• Title/Summary/Keyword: Copper/low k

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Research on the copper diffusion process in germanium metal induced crystallization by different thickness and various temperature

  • Kim, Jinok;Park, Jin-Hong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.289.1-289.1
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    • 2016
  • Germanium (Ge) with higher carrier mobility and a lower crystallization temperature has been considered as the channel material of thin-film transistors for display applications. Various methods were studied for crystallizaion of poly-Ge from amorphous Ge at low temperature. Especially Metal induced crystalliazation (MIC) process was widely studied because low process cost. In this paper, we investigate copper diffusion process of different thick (70 nm, 350 nm) poly-Ge film obtained by MIC process at various temperatures (250, 300, and $350^{\circ}C$) through atomic force microscopy (AFM), Raman spectroscopy, and secondary ion mass spectroscopy (SIMS) measurement. Crystallization completeness and grain size was similar in all the conditions. Copper diffusion profile of 370 nm poly-Ge film show simirly results regardless of process temperature. However, copper diffusion profile of 70 nm poly-Ge film show different results by process temperature.

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A novel low resistivity copper diffusion joint for REBa2Cu3O7-δ tapes by thermocompression bonding in air

  • Wei, Ren;Zhen, Huang;Fangliang, Dong;Yue, Wu;Zhijian, Jin
    • Progress in Superconductivity and Cryogenics
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    • v.24 no.4
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    • pp.16-24
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    • 2022
  • Applications of REBa2Cu3O7-δ tapes require joints with a simple manufacturing process, low resistance and good mechanical properties. In the present study, we successfully developed a copper diffusion joint between Cu-stabilized REBa2Cu3O7-δ tapes that meets the above requirements without solder simply by applying flux, heat and pressurization. After a 3 min thermocompression process at approximately 150 δ and 336 MPa in air, two tapes were directly connected between Cu stabilizers by copper diffusion, which was proven by microstructure analysis. The specific resistivity of the copper diffusion joint reached 5.8 nΩ·cm2 (resistance of 0.4 nΩ for a 306 mm splicing length) at 77 K in the self-field. The axial tensile stress reached 200 N without critical current degradation. The results show promise for the preparation of copper diffusion joints to be used in coils, attached tapes, and wire/cable terminals.

A STUDY ON THE CORROSION BEHAVIOUR OF AMALGAMS BY USING OF POTENTIOSTATIC POLARIZATION METHOD (정전압 분극곡선법에 의한 아말감의 부식 거동에 관한 연구)

  • Shin, Dong-Hoon;Um, Chung-Moon
    • Restorative Dentistry and Endodontics
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    • v.12 no.1
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    • pp.39-49
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    • 1986
  • The purpose of this study was to observe characteristic properties through the polarization curves and SEM images from 4 different types of amalgam obtained by using the potentiostats (Princeton EG & G) & SEM (Jeol/35), and to investigate the degree of corrosion on the oxidation peak of the each phase of amalgam. After each amalgam alloy and Hg was triturated as the direction of the manufacturer by means of the mechanical amalgamator (Shofu Co.), the triturated mass was inserted into the cylindrical metal mold which was 12mm in diameter and 10.0mm in height and was condensed by using routine manner. The specimen was removed from the mold and stored at room temperature for about 24 hours. The standard surface preparation was routinely carried out. Anodic polarization measurement was employed to confirm the corrosion behaviour of the amalgams in a 0.9% saline solution (P.H: 6.8-7.0) at $37^{\circ}C$. The initial rest potential (corrosion potential) was determined after 30 minutes of immersion of specimen in electrolyte, and the potential scan was begun at the point of 100mV cathodic from the corrosion potential. The scan rate was 0.17mV/sec. in the study to observe the degree of corrosion of each phase. SEI and EPMA images on the determined oxidation peaks of each amalgam were observed. The results were as follows: 1. In the four anodic polarization curves, low copper amalgams have three oxidation peaks and high copper amalgams have two oxidation peaks, -270mV, +26mV and +179mV(SEC) in the low copper lathe cut, and -300mV, +39mV and +163mV(SEC) in the low copper spherical. -4mV and +154mV(SEC) in the Dispersalloy, and +17mV and +180mV(SEC) in the Tytin as high copper amalgams. 2. ${\gamma}_2$ phase in the low copper amalgam and ${\eta}$ phase in the high copper amalgam were the most corrodible phases and Ag-Cu eutectic in high copper amalgam was the most slowly corroded phase. 3. Low copper amalgam was more susceptible in corrosion than high copper amalgam.

