• Title/Summary/Keyword: Corrosion Defects

Search Result 277, Processing Time 0.026 seconds

Effect of ALD-Al2O3 Passivation Layer on the Corrosion Properties of CrAlSiN Coatings (ALD-Al2O3 보호층이 적용된 CrAlSiN 코팅막의 내부식성 특성에 관한 연구)

  • Wan, Zhixin;Lee, Woo-Jae;Jang, Kyung Su;Choi, Hyun-Jin;Kwon, Se Hun
    • Journal of the Korean institute of surface engineering
    • /
    • v.50 no.5
    • /
    • pp.339-344
    • /
    • 2017
  • Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid coating system of arc ion plating and high power impulse magnetron sputtering (HiPIMS) method. And, ultrathin $Al_2O_3$ passivation layer was deposited on the CrAlSiN/Cr adhesion layer/SUS304 sample to protect CrAlSiN coatings by encapsulating the whole surface defects of coating using ALD. Here, the high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and energy dispersive X-ray spectrometry (EDX) analysis revealed that the ALD $Al_2O_3$ thin films uniformly covered the inner and outer surface of CrAlSiN coatings. Also, the potentiodynamic and potentiostatic polarization test revealed that the corrosion protection properties of CrAlSiN coatings/Cr/SUS304 sample was greatly improved by ALD encapsulation with 50 nm-thick $Al_2O_3$ thin films, which implies that ALD-$Al_2O_3$ passivation layer can be used as an effect barrier layer of corrosion.

A Study on the Reduction of Dishing and Erosion Defects (텅스텐 CMP에서 디싱 및 에로젼 결함 감소에 관한 연구)

  • Jeong, Hae-Do;Park, Boum-Young;Kim, Ho-Youn;Kim, Hyoung-Jae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.11a
    • /
    • pp.140-143
    • /
    • 2004
  • Chemical mechanical polishing(CMP) is essential technology to secure the depth of focus through the global planarization of wafer. But a variety of defects such as contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the resistance because they decrease the interconnect section area, and ultimately reduce the life time of the semiconductor. Due to this dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred over-polishing. Decreasing of abrasive concentration results in advanced pattern selectivity which can lead the uniform removal in chip and decrease of over-polishing. The fixed abrasive pad was applied and tested to reduce dishing and erosion in this paper. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed fixed abrasive pad and chemicals.

  • PDF

A Study on the Reduction of Dishing and Erosion Defects in Tungsten CMP (텅스텐 CMP에서 디싱 및 에로젼 결함 감소에 관한 연구)

  • Park Boumyoung;Kim Hoyoun;Kim Gooyoun;Kim Hyoungjae;Jeong Haedo
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.22 no.2
    • /
    • pp.38-45
    • /
    • 2005
  • Chemical mechanical polishing(CMP) has been widely accepted for the planarization of multi-layer structures in semiconductor fabrication. But a variety of defects such as abrasive contamination, scratch, dishing, erosion and corrosion are occurred during CMP. Especially, dishing and erosion defects increase the metal resistance because they decrease the interconnect section area, and ultimately reduce the lift time of the semiconductor. Due to this reason dishing and erosion must be prohibited. The pattern density and size in chip have a significant influence on dishing and erosion occurred by over-polishing. The fixed abrasive pad(FAP) was applied and tested to reduce dishing and erosion in this paper. The abrasive concentration decrease of FAP results in advanced pattern selectivity which can lead the uniform removal in chip and declining over-polishing. Consequently, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with proposed FAP and chemicals.

