• JSTS:Journal of Semiconductor Technology and Science
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• 제13권6호
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• pp.662-667
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• 2013

The effect of fluorine ions, which can be reacted with boron in high-doped BPSG, is investigated on the contact sidewall wiggling profile in semiconductor process. In the semiconductor device, there are many contacts on $p^+/n^+$ source and drain region. However these types of wiggling profile is only observed at the $n^+$ contact region. As a result, we find that the type of plug implantation dopant can affect the sidewall wiggling profile of contact. By optimizing the proper fluorine gas flow rate, both the straight sidewall profile and the desired electrical characteristics can be obtained. In this paper, we propose a fundamental approach to improve the contact sidewall wiggling profile phenomena, which mostly appear in high-doped BPSG on next-generation DRAM products.

• Tribology and Lubricants
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• 제21권6호
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• pp.289-295
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• 2005

Most machine element, such as gears and bearings, are operated in the mixed lubrication region. Contact between two asperities has an effect on machine life by increasing local pressure. To estimate fatigue life exactly, asperity contact should be considered as a factor of fatigue life because this happening produce friction, abrasion and make flash temperature. In this paper, asperity contact is considered as a result of film breakdown when lubricant pressure is not enough to separate two asperities. Contact pressure is calculated to asperity overlap region and added to lubricant pressure. For this model, numerical procedure is introduced and the result on surface roughness and velocity for wheel bearing is presented. Results of EHL analysis for wheel bearing show that asperity contact is occurred at the edge ofEHL conjunction where has a insufficient lubricant pressure to separate two surface.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.616-621
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• 2005

Most machine element, such as gears and bearings, are operated in the mixed lubrication region. Contact between two asperities has an effect on machine life by increasing local pressure. To estimate fatigue lift exactly, asperity contact should be considered as a factor of fatigue liff because this happening produce friction, abrasion and make flash temperature. In this paper, asperity contact is considered as a result of film breakdown when lubricant pressure is not enough to separate two asperities. Contact pressure is calculated to asperity overlap region and added to lubricant pressure. For this model, numerical procedure is introduced and the result on surface roughness and velocity for wheel bearing is presented. Results of EHL analysis for wheel bearing show that asperity contact is occurred at the edge of EHL conjunction where has a insufficient lubricant pressure to separate two surface.

• Tribology and Lubricants
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• 제18권4호
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• pp.249-254
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• 2002

Adhesive contact characteristics of torus-shaped bumps were analyzed using the finite element technique considering the adhesive force. Analyses focused on the effect of rim and bump radii on the adhesive contact behavior such as the jump-to-contact behavior, adhesion hysteresis, pull-off forces, contact region and pressure, and surface and subsurface stresses. Analysis results in the absence of adhesive force were also included to examine the effect of adhesive force. The applicability of torus-shaped bumps to the MEMS structure for reduction of friction is discussed.

• Tribology and Lubricants
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• 제34권1호
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• pp.23-32
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• 2018

Coupling is a mechanical component that transmits rotational force by connecting two shafts. Curvic coupling is widely used in high-performance systems because of its excellent power transmission efficiency and easy machining. However, coupling applications change dynamic behavior by reducing the stiffness of an entire system. Contact surface stiffness is an important parameter that determines the dynamic behavior of a system. In addition, the roughness profile of a contact surface is the most important parameter for obtaining contact stiffness. In this study, we theoretically establish the process of contact and bending stiffness analysis by considering the rough surface contact at Curvic coupling. Surface roughness parameters are obtained from Nayak's random process, and the normal contact stiffness of a contact surface is calculated using the Greenwood and Williamson model in the elastic region and the Jackson and Green model in the elastic-plastic region. The shape of the Curvic coupling contact surface is obtained by modeling a machined shape through an actual machining tool. Based on this modeling, we find the maximum number of gear teeth that can be machined according to the contact angle. Curvic coupling stiffness is calculated by considering the contact angle, and the calculation process is divided into stick and slip conditions. Based on this process, we investigate the stiffness characteristics according to the contact angle.

