• 제목/요약/키워드: CrAlN

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Single-step 전자빔 묘화 장치를 이용한 Focusing Grating Coupler 제작 연구 (Fabrication technology of the focusing grating coupler using single-step electron beam lithography)

  • 김태엽;김약연;손영준;한기평;백문철;김해성;신동훈;이진구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.976-979
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    • 2002
  • A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control' writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm), To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and $0.5{\times}0.5mm^2$ area, respectively, This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolpution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

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제주도 지하수 내 바나듐의 산출 특성 (Occurrence of Vanadium in Groundwater of Jeju Island, Korea)

  • 현익현;윤성택;김호림;감상규
    • 한국환경과학회지
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    • 제25권11호
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    • pp.1563-1573
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    • 2016
  • The aim of this study was to evaluate the occurrence of vanadium in Jeju Island groundwater, focusing on the spatio-temporal patterns and geochemical controlling factors of vanadium. For this, we collected two sets of groundwater data: 1) concentrations of major constituents of 2,595 groundwater samples between 2008 and 2014 and 2) 258 groundwater samples between December 2006 and June 2008. The concentrations of groundwater vanadium were in the range of $0.2{\sim}71.0{\mu}g/L$ (average, $12.0{\mu}g/L$) and showed local enrichments without temporal/seasonal variation. This indicated that vanadium distribution was controlled by 1) the geochemical/mineralogical composition and dissolution processes of original materials (i.e., volcanic rock) and 2) the flow and chemical properties of groundwater. Vanadium concentration was significantly positively correlated with that of major ions ($Cl^-$, $Na^+$, and $K^+$) and trace metals (As, Cr, and Al), and with pH, but was negatively correlated with $NO_3-N$ concentration. The high concentrations of vanadium (>$15{\mu}g/L$) occurred in typically alkaline groundwater with high pH (${\geq}8.0$), indicating that a higher degree of water-rock interaction resulted in vanadium enrichment. Thus, higher concentrations of vanadium occurred in groundwater of $Na-Ca-HCO_3$, $Na-Mg-HCO_3$ and $Na-HCO_3$ types and were remarkably lower in groundwater of $Na-Ca-NO_3$(Cl) type that represented the influences from anthropogenic pollution.

Fabrication Technology of the Focusing Grating Coupler using Single-step Electron Beam Lithography

  • Kim, Tae-Youb;Kim, Yark-Yeon;Han, Gee-Pyeong;Paek, Mun-Cheol;Kim, Hae-Sung;Lim, Byeong-Ok;Kim, Sung-Chan;Shin, Dong-Hoon;Rhee, Jin-Koo
    • Transactions on Electrical and Electronic Materials
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    • 제3권1호
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    • pp.30-37
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    • 2002
  • A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

Elemental Composition of the Soils using LIBS Laser Induced Breakdown Spectroscopy

  • Muhammad Aslam Khoso;Seher Saleem;Altaf H. Nizamani;Hussain Saleem;Abdul Majid Soomro;Waseem Ahmed Bhutto;Saifullah Jamali;Nek Muhammad Shaikh
    • International Journal of Computer Science & Network Security
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    • 제24권6호
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    • pp.200-206
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    • 2024
  • Laser induced breakdown spectroscopy (LIBS) technique has been used for the elemental composition of the soils. In this technique, a high energy laser pulse is focused on a sample to produce plasma. From the spectroscopic analysis of such plasma plume, we have determined the different elements present in the soil. This technique is effective and rapid for the qualitative and quantitative analysis of all type of samples. In this work a Q-switched Nd: YAG laser operating with its fundamental mode (1064 nm laser wavelength), 5 nanosecond pulse width, and 10 Hz repetition rate was focused on soil samples using 10 cm quartz lens. The emission spectra of soil consist of Iron (Fe), Calcium (Ca), Titanium (Ti), Silicon (Si), Aluminum (Al), Magnesium (Mg), Manganese (Mn), Potassium (K), Nickel (Ni), Chromium (Cr), Copper (Cu), Mercury (Hg), Barium (Ba), Vanadium (V), Lead (Pb), Nitrogen (N), Scandium (Sc), Hydrogen (H), Strontium (Sr), and Lithium (Li) with different finger-prints of the transition lines. The maximum intensity of the transition lines was observed close to the surface of the sample and it was decreased along the axial direction of the plasma expansion due to the thermalization and the recombination process. We have also determined the plasma parameters such as electron temperature and the electron number density of the plasma using Boltzmann's plot method as well as the Stark broadening of the transition lines respectively. The electron temperature is estimated at 14611 °K, whereas the electron number density i.e. 4.1 × 1016 cm-3 lies close to the surface.

