• Title/Summary/Keyword: Consecutive process

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Virtual Metrology for predicting $SiO_2$ Etch Rate Using Optical Emission Spectroscopy Data

  • Kim, Boom-Soo;Kang, Tae-Yoon;Chun, Sang-Hyun;Son, Seung-Nam;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.464-464
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    • 2010
  • A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

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A Study on Technological Innovation and Employment Performance from the Perspective of Process : Focused on Small and Medium Sized Enterprises (프로세스 관점에서의 기술혁신 및 고용성과에 관한 연구 : 중소기업을 중심으로)

  • Bong, Kang Ho;Park, Jaemin
    • Journal of Korea Technology Innovation Society
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    • v.21 no.4
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    • pp.1508-1535
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    • 2018
  • Employment in enterprises is a consecutive decision-making process based on the results of their innovative activities and it is necessary to consider this relationship as well explicitly in an analysis of the employment performance through technological innovation. Based on this critical mind, this study would analyze the structural relationships among enterprises' innovative activities, the performance of technological innovation, a compensation system and the creation of employment, reflecting the correlation of the process of the actual technology management performed simultaneously, utilizing the seemingly unrelated regression(SUR) model to estimate a simultaneous equation in addition to analyzing the relationship between technological innovation and the effect on employment with the ordered logit model to estimate a single equation as in the preceding studies. As a result of the analysis, a structural relationship could be found out, in which the execution of the compensation system would increase the performances of technical development and technology commercialization, which in turn, accelerates enterprises' employment. Especially, it is judged that enterprises' employment performance increases when technological innovation is managed from a process perspective in that the commercialization performance, as well as technical development, acts as a kind of hurdle in the effect on employment.

Mechanism of amyloidogenesis: nucleation-dependent fibrillation versus double-concerted fibrillation

  • Bhak, Ghi-Bom;Choe, Young-Jun;Paik, Seung-R.
    • BMB Reports
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    • v.42 no.9
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    • pp.541-551
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    • 2009
  • Amyloidogenesis defines a condition in which a soluble and innocuous protein turns to insoluble protein aggregates known as amyloid fibrils. This protein suprastructure derived via chemically specific molecular self-assembly process has been commonly observed in various neurodegenerative disorders such as Alzheimer's, Parkinson's, and Prion diseases. Although the major culprit for the cellular degeneration in the diseases remains unsettled, amyloidogenesis is considered to be etiologically involved. Recent recognition of fibrillar polymorphism observed mostly from in vitro amyloidogeneses may indicate that multiple mechanisms for the amyloid fibril formation would be operated. Nucleation-dependent fibrillation is the prevalent model for assessing the self-assembly process. Following thermodynamically unfavorable seed formation, monomeric polypeptides bind to the seeds by exerting structural adjustments to the template, which leads to accelerated amyloid fibril formation. In this review, we propose another in vitro model of amyloidogenesis named double-concerted fibrillation. Here, two consecutive assembly processes of monomers and subsequent oligomeric species are responsible for the amyloid fibril formation of $\alpha$-synuclein, a pathological component of Parkinson's disease, following structural rearrangement within the oligomers which then act as a growing unit for the fibrillation.

Follow-up Monitoring & Adaptive Management after Ecological Restoration for the Stream - Focused the Hakui Stream in Anyang City - (생태하천 복원 후 모니터링과 적응관리 - 안양시 학의천을 중심으로 -)

