• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.173-174
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• 2006

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.188-189
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• 2015

본 연구에서는 저온에서 증착이 가능한PECVD법을 이용하여 아르곤 가스 및 아세틸렌 가스 비율에 따른 기계적 구조적 특성 확인을 확인 후 공정압력 변화 실험을 통하여 DLC코팅의 특성을 확인하였다. 기계적 특성을 확인하기 위하여 나노인덴터를 이용하여 경도 및 탄성률을 측정하였으며, ball-on disk를 이용하여 마찰계수를 확인하였다. 각 샘플들의 부식 저항 특성을 확인하기 위하여 $1mole\;H_2SO_4+2ppm\;HF$ 분위기의 전해질 내에서 동전위 분극시험을 통한 내식성 테스트를 하였으며, 구조적 특성은 라만분광법을 이용하여 박막내의 sp3와 sp2 bond의 비율 변화를 확인하였다.

• KSTLE International Journal
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• v.8 no.2
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• pp.26-28
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• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• Journal of Ocean Engineering and Technology
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• v.25 no.6
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• pp.60-65
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• 2011

A low temperature plasma carburizing process was performed on AISI 316L austenitic stainless steel to achieve an enhancement of the surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of the processing temperatures on the surface hardened layer during low temperature plasma carburizing in order to obtain the optimum processing conditions. The expanded austenite (${\gamma}_c$) phase, which contains a high saturation of carbon (S phase), was formed on all of the treated surfaces. Precipitates of chromium carbides were detected in the hardened layer (C-enriched layer) only for the specimen treated at $550^{\circ}C$. The hardened layer thickness of ${\gamma}_c$ increased up to about $65{\mu}m$ with increasing treatment temperature. The surface hardness reached about 900 $HK_{0.05}$, which is about 4 times higher than that of the untreated sample (250 $HK_{0.05}$). A minor loss in corrosion resistance was observed for the specimens treated at temperatures of $300^{\circ}C{\sim}450^{\circ}C$ compared with untreated austenitic stainless steel. In particular, the precipitation of chromium carbides at $550^{\circ}C$ led to a significant decrease in the corrosion resistance. A diamond-like carbon (DLC) film coating was applied to improve the wear and friction properties of the S phase layer. The DLC film showed a low and stable friction coefficient value of about 0.1 compared with that of the carburized surface (about 0.45). The hardness and corrosion resistance of the S phase layer were further improved by the application of such a DLC film.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.155-155
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• 2016

DLC (Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소 DLC 로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 고온안정성, 높은 경도 (30~80 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용되고 있으며, 최근에는 고내구성을 보유하면서 전기적 특성을 가지는 기능성 DLC막의 요구가 증대하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source (FVAS)를 자체적으로 개발하여 연구를 수행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통한 음극에서 기판으로 이동하는 카본이온의 에너지 및 flux 변화를 통해 ta-C 막의 전기적, 기계적 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0 ~ 20 V 조건으로 진행하였으며, 물성 평가는 경도 (Hardness), 마찰계수, 전기적 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라 10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인한 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만 분석법을 통해 증명하였다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.4
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• pp.123-130
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• 2013

Zirconia is well known in industrial applications for its mechanical characteristics. DLC (diamond-like carbon) have high elastic modulus, high electric resistivity, high dielectric constant, high wear resistance, low friction coefficient, bio compatibility, chemically inert and thermally stable. Because of all these physical and chemical properties these types of coatings have become key procedure for thin coating. Friction coefficient of DLC films is already evaluated and the current work is a further advancement by calculating the fracture toughness and wear resistance of these coatings. In the present study DLC thin film coatings are developed on $ZrO_2$ alloy surface using Plasma Enhanced Chemical Vapor Deposition (PECVD) method. Vicker hardness test is employed and it was concluded that, DLC coatings increase the Vickers hardness of ceramics.

• Journal of the Korean institute of surface engineering
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• v.36 no.2
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• pp.148-154
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• 2003

Short ($\tau$=40 $mutextrm{s}$) and high-voltage ($U_{sub}$=2~8 kV) negative substrate bias pulses were used to assist pulsed magnetron sputtering DLC films deposition. Space- and time-resolved probe measurements of the plasma characteristics have been performed. It was shown that in case of high-voltage substrate bias spatial non-uniformity of the magnetron discharge plasma density greatly affected DLC deposition process. By Raman spectroscopy it was found that maximum percentage of s $p^3$-bonded carbon atoms (40 ~ 50%) in the coating was attained at energy $E_{c}$ ~700 eV per deposited carbon atom. Despite rather low diamond-like phase content these coatings are characterized by good adhesion due to ion mixing promoted by high acceleration voltage. Short duration of the bias pulses is also important to prevent electric breakdowns of insulating DLC film during its growth.wth.

• Journal of the Korean Vacuum Society
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• v.14 no.3
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• pp.165-170
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• 2005

There is an increasing interest in developing novel coating to improve the blood compatibility of medical implants. Diamond-like carbon(DLC) and titanium nitride(TiN) films have been proposed as potential biomedical coatings due to their chemical k physical properties and moderate biocompatibility. To study the correlation between blood compatibility and physical properties of the films, the fibrinogen adsorption on the surface as well as morphology & wettability were investigated. The quantity of fibrinogen adsorption are Tower for TiN than DLC, which correlates with a higher hydrophilicity of TiN film. To reduce the quantity of fibrinogen adsorption on the film, plasma treatment and furnace annealing were performed, respectively. With the use of oxygen plasma and furnace annealing, the amount of fibrinogen adsorption on TiN film was remarkably reduced, while there was no decrease of the quantity with DLC.

• Journal of the Semiconductor & Display Technology
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• v.2 no.1
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• pp.1-5
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• 2003

Plasma generator based on non-self-sustained low-pressure arc discharge has been examined as a tool for deposition of highly-adhesive hydrogenated amorphous diamond-like carbon(DLC) films. Since the discharge is stable in wide range of gas pressures and currents, this plasma source makes possible to realize both plasma-immersion ion implantation(PIII) and plasma-immersion ion deposition(PIID) in a unified vacuum cycle. The plasma parameters were measured as functions of discharge current. Discharge and substrate bias voltage parameters have been determined for the PIII and PIID modes. For PIID it has been demonstrated that hard and well-adherent DLC coating are produced at 200-500 eV energies per deposited carbon atom. The growth rates of DLC films in this case are about 200-300 nm/h. It was also shown that short(∼60$\mu\textrm{s}$) high-voltage(> 1kV) substrate bias pulses are the most favorable for achieving high hardness and good adhesion of DLC, as well as for reducing of residual intrinsic stress are.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.200-200
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• 2009