MO-PACVD 및 복합 플라즈마 공정에 의한 내마모 내식성 코팅 (Wear and corrosion coatings by MO-PACVD and dual plasma processes)

  • 김선규
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 1999년도 추계학술발표회 초록집
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    • pp.3-4
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    • 1999
  • 최근 산업이 고속도화, 고능률화 및 고정멸화의 추세로 발전함에 따라 우수한 내마모성, 인성, 고온 안정성 및 내구성을 갖는 공구 및 금형을 요구하게 되었다. 그러나 이와같은 성질들은 어떤 단일 재료에서는 얻을 수 없으며 적당한 기판공구나 금혈위에 내마모성 보호피막을 coating함으로 비교적 저렴하게 얻을 수 있다. 화학증착법으로 TiC, TiN등을 증착시킬때에는 $1000^{\circ}C$정도의 반응온도가 필요하며 이러한 증착온도는 모재가 초경합금일때는 문제가 안되나 강재일 경우 모재의 연화와 칫수변화의 문제를 야기시킨다. 최근에는 플라즈마를 사용하여 증착반응온도를 $550^{\circ}C$ 이하로 낮추는 플라즈마 화학 증착볍(PACVD)이 대두되고 있다. 그러나 이 방법어서 는 뚱착하려는 금속원소가 TiCl4의 형태로 공급되고 있으므로 생성된 층이 염소를 포함하고 있다. 이 층에 잔존하는 염소는 층의 기계적 성질을 저하시키고 층내의 stress를 유발시킨다. 또한 HCI개스의 생성으로 인하여 펌프 및 장비의 부식이 촉진 된다 이러한 결점을 극복하기 위하여 금속유기화합물 전구체(metallo-organic precursor)로 $TiCl_4$를 대체하고자 하는 연구가 활발하게 진행되고 있으며 본 연구실에서 이에 대하여 연구한 결과를 소개하고자 한다. diethylamino titanium을 전구체로 사용하여 $H_2,\;N_2,\;Ar$분위기하에서 pulsed d.c.를 사용하는 MO-PACVD에 의하여 $150~250^{\circ}C$의 저온에서 Al 2024 기판에 TiCN층 형 성을 하였다. 전구체 증발온도는 $74~78^{\circ}C$의 온도범위어야 하며 고경도의 코탱층은 54% duty, 14.2kHz, 450V의 조건에서 얻어졌으며 duty, 주파수, 전압이 증가함에 따라 경도는 저하되었다. 이때의 표면 morphology를 SEM으로 조사한바 dome structure가 크게 발달되었음을 알 수 있었다. 본 실험의 온도 범위내에서 얻은 TiCN 증착반응의 활성화에너지는 7.5Kcal/mol이었다. 증착된 TiCN층은 우수한 내마모섣을 나타내었으며 스크래치테스트 결과 17N의 엄계하중을 나타내었다. 본 연구에서 변화 시킨 duty, 주파수, 전압의 범위에서는 층의 밀착력은 크게 변화하지 않았다. titanium isopropoxide를 전구체로 사용하여 Hz, Nz 분위기하에서 d.c.를 사용하는 MO-PACVD에 의하여 Ti(NCO) 코팅층을 SKDll, SKD61, SKH9 공구강에 형성시키는 공정을 개발하였다. 최적의 Ti(NCO) 코탱층을 얻기 위해 유입전구체 부피%의 양은 향착압력의 5%를 넘지 않아야 되고 수소와 젤소 가스비가 1:1일 때 가장 높은 코팅층의 경도값을 나타내었다. 수소와 질소 가스비가 3:7일 때 TiFeCr(NCO)의 복화합물 코팅층이 형성됨을 알 수 있었고 500t의 증착온도에서 얻은 Ti(NCO) 코팅층이 높은 경도값과 좋은 내식성을 나타내었다. 또한 이와같은 Ti(NCO) 코팅공정과 본 실험실에서 개발한 확산층만 형성시키는 plsma nitriding 공정을 결합하여 복합코탱층을 형성하였는데 이 복합코팅층은 고경도와 우수한 내마모성, 내식성 뿐만 아니라 10)N 이상의 뛰어난 밀착력을 나타내었다. 현재 많이 사용되고 있는 PVD법은 step coverage가 좋지 않은 점과 cost intensive p process라는 단점이 있다. MO-PACVD법은 이러한 문제를 해결할 수 있는 방법으로서 앞으로 지속적인 도전이 요구되는 분야이다.

