• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.5-10
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• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• Composites Research
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• v.26 no.2
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• pp.129-134
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• 2013

The strength of adhesive joints employed in composite structures under cryogenic environments, such as LNG tanks, is affected by thermal residual stress generated from the large temperature difference between the bonding process and the operating temperature. Aramid fibers are noted for their low coefficient of thermal expansion (CTE) and have been used to control the CTE of thermosetting resins. However, aramid composites exhibit poor adhesion between the fibers and the resin because the aramid fibers are chemically inert and contain insufficient functional groups. In this work, electrospun meta-aramid nanofiber-reinforced epoxy adhesive was fabricated to improve the interfacial bonding between the adhesive and the fibers under cryogenic temperatures. The CTE of the nanofiber-reinforced adhesives were measured, and the effect on the adhesion strength was investigated at single-lap joints under cryogenic temperatures. The fracture toughness of the adhesive joints was measured using a Double Cantilever Beam (DCB) test.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.92-97
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• 2021

The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

• Progress in Superconductivity and Cryogenics
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• v.24 no.3
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• pp.47-51
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• 2022

With the innovative development of bio, pharmaceutical, and semiconductor technologies, it is essential to demand a next-generation transfer system that minimizes dust and vibrations generated during the manufacturing process. In order to develop dust-free and non-contact transfer systems, the high temperature superconductor (HTS) bulks have been applied as a magnet for levitation. However, sintered HTS bulk magnets are limited in their applications due to their relatively low critical current density (J_c) of several kA/cm² and low mechanical properties as a ceramic material. In addition, during cooling to cryogenic temperatures repeatedly, cracks and damage may occur by thermal shock. On the other hand, the bulk magnets made by stacked HTS tapes have various advantages, such as relatively high mechanical properties by alternate stacking of the metal and ceramic layer, high magnetic levitation performance by using coated conductors with high J_c of several MA/cm², consistent superconducting properties, miniaturization, light-weight, etc. In this study, we tried to fabricate HTS tapes stacked bulk magnets with 60 mm × 60 mm area and various numbers of HTS tape stacked layers for magnetic levitation. In order to examine the levitation forces of bulk magnets stacked with HTS tapes from 1 to 16 layers, specialized force measurement apparatus was made and adapted to measure the levitation force. By increasing the number of HTS tapes stacked layers, the levitation force of bulk magnet become larger. 16 HTS tapes stacked bulk magnets show promising levitation force of about 23.5 N, 6.538 kPa at 10 mm of levitated distance from NdFeB permanent magnet.

• Journal of Aerospace System Engineering
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• v.18 no.2
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• pp.71-78
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• 2024

During the initial thermal design process, determining the thermal effect of various design variables in a complex orbital thermal environment is time-consuming. To save time in the initial design phase, it is necessary to quickly derive optimal design parameters and predict the temperature. To address these challenges, Veritrek, a software specialized in optimal design using a reduced-order model (ROM), was released in 2018. In this paper, we utilized the Veritrek software to build a reduced-order model, conduct sensitivity analysis, and perform optimal design analysis for a graphite sheet-based cryogenic cooler thermal control system. The goal was to determine the optimal design values for the number of graphite sheet layers, radiator area, and thickness that would meet the allowable temperature of the cryogenic cooler.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.9
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• pp.4643-4651
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• 2013

In this study, we have surveyed the new technologies in the cryogenic distillation of ITER, equilibrium reactors and helium refrigeration cycle contained in the isotope separation system (ISS). We also have collected thermodynamic and transport properties for $H_2$, HD, $D_2$, HT, DT and $T_2$ components of which properties are not built in a general purpose chemical process simulators such as Aspen Plus and PRO/II with PROVISION. Verification works have been performed to compare between literature data and simulation results. For the simulation of ISS involving six hydrogen isotope components, four distillation columns and two equilibrium reactors are used for the separation of $D_2$ and DT from $T_2$.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2010.04a
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• pp.162-162
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• 2010

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.42-47
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• 2007

The characteristics of the tool system give many effects into the costs and qualities for the finished components. Therefore, a tool life is one of the important issues on cold forging industry. However, since variables related with tool life are many complicated, the studies for solution should be investigated by the systematic research approach. The shape and process changes of die, the hardness changes of material and the tolerance of dies to decrease the die stress are analyzed by the FEM software. The heat-treatment of tool material is investigated to improve the tool life. Deep cryogenic treatment of tool steel is very efficient to improve the wear resistance due to the fine carbide. And, it is investigated that the shape and dimension of tool give effect into both tool life and quality of forged product..

• Journal of Power System Engineering
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• v.9 no.2
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• pp.45-49
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• 2005

Liquefied natural gas takes up six hundredths of the volume of natural gas, which makes storage and transportation much easier. To send out natural gas via a pipeline network across the nation, high-pressure LNG pumps supply highly compressed LNG to high-pressure vaporization facilities. The Number of high-pressure LNG pumps determined the send-out amount in LNG receiving terminal. So it is main equipment at LNG production process and should be maintained on best conditions. In this paper, to find out the cause of high beat vibration at cryogenic pumps, vibration and motor current signal analysis have been performed. High vibration of cryogenic pumps could be reduced due to the modification of motor rotor.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.776-779
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• 2005

Liquefied Natural Gas takes up six hundredths of the volume of natural gas, which makes storage and transportation much easier. To send out natural gas via a pipeline network across the nation, high pressure LNG pumps supply highly compressed LNG to high-pressure vaporization facilities. The Number of high Pressure LNG pumps determined the send out amount in LNG receiving terminal. So it is main equipment at LNG production process and should be maintained on best conditions. In this paper, to find out the cause of high beat vibration at cryogenic pumps, vibration and motor current analysis have been performed. And high beat vibration of cryogenic pumps could be reduced due to the modification of motor rotor.