Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 1997.04a
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- Pages.362-365
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- 1997
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- 2005-8446(pISSN)
The Development of Micro Wiring System for Micro Active Endoscope
박막 공정을 이용한 초소형 내시경의 MicroWiring System의 개발
- Jung, Seok (Seoul National Univ. Dept. of Mechanical Design and Production Engineering) ;
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Chang, Jun-Keun
(Seoul National Univ. Inst. of Advanced Machinary and Design) ;
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Han, Dong-Chul
(Seoul National Univ. Dept. of Mechanical Design and Production Engineering)
- Published : 1997.04.01
Abstract
In the field of Micro-Mechanics, it has been known diffcult to integrate the micro-machine with sensor and source line for the conventional copper line cnanot be used in compact and small size. We developed a system to make thethin copper film as a connect line on the poyurethane pipe (2mm in diameter) by the evaporation technique. This system consists of an evaporation chamber two long branches, substrate hoider and a Linear-Rotary motion feed feedthrough. The results showed that thin copper film coated polyurethanc pipe could be applied th the small medical devices such as the micro active endoscope.