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N1,N2-bis(3-((3-hydroxynaphthalen-2-yl)methylene-amino)propyl)phthalamide의 크롬(III), 망간(II), 철(III), 코발트(II), 니켈(II), 구리(II), 루테늄(III) 및 산화 지르코늄(II) 착물에 대한 합성과 분광학 및 생물학적 연구 (Synthesis, Spectroscopic, and Biological Studies of Chromium(III), Manganese(II), Iron(III), Cobalt(II), Nickel(II), Copper(II), Ruthenium(III), and Zirconyl(II) Complexes of N1,N2-Bis(3-((3-hydroxynaphthalen-2-yl)methylene-amino)propyl)phthalamide)

  • Al-Hakimi, Ahmed N.;Shakdofa, Mohamad M.E.;El-Seidy, Ahemd M.A.;El-Tabl, Abdou S.
    • 대한화학회지
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    • 제55권3호
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    • pp.418-429
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    • 2011
  • [ $N^1,N^2$ ]bis(3-((3-hydroxynaphthalen-2-yl)methylene-amino)propyl)phthalamide ($H_4L$, 1) 의 새로운 크롬(III), 망간(II), 철(III), 코발트(II), 니켈(II), 구리(II), 루테늄(III) 및 산화 지르코늄(II) 착물을 합성하여 원소분석, 물리적 성질 및 분광학적으로 특성을 규명하였다. 분광학적 결과를 통해 이 리간드는 $[H_4LMX_2(H_2O)]{\cdot}nH_2O$ (M = Cu(II), Ni(II), Co(II), X = Cl 또는 $NO_3$)의 일반식을 갖는 착물2-5에서는 중성의 삼배위 리간드로 행동한다. 또는 $[H_4L(ZrO)_2Cl_2]{\cdot}8H_2O$ 의 일반식을 갖는 착물 6-9 에서는 이염기성 육배위 리간드로 행동한다. DMF 용액에서의 몰전기전도도 실험결과 이들 착물은 비이온성을 나타낸다. 고체 구리착물 2, 5 및 6 의 ESR 스펙트럼에서 $g_{\parallel}$ >g> $g_e$을 보이는데, 이는 일그러진 팔면체구조와 큰 공유결합성을 갖는 $d{_x}^2{_{-y}}^2$ 오비탈에 비공유 전자쌍이 존재함을 의미한다. 이합체 구리(II) 착물 $[H_2LCu_2Cl_2(H_2O)_4]{\cdot}3H_2O$ (6)에 대해 두 구리원자 사이의 거리를 ESR 스펙트럼으로부터 추정한 parallel component 의 field zero splitting 파라메타를 이용하여 계산하였다. 이들 화합물의 항박테리아 및 항균 활성도를 측정한 결과, 몇가지 금속 착물의 경우 표준시약인 tetracycline (박테리아) 및 Amphotricene B (균류)보다 더 큰 저해효과를 보였다.