Evaluation of Thickness Reduction in an Aluminum Sheet using SH-EMAT (SH-EMAT를 이용한 알루미늄 박판의 두께감육 평가)

  • Kim, Yong-Kwon;Park, Ik-Kuen
    • Journal of Welding and Joining
    • /
    • v.28 no.2
    • /
    • pp.74-78
    • /
    • 2010
  • In this paper, a non-contact method of evaluating the thickness reduction in an aluminum sheet caused by corrosion and friction using SH-EMAT (shear horizontal, electromagnetic acoustic transducer) is described. Since this method is based on the measurement of the time-of-flight and amplitude change of guided waves caused from the thickness reduction, it provides information on the thinning defects. Information was obtained on the changes of the various wave features, such as their time-of-flight and amplitude, and their correlations with the thickness reduction were investigated. The interesting features in the dispersive behavior of selected guided modes were used for the detection of thinning defects. The measurements of these features using SH waves were performed on aluminum specimens with regions thinned by 7.2% to 29.5% of the total thickness. It is shown that the time-of-flight measurement provides an estimation of the thickness reduction and length of the thinning defects.

Hardness Profiles of Porcelain Insulators by Climate Changes (기후 변화에 따른 자기 애자의 시멘트 경도 변화)

  • Lee, Joohyun;Kim, Hong-Sik;Kim, Joondong;Choi, In-Hyuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.31 no.1
    • /
    • pp.24-28
    • /
    • 2018
  • Insulators used in overhead transmission lines are continuously exposed to a number of mechanical and electrical stresses owing to external environmental factors, resulting in corrosion, reduction in durability, and deterioration. Widely used porcelain insulators are fabricated with cement and porcelain and are especially common in Korea. Changes in the hardness and chemical reactivity of the cement increase the leakage and fault currents and increase the possibility of flashover due to insulation breakdown. Therefore, it is important to evaluate the durability and defects of porcelain insulators. Studies on the reliability of various evaluation methods are needed to prevent accidents by accurately determining the replacement timing and potential defects in porcelain insulators. In this study, the hardness of the cement part of the porcelain insulator was measured using the Vickers hardness test and its composition was analyzed by energy dispersive spectroscopy and X-ray diffraction analysis. The performance of the insulators was compared in two different regions with varying climatic conditions. This study presents an evaluation method of the defects in porcelain insulators by measuring humidity, which can also be used to assess the reliability of the insulators.

Feasibility Study on the Utilization of EMAT Technology for In-line Inspection of Gas Pipeline

  • Cho, Sung-Ho;Yoo, Hui-Ryong;Rho, Yong-Woo;Kim, Hak-Joon;Kim, Dae-Kwang;Song, Sung-Jin;Park, Gwan-Soo
    • Journal of Magnetics
    • /
    • v.16 no.1
    • /
    • pp.36-41
    • /
    • 2011
  • If gas is leaking out of gas pipelines, it could cause a huge explosion. Accordingly, it is important to ensure the integrity of gas pipelines. Traditionally, over the years, gas-operating companies have used the ILI system, which is based on axial magnetic flux leakage (MFL), to inspect the gas pipelines. Relatively, there is a low probability of detection (POD) for the axial defects with the axial MFL-based ILI. To prevent the buried pipeline from corrosion, it requires a protective coating. In addition to the potential damage to the coating by environmental factors and external forces, there could be defects on the damaged coating area. Thus, it is essential that nondestructive evaluation methods for detecting axial defects (axial cracks, axial groove) and damaged coating be developed. In this study, an electromagnetic acoustic transducer (EMAT) sensor was designed and fabricated for detecting axial defects and coating disbondment. In order to validate the performances of the developed EMAT sensor, experiments were performed with specimens from axial cracks, axial grooves, and coating disbondment. The experimental results showed that the developed EMAT sensor could detect not only the axial cracks (minimum 5% depth of wall thickness) and axial grooves (minimum 10% depth of wall thickness), but also the coating disbondment.

Evaluation of Durabilities in Ruined RC Bridge (철근콘크리트 철거교량의 내구성 평가)

  • 유환국;김국한;류금성;정영수
    • Proceedings of the Korea Concrete Institute Conference
    • /
    • 1999.10a
    • /
    • pp.655-658
    • /
    • 1999
  • An experimental investigation on the ruined RC bridge with 30 years old has been conducted to estimate the durabilities. The ruined RC bridge estimated in this study was located at Kyung-Bu Express Way. First, concrete strength and durability characteristics such as concrete resistivity, chloride content were estimated. Second, it was to test reinforcing corrosion embedded in slab of bridge. And, third, tensile strength and yield strength of reinforcing bar corroded and not corroded were estimated. This bridge inspection provides the most common cause of defects and deterioration and the results of this inspections give more specific information than those of laboratory inspections do.

