The Development of Micro Wiring System for Micro Active Endoscope

박막 공정을 이용한 초소형 내시경의 MicroWiring System의 개발

  • Jung, Seok (Seoul National Univ. Dept. of Mechanical Design and Production Engineering) ;
  • Chang, Jun-Keun (Seoul National Univ. Inst. of Advanced Machinary and Design) ;
  • Han, Dong-Chul (Seoul National Univ. Dept. of Mechanical Design and Production Engineering)
  • 정석 (서울대학교 기계설계학과) ;
  • 장준근 (서울대학교 정밀 기계설계 공동 연구소) ;
  • 한동철 (서울대학교 기계설계학과)
  • Published : 1997.04.01

Abstract

In the field of Micro-Mechanics, it has been known diffcult to integrate the micro-machine with sensor and source line for the conventional copper line cnanot be used in compact and small size. We developed a system to make thethin copper film as a connect line on the poyurethane pipe (2mm in diameter) by the evaporation technique. This system consists of an evaporation chamber two long branches, substrate hoider and a Linear-Rotary motion feed feedthrough. The results showed that thin copper film coated polyurethanc pipe could be applied th the small medical devices such as the micro active endoscope.

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