• Structural Engineering and Mechanics
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• 제83권3호
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• pp.341-351
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• 2022

During bolted flange assembly, the contact stiffness of some areas of the joint surface may be low due to the elastic interaction. In order to improve the contact stiffness at the lowest position of bolted flange, the correlation model between the initial bolt pre-tightening force and the contact stiffness of bolted flange is established in this paper. According to the stress distribution model of a single bolt, an assumption of uniform local contact stiffness of bolted flange is made. Moreover, the joint surface is divided into the compressive stress region and the elastic interaction region. Based on the fractal contact theory, the relationship model of contact stiffness and contact force of the joint surface is proposed. Considering the elastic interaction coefficient method, the correlation model of the initial bolt pre-tightening force and the contact stiffness of bolted flange is established. This model can be employed to reverse determine the tightening strategy of the bolt group according to working conditions. As a result, this provides a new idea for the digital design of tightening strategy of bolt group for contact stiffness of bolted flange. The tightening strategy of the bolted flange is optimized by using the correlation model of initial bolt pre-tightening force and the contact stiffness of bolted flange. After optimization, the average contact stiffness of the joint surface increased by 5%, and the minimum contact stiffness increased by 6%.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.385-386
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• 2002

The friction characteristics of contact region between vane tip and cam-ring is studied with an experimental device model. The radius of vane tip is less than 1 mm and sliding speed is lower than 10 m/s. The friction characteristics of the actual oil hydraulic vane pump is estimated on the basis of coefficient of friction. The coefficient of friction can be obtained by measuring the frictional forces in the contact region. The lubrication condition between vane and disk is modeled after the actual condition between the vane and cam-ring.

• Tribology and Lubricants
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• 제11권3호
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• pp.48-53
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• 1995

In this paper, the friction characteristics of contact region between vane tip and camring is studied using a modeled experimental device. The contact region is under the influence of variable loads with the amplitude of hundreds of Newton and frequency of tens of Hz. The condition of lubrication between vane and disk is modeled after the actual condition between vane and camring. The coefficient of friction is obtained by measuring the frictional forces in the contact region between camring and vane. The friction characteristics of the actual oil hydraulic vane pump is estimated on the basis of coefficient of friction. The analysis of frictional characteristics shows us that the lubrication condition of vane tip is that of transition regime between hydrodynamic lubrication and mixed lubrication.

• Tribology and Lubricants
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• 제17권6호
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• pp.459-466
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• 2001

In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk on friction characteristics in various sliding conditions were investigated. AISI52100 steel ball was used for the substrate of coated ball specimens, which were prepared by depositing TiN coating with 1(m in coating thickness. AISI1045 steel was used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. From the test results, the frictional characteristic between the two materials was predominated by iron oxide layer that formed on wear tract of counter-body and this layer caused friction transition and high friction. And the adhesive wear occurred from steel disk to TiN coated ball caused the formation of oxide layer on counter parts between the two materials.

• 한국재료학회지
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• 제26권8호
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• pp.412-416
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• 2016

The electrical properties of Au/n-type Ge Schottky contacts with different contact areas were investigated using current-voltage (I-V) measurements. Analyses of the reverse bias current characteristics showed that the Poole-Frenkel effect became strong with decreasing contact area. The contribution of the perimeter current density to the total current density was found to increase with increasing reverse bias voltage. Fitting of the forward bias I-V characteristics by considering various transport models revealed that the tunneling current is dominant in the low forward bias region. The contributions of both the thermionic emission (TE) and the generation-recombination (GR) currents to the total current were similar regardless of the contact area, indicating that these currents mainly flow through the bulk region. In contrast, the contribution of the tunneling current to the total current increased with decreasing contact area. The largest $E_{00}$ value (related to tunneling probability) for the smallest contact area was associated with higher tunneling effect.