• 제목/요약/키워드: Copper film

검색결과 563건 처리시간 0.027초

무산소동의 표면부식 방지기술 적용에 관한 연구 (A Study on the Application of Anti-Corrosion Techniques on the Surface of Oxygen Free Copper)

  • 주형건;이대영;장다콴;이강용;아잠카미스
    • 대한기계학회논문집A
    • /
    • 제33권4호
    • /
    • pp.425-429
    • /
    • 2009
  • The protection for copper tarnish was developed by surface treatment method and volatile corrosion inhibiting (VCI) technology. The performance of surface treatment and VCI material is also examined in simulated test environment. Benzotriazole (BTAH) solution that contained molybdate showed best performance than others. Usage of VCI materials with surface treatment was more effective. The protection film foamed on the surface of copper was investigated by auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). Molybdate does not participate in the formation of the protective film but promotes the passivation effect. This facilitates the stabilization of the cuprous oxide film, and strengthens the adsorption of BTAH.

박막 공정을 이용한 초소형 내시경의 MicroWiring System의 개발 (The Development of Micro Wiring System for Micro Active Endoscope)

  • 정석;장준근;한동철
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 1997년도 춘계학술대회 논문집
    • /
    • pp.362-365
    • /
    • 1997
  • In the field of Micro-Mechanics, it has been known diffcult to integrate the micro-machine with sensor and source line for the conventional copper line cnanot be used in compact and small size. We developed a system to make thethin copper film as a connect line on the poyurethane pipe (2mm in diameter) by the evaporation technique. This system consists of an evaporation chamber two long branches, substrate hoider and a Linear-Rotary motion feed feedthrough. The results showed that thin copper film coated polyurethanc pipe could be applied th the small medical devices such as the micro active endoscope.

  • PDF

구리박막의 피로특성에 관한 제조공정의 영향 (Manufacturing Process Effect on Fatigue Properties for Copper Thin Film)

  • 안중혁;박준협;김윤재
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2007년도 춘계학술대회A
    • /
    • pp.1783-1786
    • /
    • 2007
  • The copper film coated by Sn is often used in various applications such as LCD, Mobile Phone and etc. Especially, when the film is used as tape carrier package(TCP) of LCD panel, the film is repeatedly applied by mechanical or(and) thermal stress and then is often failed. Therefore, to guarantee the reliability of the electrical devices using the film, the tensile and fatigue characteristics of the film are important. In this study, to obtain the tensile and fatigue characteristics of the film, the specimen was fabricated by etching process to make a smooth specimen of 2000 ${\mu}m$ width, 8000 ${\mu}m$ length and 15.26 ${\mu}m$ thickness. The 2 kinds of specimen were fabricated by other manufacturing process. These specimens had values of Young's modulus(80.2GPa) lower than literature values(108${\sim}$145GPa) for bulk values, but had high values of the yield and ultimate strength as 317MPa and 437MPa, respectively. And fatigue test of load-control with 20Hz frequency was performed.

  • PDF

PET 기질의 전처리효과가 상온 ECR 화학증착법에 의해 증착된 구리박막의 계면접착력에 미치는 영향 (Effects of Pretreatments of PET Substrate on the Adhesion of Copper Films Prepared by a Room Temperature ECR-MOCVD Method)

  • 현진;전법주;변동진;이중기
    • 한국재료학회지
    • /
    • 제14권3호
    • /
    • pp.203-210
    • /
    • 2004
  • Effects of various pretreatments on the adhesion of copper-coated polymer films were investigated. Copper-coated polymer films were prepared by an electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) coupled with a DC bias system at room temperature. PET(polyethylene terephthalate) film was employed as a substrate material and it was pretreated by industrially feasible methods such as chromic acid, sand-blasting, oxygen plasma and ion-implantation treatment. Surface characterization of the copper-coated polymer film was carried out by AFM(Atomic Force Microscopy) and FESEM(Field Emission Scanning Electron Microscopy). Surface energy was calculated by based on the value of the contact angle measured. The adhesion of copper/PET films was determined by a pull-off test according to ASTM D-5179. It was found that suitable pretreatment of the PET substrate was required for obtaining good adhesion property between copper films and the substrate. In this study the highest adhesion was observed in sand-blasting, and then followed by those of acid and oxygen plasma treatment. However, the effect of surface energy was insignificant in our experimental range. This is probably due to compensating the difference in surface energy from various pretreatments by exposing substrate to ECR plasma for 5 min or longer at the early stage of the copper deposition. Therefore, it can be concluded that surface roughness of the polymer substrate plays an important role to determine the adhesion of copper-coated polymer for the deposition of copper by ECR-MOCVD.