  • Choi, jungkwon;Choi, mikyoung;Choi, cheolbin
    • Journal of the Korean Society of Environmental Restoration Technology
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    • v.18 no.6
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    • pp.85-95
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    • 2015
  • Recent years, nationwide projects for ecological restoration are implemented with emerging issues on the stream ecosystem. In order to enhance effectiveness of the ecosystem restoration and reduce negative impact, the appraisal of effectiveness through the follow-up monitoring and the adaptive management process are executed in consecutive phase. In this study, planning phase, monitoring and adaptive management in Hakui stream which is part of An Yang stream restoration project is introduced as representative ongoing case of effective adaptive management. The aim of this study is to verify the adaptive management process and suggest direction of effective restoration. Restoration project of Hakui stream resulted in increasing number and diversity of species (vegetation, fish, bird, invertbrates, amphibian and reptilia) according to monitoring from 2004 to 2013, and enhancing natural river landscape by evaluation of river naturalness among 2001(before restoration), 2007 (after), 2015 (recent). However, excessive vegetation expansion or sediment deposition on channel over time caused unexpected results such as terrestrialization or degradation of habitats. Adaptive management action such as removing disturbance species (Humulus japonicus)(2007), coppicing willow (2007), release of march snail (2007), creation of wetland (2014) were implemented based on monitoring results. And then appraisal of management action was discussed.

Mechanical Behavior of Indentation Stress in Carbon Fiber Reinforced Silicon Carbide Composites with Different Densities (서로 다른 밀도를 갖는 탄소섬유강화 탄화규소 복합재료의 압흔응력에 의한 기계적 거동)

  • Lee, Kee-Sung;Kim, Il-Kyum;Kim, Tae-Woo;Kim, Se-Young;Han, In-Sub;Woo, Sang-Kuk
    • Journal of the Korean Ceramic Society
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    • v.48 no.4
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    • pp.288-292
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    • 2011
  • In this study, we investigated the mechanical behavior of carbon fiber reinforced silicon carbide composites by indentation stress. Relatively porous and dense fiber reinforced ceramic composites were fabricated by liquid silicon infiltration (LSI) process. Densification of fiber composite was controlled by hardening temperature of preform and consecutive LSI process. Load-displacement curves were obtained during indentation of WC sphere on the carbon fiber reinforced silicon carbide composites. The indentation damages at various loads were observed, and the elastic modulus were predicted from unloading curve of load-displacement curve.

An Efficient Dynamic Response Optimization Using the Design Sensitivities Approximated Within the Estimate Confidence Radius

  • Park, Dong-Hoon;Kim, Min-Soo
    • Journal of Mechanical Science and Technology
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    • v.15 no.8
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    • pp.1143-1155
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    • 2001
  • In order to reduce the expensive CPU time for design sensitivity analysis in dynamic response optimization, this study introduces the design sensitivities approximated within estimated confidence radius in dynamic response optimization with ALM method. The confidence radius is estimated by the linear approximation with Hessian of quasi-Newton formula and qualifies the approximate gradient to be validly used during optimization process. In this study, if the design changes between consecutive iterations are within the estimated confidence radius, then the approximate gradients are accepted. Otherwise, the exact gradients are used such as analytical or finite differenced gradients. This hybrid design sensitivity analysis method is embedded in an in-house ALM based dynamic response optimizer, which solves three typical dynamic response optimization problems and one practical design problem for a tracked vehicle suspension system. The optimization results are compared with those of the conventional method that uses only exact gradients throughout optimization process. These comparisons show that the hybrid method is more efficient than the conventional method. Especially, in the tracked vehicle suspension system design, the proposed method yields 14 percent reduction of the total CPU time and the number of analyses than the conventional method, while giving similar optimum values.

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Anatomical Location of the Tendinous Intersections of the Rectus Abdominis Muscle in Korean Women (한국 여성의 배곧은근에서 나눔힘줄(Tendinous Intersection)의 위치)

