverage the interference between devices that share the same operating frequency (e.g., 2.4GHz). Such interference exhibits unique patterns that depend on the target device's location, thus it can be leveraged for cross-technology localization. The proposed framework uses Principal Components Analysis (PCA) to extract salient features of the received WiFi signals, and leverages Dynamic Time Warping (DTW), Gradient Boosting Regression Tree (GBRT) to improve the robustness of our system. We conduct experiments in real scenario and investigate the impact of different factors. Experimental results show that the average localization accuracy of our prototype can reach 1.54m, which demonstrates a promising direction of building cross-technology technologies to fulfill the needs of modern IoT context.