• 제목/요약/키워드: Cu(Mg) alloy

검색결과 186건 처리시간 0.024초

Cu(Mg) alloy 금속배선에 의한 TiN 확산방지막의 특성개선 (A study on the improvement of TiN diffusion barrier properties using Cu(Mg) alloy)

  • 박상기;조범석;조흥렬;양희정;이원희;이재갑
    • 한국진공학회지
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    • 제10권2호
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    • pp.234-240
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    • 2001
  • 본 연구에서는 Mg을 첨가한 Cu-alloy에 의해 TiN의 확산방지능력을 향상시키고자 하였다. Cu(Mg) 박막은 대기노출시킨 TiN박막위에 증착되었으며 열처리시 Cu 박막내의 Mg은 TiN의 표면에 있는 산소와 반응하여 매우 얇은(~100 $\AA$) MgO를 형성하게되고 MgO에 의해 TiN의 확산방지능력은 Cu(4.5 at.%Mg)의 경우 $800^{\circ}C$까지 향상됨을 알 수 있었다. 그러나 Cu(Mg) a]toy는 TiN위에서 접착특성이 좋지 않기 때문에 TiN을 $O_2$plasma 처리하였으며 $O_2$ plasma 처리후 $300^{\circ}C$ 진공열처리를 통해 접착력이 크게 향상되는 것을 알 수 있었다. 이는 $O_2$ plasma 처리에 의해 TiN표면에 Mg과 반응할 수 있는 산소의 양이 증가하는 데 기인하며 이에 따라 Mg의 계면이동이 크게 증가되어 치밀한 MgO가 형성됨을 확인하였다. 그리고 $O_2$ plasma 처리시 RF power를 증가시키면 계면으로 이동하는 Mg의 양이 오히려 감소하였고 이것은 TiN의 표면이 $TiO_2$로 변하여 Mg과 결합할 수 있는 산소의 양이 상대적으로 감소하였기 때문인 것으로 생각된다. 또한 접착층으로서 Si을 50$\AA$ 증착하여 접착력을 크게 향상시켰으며 Si 증착에 의한 TiN의 확산방지능력은 감소되지 않는 것을 알 수 있었다.

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Cu 및 Si첨가에 의한 Mg-Zn합금계의 입자미세화 및 시효경화 (Grain Refining and Age Hardening of Mg-Zn Alloys by Addition of Cu and Si)

  • 황진환;남태현;안인섭;김유경;허경철;허보영
    • 한국재료학회지
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    • 제5권6호
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    • pp.682-689
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    • 1995
  • Mg-Zn합금계의 입자미세화를 위하여 0.5-6 wt.% 조성범위의 Cu 및 Si를 첨가하였다. 합 잉곳트는 4 $\times$ $10^{-4}$ Torr의 진공의 BN을 내벽에 바른 석영관내에서 제조하였다. 제조된 합금을 435$^{\circ}C$에서 8시간 용체화처리한 후 결정립크기와 경도를 측정하였다. 측정결과 Mg-6wt.%Zn합금의 입자미세효과는 Cu가 2wt.%첨가될때, Si은 1.5wt.%가 첨가될 때가 최적의 조건이었다. Mg-6wt.% Zn과 Mg-6wt.%Zn-2wt.%Cu 및 Mg-6wt.%Zn-1.5wt.%Si합금을 시효열처리하여 시효거동을 조사하였다. 입자미세화에 의한 경도증가효과는 Mg-Zn-Cu합금계에서 크게 나타났으며 시효에 의한 경도증가 효과는 Mg-Zn-또합금계에서 크게 나타났다.

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Galvanic Corrosion of AZ31 Mg Alloy Contacting with Copper

  • Phuong, Nguyen Van;Moon, Sungmo
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.151.1-151.1
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    • 2017
  • This work studied the corrosion behavior of AZ31 Mg alloy galvanically coupled with Cu during immersion in 0.1 and 0.5 M NaCl solutions by in-situ observation and galvanic corrosion current measurement using a zero resistance ammeter. The corrosion behavior of AZ31 Mg alloy was also studied by salt spray test. The average galvanic corrosion density during 2 h immersion in 0.1 NaCl solution was found to decrease as an exponential function with increasing the surface area ratios between AZ31:Cu or with increasing the distance between AZ31 and Cu. The corrosion of electrodeposited Cu on AZ31 Mg alloy was concentrated at the area next to Cu (about 5 mm for immersion test and 2 mm for salt spray test) and pitting corrosion was accelerated at the area beyond the severely corroded area by the galvanic coupling effect.

