• 대한전기학회:학술대회논문집
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• 대한전기학회 1992년도 하계학술대회 논문집 B
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• pp.850-853
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• 1992

A cryogenic electron cyclotron resonance plasma etching system has been built to study wafer-temperature in the silicon etching characteristics. The wafer temperature was controlled from -150 to +30 $^{\circ}C$ during etching using the liquid nitrogen cooled helium gas. Although silicon was etched isotropically in $SF_6$ plasma at room temperatures, we found that it is possible to suppress the etch undercut in Si by reducing a substrate temperature without side wall passivation. In addition, the selectivity of silicon to photoresist was improved considerably at a low wafer temperature. Etch rates, anisotropy and selectivity to photo resist are measured as a function of the wafer temperature in the region of -125 $\sim$ 25$^{\circ}C$ and rf bias power of 20W $\sim$ 80W.

• 한국초전도저온공학회:학술대회논문집
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• 한국초전도저온공학회 2000년도 KIASC Conference 2000 / 2000년도 학술대회 논문집
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• pp.35-38
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• 2000

A preliminary design of gas-gp thermal switch is presented to reduce the cooldown time of superconducting system conduction-cooled by a two-stage refrigerator without liquid cryogens. The switch connects thermally the first and the second stages (ON) to take advantage of the larger refrigeration capacity at the first stage during the beginning period. After the cryogenic temperature is reached, the switch should isolate thermally the two stages (OFF) in order to reduce the heat leak to the cold end. In this paper, a new concept for the performance index is introduced to evaluate the reduction of the cooldown time and the increase of the cooling load at the same time. In addition, the design of a gas-gap switch is discussed as a closed container of several staggered concentric tubes filled with gas, which is frozen at low temperatures for the shut-off of heat without any mechanical actuation. Some of the detailed features in the design is quantitative investigated by the gas convection model in the continuum or the rarefied gas region.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2009년도 추계학술발표대회 논문집
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• pp.409-414
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• 2009

Since cryogens are stored at very low temperatures, the cryogenic storage systems are quite sensitive to heat leaks. Even though the vessel operated under sealed condition with vacuum insulation and reflective coatings are used, the heat leakage into the vessel is still unavoidable. Therefore, this paper concerns with numerical study of self-pressurization used to analysis the optimum design with the variation volume fraction, effect of heat flux and storage pressure of liquid nitrogen. The result shows that as the volume fraction increases, the pressure rise reduces and the relatively at atmosphere pressure is better than the higher one. In addition, higher heat flux leads the pressure rise increases faster than low one. The additional of heat pipe system to reduce the pressure rise rate also has been done. By this comparison, the optimum design for storage umbilical cord blood can be selected.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2011년도 제36회 춘계학술대회논문집
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• pp.279-282
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• 2011

가스 발생기 산화제 개폐 밸브에 사용되는 벨로우즈의 구조 해석 및 시험이 수행되었다. 해석은 상온 및 극저온에서 EJMA (Expansion Joint Manufacturing Association) 표준 및 상용 유한 요소 해석프로그램인 Abaqus v6.9를 이용하여 수행되었다. 스프링 강성, 응력 및 피로 수명 해석 결과들이 비교되었고 유한 요소 해석 결과에서 접촉 및 재질의 소성에 의한 영향을 살펴보았다.

• 한국초전도ㆍ저온공학회논문지
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• 제10권2호
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• pp.38-41
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• 2008

The relation between surface emissivity and temperature distribution is experimentally and analytically investigated for a conduction-cooled metal plate in vacuum. Experimental set-up consists of a rectangular metal plate placed vertically in a cryostat and thermally anchored to the coldhead of a GM cryocooler at the top. Temperature is measured at a number of locations over the plate with platinum resistors mounted on the plate. A parallel analysis on the balance of heat conduction through the plate and thermal radiation on its surface is performed to numerically calculate the temperature distribution having the same boundary conditions as experiment. By comparing the two results, an average emissivity of the plate is roughly estimated for different metal plates and different surface conditions. The estimated emissivity in present study is less than the listed values for highly polished stainless steel, and meets a fairly good agreement for oxidized copper surface.

• 한국초전도ㆍ저온공학회논문지
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• 제8권4호
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• pp.34-38
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• 2006

Cycle analysis was performed in order to find the optimum design point of the LNG Boil-off gas re-liquefaction system. Thermodynamic analysis revealed the system could be defined by three state variables. Thus the system performance could be described by the three cold endpoint temperatures of the three-pass heat exchanger. This enabled us to investigate the cycle performance in terms of the heat exchanger parameters. To get access to the cycle states of higher system performances, larger heat exchangers were found necessary. Also the thermal pinch in cryogenic heat exchangers was found to act as a limiting factor to the system performance.

