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Effect of Pressure on Edge Delamination in Chemical Mechanical Polishing of SU-8 Film on Silicon Wafer

  • Park, Sunjoon;Im, Seokyeon;Lee, Hyunseop
    • Tribology and Lubricants
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    • v.33 no.6
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    • pp.282-287
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    • 2017
  • SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.

Effects of Synthetic Pseudoceramides on Sphingosine Kinase Activity in F9-12 Cells

  • Jin, You-Xun;Shin, Kyong-Oh;Park, Myung-Yong;Lee, Shin-Hee;Park, Byeong-Deog;Oh, Sei-Kwan;Yoo, Hwan-Soo;Lee, Yong-Moon
    • Biomolecules & Therapeutics
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    • v.19 no.1
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    • pp.134-139
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    • 2011
  • Sphingosine kinase (SPHK) has a central role to control cell death and cell proliferation, which is suggested as a sphingolipid rheostat by regulating the levels between ceramide and sphingosine 1-phosphate (S1P). Therefore, physiological regulators of SPHK will be a good candidate to develop a new targeted drug. For this purpose, a series of synthetic pseudoceramides were tested by SPHK assay either cell-based or cell-free system. K10PC-5 strongly inhibited SPHK, while K6PC-5 activated SPHK in cell-free system. Specifically, K6PC-5 activated SPHK under the co-treatment with $50\;{\mu}M$ dimethylsphingosine (DMS), a SPHK inhibitor. Collectively, we developed a simple SPHK assay system to find SPHK regulatory pseudoceramide compounds, K10PC-5 and K6PC-5 which may be useful to cancer treatment or immune regulation like FTY720, a synthetic sphingolipid mimetic compound.

HACCP원리에 적용 대량 급식 주방 레이아웃 및 기기 운영 방안

  • 정흥관
    • Proceedings of the Korean Journal of Food and Nutrition Conference
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    • 1998.06a
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    • pp.91-102
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    • 1998
  • 이제 HACCP가 무엇이며 왜 이것을 단체 급식소에 적용해야 할 것인가의 것은 더 이상 논의 과제가 아니다. 문제는 어떻게 HACCP 원리를 주방 동선 구성에 적용할 것이며 동시에 이 원리 기준에 적합한 주방 기계 선정 및 운영 절차는 무엇인가에 관한 하드웨어적 접근에 관심이 모여지고 있다. 작은 정부를 주장하는 메리랜드 주에서는 미국에서 최초로 새로운 조리 시설을 짓거나 전반적 보수공사 하는 모든 외식업체는 HACCP Plan을 제출한 후 통과된 경우에 한하여 공사 허가서를 내어주고 있다. 이로써 업체 종사원 스스로가 위생 상태를 점검 기록함으로 함으로 식중독 사고를 사전에 예방함과 동시에 공무원의 업체 방문을 최소화 하여 적은 인원으로 효율적인 주 정부 운영을 하고 있는 것이다. 또한 자발적으로 많은 외식 업체들이 마케팅 차원에서 경쟁 업체와의 차별화 정책의 일환으로 스스로 서둘러 HACCP를 도입하고 있다. 워싱턴 DC지역에서는 요식협회 스스로 HACCP를 도입한 외식업소에 "Extra Step"이라는 로고를 사용케 하고 있다. 이로써 보다 많은 고객들이 이 로고를 보고 해당 식당을 선택토록 광고의 효과를 더 하기 위함이다. 당연히 이와 같은 추세에 따라 유럽과 미국의 세계적인 주방 기기 메이커들도 미국의 National Sanitation Foundation(NSF), US Dept of Agriculture(USDA) 및 FDA 의 규제 흐름에 따라 상당히 빠른 속도로 HACCP 원리에 적합한 기능을 기계적으로 보완해 가고 있다. 최근 4/15/98, FDA가 대량 급식소를 포함한 주방의 HACCP 적용매뉴얼을 인터넷 web 주소 http://vm.cfsan.fda.gov/~dms/ hret-1.htm 통하여 발표한 내용과 미 육군의 식당 위생 기술 자료 TB MED 530 자료, 그리고 87년 12월 이후 (주)HRS 에서 기계 설치 사후 관리하면서 경험한 사항을 중심으로 다음 내용을 정리해 보고자 한다.리해 보고자 한다.

