• 제목/요약/키워드: Current conditioning

검색결과 360건 처리시간 0.027초

반도체 웨이퍼 제조공정 클린룸 구조, 공기조화 및 오염제어시스템 (Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process)

  • 최광민;이지은;조귀영;김관식;조수헌
    • 한국산업보건학회지
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    • 제25권2호
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    • pp.202-210
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    • 2015
  • Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

설비공학 분야의 최근 연구 동향: 2008년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research: A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2008)

  • 한화택;최창호;이대영;김서영;권용일;최종민
    • 설비공학논문집
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    • 제21권12호
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    • pp.715-732
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    • 2009
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2008. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) Research trends in thermal and fluid engineering have been surveyed in the categories of general fluid flow, fluid machinery and piping, new and renewable energy, and fire. Well-developed CFD technologies were widely applied in developing facilities and their systems. New research topics include fire, fuel cell, and solar energy. Research was mainly focused on flow distribution and optimization in the fields of fluid machinery and piping. Topics related to the development of fans and compressors had been popular, but were no longer investigated widely. Research papers on micro heat exchangers using nanofluids and micro pumps were also not presented during this period. There were some studies on thermal reliability and performance in the fields of new and renewable energy. Numerical simulations of smoke ventilation and the spread of fire were the main topics in the field of fire. (2) Research works on heat transfer presented in 2008 have been reviewed in the categories of heat transfer characteristics, industrial heat exchangers, and ground heat exchangers. Research on heat transfer characteristics included thermal transport in cryogenic vessels, dish solar collectors, radiative thermal reflectors, variable conductance heat pipes, and flow condensation and evaporation of refrigerants. In the area of industrial heat exchangers, examined are research on micro-channel plate heat exchangers, liquid cooled cold plates, fin-tube heat exchangers, and frost behavior of heat exchanger fins. Measurements on ground thermal conductivity and on the thermal diffusion characteristics of ground heat exchangers were reported. (3) In the field of refrigeration, many studies were presented on simultaneous heating and cooling heat pump systems. Switching between various operation modes and optimizing the refrigerant charge were considered in this research. Studies of heat pump systems using unutilized energy sources such as sewage water and river water were reported. Evaporative cooling was studied both theoretically and experimentally as a potential alternative to the conventional methods. (4) Research papers on building facilities have been reviewed and divided into studies on heat and cold sources, air conditioning and air cleaning, ventilation, automatic control of heat sources with piping systems, and sound reduction in hydraulic turbine dynamo rooms. In particular, considered were efficient and effective uses of energy resulting in reduced environmental pollution and operating costs. (5) In the field of building environments, many studies focused on health and comfort. Ventilation. system performance was considered to be important in improving indoor air conditions. Due to high oil prices, various tests were planned to examine building energy consumption and to cut life cycle costs.

설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013)

  • 이대영;김사량;김현정;김동선;박준석;임병찬
    • 설비공학논문집
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    • 제26권12호
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    • pp.605-619
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    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.

공기조화, 냉동 분야의 최근 연구 동향 - 1998년 1999년 학회지 논문에 대한 종합적 고찰 - (Recent Progress in Air Conditioning and Refrigeration Research - A Review of papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 1998 and 1999 -)

