• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.

• 한국근적외분광분석학회:학술대회논문집
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• 한국근적외분광분석학회 2001년도 NIR-2001
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• pp.1524-1524
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• 2001

A previous paper(Ito et al., 2000) has described the improvement of the standard error(SEC and SEP) of the predicted soluble solids(Brix) in a melon cultivar by non-contact mode with a fiber optic probe. Then we examined the immature and mature fruits. The objective of this study was to determine if non-contact mode could improve the standard error of the predicted Brix of matured melon fruits from cross progeny as well as the contact mode(usual method). The optical absorption spectrum was measured using a NIR Systems model 6500 spectrophotometer. A commercial spectral program(NSAS ver. 3.27) was used for multiple linear regression analysis. Absorbances of 902 and in the vicinity of 877 nm were included as the independent variables in both multiple regression equations. These wavelengths are key wavelengths for non-destructive Brix determination. When the results for the contact mode and non-contact mode are compared, the latter mode improved the former standard error(SEP and RMS).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.463-464
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• 2006

This paper present experimental results by non-contact mode Atomic Force Microscopy using high aspect ratio tips (HAR-T). We fabricated the carbon nanotube tip based on dielectrophoresis and the carbon nano probe by focused ion beam after dielectrophoretic assembling. In this paper, we measure AAO sample and trench structure to estimate HAR-T's performance and compared with conventional Si tip. We confirmed that results of HAR-T's performance in non contact mode was very superior than conventional tip.

• 한국소음진동공학회논문집
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• 제14권6호
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.263-268
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• 2003

This paper presents a result of performance evaluation fur non-contact scanning probe microscopy with respect to the vibration characteristics of cantilevers with tips. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made fur the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.73-76
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• 2004

Tapping mode atomic force microscopy (TM-AFM) utilizes the dynamic response of a resonating probe tip as it approaches and retracts from a sample to measure the topography and material properties of a nanostructure. We present recent results based on numerical techniques that yield new perspectives and insight into AFM. It is compared that the dynamic models including van der Waals and Derjaguin-Muller-Toporov(DMT) or Johnson-Kendall-Roberts(JKR) contact forces demonstrates that periodic solutions can be represented with respect to the approach distance and excitation frequency.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.330-333
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• 2005

The fabrication of mold fur nano imprint lithography (NIL) is experimentally reported using the scanning probe lithography (SPL) technique, instead of the conventional I-beam lithography technique. The nanometer scale patterning structure is fabricated by the localized generation of oxide patterning on the silicon (100) wafer surface with a thin oxide layer, The fabrication method is based on the contact mode of scanning probe microscope (SPM) in air, The precision cleaning process is also performed to reach the low roughness value of $R_{rms}=0.084 nm$, which is important to increase the reproducibility of patterning. The height and width of the oxide dot are generated to be 15.667 nm and 209.5 nm, respectively, by applying 17 V during 350 ms.

• ETRI Journal
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• 제26권3호
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• pp.189-194
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• 2004

We demonstrate a high-speed recording based on field-induced manipulation in combination with an optical reading of recorded bits on Au cluster films using the atomic force microscope (AFM) and the near-field scanning optical microscope (NSOM). We reproduced 50 nm-sized mounds by applying short electrical pulses to conducting tips in a non-contact mode as a writing process. The recorded marks were then optically read using bent fiber probes in a transmission mode. A strong enhancement of light transmission is attributed to the local surface plasmon excitation on the protruded dots.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.185-189
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• 2005

We reported here nano-scale electrical phase-change recording in amorphous $Ge_2Sb_2Te_5$ media using an atomic force microscope (AFM) having conducting probes. In recording process, a pulse voltage is applied to the conductive probe that touches the media surface to change locally the electrical resistivity of a film. However, in contact operation, tip/media wear and contamination could major obstacles, which degraded SNR, reproducibility, and lifetime. In order to overcome tip/media wear and contamination in contact mode operation, we adopted the W incorporated diamond-like carbon (W-DLC) films as a protective layer. Optimized mutilayer media were prepared by a hybrid deposition system of PECVD and RF magnetron sputtering. When suitable electrical pulses were applied to media through the conducting probe, it was observed that data bits as small as 25 nm in diameter have been written and read with good reproducibility, which corresponds to a data density of $1 Tbit/inch^2$. We concluded that stable electrical phase-change recording was possible mainly due to W-DLC layer, which played a role not only capping layer but also resistive layer.

• Progress in Superconductivity
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• 제14권1호
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• pp.1-10
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• 2012

We fabricated a closed coils by using resistive-joint method and the joint resistance of the coils were estimated by field decay technique in liquid nitrogen. We used the Runge-kutta method for the numerical analysis to calculate the decay properties. The closed coil was wound by $(Bi,Pb)_2Sr_2Ca_2Cu_3O_x$/Ag tape. Both ends the tape were overlapped and soldered to each other. The current was induced in a closed coils by external magnetic flux density. Its decay characteristic was observed by means of measuring the magnetic flux density generated by induced current at the center of the closed coil with hall sensor. The joint resistance was calculated as the ratio of the inductance of the loop to the time constants. The joint resistances were evaluated as a function of critical current of loop, contact length, sweep time, and external magnetic flux density in a contact length of 7 cm. It was observed that joint resistance was dependent on contact length of a closed coil, but independent of critical current, sweep time, and external magnetic flux density. The joint resistance was measured to be higher for a standard four-probe method, compared with that for the field decay technique. This implies that noise of measurement in a standard four-probe method is larger than that of field decay technique. It was estimated that joint resistance was $8.0{\times}10^{-9}{\Omega}$ to $11.4{\times}10^{-9}{\Omega}$ for coils of contact length for 7 cm. It was found that 40Pb/60Sn solder are unsuitable for persistent mode.