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Al-Si-Mg-Cu 합금의 자동차 엔진 사용 온도에서 열처리 조건에 따른 열확산도 변화 (Change in Thermal Diffusivity of Al-Si-Mg-Cu Alloy According to Heat Treatment Conditions at Automotive Engine Operating Temperature)

  • 최세원
    • 한국재료학회지
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    • 제31권11호
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    • pp.642-648
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    • 2021
  • The precipitation effect of Al-6%Si-0.4%Mg-0.9%Cu-(Ti) alloy (in wt.%) after various heat treatments was studied using a laser flash device (LFA) and differential scanning calorimetry (DSC). Solid solution treatment was performed at 535 ℃ for 6 h, followed by water cooling, and samples were artificially aged in air at 180 ℃ and 220 ℃ for 5 h. The titanium-free alloy Al-6%Si-0.4%Mg-0.9%Cu showed higher thermal diffusivity than did the Al-6%Si-0.4%Mg-0.9%Cu-0.2%Ti alloy over the entire temperature range. In the temperature ranges below 200 ℃ and above 300 ℃, the value of thermal diffusivity decreased with increasing temperature. As the sample temperature increased between 200 ℃ and 400 ℃, phase precipitation occurred. From the results of DSC analysis, the temperature dependence of the change in thermal diffusivity in the temperature range between 200 ℃ and 400 ℃ was strongly influenced by the precipitation of θ'-Al2Cu, β'-Mg2Si, and Si phases. The most important factor in the temperature dependence of thermal diffusivity was Si precipitation.

저온 주조법을 응용한 Al-Zn-Mg-Cu 합금의 반응고 성형 (Semi-Solid Forming of Al-Zn-Mg-Cu Alloy Applying Low-Temperature Casting Process)

  • 김정민;김기태;정운재
    • 한국주조공학회지
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    • 제22권2호
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    • pp.82-88
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    • 2002
  • Al-5.5Zn-2.5Mg-l.5Cu semi-solid slurry was prepared by cooling the liquid metal with a low superheat to a solid and liquid co-existing temperature. Relatively round solid particles could be obtained in the slurry through the simple process. The prepared slurry was deformed into the metallic mold by a press and the mechanical properties of obtained specimens were investigated. Mold filling ability of the alloy slurry was also investigated and compared with that of A356 alloy. Al-Zn-Mg-Cu alloy showed lower mold filling ability than A356 alloy probably because small amount of eutectic phase is present and the heat of fusion generated during solidification is smaller than that of A356 alloy.

Cu-5% Sn합금(合金)의 주조조직(鑄造組織)에 미치는 도형재(塗型材)의 영향(影響)에 관(關)한 연구(硏究) (Effect of Mold Coatings on the Macrostructures of Cu-5%Sn Alloy)

  • 최영승;최창옥
    • 한국주조공학회지
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    • 제5권3호
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    • pp.19-26
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    • 1985
  • This study has been carried out to examine into wettability of Cu-5%Sn alloy in $Al_2O_3$, MgO, $SiO_2$ and graphite, respectively and investigated into the change in macrostructure of Cu-5%Sn alloy according to kind and mixing rate of mold-coating. The results obtained from the experiment are summerized as follows; 1. Cu Cu-5%Sn alloy, wettabilities of $Al_2O_3$ and MgO were good, on the other hand, wettabilities of $SiO_2$ and graphite were bad. 2. The fine equiaxed zone was created because of the role of $Al_2O_3$ and MgO as preferential nucleation sites. 3. Notwithstanding change of mixing rate of $SiO_2$ in mold coating the equixed zone was not created. 4. The area of equiaxed zone was varied according to mixing rate in the case of using $Al_2O_3$ and MgO in mold-coating.

