• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.3
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• pp.506-513
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• 2007

This paper proposes a rotary magnetic position sensor which has a sinusoidally magnetized permanent magnet with a small number of poles. To make the sinusoidal magnetic flux density distribution from the permanent magnet, a magnetizing future is optimized by the DOE(Design of Experiments) method. The magnetization process is analyzed using the Preisach model and 2 dimensional finite element method. The magnetic flux density distribution from the magnetized permanent magnet is very similar to ideal sine wave. The simulation result of the magnetic flux density distribution is compared with the experimental one. Also the availability of the proposed rotary type magnetic position sensor is confirmed by position calculation technique.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.555-558
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• 2005

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, The sub-resonance occurred by the disaccord of force center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

• Korean Journal of Materials Research
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• v.15 no.11
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• pp.705-710
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• 2005

NIL (nanoimprint lithography) technique has demonstrated a high potential for wafer size definition of nanometer as well as micrometer size patterns. During the replication process by NIL, the stiction between the stamp and the polymer is one of major problems. This stiction problem is moi·e important in small sized patterns. An antistiction layer prevents this stiction ana insures a clean demolding process. In this paper, we were using a TCP (transfer coupled plasma) equipment and $C_4F_8$ as a precursor to make a Teflon-like antistiction layer. This antistiction layer was deposited on a 6 inch silicon wafer to have nanometer scale thicknesses. The thickness of deposited antistiction layer was measured by ellipsometry. To optimize the process factor such as table height (TH), substrate temperature (ST), working pressure (WP) and plasma power (PP), we were using a design of experimental (DOE) method. The table of full factorial arrays was set by the 4 factors and 2 levels. Using this table, experiments were organized to achieve 2 responses such as deposition rate and non-uniformity. It was investigated that the main effects and interaction effects between parameters. Deposition rate was in proportion to table height, working pressure and plasma power. Non-uniformity was in proportion to substrate temperature and working pressure. Using a response optimization, we were able to get the optimized deposition condition at desired deposition rate and an experimental deposition rate showed similar results.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.6
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• pp.783-792
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• 2004

In this study, a thick-film semiconductor odor gas sensor for the detection of $CH_3$SH was developed using SnO$_2$ as the main substrate and was investigated in terms of its sensitivity and reaction time. In the process of manufacturing the sensor, Taguchi's design of experiment (DOE) was applied to analyze the effects of a variety of parameters, including the substrate, the additives and the fabrication conditions, systematically and effectively. Eight trials of experiments could be possible using the 27 orthogonal array for the seven factors and two levels of condition, which originally demands 128 trials of experiments without DOE. The additives of Sb$_2$O$_{5}$ and PdCl$_2$ with the H$_2$PtCl$_{6}$ ㆍ6$H_2O$ catalyst were appeared to be important factors to improve the sensitivity, and CuO, TiO$_2$, V$_2$O$_{5}$ and PdO were less important. In addition, TiO$_2$, V$_2$O$_{5}$ and PdO would improve the reaction time of a sensor, and CuO, Sb$_2$O$_{5}$, PdCl$_2$ and H$_2$PtCl$_{6}$ㆍ6$H_2O$ were negligible. Being evaluated simultaneously in terms of both sensitivity and reaction time, the sensor showed the higher performance with the addition of TiO$_2$ and PdO, but the opposite results with the addition of CuO, V$_2$O$_{5}$, Sb$_2$O$_{5}$ and PdCl$_2$. The amount of additives were superior in the case of 1% than 4%. H$_2$PtCl$_{6}$ㆍ6$H_2O$ would play an important role for the increase of sensor performance as a catalyst.nce as a catalyst.

• Transactions on Electrical and Electronic Materials
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• v.12 no.3
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• pp.115-118
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• 2011

Process characterization of the chemical mechanical polishing (CMP) process for undensified phosphosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been addressed to experimenters to understand the relationship between input variables and responses of interest in a simple and efficient way. It is typically beneficial for determining the adequate size of experiments with multiple process variables and making statistical inferences for the responses of interests. Equipment controllable parameters to operate the machine include the down force (DF) of the wafer carrier, pressure on the backside of the wafer, table and spindle speed (SS), slurry flow rate, and pad condition. None of them is independent; thus, the interaction between parameters also needs to be indicated to improve process characterization in CMP. In this paper, we have selected the five controllable equipment parameters, such as DF, back pressure (BP), table speed (TS), SS, and slurry flow (SF), most process engineers recommend to characterize the CMP process with respect to material removal rate (RR) and film uniformity as a percentage. The polished material is undensified PSG. PSG is widely used for the plananization in multi-layered metal interconnects. We identify the main effect of DF, BP, and TS on both RR and film uniformity, as expected, by the statistical modeling and analysis on the metrology data acquired from a series of $2^{5-1}$ fractional factorial design with two center points. This revealed the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that the process control based on better understanding of the process is the key to success in semiconductor manufacturing, typically when the wafer size reaches 300 mm and is continuously scheduled to expand up to 450 mm in or little after 2012.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1480-1487
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• 2012

