• Title/Summary/Keyword: DI water system

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A Study on the Estimation of the GHGs Emissions to the Reuse of De-ionized Water Production Process in Semiconductor Factory (반도체 생산용 초순수 제조공정의 농축수 재이용에 따른 온실가스 발생량 평가에 관한 연구)

  • Han, Jong-Min;Chung, Jin-Do;Kim, San
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.9
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    • pp.518-525
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    • 2018
  • In the 21st century, human beings are becoming increasingly concerned about greenhouse gas emissions as the environment changes due to climate change become serious. The temperature of Korea has risen by approximately $1.5^{\circ}C$ from 1904 to 2000, and the climate is changing gradually to a subtropical climate. As a result, the frequency of floods and droughts increases, so that the water available to humans is decreasing every year, and the cost of using city water is rising every year. The reuse of wastewater that is normally abandoned is inevitable. This study examined the monthly data for 6 months of operation by installing a reuse system of concentrated wastewater (Re R/O System) that is generated during the process of manufacturing de-ionized water (DI-Water System) used in semiconductor processing. As a result of the survey, the city water supply saved approximately $2,767m^3$ per month. The average annual greenhouse gas emissions was $1,329.07kg-CO_2$ per month due to the electricity consumption of the water reuse system. On the other hand, because of the reduction in city water supply, the average monthly average of $918.64kg-CO_2$ was reduced, and the greenhouse gas emissions were increased to $410.43kg-CO_2$ per month. If it improves some processes in the water reuse system, the amount of greenhouse gas emissions can be reduced by an average of $254.41kg-CO_2$ per month.

Design of Smart Controller for New Generation Semiconductor Wet Station (차세대 반도체 세정장비용 스마트 제어기 설계)

  • 홍광진;백승원;조현찬;김광선;김두용;조중근
    • Proceedings of the Korean Institute of Intelligent Systems Conference
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    • 2004.04a
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    • pp.149-152
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    • 2004
  • Generally the wafer is increased by 300mm. We are desired that the wafer is prevented from pollutions of metal contaminant on surface of wafer. We have to develop new wafer cleaning process of IC Manufacturing that can reduce DI water and chemical by removal of the wafer cleaning process step. Moreover, it is difficult to control temprature and density of chemical in spite of rapidly increasing automation of system. We design smart module controller for new generation of semiconductor wet station with intelligent algorithm using data that is taken by computer simulation for optimal system.

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Transport behavior of PVP (polyvinylpyrrolidone) - AgNPs in saturated packed column: Effect of ionic strength and HA (포화 컬럼실험에서 이온강도 변화 및 유기물질 출현에 의한 PVP로 코팅된 은나노 입자의 거동 연구)

  • Heo, Jiyong;Han, Jonghun;Her, Namguk
    • Journal of Korean Society of Water and Wastewater
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    • v.30 no.3
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    • pp.263-270
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    • 2016
  • Recent Engineered nanoparticles were increasingly exposed to environmental system with the wide application and production of nanomaterials, concerns are increasing about their environmental risk to soil and groundwater system. In order to assess the transport behavior of silver nanoparticles (AgNPs), a saturated packed column experiments were examined. Inductively coupled plasma-mass spectrometry and a DLS detector was used for concentration and size measurement of AgNPs. The column experiment results showed that solution chemistry had a considerable temporal deposition of AgNPs on the porous media of solid glass beads. In column experiment, comparable mobility improvement of AgNPs were observed by changing solution chemistry conditions from salts (in both NaCl and $CaCl_2$ solutions) to DI conditions, but in much lower ionic strength (IS) with $CaCl_2$. Additionally, the fitted parameters with two-site kinetic attachment model form the experimental breakthrough curves (BTCs) were associated that the retention rates of the AgNPs aggregates were enhanced with increasing IS under both NaCl and $CaCl_2$ solutions.