  • PDF

Corrosion Characteristics of TiN/Ti Multilayer Coated Ti-30Ta-xZr Alloy for Biomaterials (TiN/Ti 다층막 코팅된 생체용 Ti-30Ta-xZr 합금의 부식특성)

  • Kim, Y.U.;Cho, J.Y.;Choe, H.C.
    • Corrosion Science and Technology
    • /
    • v.8 no.4
    • /
    • pp.162-169
    • /
    • 2009
  • Pure titanium and its alloys are drastically used in implant materials due to their excellent mechanical properties, high corrosion resistance and good biocompatibility. However, the widely used Ti-6Al-4V is found to release toxic ions (Al and V) into the body, leading to undesirable long-term effects. Ti-6Al-4V has much higher elastic modulus than cortical bone. Therefore, titanium alloys with low elastic modulus have been developed as biomaterials to minimize stress shielding. For this reason, Ti-30Ta-xZr alloy systems have been studied in this study. The Ti-30Ta containing Zr(5, 10 and 15 wt%) were 10 times melted to improve chemical homogeneity by using a vacuum furnace and then homogenized for 24 hrs at $1000^{\circ}C$. The specimens were cut and polished for corrosion test and Ti coating and then coated with TiN, respectively, by using DC magnetron sputtering method. The analyses of coated surface were carried out by field emission scanning electron microscope(FE-SEM). The electrochemical characteristics were examined using potentiodynamic (- 1500 mV~+ 2000 mV) and AC impedance spectroscopy(100 kHz~10 mHz) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The equiaxed structure was changed to needle-like structure with increasing Zr content. The surface defects and structures were covered with TiN/Ti coated layer. From the polarization behavior in 0.9% NaCl solution, The corrosion current density of Ti-30Ta-xZr alloys decreased as Zr content increased, whereas, the corrosion potential of Ti-30Ta-xZr alloys increased as Zr content increased. The corrosion resistance of TiN/Ti-coated Ti-30Ta-xZr alloys were higher than that of the TiN-coated Ti-30Ta-xZr alloys. From the AC impedance in 0.9% NaCl solution, polarization resistance($R_p$) value of TiN/Ti coated Ti-30Ta-xZr alloys showed higher than that of TiN-coated Ti-30Ta-xZr alloys.

Experimental Evaluation of Weathering Performance for Duplex Coating Systems Combining Thermal Spraying Metals and Painting (금속용사와 도장의 복합피복방식법에 대한 실험적 내후성능평가)

  • Kim, In Tae;Jun, Je Hyong;Cha, Ki Hyuk;Jeong, Young Soo;Ahn, Jin Hee
    • Journal of Korean Society of Steel Construction
    • /
    • v.28 no.5
    • /
    • pp.373-382
    • /
    • 2016
  • Painting or thermally sprayed metal coating is often used in corrosion protection of steel structures. In recently, duplex coating system which combines thermally sprayed metals with paint is selected as a new generic type of coatings on steel structures under the highly corrosive environments. In this study, the structural steel specimens were surface treated, thermally sprayed with zinc, zinc-15%aluminum alloy, aluminum and aluminum-5%magnesium alloy, and finally sealing or painted with acrylic urethane. And as a reference specimens, steel specimens were painted with acrylic urethane after surface treatment. Circular defects with 1.0, 3.0 and 5.0 mm in diameters and line defect with 2.0 mm width, which reach the steel substrate were created on all specimens. The specimens were exposed into an environmental testing chamber controlled by the ISO 20340, which is a laboratory cyclic accelerated exposure test condition of spraying/UV/low temperature, for up to 175 days. Based on the corrosion tests, corrosion deterioration from the initial defects were evaluated and weathering performance of the specimens are compared.