• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2016.11a
• /
• pp.103.1-103.1
• /
• 2016

플라즈마 코팅은 진공 및 진공에서 발생된 플라즈마 대기압 플라즈마를 이용하여 기판에 코팅하는 기술을 의미하는 것으로 최근 다양한 코팅 소스 및 물질계가 개발되면서 그 응용을 넓혀가고 있다. 플라즈마 코팅은 물리증착 및 화학증착에서 주로 이용하고 있는데 플라즈마를 이용하는 대표적인 기술로 스퍼터링과 음극아크증착, 플라즈마 화학증착 등이 있다. 스퍼터링은 기존의 마그네트론 스퍼터링에 비해 이온화율이 대폭 향상된 HIPIMS(High Power Impulse Magnetron Sputtering) 기술이 개발되면서 경질피막 제조의 신기술로 자리 잡고 있고 음극아크증착의 경우는 다양한 Filtered 아크소스가 개발되면서 후막 고경도 DLC(Diamond-like Carbon) 등 기존의 방법으로 달성할 수 없었던 코팅층의 제조가 가능하게 되었다. 최근 수명 및 물성이 크게 향상된 소재들이 다양하게 개발되었는데 이들 소재는 가공이 잘 되지 않는 난삭재가 대부분이어서 기존의 가공 Tool이 한계를 드러내고 있다. 이에 따라 난삭재 가공용 새로운 Tool에 대한 수요가 크게 증가하고 있는데 이에 대응하는 유력한 방법 중의 하나가 플라즈마를 이용한 경질코팅이다. 이렇듯 플라즈마 코팅은 난삭재가공용 Tool을 비롯하여 기계나 자동차 부품의 고경도, 저마찰 코팅, 기능성 코팅 등 다양한 분야에 응용을 확대하고 있다. 본 논문에서는 플라즈마 코팅의 최신 기술개발 동향과 그 응용에 대해 고찰하고자 한다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1997.07a
• /
• pp.163-164
• /
• 1997

Indium thin oxide(ITO) 가 코팅된 유리위에 Ion beam spputtering depposition (IBSD)방법으로 다이아몬드상 카본(Diamond-like Carbon ; DLC)을 합성하여 전계방출 특성을 조사하였다. 박막의 합성은 이온 빔 전압을 1250 V, 전류를 20mA인 상태에스 합성 시간만을 조절하여 박막의 두계에 대한 변화를 주었다. 두께에 대한 전류-전압 특성은 두께가 약 750$\AA$인 경우 전기장이 10V/$\mu$m 일 때 $ extrm{cm}^2$당 1.3mA 정도의 전류를 방출하였으며 두께가 얇은 경우와 아주 두꺼운 경우에는 오히려 방출전류가 감소하는 경향을 보여 주었다.

• Tribology and Lubricants
• /
• v.24 no.3
• /
• pp.122-128
• /
• 2008

To reduce the friction losses and the wear amounts in the piston assembly two methods were proposed. One is the modification of surface profile of the skirt part. The surface coating is another method to protect the sliding surfaces. To modify the profile of the skirt surfaces the surfaces were ground to have three different shapes of profiles. Also, several coatings, such as graphite, TiN, and $MoS_2$, and DLC, were used to protect the surfaces of the piston skirts. The specimens of the skirt and the cylinder bores were tested with the reciprocating wear tester. SAE 5W40 engine oil was used in boundary lubrication regime. Among several coatings the graphite and DLC coatings were very effective to reduce the friction forces. Especially, DLC film represented much better tribological performances than the others. The friction coefficient of the graphite coating was the lowest, but the graphite coating was not effective to protect the surfaces.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.12 no.4
• /
• pp.123-130
• /
• 2013

Zirconia is well known in industrial applications for its mechanical characteristics. DLC (diamond-like carbon) have high elastic modulus, high electric resistivity, high dielectric constant, high wear resistance, low friction coefficient, bio compatibility, chemically inert and thermally stable. Because of all these physical and chemical properties these types of coatings have become key procedure for thin coating. Friction coefficient of DLC films is already evaluated and the current work is a further advancement by calculating the fracture toughness and wear resistance of these coatings. In the present study DLC thin film coatings are developed on $ZrO_2$ alloy surface using Plasma Enhanced Chemical Vapor Deposition (PECVD) method. Vicker hardness test is employed and it was concluded that, DLC coatings increase the Vickers hardness of ceramics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.272-272
• /
• 2008

Diamond-like carbon (DLC) 박막은 높은 경도, 내 마모성, 화학적 안정성, 전기적 절연성, 높은 광 투과성을 가지고 있어, 공구강, 광학렌즈 및 플라스틱의 보호 코팅을 위해 응용되어진다. 하지만, DLC 박막은 높은 잔류응력으로 adhesion이 떨어진다는 단점이 있다. 따라서 본 연구에서는 전처리가 13.56MHz 150W RF플라즈마 화학기상 증착(RF-PECVD) 법을 통한 DLC 박막의 합성에 어떤 영향을 미치는지 알아보기 위해, $H_2$ (80 sccm), $O_2$ (10 sccm), $N_2$ (20 sccm)의 다른 가스를 사용하여 전처리를 하였다. DLC 박막 합성 후, 특성은 Raman, scratch test, contact angle 등의 측정을 통하여 분석되었다.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.23 no.4
• /
• pp.392-397
• /
• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.7
• /
• pp.508-516
• /
• 1998

Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

• Journal of the Korean Vacuum Society
• /
• v.14 no.3
• /
• pp.165-170
• /
• 2005

There is an increasing interest in developing novel coating to improve the blood compatibility of medical implants. Diamond-like carbon(DLC) and titanium nitride(TiN) films have been proposed as potential biomedical coatings due to their chemical k physical properties and moderate biocompatibility. To study the correlation between blood compatibility and physical properties of the films, the fibrinogen adsorption on the surface as well as morphology & wettability were investigated. The quantity of fibrinogen adsorption are Tower for TiN than DLC, which correlates with a higher hydrophilicity of TiN film. To reduce the quantity of fibrinogen adsorption on the film, plasma treatment and furnace annealing were performed, respectively. With the use of oxygen plasma and furnace annealing, the amount of fibrinogen adsorption on TiN film was remarkably reduced, while there was no decrease of the quantity with DLC.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2015.05a
• /
• pp.72-72
• /
• 2015

최근 비철소재 가공용 공구의 이형성 향상 코팅 및 자동차 부품의 고온 환경에서 사용할 수 있는 코팅으로 유망한 수소가 없는 비정질 다이아몬드 카본 막 (Non-Hydrogen Diamond Like Carbon films : ta-C)을 양산할 수 있는 코팅 시스템에 대한 연구 결과를 발표하고자 한다. 본 시스템은 Diamet-600이라고 하며 ta-C의 처리폭은 350 mm, 직경 450 mm 8축 공자전 치구에서 400nm/h의 증착률을 가지며, 막의 경도는 최대 65GPa을 달성하였다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2009.02a
• /
• pp.113.1-113.1
• /
• 2009