• JSTS:Journal of Semiconductor Technology and Science
• /
• v.17 no.3
• /
• pp.319-325
• /
• 2017

Through silicon via (TSV) technology is extensively used in 3D IC integrations. The special structure of the TSV is realized by CMP (Chemically Mechanical Polishing) process with a high Cu removal rate and, low dishing, yielding fine topography without defects. In this study, we investigated the electrochemical behavior of copper slurries with various inhibitors in the Cu CMP process for advanced TSV applications. One of the slurries was carried out for the most promising process with a high removal rate (${\sim}18000{\AA}/Min$ @ 3 psi) and low dishing (${\sim}800{\AA}$), providing good microstructure. The effects of pH value and $H_2O_2$ concentration on the slurry corrosion potential and Cu static etching rate (SER) were also examined. The slurry formula with a pH of 6 and 2% $H_2O_2$, hadthe lowest SER (${\sim}75{\AA}/Min$) and was the best for TSV CMP. A novel Cu TSV CMP process was developed with two CMPs and an additional annealing step after some of the bulk Cu had been removed, effectively improving the condition of the TSV Cu surface and preventing the formation of crack defects by variations in wafer stress during TSV process integration.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.21 no.2
• /
• pp.267-275
• /
• 2012

Austenite stainless steel 304 has properties of high resistance to corrosion and temperature changes. Therefore, this material is widely used in various of industries. However, when the material is subjected to heating and cooling cycles the forming accuracy, for example, the right angle associated with a sharp bend such as corner is lost. This phenomenon is caused by the reversion of the deformation-induced martensite into austenite when the temperature in increased. This result in misfit of a structure or an assembly, and an increase in residual stress. Hence, it is important to understand this process. In this study, to evaluate the mechanical behavior of the deformation-induced martensite and reversed austenite, a scanning acoustic spectroscope including the capability of obtaining both phase and amplitude of the ultrasonic wave (i.e., the complex V(z) curve method) was used. Then, the velocities of the SAW propagating within the specimens made in different conditions were measured. The experimental differences of the SAW velocities obtained in this experiment were ranging from 2,750 m/s to 2,850 m/s, and the theoretical difference was 3.6% under the assumption that the SAW velocity was 2,800 m/s. The error became smaller as the martensite content was increased. Therefore, the SAW velocity may be a probe to estimate the marternsite content.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.32 no.2
• /
• pp.149-154
• /
• 2012

The size and distribution of welding residual stress and welding deformation in welding structures have an effect on various sorts of damage like brittle failure, fatigue failure and stress corrosion cracking. So, research for this problem is necessary continuously. In this study, non-destructive technique using laser electronic speckle pattern interferometry, plate of welding specimen according to the external load on the entire behavior of residual stress are presented measurement techniques. Once, welding specimen force tensile loading, using electronic speckle pattern interferometry is measured. welding specimen of base metal and weld zone measure strain from measured result, this using measure elastic modulus. In this study, electronic speckle pattern interferometry use weld zone and base metal parts of the strain differences using were presented in residual stress calculated value, This residual stress value were calculated by numerical calculation. Consequently, weld zone of modulus high approximately 3.7 fold beside base metal and this measured approximately 8.46 MPa.

• Korean Journal of Materials Research
• /
• v.10 no.5
• /
• pp.369-374
• /
• 2000

In order to investigate the effects of addition of 1M sulfuric acid to the etching solution or 1M hydrochloric acid on the etching behavior of aluminum foil for electrolytic capacitors, the changes in the density of etch pit, the length and diameter of etch tunnels and the capacitance were analyzed using SEM, TEM, LCR meter etc. Sulfate ion as a corrosion inhibitor was contributed to the increase of the surface area comparing with chloride ion. By adding sul-furic acid the density of etch pit and the length of etched tunnel increased and the diameter of the tunnel decreased, resulting in the increase of capacitance. It was also shown that the capacitance decreased when the current density was below $0.9A/\textrm{cm}^2$, while remarkably increased in the other case.

• Korean Journal of Materials Research
• /
• v.28 no.6
• /
• pp.361-364
• /
• 2018

Binary Ti-Al alloys below 51.0 mass%Al content exhibit a breakaway, transferring from parabolic to linear rate law. The second $Al_2O_3$ layer might have some protectiveness before breakaway. Ti-63.1 mass%Al oxidized at 1173 K under parabolic law. Breakaway oxidation is observed in every alloy, except for Ti-63.1 mass%Al. After breakaway, oxidation rates of the binary TiAl alloys below 34.5 mass%Al obey almost linear kinetics. The corrosion rate of Ti-63.1 mass%Al appears to be almost parabolic. As content greater than 63.0 mass% is found to be necessary to form a protective alumina film. Addition of Mo improves the oxidation resistance dramatically. No breakaway is observed at 1123 K, and breakaway is delayed by Mo addition at 1173 K. At 1123 K, no breakaway, but a parabolic increase in mass gain, are observed in the Mo-added TiAl alloys. The binary Ti-34.5 mass%Al exhibits a transfer from parabolic to linear kinetics. At 1173 K, the binary alloys show vary fast linear oxidation and even the Mo-added alloys exhibit breakaway oxidation. The 2.0 mass%Mo-added TiAl exhibits a slope between linear and parabolic. At values of 4.0 and 6.0 mass% added TiAl alloys, slightly larger rates are observed than those for the parabolic rate law, even after breakaway. On those alloys, the second $Al_2O_3$ layer appears to be persistently continuous. Oxidation resistance is considerably degraded by the addition of Mn. Mn appears to have the effect of breaking the continuity of the second $Al_2O_3$ layer.