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Low Temperature Debinding Process Using Oxygen Plasma for Flexible Printed Electronics

  • Lee, Young-In
    • Journal of Powder Materials
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    • v.19 no.5
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    • pp.343-347
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    • 2012
  • In this study, an oxygen plasma treatment was used as a low temperature debinding method to form a conductive copper feature on a flexible substrate using a direct printing process. To demonstrate this concept, conductive copper patterns were formed on polyimide films using a copper nanoparticle-based paste with polymeric binders and dispersing agents and a screen printing method. Thermal and oxygen plasma treatments were utilized to remove the polymeric vehicle before a sintering of copper nanoparticles. The effect of the debinding methods on the phase, microstructure and electrical conductivity of the screen-printed patterns was systematically investigated by FE-SEM, TGA, XRD and four-point probe analysis. The patterns formed using oxygen plasma debinding showed the well-developed microstructure and the superior electrical conductivity compared with those of using thermal debinding.

Effects of Concentration of Electrolytes on the Electrochemical Properties of Copper (전해액의 농도가 Cu 전극의 전기화학적 특성에 미치는 영향)

  • Lee, Sung-Il;Park, Sung-Woo;Han, Sang-Jun;Lee, Young-Kyun;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.82-82
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    • 2007
  • The chemical mechanical polishing (CMP) process has been widely used to obtain global planarization of multilevel interconnection process for ultra large scale. integrated circuit applications. Especially, the application of copper CMP has become an integral part of several semiconductor device and materials manufacturers. However, the low-k materials at 65nm and below device structures because of fragile property, requires low down-pressure mechanical polishing for maintaining the structural integrity of under layer during their fabrication. In this paper, we studied electrochemical mechanical polishing (ECMP) as a new planarization technology that uses electrolyte chemistry instead of abrasive slurry for copper CMP process. The current-voltage (I-V) curves were employed we investigated that how this chemical affect the process of voltage induced material removal in ECMP of Copper. This work was supported by grant No. (R01-2006-000-11275-0) from the Basic Research Program of the Korea Science.

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A Study on the Cu2+ Behavior in Activated Sludge Process (활성슬러지공정에서 구리의 거동에 관한 연구)

  • Park, Jin-Do;Lee, Hak-Sung
    • Journal of Environmental Science International
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    • v.19 no.9
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    • pp.1119-1127
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    • 2010
  • The behavior of copper throughout the whole process of wastewater treatment plant that uses the activated sludge process to treat the wastewater of petrochemical industry that contains low concentration of copper was investigated. Total inflow rate of wastewater that flows into the aeration tank was $697\;m^3$/day with 0.369 mg/L of copper concentration, that is, total copper influx was 257.2 g/day. The ranges of copper concentrations of the influent to the aeration tank and effluent from the one were 0.315 ~ 0.398 mg/L and 0.159 ~ 0.192 mg/L, respectively. The average removal rate of copper in the aeration tank was 50.8 %. The bioconcentration factor (BCF) of copper by microbes in the aeration tank was 3,320. The accumulated removal rate of copper throughout the activated sludge process was 71.3%, showing a high removal ratio by physical and chemical reactions in addition to biosorption by microbes. The concentration of copper in the solid dehydrated by filter press ranged from 74.8 mg/kg to 77.2 mg/kg and the concentration of copper by elution test of waste was 2.690 ~ 2.920 mg/L. It was judged that the copper concentration in dehydrated solid by bioconcentration could be managed with the control of that in the influent.