차세대 반도체 소자의 배선을 위한 구리박막의 reflow (Reflow of copper film for the interconnection of the next generation semiconductor devices)

  • 김동원;김갑중;권인호;이승윤;라사균;박종욱
    • 한국진공학회지
    • /
    • 제6권3호
    • /
    • pp.206-212
    • /
    • 1997
  • 차세대 반도체 소자의 배선재료로 사용될 것으로 예상되는 구리의 reflow 특성을 조 사하였다. 구리박막을 hole 및 trench 패턴 위에 금속유기화학증착법으로 증착하고 $350^{\circ}C$에 서 $550^{\circ}C$까지의 열처리 온도 범위 및 질소, 산소 분위기에서 열처리하였다. 질소 분위기에서 열처리 한 경우에는 구리가 패턴을 채우지 못하였고 열처리 온도 $450^{\circ}C$ 이상의 산소 분위기 에서 열처리 한 경우에는 reflow에 의하여 구리가 패턴을 채웠다. 이러한 현상은 구리의 산 화시 발생되는 열에 의하여 부분적으로 액상화된 구리가 표면에너지 및 위치에너지를 감소 시키기 위하여 패턴을 채우면서 발생하는 것으로 생각된다. 산소 분위기에서 열처리한 경우 에는 응집물 표면에 300$\AA$이하의 구리 산화물이 형성되었으며 열처리 온도 $550^{\circ}C$에서 구리 의 응집에 의하여 비저항이 급격하게 증가하였다.

  • PDF

유기 반도체 CuPccp LB초박막의 제작 및 특성 (Fabrication and Properties of Organic Semiconductor CuPccp LB Thin Film)

  • 조민재;쑤양싸이양;이진수;안다현;정치섭
    • 센서학회지
    • /
    • 제28권1호
    • /
    • pp.23-29
    • /
    • 2019
  • A copper tetracumylphenoxy phthalocyanine (CuPccp) thin film was formed on an organic insulator film by Langmuir-Blodgett (LB) deposition for gas sensor fabrication. To increase the reproducibility of film transfer, stearyl alcohol was used as a transfer promoter. The structural properties of the CuPccp layers were optically monitored through attenuated total reflection and polarization-modulated ellipsometry techniques. The average thickness of a single layer of the CuPccp LB film was measured to be 2.5 nm. Despite the role of the transfer promoter, the stability of the layer transfer was not sufficient to ensure homogeneity of the LB film. This was probably due to the presence of aggregates in the molecular structure of the CuPccp LB film. Nevertheless, copper phthalocyanine polymorphism can be greatly suppressed by the LB arrangement, which appears to contribute to the improvement of electrical conductivity. The p-type semiconductor characteristics were confirmed by Hall measurements from the CuPccp LB films.

무전해 동도금 피막의 접착력 향상에 관한 연구 - PET 필름의 전처리 조건의 영향 - (Adhesion Improvement of Electroless Copper Plated Layer on PET Film - Effect of Pretreatment Conditions -)