• 한국초전도ㆍ저온공학회논문지
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• 제8권4호
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• pp.26-29
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• 2006

The study to be presented related on initial behavior of quench concerned with many considerations, such as epoxy impregnated coil, critical current density related on strain and temperature, winding effect and behavior of internal superconducting wire. Especially, the deformation behavior of coils under magnetic field and thermal contractions at cryogenic temperatures to be dealt with the analytical method related on Fracture Mechanics. From the results, we know that the strain by self weight contribute to epoxy cracking at the edge of deformed coils and the deformation behavior relate on epoxy cracking must be dealt with biaxial loading problem. Then, the epoxy crack on $r\theta-plane$ under biaxial loading have been propagated with inclined crack angle and joined superconducting wire. Also, we can explain transfer of epoxy crack propagation energy from epoxy resin to superconducting wire.

• Progress in Superconductivity
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• 제3권1호
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• pp.17-22
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• 2001

Practical implementation of the SFQ technology in most application requires more than single-chip-level circuit complexity. Multiple chips have to be integrated with a technology that is reliable at cryogenic temperatures and supports an inter-chip data transmission speed of tens of GHz. In this work, we have studied two basic issues in building large RSFQ circuits. The first is the reliable inter-chip SFQ pulse transfer technique using Multi-Chip-Module (MCM) technology. By noting that the energy contained in an SFQ pulse is less than an attojoule, it is not very surprising that the direct transmission of a single SFQ pulse through MCM solder bump connectors can be difficult and an innovative technique is needed. The second is the recycling of the bias currents. Since RSFQ circuits are dc current biased the large RSFQ circuits need serial biasing to reduce the total amount of current input to the circuit.

• 폴리머
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• 제24권2호
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• pp.245-251
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• 2000

에폭시 (EP) 수지와 폴리우레탄(PU) 으로 제조된 블렌드 시스템의 접촉각과 기계적 특성을 연구하였다. EP의 경화제로 20 phr의 DDM (4,4'-diamino diphenyl methane)이 사용되었으며 EP/PU의 함량은 100/0~100/60까지 변화시켰다. 접촉각은 Rame-Hart goniometer를 사용 하였으며 젖음액으로는 증류수와 diiodomethane을 사용하였다. 본 연구에서는 geometric 방법을 사용한 Owens-Wendt와 Wu's model이 블렌드 시스템의 표면 자유에너지를 알아보는데 사용되었다. 시편의 기계적 성질과 강인성은 임계 응력 세기 인자(critical stress intensity factor, $K_{IC}$)와 충격 강도 시험을 통하여 알아보았다. 그리고 특히 충격 강도는 상온과 극저온에서 알아보았다. 그 결과로서, 블렌드 시스템에 있어서 표면 자유에너지의 극성 요소는 저온에서 충격 강도를 증가시키는 PU의 함량에 크게 영향을 주었음을 알 수 있었다.

• 천문학회보
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• 제35권1호
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• pp.39.2-39.2
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• 2010

In this paper, I present the domestic development of near infrared camera systems for the ground telescope and the space satellite. These systems are the first infrared instruments made for astronomical observation in Korea. KASINICS (KASI Near Infrared Camera System) was developed to be installed on the 1.8m telescope of the Bohyunsan Optical Astronomy Observatory (BOAO) in Korea. KASINICS is equipped with a $512{\times}512$ InSb array enable L band observations as well as J, H, and Ks bands. The field-of-view of the array is $3.3'{\times}3.3'$ with a resolution of 0.39"/pixel. It employs an Offner relay optical system providing a cold stop to eliminate thermal background emission from the telescope structures. From the test observation, limiting magnitudes are J=17.6, H=17.5, Ks=16.1 and L(narrow)=10.0 mag at a signal-to-noise ratio of 10 in an integration time of 100 s. MIRIS (Multi-purpose InfraRed Imaging System) is the main payload of the STSAT-3 in Korea. MIRIS Space Observation Camera (SOC) covers the observation wavelength from $0.9{\mu}m$ to $2.0{\mu}m$ with a wide field of view $3.67^{\circ}{\times}3.67^{\circ}$. The PICNIC HgCdTe detector in a cold box is cooled down below 100K by a micro Stirling cooler of which cooling capacity is 220mW at 77K. MIRIS SOC adopts passive cooling technique to chill the telescope below 200K by pointing to the deep space (3K). The cooling mechanism employs a radiator, a Winston cone baffle, a thermal shield, MLI of 30 layers, and GFRP pipe support in the system. Opto-mechanical analysis was made in order to estimate and compensate possible stresses from the thermal contraction of mounting parts at cryogenic temperatures. Finite Element Analysis (FEA) of mechanical structure was also conducted to ensure safety and stability in launching environments and in orbit. MIRIS SOC will mainly perform the Galactic plane survey with narrow band filters (Pa $\alpha$ and Pa $\alpha$ continuum) and CIB (Cosmic Infrared Background) observation with wide band filters (I and H) driven by a cryogenic stepping motor.