  • Suh, Hyun Suk;Eom, Jin Sub;Lee, Taik Jong
    • Archives of Plastic Surgery
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    • v.33 no.4
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    • pp.469-473
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    • 2006
  • Purpose: The transverse rectus abdominis myocutaneous(TRAM) flap has become a reliable method for autogenous breast reconstruction. However, dissection of the tendinous intersections of rectus abdominis is technically difficult. The tendinous intersection has significant vascularity within its fascial layers raising in importance of technique in elevation. If tendinous intersections are damaged during the elevation of the rectus muscle, circulation to TRAM flap can be endangered. The purpose of this study is to evaluate the number of tendinous intersections and to predict anatomical position of the tendinous intersections. Methods: We dissected 182 consecutive TRAM flaps and measured the distance between xiphoid process and each tendinous intersection and evaluated the statistic correlation among the distance, patient's height and position of umbilicus. Results: In this study, in 30.7% of patients, two tendinous intersections were observed in one rectus abdominis muscle, in 67.7% three tendinous intersections, and in 1.6% four tendinous intersections, respectively. But there was no correlation between patient's height and the distance between xiphoid process and each tendinous intersection. Conclusion: It still remains difficult to predict the position of tendinous intersections just by topography before the dissection. Careful and meticulous dissection of the tendinous intersections is still required.

Development of High-Quality Poly(3,4-ethylenedioxythiophene) Electrode Pattern Array Using SC1 Cleaning Process (SC1 세척공정을 이용한 고품질 Poly(3,4-ethylenedioxythiophene) 전극 패턴 어레이의 개발)

  • Choi, Sangil;Kim, Wondae;Kim, Sungsoo
    • Journal of Integrative Natural Science
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    • v.4 no.4
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    • pp.311-314
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    • 2011
  • Application of self-assembled monolayers (SAMs) to the fabrication of organic thin film transistor has been recently reported very often since it can help to provide ohmic contact between films as well as to form simple and effective electrode pattern. Accordingly, quality of these ultra-thin films is becoming more imperative. In this study, in order to manufacture a high quality SAM pattern, a hydrophobic alkylsilane monolayer and a hydrophilic aminosilane monolayer were selectively coated on $SiO_2$ surface through the consecutive procedures of a micro-contact printing (${\mu}CP$) and dip-coating methods under extremely dry condition. On a SAM pattern cleaned with SC1 solution immediately after ${\mu}CP$, poly(3,4-ethylenedioxythiophene) (PEDOT) source and drain electrode array were very selectively and nicely vapour phase polymerized. On the other side, on a SC1-untreated SAM pattern, PEDOT array was very poorly polymerized. It strongly suggests that the SC1 cleaning process effectively removes unwanted contaminants on SAM pattern, thereby resulting in very selective growth of PEDOT electrode pattern.

Efficient Range Query on Moving Object Trajectories (이동객체궤적에 대한 효율적인 범위질의)

  • Park, Young-Hee;Kim, Kyu-Jae;Cho, Woo-Hyun
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.336-339
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    • 2013
  • Location-Based services that collect location information for moving object and utilize in real life are being used in many aspects by the development of wireless network technology. Accordingly, new index structures are required to efficiently retrieve the consecutive location of moving objects. This paper addresses algorithms that make index structure by using Douglas-Peucker Algorithm and process range query efficiently on moving objects trajectories. Our algorithms are going to make smaller size of index structure and process more efficiently.

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The Case Study for the Development of Conception of a Graph and the Formula with the absolute value through the Mathematical Modeling (절댓값 기호를 포함한 알차함수와 그래프의 개념발달에 관한 수학적 모델링 사례연구)

  • Shin, Kyung-Hee;Kim, Yeon-Ji
    • The Mathematical Education
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    • v.50 no.2
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    • pp.165-184
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    • 2011
  • The purpose of this study is to detect the possibility of the development of conception of a graph and the formula with the absolute value through context questions, and also to investigate the effectiveness of the each step of the mathematical modeling activities in helping students to have the conception. The research was conducted to analyze the process of development of the mathematical conception by applying the mathematical modeling activities two times to subjects of two academic high school students in the first grade. The results of the study are as follows: Firstly, the subjects were able to comprehend the geometric conception of the absolute value and to make the graph and the formula with the sign of the absolute value by utilizing the condition of the question. Secondly, the researcher set five steps of the intentional mathematical model in order to arouse the effective mathematical notion and each step performed a role in guiding the subjects through the mathematical thinking process in consecutive order; consequently, it was efficacious in developing the conception.