Calibration and Sensitivity Analysis of LRCS Rainfall-Runoff Model(I): Theory (LRCS 강우-유출 모형의 보정 및 민감도 분석(I) : 이론)

  • O, Gyu-Chang;Lee, Gil-Seong;Lee, Sang-Ho
    • Journal of Korea Water Resources Association
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    • v.32 no.6
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    • pp.657-664
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    • 1999
  • This paper introduced the basic theory of LRCS(Linear Reservoir and Channel System) rainfall runoff model proposed by Korean researchers(Lee and Lee, 1995), and discussed the change of model output according to objective functions in sensitivity analysis and calibration process of model. It proposed "hat" matrix and affluence measures for affluence analysis of parameters in calibration, and investigated relationship between change of model output according to error propagation in parameter estimation, and sensitivity of model output according to variance of model output and change of parameters. Accuracy of parameter estimates was known by analysis of sensitivity coefficient, diagonal element $h_i$ and $D_i$._i$.

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Characteristics of Adsorption on the RO Membrane Surface by Coagulants Types (응집제 종류에 따른 RO막 표면 흡착 특성)

  • Jeong, Youngmi;Park, Chanhyuk;Lee, Sanghyup;Kweon, Jihyang
    • Journal of Korean Society of Water and Wastewater
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    • v.21 no.4
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    • pp.477-483
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    • 2007
  • A coagulation process for RO (reverse osmosis) membrane pretreatment system was an effective technology to remove colloidal and particulate matters. However, coagulant residuals from the pretreatment process may negatively affect RO membrane performance. The bench-scale coagulant exposure study was performed to investigate the effect of their residual on adsorbed mass which related to the membrane performance. Coagulant addition in this study ranged from 0 to 5mg/L ferric chloride, alum, and 2mg/L cationic polymer(poly-di-methyldiallyl ammonium chloride) as coagulant aids. This results showed that adsorbed mass is not significantly increased during short-time period, however, accumulated mass of coagulants on the membrane surface is significantly increased during long-time experimental period. The effect of pH on coagulants adsorption characteristics was significantly differed due to the electrostatic repulsive interactions between soluble coagulants and membrane surface charge. This data suggest that the RO membrane performance of drinking water treatment plant could be decreased by adsorption of residual coagulants when applied for the coagulant pretreatment process.

Effect of Coolants and Metal Bumps on the heat Removal of Liquid Cooled Microchannel System (액랭식 마이크로채널 시스템 내 냉매와 범프의 열 제거 효과에 대한 연구)

  • Won, Yonghyun;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.2
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    • pp.61-67
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    • 2017
  • As transistor density increases rapidly, a heat flux from IC device rises at fast rate. Thermal issues raised by high heat flux cause IC's performance and reliability problems. To solve these thermal management problems, the conventional cooling methods of IC devices were reached their thermal limit. As a result, alternative cooling methods such as liquid heat pipe, thermoelectric cooler, thermal Si via and etc. are currently emerging. In this paper microchannel liquid cooling system with TSV was investigated. The effects of 2 coolants (DI water and ethylene glycol 70 wt%) and 3 metal bumps (Ag, Cu, Cr/Au/Cu) on cooling performance were studied, and the total heat flux of various coolant and bump cases were compared. Surface temperature of liquid cooling system was measured by infrared microscopy, and liquid flowing through microchannel was observed by fluorescence microscope. In the case of ethylene glycol 70 wt% at $200^{\circ}C$ heating temperature, the total heat flux was $2.42W/cm^2$ and most of total heat flux was from liquid cooling effect.

Mixture Toxicity Test of Ten Major Chemicals Using Daphnia magna by Response Curve Method (독성 반응곡선을 이용한 수계 주요 오염물질의 혼합독성평가)

  • Ra, Jin-Sung;Kim, Ki-Tae;Kim, Sang-Don;Han, Sang-Guk;Chang, Nam-Ik;Kim, Yong-Seok
    • Journal of Korean Society of Environmental Engineers
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    • v.27 no.1
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    • pp.67-74
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    • 2005
  • Toxicity tests were performed to evaluate the feasibility of application with prediction models to 10 mixture chemicals (chloroneb, butylbenzylphthalate, pendimethaline, di-n-butylphthalate, di-iso-butylphthalate, diazinon, isofenphos, 2-chlorophenol, 2,4,6-trichlorophenol and p-octylphenol) detected in effluents from wastewater treatment plants (WWTPs). Ten chemicals were selected in the basis of their toxicities to Daphnia magna and the concentrations in effluents measured by GC/MS. Three models including concentration addition (CA), independent action (IA) and effect summation (ES) were employed for the comparison of the predicted and the observed mortality of D. magna exposed to 10 mixture chemicals for 48 hours. With a comparative study it was ineffective to predict the mortality through the CA and the ES prediction model, while the IA prediction model showed a high correlation($r^2\;=\;0.85$). Moreover, the ES model over-estimated the toxicity observed by bioassay experiments about five-fold. Consequently, IA model is a reasonable tool to predict the mixture toxicity of the discharging water from WWTPs.