마산항 표층 퇴적물의 유기물 및 금속원소의 분포 (Distribution of Organic Matters and Metallic Elements in the Surface Sediments of Masan Harbor, Korea)

  • 황동운;진현국;김성수;김정대;박종수;김성길
    • 한국수산과학회지
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    • 제39권2호
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    • pp.106-117
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    • 2006
  • We measured the concentrations of organic matter and metallic elements (Al, Fe, Cr, Mn, Ni, Cu, Zn, As, Cd, Pb and Hg) in the surface sediments of Masan Harbor (in the southern sea, Korea) to evaluate the geochemical characters of sediment and the pollutions by organic matter and metallic elements. The mean grain size of the surface sediments in the study area ranged from $5.6{\phi}$ to $7.8{\phi}$, indicating silt sediment. The water content of the surface sediments exceeded 60% except at some stations. The contents of ignition loss (IL), total organic carbon (TOC) and total nitrogen (TN) ranged from 7.2-14.3%, 1.2-3.2%, and 0.10-0.28%, respectively. Based on the C/N ratios, the organic matter in the surface sediments of Masan Harbor may originate from terrigenous sources including fluvial inputs (mainly sewage in urban areas). The chemical oxygen demand (COD) and acid volatile sulfide (AVS) ranged from $11.3-29.9\;mgO_2/g\;dry$ and 0.20-4.47 mgS/g dry, respectively, and low concentrations were observed near a shipping route. In addition, the concentrations of metallic elements showed large spatial variations in Masan Harbor and the distributions of metallic elements were also comparable to those of organic matter. This implies that the distributions of organic matter and metallic elements in the surface sediments of Masan Harbor are mainly controlled by biogenic matter and artificial action (mainly dredging). In addition, we calculated the enrichment facto. (EF) and geoaccumulation index (Igeo) in order to evaluate pollution by metallic elements. The enrichment of metallic elements relative to Al was three to eighteen times higher at the study sites, compared to levels in the Earth's crust except for Fe, Ni and Mn. In addition, the Igeo class indicated that the surface sediments in the study area were moderately to strongly polluted in terms of metallic elements.

옥방(玉房) 중석광상(重石鑛床)의 성인(成因)에 관(關)한 연구(硏究) -특(特)히 남부광체(南部鑛體)에 대(對)하여- (On the Genesis of Okbang Tungsten Deposits)

  • 윤정수
    • 자원환경지질
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    • 제12권4호
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    • pp.181-195
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    • 1979
  • The Nambu orebodies of the Okbang tungsten mine are hosted in the Precambrian amphibolite and Weonnam formation. These orebodies can be classified into two types; The scheelite-bearing ore vein occurring in the amphibolite (the Nambu 1, 2 adits) and tungsten-bearing quartz vein along the contact between the amphibolite and the Weonnam formation (the Young-ho, -1, -2, -3 levels). The scheelite-bearing ore vein in the amphilbolite is discontinuous, narrow, and highly irregular in geometry, occurring only within the amphibolite with which of the vein is graduational. Based on these feature of the mode of occurrence, the origin of this ore type might be attributed to a potential segregation of tungsten ore fluid in situ from hornblenditic basic magma of the host rock. Tungsten-bearing quartz vein, however, is considered to have deposited along the N30-60E trending fractures as a later hypothermal vein after the hornblendite was emplaced. The principal ore mineral is scheelite with minor amount of wolframite, and the gangue minerals are quartz, and small amounts of fluorite, pyrrhotite, chalcopyrite and calcite. Fluid inclusion study of minerals from the Nambu orebody reveals that the fluids in fluorite of the scheelite-bearning ore vein attained a temperature range of $208{\sim}256^{\circ}C$ and those in quartz from the tungsten-bearing quartz vein a temperature range of $220{\sim}357^{\circ}C$. The real formation temperatures can be somewhat higher than filling temperatures, if pressure correction is made. Chemical analysis of 8 amphibolitc samples on major and some trace elements indicate that the amphibolite is igneous origin. On a Niggli diagram (al-alk)versus c, the analytical values are plotted on an igneous field, and on a Niggli diagram mg versus c they follow a karroo igneous trend line. According to the Ba, Cr, and Ni versus Niggli mg plots suggested by Leake (1964), Okbang amphibolite fall outside a pelitic field and compare favorably with his plots form ortho-amphibolites. Analitical values of $MoO_3$ of 8 samples of scheelite minerals from the Nambu orebody indicate that the tungsten-bearing quartz vein (type n) of Nambu orebody shows a range from 1. 69% to 4.38% which is higher than 0.94%~3.25% $MoO_3$ for the scheelite-bearing ore vein (type I). This fact indicates that the type II was deposited in a lower $fO_2/higher$ $fO_2$ environment and under lower temperature than the type I. Analysis of major components $WO_3$, MnO, and FeO of 6 samples of wolframite from the type II veins revealed that they contain 73.35~76.2% $WO_3$, 7.94~11.63% MnO, and 10.53~14.82% FeO. MnO/FeO ratios of wolframite shows the range of 0.85~1.17 which suggests a slightly higher temperature type of deposits than other major tungsten deposits in the country.

