• 한국결정성장학회지
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• 제21권5호
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• pp.193-198
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• 2011

최근 사파이어 결정은 LED 응용부품에 사용되고 있고, CZ 성장공정은 고 품질의 사파이어 단결정을 성장시키기 위한 중요한 기술중의 하나이다. 고 품질의 단결정을 성장하기 위해서는 CZ 성장로 내부의 열 및 질량 전달현상의 제어가 필요하다. 본 연구에서는 유도 가열된 CZ 성장로에 대한 사파이어 결정의 성장공정을 FEM을 사용하여 수치적으로 분석하였다. 본 연구의 결과, 성장로의 rpm이 증가함에 따라 고온부는 도가니 표면에서 융액의 내부로 이동하고, 고-액 계면은 평편한 형태로 변화되는 것으로 분석되었다. 또한 성장된 결정의 고-액 계면은 초기에 형성된 결정의 shoulder 형상에 의해서도 영향을 받는 것으로 나타났다.

• 한국결정성장학회지
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• 제1권2호
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• pp.23-33
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• 1991

Mn-Zn Ferrite는 단결정을 성장하기 위하여 용융하는 동안 불균질 용융과 ZnO휘발의 고유특성을 갖는 재료이다. 그 결과로, 결정성장축을 따라 양이온의 분포가 불균일 하게 된고 또한 기존의 Bridgman법에서는 도가니내에서 용융대가 장시간 유지됨으로써 백금입자가 결정안으로 침입하게된다. 이들은 훼라이트의 자기적 성질을 저하시키는 성질을 갖고 있다. 그러나 새로운 성장법에서는 이러한 단점들을 극복하고 양질의 단결정을 얻기 위하여 결정성장 인자들의 관계를 고찰하였으며 그 인자들은 다음과 같다 : 도가니내의 melt 높이, melt의 표면장력과 밀도, 계면에서의 melt거동, 도가니와 고액계면의 형상, 원료공급속도, 결정성장속도. 아울러, 성장된 결정의 조성을 분석하였을 때 초기조성과 비교하여 $\textrm{Fe}_2\textrm{O}_3$ 1.5 mol%, MnO, Zn 2.0 mol% 이내로 조성 변동은 각각 억제되었고 성장결정면 (110)에서 화확적인 etching 법을 이용하여 광학현미경을 통해 결정내부등을 관찰하였으며, 자기적 특성등을 측정하였다.

• 한국결정성장학회지
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• 제7권1호
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• pp.27-40
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• 1997

The heat in Czochralski method is transfered by all transport mechanisms such as convection, conduction and radiation and convection is caused by the temperature difference in the molden pool, the rotations of crystal or crucible and the difference of surface tension. This study delvelops the simulation model of Czochralski growth by using the finite difference method with fixed grids combined with new latent heat treatment model. The radiative heat transfer occured in the surfce of the system is treated by calculating the view factors among surface elements. The model shows that the flow is turbulent, therefore, turbulent modeling must be used to simulate the transport phenomena in the real system applied to 8" Si single crystal growth process. The effects of a cusp magnetic field imposed on the Czochralski silicon melt are studied by numerical analysis. The cusp magnetic field reduces the natural and forced convection due to the rotation of crystal and crucible very effectively. It is shown that the oxygen concentration distribution on the melt/crystal interface is sensitively controlled by the change of the magnetic field intensity. This provides an interesting way to tune the desired O concentration in the crystal during the crystal growing.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1997년도 Proceedings of the 12th KACG Technical Meeting and the 4th Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.187-196
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• 1997

Oxygen transfer in silicon melts during crystal growth under vertical magnetic fields is investigated numeriaclly and experimentally. A three-dimensional numerical simulation, including melt convection and oxygen transport, is carried out to understand how oxygen transfers in the melt under magnetic fields. Oxygen concentrations in single silicon crystals grown from the melt under these magnetic fields are experimentally measured by using an infrared absoption technique. The rusults obtained are compared to results from a numerical simualtion. An anomalous increase is observed in the oxygen concentration of the grown crystals under a magnetic field of about 0/03 tesla. The cause of this anomaly is identified as Benard instability, since the temperature at the bottom of the crucible is higher than that at interface. When the temperature at the bottom is decreased, the Benard cell can be removed, and a monotonical decrease in the oxygen concentration in the single crystals can be observed.

• 대한기계학회논문집B
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• 제20권10호
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• pp.3322-3333
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• 1996

A numerical analysis has been conducted to investigate a modified floating-zone crystal growth process in which most of the melt surface is covered with a heated ring. The crystal rod is not only pulled downward but rotated around its axisymmetric line during crystal growth process in order to produce the flat interface of crystal growth and the single crystal growth of NaNO3 is considered in 6mm diameter. The present study is made from a full-equation-based analysis considering a pulling velocity in all of solid and liquid domains and both of solid-liquid interfaces are tracked simultaneously with a governing equation in each domain. Numerical results are mainly presented for the comparison of the surface shape of rotational crystal rod with that of no-rotational crystal rod and the effects of revolution speeds of the crystal rod. Results show that the rotation of crystal rod produces more its flat surface. In addition, the shape of crystal growth near the centerline is more concaved with the increase in the revolution speed of crystal rod. The flow pattern and temperature distribution is analyzed and presented in each case. As the pulling velocity of crystal rod is increasing, the free surface of the melt below the heated ring is enlarged due to the crystal interface migrating downward.