Development of Multi Sample Array System Based on Pneumatic Valve (공압식 미세밸브를 이용한 다중유체 배열장치 개발)

  • Kim, Chul Min;Park, Seo Jung;Kim, Gyu Man
    • Journal of the Korean Society for Precision Engineering
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    • v.34 no.1
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    • pp.59-63
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    • 2017
  • We present a multi-sample array device based on a pneumatic system. Solenoid valves were used to control a micro valve in a pneumatic system. The use of a compressor together with a vacuum pump ensured that one outlet could supply both compression and vacuum pressure. The multi-sample array device was fabricated using conventional photolithography and PDMS casting. The device was composed of a multiplexer, sample array, and rinsing. The multiplexer could control four sample solutions injecting into the sample array chamber. Sample solution not arrayed was removed by DI-water from the rinsing inlet. To prevent trapping of microbubbles in the channel during injection of sample solution into the device, surfactant was added in PDMS solution to serve as a hydrophilic surface treatment. As a result, the device could be used as a sample array for 64 cases, using four samples and three columns of three chambers.

A Study on Design of Intelligent Wet Station for Semiconductor (지능형 반도체 세정장비 설계에 관한 연구)

  • Kim Jong Won;Hong Kwagn Jin;Cho Hyun Chan;Kim Kwang Sun;Kim Doo Yong;Cho Jung Keun
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.3 s.12
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    • pp.29-33
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    • 2005
  • As the integrated devices become more and more sophistcated, the diameter of wafers increased up to 300 mm and strict level of cleaning is necessary to remove the particulates on the surface of wafer. Therefore we need a new type of wet-station which can reduce DI water and chemical in the cleaning process. Moreover, it is important to control the temperature and the concentration of chemical in the wet-station. In the conventional chemical supply system, it is difficult not only to fit the mixing rate of chemicals in cleaning process, but also to fit the quantity and temperature. Thus, we propose a new chemicals supply system, which overcomes above problems by the analysis of fluid and thermal transfer on chemical supply system.

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Use of Carbon Nanotube Electrode and Squarewave Anodic Stripping Voltammetry for the Detection of Lead Heavy Metal (납 중금속 검출을 위한 탄소나노튜브 전극 및 네모파 양극 벗김 전압전류법 이용)

  • Choi, Changkun;Seok, Jonghyuk;Kwon, Yongchai
    • Applied Chemistry for Engineering
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    • v.23 no.5
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    • pp.505-509
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    • 2012
  • In this study, we investigate the use of new carbon nanotube paste electrode (CNPE) for promoting the detection of lead (Pb) heavy metal in the a drinkable water, which negatively affects human brain and nerve system. For the evaluations, CNPE is served as a working electrode, while sensitivity and limit of detection (LOD) of Pb are measured in DI and tap water based electrolytes using squarewave anodic stripping voltammetry (SWASV). As a result of that, in the 25~150 ppb range of $Pb^{2+}$ ions, its sensitivity and calculated LOD are $12.85\;{\mu}A/{\mu}M$ and 26 ppb in DI water based 0.1 M $H_{2}SO_{4}$ electrolyte while they are $10.36\;{\mu}A/{\mu}M$ and 38 ppb electrolytes respectively. In addition, experimentally measured LOD values of Pb are 4 ppb and 10 ppb in the two water electrolytes. The stripping of $Pb^{2+}$ ion is also controlled by surface reaction. Our experimental data are then compared with those of other already published references. With the comparison, it is proved that our electrode outperforms other electrodes in terms of the sensitivity and LOD of trace Pb metal.