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Synthesis of Core-Shell Silica Nanoparticles with Hierarchically Bimodal Pore Structures

  • Yun, Seok-Bon;Park, Dae-Geun;Yun, Wan-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.467-467
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    • 2011
  • Reflecting the growing importance of nanomaterials in science and technology, controlling the porosity combined with well-defined structural properties has been an ever-demanding pursuit in the related fields of frontier researches. A number of reports have focused on the synthesis of various nanoporous materials so far and, recently, the nanomaterials with multimodal porosity are getting an emerging importance due to their improved material properties compared with the mono porous materials. However, most of those materials are obtained in bulk phases while the spherical nanoparticles are one of the most practical platforms in a great number of applications. Here, we report on the synthesis of the core-shell silica nanoparticles with double mesoporous shells (DMSs). The DMS nsnoparticles are spherical and monodispersive and have two different mesoporous shells, i.e., the bimodal porosity. It is the first example of the core-shell silica nanoparticles with the different mesopores coexisting in the individual nanoparticles. Furthermore, the carbon and silica hollow capsules were also fabricated via a serial replication process.

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On-line GC Analysis of Odorous VOC and S Gas Pollutant Levels in Ambient Air of a Residential Area at Ansan City, Korea (안산시 주거지역을 중심으로 한 환경대기 중 휘발성 유기화합물과 황계열 성분의 온라인 연속측정 연구)

  • Kim K.-H;Ju DW;Choi YJ;Hong YJ;Sa JH;Park JH;Jeon EC;Choi CR;Koo YS
    • Journal of Korean Society for Atmospheric Environment
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    • v.21 no.1
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    • pp.107-118
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    • 2005
  • In this study, the concentrations of major odorous compounds including reduced sulfur compounds (OMS, CS$_2$, and DMDS) and aromatic VOC (benzene, toluene, xylene, etc.) were measured continuously using an on-line GC analytical system. Our measurements were made from a residential area of Ansan sity during about two week period of October, 2004. The highest mean concentrations of Sand VOC were found as 56.9 pbb of DMS and 21.7 ppb of toluene, respectively. The results of this study generally show that the pollution levels for both types of chemicals are significant relative to previous measurement results reported from comparable sites, if the results are compared simply in terms of the magnitude of the measured concentration data. Moreover, when the relative importance of different compounds is compared in terms of the odor strength, it indicated that the contribution of reduced S compounds may be much more important than that of VOC in the study area.

A Design of Advanced Distribution Management System Based on IT/OT Convergence (IT/OT Convergence 기반의 Advanced Distribution Management System의 설계)

  • Lim, Il-Hyung;Lee, Seung-Joo;Park, Jong-Ho;Shin, Yong-Hak
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.65 no.5
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    • pp.753-759
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    • 2016
  • Power automation system to operate power distribution systems can be distinguished by distribution SCADA with remote monitoring and control; and distribution automation system with basic functions such as service restoration to the distribution SCADA; and distribution management system which is operated by various applications in order to enhance distribution system operation performance based on the distribution automation system. In the technological change, a technical boundary of information technology (IT) and operation technology (OT) is being blurred by that new concepts such as interoperability. In addtion, IT/OT convergence has been proposed by the improvement of ICT and power system technology. At the viewpoint, advanced distribution management system (ADMS) to have the new concepts and to increase distribution system operation efficiency through global information and functions from the other systems has been proposed. In order to implement the ADMS, IT and OT have to be employed together on the ADMS; and the concept-based IT/OT convergence concept has been presented. Therefore, this paper introduces ADMS and IT/OT convergence and proposes a design of IT/OT convergence based ADMS system design with configurations and functions.

Establishment Status of the Korea Ocean Satellite Center and GOCI-Data Distribution System (해양위성센터 구축 현황 및 GOCI 자료배포시스템 소개)

