• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2006.06a
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• pp.149-150
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• 2006

Displayed result that handle particle contaminant and hydrospace organism included in number of ballast that is happened in ship using automatic back washing filter. Reason that remove first contaminant that is included in number of ballast is that heighten processing effect of after processing process. of the filter. Another advantage is to drop oft the solids with controlling revolution of drum screen in pretreatment filtration process. The fact that it is easy to attach and detach a several type of screen for getting the expected water quality is another advantage. Filter rotation speed at 1.0rpm is filter resistance 3.0bar and 3.0rpm is filter resistance 2.8bar. Filter out impurities from ballast water over 6.0rpm is filter resistance 2.6bar and 10rpm is filter resistance 2.5bar. Filtration system removal aquatic organism over $80{\mu}m$ in ballast water. This study shows that the filtration treatment system has a potential for the treatment of ballast water.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.1
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• pp.66-71
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• 2004

Airborne contaminant particles are intruded into optical disk drive(ODD) due to the flow caused by disk rotation and can be adhered to objective lens, which causes read/write errors. Such a phenomenon can be a serious problem for high-density storage devices. The purpose of this paper is to understand the effect of particle contamination of objective lens in a CD-ROM drive on laser diode power and photo diode RF signal. The measurements of laser power and readout RF signal were carried out by using a laser power meter and a time interval analyzer, respectively. The parameters for estimating a readout-signal' distortion were its jitter and amplitude. Alumina(Al$_2$O$_3$) particles were used as test dust particles. The results show that the failure for data access happened as the degree of lens contamination was greater than 20％.

• Particle and aerosol research
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• v.18 no.4
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• pp.129-136
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• 2022

The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

• Journal of Ocean Engineering and Technology
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• v.16 no.5
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• pp.41-48
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• 2002

Numerical experiments are conducted using a three-dimensional baroclinic equation model and a Lagrangian method for clarifying the effect of th settling velocity on the suspended solids diffusion caused by the dredging and the reclamination works. Diffusion characteristics of the neutral particles and the weighting particles is experimented by the Lagrangian particles trajectory model, The results show that the diffusion characteristics of the suspended solids is effected by the settling velocity classified by the particles size in the density layered semi-closed bay. To estimate exactly the diffusion characteristics of the suspended solids and the contaminant with weight the three-dimensional baroclinic equation model and the three-dimensional Lagrangian particles trajectory model considering the settling velocity of the particle in the density layered semi-closed bay must be used.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1887-1889
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• 2002

One of the most frequent sources of the accident is metal contaminant in GIS. This paper deals with the characteristics of breakdown voltage of metallic particles using electrodes of various epoxy coating thickness. As experimental results, breakdown voltage of the thickly coated electrode is higher than that of thinly coated electrode. It is considered that resistance of the epoxy coating impedes the development of pre-discharges in the gas.

• Journal of Drive and Control
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• v.9 no.2
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• pp.28-38
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• 2012

Monitoring of system cleanliness levels and counting of particulate contaminant are fundamental to achieving hydraulic system reliability as any departure from the specified cleanliness level is often a precursor to future failures. On-line monitoring of cleanliness levels has the advantage of giving data both very quickly and accurately as environmental influences are eliminated. In this way, corrective actions can be promptly implemented. Most on-line instruments are sensitive to system conditions to a greater or lesser extent, but Automatic Particle Counters (APCs) working on light extinction principles are especially sensitive to the presence of optical interfaces caused by such conditions as fluid mixtures, emulsions, free water and air bubbles. These conditions give erroneous data and can result in drawing incorrect conclusions, wasting maintenance time and ultimately, reduced user confidence in cleanliness monitoring. This paper describes such conditions and shows how the correct selection of the analysis technique can result in reliable cleanliness level data.

• Laser Solutions
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• v.12 no.4
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• pp.17-25
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• 2009

The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.5
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• pp.207-215
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• 2000

This study theoretically investigated the roll-off cleanliness operation to eliminate the built-in contaminants which are primarily the result of manufacturing and assembly procedures first. A rigorous analytical examination of the cleaning process associated with hydraulic systems was performed by developing the general filtration process equations. The sloughing process by which built-in contaminant is entrained in the system fluid was examined during the development of a general analytical expression for sloughing rate. This sloughing rate expression in conjunction with the filtration process equations have lead to a relationship rate expression in conjunction with the filtration process equations have lead to a relationship which describes the flushing and clean-up operation for the hydraulic systems. The effects of the primary roll-off cleanliness factors was discussed and illustrated on the figures. Then, the analytical results was shown to be usefully applied into the design of roll-off flushing equipment for the hydraulic system of a tractor.

• Journal of Navigation and Port Research
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• v.30 no.3 s.109
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• pp.241-245
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• 2006

Displayed result that handle particle contaminant and hydrospace organism included a number of ballast that is happened in ship using automatic back washing filter. Reason that removes first contaminant that is included in number of ballast is that heighten processing effectof after processing processof the filter. Another advantage is to drop off the solids with controlling revolution of drum screen in pretreatment filtration process. The fact that it is easy to attach and detach a several type of screen for getting the expected water quality is another advantage. Filter rotation speed of filtration filter could be expose by 35mmHg more than 60 rpm and filter consecutively filtration pressure is 40.5mmHg in 20 rpm and 40 rpm are 36.6mmHg. Filtration system removal aquatic organism over $70{\mu}min$ ballast water. This study shows that the filtration treatment system has a potential for the treatment of ballast water.