  • 오경화;김동준;김성훈
    • 폴리머
    • /
    • 제25권2호
    • /
    • pp.302-310
    • /
    • 2001
  • 무전해도금법을 이용하여 구리/PET 필름 복합재료를 제조하였으며 에칭방법과 촉매액의 조성 및 acceleration 방법을 달리하여 PET 필름과 무전해도금된 구리 피막간의 접착력을 향상시키고자 하였다. HCl 용액으로 에칭된 PET 필름은 NaOH에 의한 것보다 더욱 세밀하게 에칭되어져 구리와 PET 필름간의 접착력은 향상되었으나 전자파 차폐효과는 유사한 경향을 보였다. 촉매액의 조성변화에 따른 영향을 살펴본 결과 PdCl$_2$:SnCl$_2$의 몰비가 1:4에서 1:16으로 증가할수록 PET 필름 위에 적층된 Pd/Sn 콜로이드 입자들의 크기가 감소하며 고르게 분포되는 경향을 보였다. 따라서 이들의 몰비가 증가할수록 구리도금이 균일하고 조밀하게 이루어져 접착력 및 차폐효과가 증가하였다. 또한 NaOH보다 HCl로 acceleration한 경우 촉매 입자의 크기가 작고 더 균일하게 분포되어 우수한 접착력과 도금물성을 나타내었다.

  • PDF

고온용 플라스틱 필름 수위 센서 개발 (Development of Plastic Film Type Water Level Sensor for High Temperature)

  • 이영태
    • 반도체디스플레이기술학회지
    • /
    • 제18권4호
    • /
    • pp.124-128
    • /
    • 2019
  • In this paper, a high temperature plastic film type water level sensor was developed. The high temperature film type water level sensor was manufactured by attaching a copper film to a polyimide film which can be used for a long time at 250℃, by laminating process and patterning the electrode by etching process. For the performance evaluation of the developed film type water level sensor, the temperature dependence of the capacitance was measured, and the deformation was examined after standing for 8 hours in 150℃ air. The developed film type water level sensor can be used at up to 150℃, and can be applied to electric ports and steam devices.

진공열증착으로 성막된 산화구리 박막의 p-형 전도특성 (P-type transport characteristics of copper-oxide thin films deposited by vacuum thermal evaporation)

  • 이호년;송병준
    • 한국산학기술학회논문지
    • /
    • 제12권5호
    • /
    • pp.2267-2271
    • /
    • 2011
  • p-채널 박막트랜지스터에 이용할 수 있는 p-형 산화구리 박막반도체를 얻기 위한 연구를 하였다. 진공열증착방법으로 산화구리 박막을 성막하였으며, 증착 후 열처리 조건을 조절하여 박막트랜지스터의 활성층에 적용 가능한 특성을 가지는 산화구리 박막반도체를 얻었다. 열처리 전에 $10^{22}\;cm^{-3}$ 수준의 전자 이송자농도를 가지던 n-형 박막이 열처리 조건을 최적화함에 따라 $10^{16}\;cm^{-3}$ 수준의 정공 이송자농도를 가지는 p-형 산화물반도체 박막으로 변화하였다.

Cu2O Thin Film Photoelectrode Embedded with CuO Nanorods for Photoelectrochemical Water Oxidation

  • Kim, Soyoung;Kim, Hyojin
    • 한국표면공학회지
    • /
    • 제52권5호
    • /
    • pp.258-264
    • /
    • 2019
  • Assembling heterostructures by combining dissimilar oxide semiconductors is a promising approach to enhance charge separation and transfer in photoelectrochemical (PEC) water splitting. In this work, the CuO nanorods array/$Cu_2O$ thin film bilayered heterostructure was successfully fabricated by a facile method that involved a direct electrodeposition of the $Cu_2O$ thin film onto the vertically oriented CuO nanorods array to serve as the photoelectrode for the PEC water oxidation. The resulting copper-oxide-based heterostructure photoelectrode exhibited an enhanced PEC performance compared to common copper-oxide-based photoelectrodes, indicating good charge separation and transfer efficiency due to the band structure realignment at the interface. The photocurrent density and the optimal photocurrent conversion efficiency obtained on the CuO nanorods/$Cu_2O$ thin film heterostructure were $0.59mA/cm^2$ and 1.10% at 1.06 V vs. RHE, respectively. These results provide a promising route to fabricating earth-abundant copper-oxide-based photoelectrode for visible-light-driven hydrogen generation using a facile, low-cost, and scalable approach of combining electrodeposition and hydrothermal synthesis.