• Journal of Korea Foundry Society
• /
• v.31 no.2
• /
• pp.66-70
• /
• 2011

Hot dip aluminizing (HDA) is widely used in industry for improving corrosion resistance of material. The formation of intermetallic compound layers during the contact between dissimilar materials at high temperature is common phenomenon. Generally, intermetallic compound layers of $Fe_2Al_5$ and $FeAl_3$ are formed at the Al alloy and Fe substrate interface. In case of cast iron, high contact angle of graphite existed in the matrix inhibits the formation of intermetallic compound layer, which carry with it the disadvantage of a reduced reaction area and mechanical properties. In present work, the process for the removal of graphite existed on the surface of specimen has been investigated. And also HDA was proceeded at $800^{\circ}C$ for 3 minutes in aluminum alloy melt. The efficiency of graphite removal was increased with the reduction of particle size in sanding process. Graphite appears to be present both in the region of melting followed by re-solidification and in the intermetallic compound layer, which could be attributed to the fact that the surface of cast iron is melted down by the formation of low melting point phase with the diffusion of Al and Si to the cast iron. Intermetallic compound layer consisted of $Fe(Al,Si)_3$ and $Fe_2Al_5Si$, the layer formed at cast iron side contained lower amount of Si.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2002.05a
• /
• pp.155-160
• /
• 2002

Metal matrix composites had generated a lot of interest in recent times because of significant in specific properties. It was also highlighted as the materials of frontier industry because strength, heat-resistant, corrosion-resistant, wear-resistant were superiored. In this study the strength properties of $Al_{18}B_4O_{33}/AC4CH$ were represented mixing the binder of $Al_2O_3$ and $TiO_2$. It was also fabricated by squeeze casting. $Al_{18}B_4O_{33}/AC4CH$ was fabricated at the melt temperature of $760^{\circ}C$ the perform temperature of $700^{\circ}C$ and mold temperature of $200^{\circ}C$ under the pressure of 83.4MPa and observed SEM. Fatigue crack growth rate tests on compact tension specimen(half-size) of thickness 12.5mm were conducted by using sinusoidal waveform. Compact tension specimens(half-size) were used and fatigue crack growth rate da/dN and stress intensity factor range ${\Delta}K$ were analyzed concerning to the R value of 0.1 and 0.05. In order to find out the value of ${\Delta}K$, load amplitude constant method was applied by the standard fatigue testing method describes in ASTM E647-95a. As the results of this study, Fatigue crack growth rate increased with in creasing the load ratio, Consequently, At equivalent stress intensity factors, the fatigue crack growth rates in MMC were faster than those of AC4CH alloy. then the fatigue life and the fatigue crack growth rate was investigated using scanning election microscopy(SEM)

• Journal of the Korean Society for Advanced Composite Structures
• /
• v.1 no.3
• /
• pp.10-16
• /
• 2010

In construction industries, new construction materials are needed to overcome some problems associated with the use of conventional construction materials due to the change of environmental and social requirements. Accordingly, the requirements to be satisfied in the design of civil engineering structures are diversified. As a new construction material in the civil engineering industries, fiber reinforced polymeric plastic (FRP) has a superior corrosion resistance, high specific strength/stiffness, etc. Therefore, such properties can be used to mitigate the problems associated with the use of conventional construction materials. Nowadays, new types of bridge piers and marine piles are being studied for new construction. They are usually made of concrete filled fiber reinforced polymeric plastic tubes (CFFT). In this paper, a new type of FRP-concrete composite pile which is composed of reinforced concrete filled FRP tube (RCFFT) is proposed to improve compressive strength as well as flexural strength. The load carrying capacity of proposed RCFFT compression member is discussed based on the result of experimental and analytical investigations.

• Journal of Advanced Marine Engineering and Technology
• /
• v.38 no.7
• /
• pp.883-889
• /
• 2014

It is generated for cavitation erosion due to the local static boiling by pressure differentials in high speed rotating fluid environment. The cavitation is influenced by various elements such as pressure, velocity, temperature, pH of fluid and medium. In particular, the damage of material is accelerated due to the electrochemical corrosion by $C1^-$ and cavitation erosion due to cavities in seawater. In this paper, hence, it investigated for martensite stainless steel the damage behavior with applied current density and cavitation time in natural seawater solution. Less damage depth at the cavitation condition was observed than static condition as a result of galvanostatic experiment. Furthermore, it was shown that dramatic increase of weightloss, damage rate and damage depth after 3 hour of cavitation test.

• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.17-22
• /
• 2007

Low-cycle environmental fatigue tests of cast austenitic stainless steel CF8M at the condition of fatigue strain rate 0.04%/sec were conducted at the pressure and temperature, 15MPa, $315^{\circ}C$ of a operating pressurized water reactor. The used test rig was limited to install an extensometer at the gauge length of the cylindrical fatigue specimen inside the small autoclave. So the magnet type LVDT's were used to measure the fatigue displacement at the specimen shoulders inside the high temperature and high pressure water autoclave. However, the displacement and strain measured at the specimen shoulders is different from the one at the gauge length for the geometry and the cyclic strain hardening effect. FEM calculated the displacement and the strain of the gauge length from the data measured at the shoulders. Tensile test properties in elastic and plastic behavior of CF8M material were used in the FEM analysis. A series of low cycle fatigue tests simulating the cyclic strain hardening effect verified that the FEM calculation was well agreed with the simulated tests. The process and method developed in this study would be so useful to produce reliable environmental fatigue curves of CF8M stainless steel in pressurized water reactors.