• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.525-529
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• 1999

A cone shape drum polisher was developed to make up for the demerits of conventional CMP apparatus. The developed equipment has several superiorities. First of all, it can achieve uniform velocity profile on all the contact line because of its shape and easy to control the amount of slurry at the position of use. The whole area of wafer surface is exposed to the visual area except the contact line between wafer and drum, hence we can detect polishing end point more easily than any other polishing equipments. Also it has additional merits such as small foot print and polishing load. Polishing characteristics were investigated by developed equipment.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.38-43
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• 2019

Electrowetting on dielectric (EWOD) is a unique method of shape control of small-volume droplets in microfluidic biochips that relies on modification of surface wetting characteristics using electrical methods. In this study, the droplet shape control on various dielectric surfaces by the EWOD and the effect of droplets on the contact angle as well as the shape were investigated. The droplet used in the experiment was on a sample substrate with $5{\mu}l$ of de-ionized water (DIW) using a micropipette, and wettability was measured with a contact angle meter. This study is expected to be helpful for the development of various micro-total-analysis-systems (${\mu}TAS$) and microfluidic systems with MEMS technology.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• Tribology and Lubricants
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• v.34 no.1
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• pp.23-32
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• 2018

Coupling is a mechanical component that transmits rotational force by connecting two shafts. Curvic coupling is widely used in high-performance systems because of its excellent power transmission efficiency and easy machining. However, coupling applications change dynamic behavior by reducing the stiffness of an entire system. Contact surface stiffness is an important parameter that determines the dynamic behavior of a system. In addition, the roughness profile of a contact surface is the most important parameter for obtaining contact stiffness. In this study, we theoretically establish the process of contact and bending stiffness analysis by considering the rough surface contact at Curvic coupling. Surface roughness parameters are obtained from Nayak's random process, and the normal contact stiffness of a contact surface is calculated using the Greenwood and Williamson model in the elastic region and the Jackson and Green model in the elastic-plastic region. The shape of the Curvic coupling contact surface is obtained by modeling a machined shape through an actual machining tool. Based on this modeling, we find the maximum number of gear teeth that can be machined according to the contact angle. Curvic coupling stiffness is calculated by considering the contact angle, and the calculation process is divided into stick and slip conditions. Based on this process, we investigate the stiffness characteristics according to the contact angle.

• The Journal of Korea Robotics Society
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• v.12 no.3
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• pp.322-331
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• 2017

In this paper we present a novel robotic palpation method for the lump shape estimation using contact pressure distribution. Many previous researches about the robotic palpation have used a stiffness map, which is not suitable to obtain geometrical information of a lump. As a result, they require a large data set and long palpation time to estimate the lump shape. Instead of using the stiffness map, the proposed palpation method uses the difference between the normal force direction and the surface normal to detect the lump boundary and estimate its normal. The palpation trajectory is generated by the normal of the lump boundary to track the lump boundary in real-time. The proposed approach requires small data set and short palpation time for the lump shape estimation since the shape can be directly estimated from the optimally generated palpation trajectory. An experiment result shows that our method can find the lump shape accurately in real-time with small data and short time.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.32-38
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• 2006

During stereolithography processes, the shape errors such as curl distortion and distortion of side face are generated due to the shrinkage of liquid resins. In this study, the effects of dimension of part and structure of supports on the shape error are examined. Cubic specimens which have different thicknesses are manufactured and their deformations are measured with CMM. Thicker part generates smaller curl distortion of top face and larger of bottom face. Also thicker part generates larger distortion of side face until part thickness increases to about 20mm. Larger stiffness of supports which is obtained by shorter spacing of the supports and line type contact instead of point type contact generates smaller shape error of the part.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.813-817
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• 2000

Cam mechanism is one of the common devices used in many automatic machinery. Specially cylindrical cam generates three dimensional motions. Thus, the shape design procedure must have high accuracy. This paper proposes the shape design procedure for a cylindrical cam and follower mechanism using a relative velocity method. The relative velocity method and coordinate transformation are used to find a contact point between cam and follower. Also, the full shape of the cylindrical cam can be generated by using the geometric relationships and the contact constraints. As a result, this paper presents an example for the sape design of the cylindrical cam in order to prove the accuracy of the design procedures.

• Computational Structural Engineering
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• v.6 no.3
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• pp.89-97
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• 1993

General formulation to analyse the rectangular thin plate on a soil medium by energy method is developed. In the problem, Boussinesque's formular needs to be integrated after assuming the contact stress distribution. Two different functions, i.e., power series and Chebychev polynomials are used to approximate the contact stress distribution. It was found that Chebychev polynomials are better function to describe the contact stress than power series. Chebychev polynomials considering stress singularity around plate boundary is recommended as the desirable shape function for future research.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.672-674
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• 2001

Axial magnetic field(AMF) type electrode can increase the interrupting capability of vacuum interrupters. But, this interrupting capability vary with design parameters such as shape of electrode, slits of contact, material of contact and so on. In this paper, shown arc characteristics of unipolar axial magnetic field type electrode for vacuum interrupter by design parameters such as shape of contact slits and diameter of contact. And, confirmed vacuum arc configuration by individual design parameter using high speed camera.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.33B no.2
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• pp.10-19
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• 1996

This paper presents a finger-shaped multisensor system which can measure the tyep and position of a target surface by contactl. The multi-sensor system consists of a sphere-shpaed optical tactile sensor located at the finger tip and a force/torque sensor located at the joint of a finger. The optial tactile sensor determines the type and position of the target surface using the shape and position of the CCD image of the touching area generated by a contact between the sensor and the taget surface. The force/torque sensor also determines the position and surface normal vector by applying the distributionof forces and torques t the contact point to the equations of finger shape. The measurements on the position and surface normal vector at a contact point obtined by two individual sensors are fused using a statistical method. The integrated sensor system has 0.8mm error in position measurement and 1.31$^{\circ}$ error in normal vector measurement. The developed sensor system has many applications, such as autonomous compliance control, automatic grasping and recognition, etc.