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자폐아동 모발에서의 미네랄 및 중금속 함량에 관한 연구 (Study on the Mineral and Heavy Metal Contents in the Hair of Preschool Aged Autistic Children)

  • 정명애;장현서;박은주;이한우;최정화
    • 한국식품영양과학회지
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    • 제37권11호
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    • pp.1422-1426
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    • 2008
  • 본 연구에서는 일반아동과 자폐아동 모발의 무기질, 유해 중금속 함량, 혈액의 자유라디칼 및 세로토닌 함량을 측정함으로써 일반아동에 대한 자폐아동의 특성을 연구하고자 하였다. 실험그룹은 $3{\sim}9$세 사이의 50명의 아동을 일반아동(22명) 및 어린이 정신과 의사에 의해 판정된 자폐아동(28명)의 두 그룹으로 나누었다. 일반아동과 자폐아동 간의 나이, 신장, 체중 및 식이섭취량은 두 군간 유의적인 차이가 없었으나, 모발 중 다량미네랄 함량을 측정한 결과 Ca, Mg, P 및 S는 일반아동이 자폐아동보다 다소 높게 나타났으며, Na 및 K는 자폐아동에서 일반아동에 비해 유의적으로 높았다. 또한, 모발 중 미량미네랄 함량을 측정한 결과에서는 Cu, Zn, Fe, Cr 및 Se는 일반아동이 자폐아동보다 높게 나타났으며, 특히, Cu, Zn, Fe의 경우 두 그룹 간에 유의적인 차이를 나타내었다. Mn, B, Co 및 Mo는 두 그룹 간에 차이가 없었다. Al의 경우에는 자폐아동에서 더 높은 것을 관찰할 수 있었으나 유의적인 수준은 아니었다. 일반아동 및 자폐아동의 모발 중 유해중금속 함량을 측정한 결과 As, Hg 및 Be의 경우에는 두 그룹 간에 유의적인 차이를 나타내지 않았으나 Cd와 Pb는 일반아동에 비해 자폐아동에서 유의하게 높은 것을 관찰할 수 있었다. 혈액 내 자유라디칼 함량은 자폐아동이 일반아동에 비해 유의적으로 높게 나타났으며, 세로토닌 함량은 일반아동과 자폐아동 간의 유의적인 차이가 없었다. 이상의 결과 본 연구에서는 식이섭취량을 단 하루만을 조사하였으나 향후에는 조사기간을 더 늘리고 식품섭취유형과 패턴 및 식행동 장애 분석 등 좀 더 다양하고 깊이 있는 연구가 진행되어야 할 것이다. 또한 자폐아동은 일반아동에 비해 모발의 일부 미네랄 함량은 감소, 중금속 함량의 증가 및 자유라디칼 생성이 증가함으로써 자폐아동의 행동 및 발달장애에 영향을 미치는 것으로 사료된다. 향후 연구에서는 자폐아동에게 부족한 영양소의 보충 및 중금속 해독 영양소를 섭취함으로써 자폐아동의 행동 및 발달장애의 개선 기능에 대한 연구가 시행되어야 할 것이다.