  • 이재헌;김광우;김병주;이재효;김우승;조형희;김민수
    • 설비공학논문집
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    • 제12권12호
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    • pp.1098-1125
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    • 2000
  • A review on the papers published in the Korean Journal of Air-Conditioning and Refrigerating Engineering in 1998 and 1999 has been done. Focus has been put on current status of research in the aspect of heating, cooling, ventilation, sanitation and building environment. The conclusions are as follows. 1) A review of the recent studies on fluid flow, turbomachinery and pipe-network shows that many experimental investigations are conducted in applications of impingement jets. Researches on turbulent flows, pipe flows, pipe-networks are focused on analyses of practical systems and prediction of system performance. The results of noise reduction in the turbomachinery are also reported. 2) A review of the recent studies on heat transfer analysis and heat exchanger shows that there were many papers on the channel flow with the application to the design of heat exchanger in the heat transfer analysis. Various experimental and numerical papers on heat exchanger were also published, however, there were few papers available for the analysis of whole system including heat exchanger. 3) A review of the recent studies on heat pump system have focused on the multi-type system and the heat pump cycle to utilize treated sewage as the heat source. The defrosting and the frosting behaviors in the fin-tube heat exchanger is experimentally examined by several authors. Several papers on the ice storage cooling system are presented to show the dynamic simulation program and optimal operation conditions. The study on the micro heat pipes for the cooling of high power electronic components is carried out to examine the characteristics of heat and mass transfer processed. In addition to these, new type of separate thermosyphon is studied experimentally. 4) The recent studies on refrigeration/air conditioning system have focused on the system performance and efficiency for new alternative refrigerants. New systems operating with natural refrigerants are drawing lots of attention. In addition to these, evaporation and condensation heat transfer characteristics of traditional and new refrigerants are investigated for plain tubes and also for microfin tubes. Capillary tubes and orifice are main topics of research as expansion devices and studies on thermophysical properties of new refrigerants and refrigerant/oil mixtures are widely carried out. 5) A review of the recent studies on absorption cooling system shows that numerous experimental and analytical studies on the improvement of absorber performance have been presented. Dynamic analysis of compressor have been performed to understand its vibration characteristics. However research works on tow-phase flow and heat transfer, which could be encountered in the refrigeration system and various phase-change heat exchanger, were seemed to be insufficient. 6) A review of recent studies on duct system shows that the methods for circuit analysis, and flow balancing have been presented. Researches on ventilation are focused on the measurement of ventilation efficiency, and variation of ventilation efficiency with ventilation methods by numerous experimental and numerical studies. Furthermore, many studies have been conducted in real building in order to estimate indoor thermal environments. Many research works to get some information for cooling tower design have been performed but are insufficient. 7) A review on the recent studies on architectural thermal environment and building mechanical systems design shows that thermal comfort analysis is sitting environment, thermal performance analysis of Korean traditional building structures., and evaluation of building environmental load have been performed. However research works to improve the performance of mechanical system design and construction technology were seemed to be insufficient.

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온도보상회로를 부착한 개방형 전류측정기의 특성 (Characteristics of Open-Loop Current Sensor with Temperature Compensation Circuit)

  • 구명환;박주경;차귀수;김동희;최종식
    • 한국산학기술학회논문지
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    • 제16권12호
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    • pp.8306-8313
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    • 2015
  • 개방형 전류측정기는 DC 모터 콘트롤러, AC 가변 콘트롤러, UPS(Uninterruptible Power System)에 주로 사용되며 최근 신재생 에너지의 성장과 전력망의 스마트 그리드화로 인하여 활용성이 점차 확대되고 있다. 이러한 신재생 에너지의 성장으로 관련 핵심기술의 보유여부가 중요해지고 있으며 대부분 수입에 의존하고 있는 개방형 전류측정기의 국산화 및 관련 기술의 확보를 필요로 한다. 본 논문에서는 일반 산업용 개방형 전류측정기의 제작과정과 특성을 측정한 결과를 기술하였다. 개방형 전류측정기를 구성하는 C형 철심의 공극자장분포 해석 및 형상 설계, 홀센서의 선정 및 특성시험, 정전류 전원공급회로와 신호처리회로의 회로설계 과정을 기술하며 DIP(Dual In-line Package) type과 SMD (Surface Mount Device) type의 100A급 개방형 전류측정기를 제작하고 특성을 측정했다. 제작된 전류측정기로 0~100A 범위에서 통전 실험을 실시한 했고 직류전류와 60Hz의 교류전류에서 특성을 측정한 결과 정밀도 오차 2% 이내, 선형도 오차 2% 이내의 성능을 만족하였다. 또한 부 특성 온도계수를 갖는 NTC(Negative Temperature Coefficient) 서미스터를 이용한 온도보상회로를 사용하여 $-35{\sim}100^{\circ}C$의 범위에서 온도보상 효과를 확인하였다.

The Improvement of Junction Box Within Photovoltaic Power System

  • Sun, Ki-Ju;Cheon, Min-Woo
    • Transactions on Electrical and Electronic Materials
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    • 제17권6호
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    • pp.359-362
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    • 2016
  • In the PV (Photovoltaic) power system, a junction box collects the DC voltage generated from the PV module and transfers it to the PCS (power conditioning system). The junction box prevents damage caused by the voltage difference between the serially connected PV modules and provides convenience while repairing or inspecting the PV array. In addition, the junction box uses the diode to protect modules from the inverse current when the PV power system and electric power system are connected for use. However, by using the reverse blocking diode, heat is generated within the junction box while generating electric power, which decreases the generating efficiency, and causes short circuit and electric leakage. In this research, based on the purpose of improving the performance of the PV module by decreasing the heat generation within the junction box, a junction box with a built-in bypass circuit was designed/manufactured so that a certain capacity of current generated from the PV module does not run through the reverse blocking diode. The manufactured junction box was used to compare the electric power and heating power generated when the circuit was in the bypass/non-bypass modes. It was confirmed that the electric power loss and heat generation indicated a decrease when the circuit was in the bypass mode.

