• 제목/요약/키워드: Control of process

검색결과 14,988건 처리시간 0.052초

Real-time In-situ Plasma Etch Process Monitoring for Sensor Based-Advanced Process Control

  • Ahn, Jong-Hwan;Gu, Ja-Myong;Han, Seung-Soo;Hong, Sang-Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제11권1호
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    • pp.1-5
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    • 2011
  • To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

Process Control Using n Neural Network Combined with the Conventional PID Controllers

  • Lee, Moonyong;Park, Sunwon
    • Transactions on Control, Automation and Systems Engineering
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    • 제2권3호
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    • pp.196-200
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    • 2000
  • A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used fur on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.

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Process Control Using a Neural Network Combined with the Conventional PID Controllers

  • Lee, Moonyong;Park, Sunwon
    • Transactions on Control, Automation and Systems Engineering
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    • 제2권2호
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    • pp.136-139
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    • 2000
  • A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used for on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.

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The 2-DOF Control system design for Quadruple-Tank process using Root Locus Technique.

  • Arjin, Numsomran;Thanit, Trisuwannawat;Kitti, Tirasesth
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.1371-1374
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    • 2004
  • The control system design of 2-DOF for SISO process by root locus technique is not complicated and efficiently. It can design the control system to have the transient and steady state responses, and do not adjust the gain of process controller later. However, due to control system design for MIMO process, by root locus technique, there is not exact method. This paper is presents the control system design method for Quadruple-Tank Process, by using root locus technique for the structure of 2-DOF control system. The design procedures are first decentralized then using the relative gain array, and finally 2-DOF controller design is applied.

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SLIDING MODE MOULD LEVEL CONTROL IN CONTINUOUS CASTING PROCESS

  • Kueon, Yeong-Seob
    • 한국생산제조학회지
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    • 제7권4호
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    • pp.50-55
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    • 1998
  • Mould level control system for continuous casting process involves stick-slip friction in the sliding gate , time-delay, non-linearity, and certain uncertainties such as friction force variations between molten steel and the inner wall of mould. In this paper, sliding mode control technique was used to solve these complex control problem. The controller is then designed and implemented onto the continuous casting process. Testing result shows that sliding mode controller can decrease the fluctuating magnitude of the mould level and is superior to the existing PID controller.

필드버스를 이용한 공정제어 (Process Control Using Fieldbus)

  • 김영효;한헌수
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2003년도 추계학술대회
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    • pp.113-117
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    • 2003
  • In the industrial field nowadays the information that needs to be handled arc increasing and requires faster speed in contrast with PLC(Programmable Logic Controller) or DCS(Distributed Control System) based control systems these days. The work environment these days are mostly based on PC, so the control systems are wanted in PC. At Fieldbus used automated systems performing distributed process control by PC performs and combines into one system in order to maximize the increase of productivity, lower the expense, planning constructing and maintaining the reliance of automation. These latest automation systems unites process, makes distributed control process able, and can control and supervise at remote PC.

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다변량 공정관리 기술과 추세알고리즘의 연계에 관한 조사연구 (A Study on the Relation between Multivariate Process Control Techniques and Trend Algorithm)

  • 정해운
    • 대한안전경영과학회지
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    • 제13권4호
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    • pp.225-235
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    • 2011
  • Autoregressed Controller, which have trend algorithm, seeks to minimize variability by transferring the output variable to the related process input variable, while multivariate process control techniques seek to reduce variability by detecting and eliminating assignable causes of variation. In the case of process control, a very reasonable objective is to try to minimize the variance of the output deviations from the target or set point. We also investigate algorithm with relevant Shewhart chart, Theoretical control charts, precontrol and process capability. To help the people who want to make the theoretical system, we compare the main techniques in "a study on the relation between multivariate process control techniques and trend algorithms".

불명확한 공정정보 처리를 위한 퍼지-통계적 관리도의 개발 (Development of Fuzzy-Statistical Control Chart for Processing Uncertain Process Information)

  • 김경환;하성도
    • 한국정밀공학회지
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    • 제15권2호
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    • pp.75-80
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    • 1998
  • Process information is known to have the continuous distribution in many manufacturing processes. Generalized p-chart has been developed for controlling processes by classifying the information characteristics into several groups. But it is improper to describe continuous processes with the classified process informal ion, which is based on the classical set concept. Fuzzy control chart, has been developed for the control of linguistic data, but it is also based on the dichotomous notion of classical set theory. In this paper, fuzzy sampling method is studied in order to process the uncertain data properly. The method is incorporated with the fuzzy control chart. Statistical characteristics of the fuzzy representative value are utilized to device the fuzzy-statistical control chart. The fuzzy-statistical control chart is compared with the generalized p-chart and both the sensitivity to the process information distribution change pared robustiness against the noise on the process information of the fuzzy-statistical control chart are shown to be superior.

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Improvement of the Automobile Control Software Testing Process Using a Test Maturity Model

  • Jang, Jin-Wook
    • Journal of Information Processing Systems
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    • 제14권3호
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    • pp.607-620
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    • 2018
  • The problem surrounding methods of implementing the software testing process has come under the spotlight in recent times. However, as compliance with the software testing process does not necessarily bring with it immediate economic benefits, IT companies need to pursue more aggressive efforts to improve the process, and the software industry needs to makes every effort to improve the software testing process by evaluating the Test Maturity Model integration (TMMi). Furthermore, as the software test process is only at the initial level, high-quality software cannot be guaranteed. This paper applies TMMi model to Automobile control software testing process, including test policy and strategy, test planning, test monitoring and control, test design and execution, and test environment goal. The results suggest improvement of the automobile control software testing process based on Test maturity model. As a result, this study suggest IT organization's test process improve method.

칼만 필터와 뉴럴 네트워크 모델링을 이용한 연속생산공정의 통계적 공정관리 시스템 (Statistical Process Control System for Continuous Flow Processes Using the Kalman Filter and Neural Network′s Modeling)

  • 권상혁;김광섭;왕지남
    • 한국정밀공학회지
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    • 제15권3호
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    • pp.50-60
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    • 1998
  • This paper is concerned with the design of two residual control charts for real-time monitoring of the continuous flow processes. Two different control charts are designed under the situation that observations are correlated each other. Kalman-Filter based model estimation is employed when the process model is known. A black-box approach, based on Back-Propagation Neural Network, is also applied for the design of control chart when there is no prior information of process model. Performance of the designed control charts and traditional control charts is evaluated. Average run length(ARL) is adopted as a criterion for comparison. Experimental results show that the designed control chart using the Neural Network's modeling has shorter ARL than that of the other control charts when process mean is shifted. This means that the designed control chart detects the out-of-control state of the process faster than the others. The designed control chart using the Kalman-Filter based model estimation also has better performance than traditional control chart when process is out-of-control state.

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