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Cu(Mg) alloy의 비저항에 영향을 미치는 인자에 대한 연구 (A study on the factors affecting Cu(Mg) alloy resistivity)

  • 조흥렬;조범석;이재갑;박원욱;이은구
    • 한국표면공학회지
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    • 제32권6호
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    • pp.695-702
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    • 1999
  • We have explored the factors affecting the resistivity of Cu (Mg) alloy, which was prepared by sputtering. The results show that the resistivity is a function of Mg content, annealing temperature, annealing time, and Cu-alloy thickness. Addition of Mg to copper increases the resistivity through solute scattering. In addition, increasing Mg content promotes the interfacial reaction between Mg and SiO$_2$ to produce the free silicon and the generated free silicon dissolves into copper, resulting in a significant increase of resistivity. Furthermore, increasing oxidation temperature rapidly decreases the resistivity at the initial stage of oxidation and then continues to increase the resistivity to the saturation value with increasing oxidation time. The saturation value depends on the residual Mg content and the thickness of the alloy. TEM and AES analyses reveal that dense, uniform MgO grows to the limiting thickness of about $150\AA$. However, interfacial MgO does not show the limiting thickness, instead continues to grow until Mg is completely exhausted. From these facts, we proposed the maximum available Mg content needed to from the dense MgO on the surface and suppress the excessive interfacial reaction.

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Mg-6Zn-xCu 합금의 열적 특성에 미치는 Cu 첨가의 영향 (Effect of Cu Addition on Thermal Properties of Mg-6Zn-xCu alloys)

  • 예대희;김현식;강민철;정해용
    • 한국주조공학회지
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    • 제35권4호
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    • pp.67-74
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    • 2015
  • In this study, Mg-Zn alloys are investigated in terms of their thermal properties after an addition of Cu. Al element is added to improve the mechanical properties and castability in general case. However, it was excluded here because it significantly decreases the thermal conductivity. On the other hand, Zn was added as a major element, which had less influence on reducing the conductivity and can complement the mechanical properties as well. Cu was also added, and it improved the heat transfer characteristics as the amount was increased. The composition ranges of Zn and Cu are 6 wt.% and 0~1.5 wt.%, respectively. Mg-6Zn-xCu alloy was prepared by a gravity casting method using a steel mold and then the thermal conductivity and the microstructure of the as-cast material were investigated. By measuring the density_(${\rho}$), specific heat_(Cp) and thermal diffusivity_(${\alpha}$), the thermal conductivity_(${\lambda}$) was calculated by the equation ${\lambda}={\rho}{\cdot}Cp{\cdot}{\alpha}$. As the amount of Cu increased in the Mg-6Zn-xCu alloy, the heat transfer characteristics were improved, resulting in a synergistic effect which is slow when the added Cu exceeds 1 wt.%. In order to investigate the relative thermal conductivity/emission of the Mg-6Zn-xCu alloy, AZ91 and AZ31 were experimentally evaluated and compared using a separate test equipment. As a result, the Mg-6Zn-1.5Cu alloy when compared to AZ91 showed improvements in the thermal conductivity ranging from 30 to 60% with a nearly 20% improvement in the thermal emission.

용탕 단조 Al-3.0 wt%Si 합금의 강도에 미치는 합금 원소 및 열처리 조건의 영향 (Effects of Alloying Element and Heat-Treatment Condition on the Strength of Squeeze-Casted Al-3.0 wt%Si Alloy)

  • 이학주;황재형;권해욱
    • 한국주조공학회지
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    • 제26권6호
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    • pp.249-257
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    • 2006
  • The effects of alloying element and the condition of heat-treatment on the strength of squeeze-cast Al-3.0 wt%Si alloy were investigated. The strength of the alloy without grain refinement was increased with increase Cu content upto 3.0 wt% and rather decreased beyond that. The tensile strength of the alloy with grain refinement increased with Cu content upto 3.0 wt% and not changed beyond that. The strength of the alloy without grain refinement increased with the Mg content. The tensile strength with grain refinement increased with the Mg content upto 0.50 wt% and then decreased beyond that. The strength of the grain refined alloy increased by individual and simultaneous additions of Cu and Mg and the maximum strength was obtained with Al-3.0 wt%Si-4.5 wt%Cu-0.50 wt%Mg alloy. The optimum heat-treatment condition for this alloy was obtained.