• 대한기계학회논문집B
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• 제20권3호
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• pp.988-1004
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• 1996

The characteristics of flow and oxygen concentration are numerically studied in Czochralski 8" silicon crystal growing process considering radiative heat transfer. The analysis of net radiative heat flux on all relevant surfaces shows growing crystal affects the heater power. Furthermore, the variation of the radiative heat flux along the crystal surface in the growing direction is confirmed and should be a cause of thermal stress and defect of the crystal. The calculated distributions of temperature and, heat flux along the wall boundaries including melt/crystal interface, free surface and crucible wall indicate that the frequently used assumption of the thermal boundary conditions of insulated crucible bottom and constant temperature at crucible side wall is not suitable to meet the real physical boundary conditions. It is necessary, therefore, to calculate radiative heat transfer simultaneously with the melt flow in order to simulate the real CZ crystal growth. If only natural convection is considered, the oxygen concentration on the melt/crystal interface decreases and becomes uniform by the application of a cusp magnetic filed. The heater power needed also increases with increasing the magnetic field. For the case of counter rotation of the crystal and crucible, the magnetic field suppresses azimutal flow produced by the crucible rotation, which results in the higher oxygen concentration near the interface.

• 한국결정성장학회지
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• 제2권2호
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• pp.77-82
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• 1992

FZ법에 의한 결정성장에 있어서 용융대는 고액 계면의 장력에 의해 유지되고 상.하부의 고체봉 사이에 위치하고 있다. 따라서, 용융대의 표면에서는 온도와 농도 차이에 의해 표면장력의 구배가 발생하고 있는 marangoni 대류의 구동력으로 작용한다. 본 연구에서 정상상태의 결정성장시는 결정의 가장자리 영역에서의 Solute 농도는 결정내부 보다도 높아지게 되고 전위의 분포도 불규칙하여 지며, void나 기포 침투, Secondary phase의 생성 및 미소균열등의 결함 발생 확률이 계면부근에서 높아지는 결과를 알 수 있었다. 이는 고액성장 계면이 marangoni 대류에 의하여 이 영역에서 온도의 국부적인 변동에 의해 불규칙하여 지게 되기 때문이라 사료된다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.139-156
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• 1996

The phase field model is becoming the model of choice for the theoretical study of the morphologies of crystals growth from the melt. This model provides an alternative approach to the solution of the classical (sharp interface) model of solidification by introducing a new variable, the phase field, Ø, to identify the phase. The variable Ø takes on constant values in the bulk phases and makes a continuous transition between these values over a thin transition layer that plays the role of the classically sharp interface. This results in Ø being governed by a new partial differential equation(in addition to the PDE's that govern the classical fields, such as temperature and composition) that guarantees (in the asymptotic limit of a suitably thin transition layer) that the appropriate boundary conditions at the crystal-melt interface are satisfied. Thus, one can proceed to solve coupled PDE's without the necessity of explicitly tracking the interface (free boundary) that would be necessary to solve the classical (sharp interface) model. Recent advances in supercomputing and algorithms now enable generation of interesting and valuable results that display most of the fundamental solidification phenomena and processes that are observed experimentally. These include morphological instability, solute trapping, cellular growth, dendritic growth (with anisotropic sidebranching, tip splitting, and coupling to periodic forcing), coarsening, recalescence, eutectic growth, faceting, and texture development. This talk will focus on the fundamental basis of the phase field model in terms of irreversible thermodynamics as well as it computational limitations and prognosis for future improvement. This work is supported by the National Science Foundation under grant DMR 9211276

• 한국세라믹학회지
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• 제29권7호
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• pp.539-543
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• 1992

The continuous growth method was developed for Mn-Zn Ferrite single crystals. It is a new process that the polycrystalline MnχZn1-χFe2O4 raw materials are supplied continuously from the powder feeding system to the crucible heated by R.F. induction and melted in the crucible, and after the single crystals seed is attached to crucible's hole, the crystals are pulled downward with rotation. Growing the crystals by using the growth method different from the conventional Bridgman or Floating Zone method, we defined the factors having effect on the crystal growing through the pre-experiments. They are temperature distribution in the crucible, melt velocity according to its height, wettability between the crucible's bottom and melt. Therefore, Mn-Zn Ferrite single crystals were to be grown by attaining the appropriate melt height in the crucible, powder feeding rate, temperature gradient between the crucible and interface, crystal growing speed, and this method was confirmed to have possibility for single crystal growing.

• 한국결정성장학회지
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• 제19권5호
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• pp.215-222
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• 2009

Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the $KRISTMAG^{(R)}$ project inner heater-magnet modules(HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.