Recently, the safety of the coal-mining tunnels has been improved greatly, but accidents occur continually. Most tunnel support failures occur because the fish plate part that connects the I-beams is unable to withstand ground pressure. In the case of XX coal mine, the arch part of tunnel support bends to the upper direction. In such a case, excessive horizontal load as well as vertical load acts on the tunnel support. Horizontal load is caused by the sudden loosing of underground rock mass or the leakage of underground water, so it is fairly complex to predict horizontal loading on a tunnel support. To predict the horizontal load on this component is defined as the problem that determines the horizontal load conditions in wedges of tunnel support. This is an optimization problem in which maximum bending stress and horizontal load are considered by an objective function and design variables, respectively. Therefore, in this study, design of experiments and optimization algorithm were applied to identify the horizontal load in tunnel support.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.462-470
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• 2016

The locking load of a conventional manhole depends on the weight of its cover. Locking-type manhole structures with a special locking mechanism were recently developed to prevent accidents such as stolen cover, away cover from a frame. The weight of the manhole structure can be reduced under structural safety because the locking force of a locking-type manhole is greater than the weight of the cover. A light-weight manhole cover is developed in this study by using a finite element stress analysis and the design of experiments. Static stress analysis and fracture experiments are also conducted to analyze the states of the initial product. The optimum light-weight manhole cover considering manufacturing molds is developed and tested. Consequently, the weight was found to reduce by 16%. In addition, the fracture load increased by 38%.

• Proceedings of the KSR Conference
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• 1999.11a
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• pp.566-573
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• 1999

This paper is the result of sensitivity analysis of derailment with respect to the selected suspension elements for the rail vehicle. Derailment phenominon has been explained by the derailment quotient. Thus, the sensitivity of derailment is suggested by a response surface model(RSM) which is a functional relationship between derailment quotient and characteristics of suspension elements. To summarize generation of RSM, we can introduce the procedure of sensitivity analysis as follows. First, to form a RSM, a experiment is performed by a dynamic analysis code, VAMPIRE according to a kind of the design of experiments(DOE). Second, RSM is constructed to a 1$\^$st/ order polynomial and then main effect fators are screened through the stepwise regression. Finally, we can see the sensitivity level through the RSM which only consists of the main effect factors and is expressed by the liner, interaction and quadratic effect terms.

• Steel and Composite Structures
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• v.27 no.2
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• pp.135-147
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• 2018

Quasi-static three-point bending tests on sandwich beams with expanded metal sheets as core were conducted. Relationships between the force and displacement at the mid-span of the sandwich beams were obtained from the experiments. Numerical simulations were carried out using ABAQUS/EXPLCIT and the results were thoroughly compared with the experimental results. A parametric analysis was performed using a Box-Behnken design (BBD) for the design of experiments (DOE) techniques and a finite element modeling. Then, the influence of the core layers number, size of the cell and, thickness of the substrates was investigated. The results showed that the increase in the size of the expanded metal cell in a reasonable range was required to improve the performance of the structure under bending collapse. It was found that core layers number and size of the cell was key factors governing the quasi-static response of the sandwich beams with lattice cores.

• Corrosion Science and Technology
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• v.20 no.3
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• pp.129-142
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• 2021

Effects of corrosion inhibitors (i.e., sodium nitrite, sodium hexametaphosphate, trimethylamine (TEA), sugar, and urea) on the corrosion resistance of carbon steel in CaCl₂ solution were investigated. The test solution was designed with response surface methodology of design of experiments (DOE) in the range of 0 ~ 50 ppm for NaNO₂, 0 ~ 200 ppm for (NaPO₃)₆, 0 ~ 2000 ppm for TEA, 0 ~ 3000 ppm for sugar, 0 ~ 200 ppm for urea with 3 wt% CaCl₂. The corrosion potential and the corrosion rate were measured with potentiodynamic polarization tests and analyzed statistically to find main effects of inhibitor concentrations and interactions between them. As a result, hexametaphosphate was the most effective compound in reducing the corrosion rate. Sugar also reduced the corrosion rate significantly possibly because it covered the surface effectively with a high molecular weight. The inhibiting action of sugar was found to be enhanced by adding trimethylamine into the solution. Nevertheless, trimethylamine did not appear to be effective in inhibiting corrosion by itself. However, urea and sodium nitrite showed almost no inhibition on corrosion resistance of steel.