용접사업장 근로자의 흄 및 금속 노출농도에 대한 평가와 혈중 금속 농도 (Airborne Concentrations of Welding Fume and Metals of Workers Exposed to Welding Fume)

  • 최호춘;김강윤;안선희;박화미;김소진;이영자;정규철
    • 한국산업보건학회지
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    • 제9권1호
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    • pp.56-72
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    • 1999
  • Airborne concentrations of welding fumes in which 13 different metals such as Al, Cd, Cr, Cu, Fe, Mn, Mo, Ni, Pb, Si, Sn, Ti, and Zn were analyzed were measured at 18 factories including automobile assembly and manufactures, steel heavy industries and shipyards. Air samples were collected by personal sampler at each worker's worksite(n=339). Blood levels of Cd, Cu, Fe, Mn, Pb and Zn were also measured from samples taken from 447 welders by atomic absorption spectrometry and compared with control values obtained from 127 non-exposed workers. The results were as follows ; 1. Among various welding types, $CO_2$ welding 70.2 % were widely used, shielded metal arc welding(SMAW) 22.1 % came next, and rest of them were metal inert gas(MIG) welding, submerged arc welding(SAW), spot welding(SPOT) and tungsten inert gas(TIG) welding. 2. Welding fume concentration was $0.92mg/m^3$($0.02{\sim}15.33mg/m^3$) at automobile assembly and manufactures, $4.10mg/m^3$($0.02{\sim}70.75mg/m^3$) at steel heavy industries and $5.59mg/m^3$($0.30{\sim}91.16mg/m^3$) at shipyards, respectively, showing significant difference among industry types. Workers exposed to high concentration of welding fumes above Korean Permissible Exposure Limit(KPEL) amounted to 7.9 % and 12.5 %, in $CO_2$ welding and in SMAW at automobile assembly and manufactures and 62.7 % in $CO_2$ welding, and 12.5 % in SMAW at shipyards, and 66.2 % in $CO_2$ welding and 70.6 % in SMAW at steel heavy industries. 3. Geometric mean of airborne concentration of each metal released from welding fumes was below one 10th of KPEL in all welding types. Percentage of workers, however, exposed to airborne concentration of metals above KPEL amounted to 16.8 % in Mn and 7.6 % in Fe in $CO_2$ welding; 37.5 % in Cu in SAW, 30 % in Cu in TIG; and 25 % in Pb in SPOT welding. As a whole, 76 Workers(22.4%) were exposed to high concentration of any of the metals above KPEL. 4. There were differences in airborne concentration of metals such as Al, Cd, Cr, Cu. Fe. Mn, Mo, Ni, Pb, Si, Sn, Ti and Zn by industry types. These concentrations were higher in shipyards and steel heavy industries than in automobile assembly and manufactures. Workers exposed to higher concentration of Pb above KPEI amounted to 7.4 % of workers(7/94) in automobile assembly and manufactures. In shipyards, 19.2 % of workers(19/99) were over-exposed to Mn and 7.1 % (7/99) to Fe above KPEL. In steel heavy industries, 14.4 %(21/146), 7.5 %(11/146) and 13 %(19/146) were over-exposed to Mn, Fe and Cu, respectively. As a whole, 76 out of 339 workers(22.4%) were exposed to any of the metals above KPEL. 5. Blood levels of Cd, Cu, Fe, Mn, Pb, and Zn in welders were $0.11{\mu}g/100m{\ell}$, $0.84{\mu}g/m{\ell}$, $424.4{\mu}g/m{\ell}$, $1.26{\mu}g/100m{\ell}$, $5.01{\mu}g/100m{\ell}$ and $5.68{\mu}g/m{\ell}$, respectively, in contrast to $0.09{\mu}g/100m{\ell}$, $0.70{\mu}g/m{\ell}$, $477.2{\mu}g/m{\ell}$, $0.73{\mu}g/100m{\ell}$, $3.14{\mu}g/100m{\ell}$ and $6.15{\mu}g/m{\ell}$ in non-exposed control groups, showing significantly higher values in welders but Fe and Zn.

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