Analysis on Harmonic Loss of IPMSM for the Variable DC-link Voltage through the FEM-Control Coupled Analysis

  • Park, Hyun Soo;Jeung, Tae Chul;Lee, Jae Kwang;Lee, Byoung Kuk
    • Journal of Electrical Engineering and Technology
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    • 제12권1호
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    • pp.225-229
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    • 2017
  • This paper describes the loss analysis based on load conditions of the air conditioning compressor motors using variable dc-link voltage. The losses of PMSM (Permanent Magnet Synchronous Motor) should be analyzed by the PWM (Pulse Width Modulation) output of inverter. The harmonic loss by the PWM cannot consider that using the current source analysis of the inverter. In addition, when the voltage of dc-link is variable with the condition of variable speed and load conditions in motor, the losses of motor are also changeable, however it is hard to analyze those losses by only electromagnetic finite element method (FEM). Therefore, this paper proposes the analysis method considering the carrier frequency of the inverter and the varying state of the dc-link voltage through the FEM-control coupled analysis. Using proposed analysis method, additional core loss and eddy current loss of permanent magnet caused by PWM could be analyzed. Finally, the validity of the proposed analysis method is verified through the comparison the result of coupled analysis with experiment.

Analysis of the Operating Point and Fault Current Contribution of a PEMFC as Distributed Generation (DG)

  • Moon, Dae-Seong;Kang, Gi-Hyeok;Chung, Il-Yop;Won, Dong-Jun
    • Journal of Electrical Engineering and Technology
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    • 제4권3호
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    • pp.382-388
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    • 2009
  • Recently, hydrogen energy has been anticipated to change the paradigm of conventional power systems because it can expand sustainable energy utilization and conceptually provide remarkable flexibility to power system operation. Since hydrogen energy can be converted to electric energy through fuel cells, fuel cells are expected to play an important role in the future hydrogen economy. In this paper, a Proton Exchange Membrane Fuel Cell (PEMFC) is modeled as an equivalent circuit and its steady-state characteristics investigated using the model. PEMFCs can be connected to power systems through power conditioning systems, which consist of power electronic circuits, and which are operated as distributed generators. This paper analyzes the effects of the characteristics of the PEMFC internal voltages and investigated the dynamic responses of the PEMFC under fault conditions. The results show that the fault current contribution of the PEMFC is different from those of conventional generators and is closely related to its operating point.

전기화학적 소독에 의한 Legionella pneumophila 불활성화 (Inactivation of Legionella pneumophila by Electrochemical Disinfection)

  • 박영식;김동석
    • 한국물환경학회지
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    • 제23권5호
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    • pp.613-619
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    • 2007
  • This study has carried out a performance of dimensionally stable anode for the purpose of disinfection of Legionella pneumophila in water. Three kinds of electrode were prepared by plating and thermal deposition, which were coated by the oxides of Pt, Ru and Ir on Ti metal surface, respectively. The order of disinfection performance for Legionella pneumophila was Ru/Ti > Ir/Ti > Pt/Ti. Free Cl and $ClO_2$ generation of Ir/Ti electrode was higher than that of two electrodes. However, the concentrations of generated $H_2O_2$ and $O_3$ of the Ru/Ti electrode were highest among the three electrodes. The higher NaCl concentration was, the more oxidants was generated and disinfection effect was increased. However, optimum NaCl dosage was 0.0125% due to the regulation on the conductivity and $Cl^-$ concentration for the cooling water quality of air conditioning and refrigeration equipment. With the increase of current, oxidants was more generated and following disinfection effect was increased. The increase of electrode distance reduced oxidants generation due to the low electric power, and their disinfection effect was decreased accordingly.

Power Conditioning System for a Grid Connected PV Power Generation Using a Quasi-Z-Source Inverter

  • Park, Jong-Hyoung;Kim, Heung-Geun;Nho, Eui-Cheol;Chun, Tae-Won
    • Journal of Power Electronics
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    • 제10권1호
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    • pp.79-84
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    • 2010
  • This paper presents a grid connected photo-voltaic system using a quasi-Z-source inverter (QZSI) for power stage reduction. The power stage can be reduced because of an additional shoot-through stage which is a characteristic of QZSI. Therefore, by utilizing a QZSI the system's efficiency can be increased. In this paper, for applying a QZSI to a PV system, control methods such as maximum power point tracking (MPPT), point of common coupling (PCC) current control and PWM are studied and verified through simulation and experiment. In order to explain the above controllers, the characteristics of a QZSI are first analyzed. Then the MPPT control technique with a modified P&O method, the PCC current control for the regulation of the dc-link capacitor voltage and the PWM methods for the proposed system are explained. The feasibility of the proposed algorithm is verified through simulation and experiment with a 3kW system.