Cu-SiO2 Hybrid Bonding (Cu-SiO2 하이브리드 본딩)

  • Seo, Hankyeol;Park, Haesung;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.1
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    • pp.17-24
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    • 2020
  • As an interconnect scaling faces a technical bottleneck, the device stacking technologies have been developed for miniaturization, low cost and high performance. To manufacture a stacked device structure, a vertical interconnect becomes a key process to enable signal and power integrities. Most bonding materials used in stacked structures are currently solder or Cu pillar with Sn cap, but copper is emerging as the most important bonding material due to fine-pitch patternability and high electrical performance. Copper bonding has advantages such as CMOS compatible process, high electrical and thermal conductivities, and excellent mechanical integrity, but it has major disadvantages of high bonding temperature, quick oxidation, and planarization requirement. There are many copper bonding processes such as dielectric bonding, copper direct bonding, copper-oxide hybrid bonding, copper-polymer hybrid bonding, etc.. As copper bonding evolves, copper-oxide hybrid bonding is considered as the most promising bonding process for vertically stacked device structure. This paper reviews current research trends of copper bonding focusing on the key process of Cu-SiO2 hybrid bonding.

Predictions of Fatigue Life of Copper Alloy for Regenerative Cooling Channel of Thrust Chamber (연소기 재생냉각 채널용 구리합금의 피로수명예측)

  • Lee, Keumoh;Ryu, Chulsung;Heo, Seongchan;Choi, Hwanseok
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.6
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    • pp.73-82
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    • 2017
  • Low-cycle thermal fatigue problem resulting from multiple use of a liquid rocket engine has to be considered for the development of a reusable launch vehicle. In this study, life prediction equations suggested by previous researchers were compared as applied to various copper alloy cases to predict fatigue lives from tensile test data. The present study has revealed that among the presently considered life prediction methods, universal slopes method provides the best life prediction result for the copper alloys, and the modified Mitchell's method provides the best life prediction result for oxygen free high conductivity (OFHC) copper.

Corrosion behavior induced by LiCl-KCl in type 304 and 316 stainless steel and copper at low temperature

  • Sim, Jee-Hyung;Kim, Yong-Soo;Cho, Il-Je
    • Nuclear Engineering and Technology
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    • v.49 no.4
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    • pp.769-775
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    • 2017
  • The corrosion behavior of stainless steel (304 and 316 type) and copper induced by LiCl-KCl at low temperatures in the presence of sufficient oxygen and moisture was investigated through a series of experiments (at $30^{\circ}C$, $40^{\circ}C$, $60^{\circ}C$, and $80^{\circ}C$ for 24 hours, 48 hours, 72 hours, and 96 hours). The specimens not coated on one side with an aqueous solution saturated with LiCl-KCl experienced no corrosion at any temperature, not even when the test duration exceeded 96 hours. Stainless steel exposed to LiCl-KCl experienced almost no corrosion below $40^{\circ}C$, but pitting corrosion was observed at temperatures above $60^{\circ}C$. As the duration of the experiment was increased, the rate of corrosion accelerated in proportion to the temperature. The 316 type stainless steel exhibited better corrosion resistance than did the 304 type. In the case of copper, the rate of corrosion accelerated in proportion to the duration and temperature but, unlike the case of stainless steel, the corrosion was more general. As a result, the extent of copper corrosion was about three times that of stainless steel.

A Study on the Selective Leaching of the Copper Component by Sulfation Process (황산화 배소법에 의한 구리성분의 선택적 침출연구)

  • Kim, Woo Jin;Kim, Joon Soo;Kim, Myong Jun;Tran, Tam;Lee, Jin-Young;Shin, Shun-Myung
    • Resources Recycling
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    • v.25 no.5
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    • pp.57-63
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    • 2016
  • This study were carried out sulfation roasting and selective leaching test for the effective recovery of copper component in concentrate obtained by froth floatation of Autrallian low grade copper ore. The optimum conditions of sulfation roasting were temp. $450^{\circ}C$, $Na_2SO_4$ 2 mole ratio and time 1.5 h, and then selective leaching were room temperature and $H_2O$ or 1M $H_2SO_4$ solutions. Leaching efficiency of optimum sulfation product were 90 wt.% of copper, 20 wt.% of iron and 15wt.% of nickel elements. In this results, it was possible to selective decomposition leaching of the copper component under optimum conditions in this research.