  • Yang, Chan-Su;Bae, Sang-Soo;Han, Hee-Jeong;Cho, Seong-Ick;Ahn, Yu-Hwan
    • Proceedings of the KSRS Conference
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    • 2009.03a
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    • pp.367-370
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    • 2009
  • 한국해양연구원에서는 2009년 발사 예정인 통신해양기상위성(COMS: Communication, Ocean and Meteorological Satellite)의 해색센서인 정지궤도 해양위성(GOCI: Geostationary Ocean Color Imager) 데이터의 수신, 처리, 배포를 위한 해양위성센터(KOSC: Korea Ocean Satellite Center)를 구축하고 있다. 2005년 "해양위성센터 구축사업"의 시작으로, 전파 수신 환경 등의 조건을 고려하여, 안산에 위치한 한국해양연구원 본원으로 해양위성센터의 위치를 최종 확정하여 구축을 진행하고 있다. 2009년 3월 현재 수신시스템(GDAS: GOCI Data Aquisition System), 자료전처리시스템(IMPS: Image Pre-processing System), 자료처리시스템(GDPS: GOCI Data Processing System), 자료관리 시스템(DMS: Data Management System), 통합감시제어시스템(TMC: Total Management & Controlling System), 기관간 자료교환시스템(EDES: External Data Exchange System) 등이 구축 완료되었고, 위성자료 배포시스템(DDS: Data Distribution System)을 구축하고 있다. 고용량 데이터의 원활한 전송을 위한 데이터센터를 비롯하여 사용자관점에서의 시스템 구축을 추진하고 있으며, 위성 발사 후 사용자 등록을 시작할 계획이다.

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Development of an Extended EDS Algorithm for CAN-based Real-Time System (CAN기반 실시간 시스템을 위한 확장된 EDS 알고리즘 개발)

  • Lee, Byong-Hoon;Kim, Dae-Won;Kim, Hong-Ryeol
    • Proceedings of the KIEE Conference
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    • 2001.07d
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    • pp.2369-2373
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    • 2001
  • Usually the static scheduling algorithms such as DMS (Deadline Monotonic Scheduling) or RMS(Rate Monotonic Scheduling) are used for CAN scheduling due to its ease with implementation. However, due to their inherently low utilization of network media, some dynamic scheduling approaches have been studied to enhance the utilization. In case of dynamic scheduling algorithms, two considerations are needed. The one is a priority inversion due to rough deadline encoding into stricted arbitration fields of CAN. The other is an arbitration delay due to the non-preemptive feature of CAN. In this paper, an extended algorithm is proposed from an existing EDS(Earliest Deadline Scheduling) approach of CAN scheduling algorithm haying a solution to the priority inversion. In the proposed algorithm, the available bandwidth of network media can be checked dynamically by all nodes. Through the algorithm, arbitration delay causing the miss of their deadline can be avoided in advance. Also non real-time messages can be processed with their bandwidth allocation. The proposed algorithm can achieve full network utilization and enhance aperiodic responsiveness, still guaranteeing the transmission of periodic messages.

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Application of Data Processing Technology on Large Clusters to Distribution Automation System (대용량 데이터 처리기술을 배전자동화 시스템에 적용)

  • Lee, Sung-Woo;Ha, Bok-Nam;Seo, In-Yong;Jang, Moon-Jong
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.60 no.2
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    • pp.245-251
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    • 2011
  • Quantities of data in the DMS (Distribution management system) or SCADA (Supervisory control and data acquisition) system is enormously large as illustrated by the usage of term flooding of data. This enormous quantity of data is transmitted to the status data or event data of the on-site apparatus in real-time. In addition, if GIS (Geographic information system) and AMR (Automatic meter reading), etc are integrated, the quantity of data to be processed in real-time increases unimaginably. Increase in the quantity of data due to addition of system or increase in the on-site facilities cannot be handled through the currently used Single Thread format of data processing technology. However, if Multi Thread technology that utilizes LF-POOL (Leader Follower -POOL) is applied in processing large quantity of data, large quantity of data can be processed in short period of time and the load on the server can be minimized. In this Study, the actual materialization and functions of LF POOL technology are examined.

Study on Magnetic Behavior of Zn1-xMnxO Films Grown on Si and α-Al2O3 Substrates by Sol-gel Method and Powders

  • Kim, Young-Mi;Park, Il-Woo
    • Journal of the Korean Magnetic Resonance Society
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    • v.12 no.1
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    • pp.26-32
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    • 2008
  • We report on the ferromagnetic characteristics of $Zn_{1-x}Mn_xO$ films (x = 0.3) prepared by sol-gel method on the silicon and (0001) ${\alpha}-Al_2O_3$ substrates at the annealing temperature of 700$^{\circ}C$. Magnetic measurements show that Curie temperature ($T_C$) and the coercive field ($H_C$) for the film on the silicon are about 32 K and about 275 Oe, while those for that on the sapphire are about 32 K and 425 Oe, respectively. Energy dispersive spectroscopy and transmission electron microscopy measurements suggest that ferromagnetic precipitates originated by manganese oxide compound formed at the interfaces of the both substrates may be responsible for the observed ferromagnetic behavior of the films. Electron paramagnetic resonance study of the powders up to the concentration of x=0.15 supports the result.