• 한국공작기계학회논문집
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• 제17권3호
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• pp.86-93
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• 2008

This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

• 한국전기전자재료학회논문지
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• 제18권8호
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• pp.759-765
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• 2005

In this paper, developed isolator for gap filler is analyzed and designed using the simulation tool. Using the designed parameters, isolator is fabricated and tested in gap filler band. Temperature characteristics of isolator depend on magnet, YIG ferrite, and conductor etc. These require temperature stability and possible method of compensation for the temperature dependent effects. The temperature stabilization tries to use Ni-alloy. Developed isolator that compare with room temperature and high temperature characteristics has change fewer than 20 MHz. Implemented isolator shows more than 20 dB isolation characteristic at center frequency(2,650 MHz) and has 0.2 dB insertion loss in overall 100 MHz operating bandwidth. Return losses of input and output port are measured below -20 dB.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.401-402
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• 2008

We proposed a single gap transflective liquid crystal display (LCD) using a vertically aligned (VA) liquid crystal cell and circular polarizer. The conventional VA transflective LCDs have problems that there required several compensation films and voltage-dependent transmittance and reflectance curves do not match each other. To solve these problems, we used circular polarizer and optimized the condition of insulator thickness in the transmissive part and reflective part. Also, we used the patterned vertical alignment (PVA) mode for wide viewing angle in transmissive part. Consequently, this device realized transflective LCD with a single cell gap and single gamma curve.

• 대한음성학회:학술대회논문집
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• 대한음성학회 2005년도 춘계 학술대회 발표논문집
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• pp.49-52
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• 2005

Cepstral Mean Subtraction (CMS) makes effectively compensation for a channel distortion, but there are some shortcomings such as distortions of feature parameters, waiting for the whole speech sentence. By assuming that the silence parts have the channel characteristics, we consider the channel normalization using subtraction of cepstral means which are only obtained in the silence areas. If the considered techniques are successfully used for the channel compensation, the proposed method can be used for real time processing environments or time important areas. In the experiment result, however, the performance of our method is not good as CMS technique. From the analysis of the results, we found potentiality of the proposed method and will try to find the technique reducing the gap between CMS and ours method.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.148-153
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• 1998

In order to control thermal deformation of machine origin of machine tools due to internal and external heat sources, the real-time compensation system has been developed. First, GMDH models were constructed to estimate thermal deformation of machine origin for a vertical machining center through the measurement of deformation data and temperature data of specific points on the machine tool. Thermocouples and gap sensors are used respectively for measurement. These models are nonlinear equations with high-order polynomials and implemented in a multilayered perceptron type network structure. Secondly, work origin shift method were developed by implementing digital I/O interface board between CNC controller and IBM-PC. The work origin shift method is to shift the work origin by the compensation amounts which is calculated by pre-established GMDH model. From the experimental result, thermal deformation of machine origin was reduced to below $\pm$5${\mu}{\textrm}{m}$.

• 축산식품과학과 산업
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• 제5권1호
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• pp.53-56
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• 2016

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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• pp.7-8
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• 2000

We compared various LCD modes for wide viewing angle. These modes can be classified as film-compensation, multi-domain, IPS. So far, IPS and multi-domain VA represent best performance. The performance gap with respect to CRT is diminishing.

• 한국생산제조학회지
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• 제8권4호
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• pp.19-28
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• 1999

In order to control thermal deformation of the machine origin of machine tools a empirical model and a compensation system have been developed, Prior to empirical modeling the volumetric error considering shape errors and joint errors of slides is formulated through the homogeneous transformation matrix (HTM) and kinematic chain. Simulation results of the HTM method show that the thermal error of the machine origin is more critical than position-dependent errors. In order to make a stable and effective software error compensation system the GMDH (Group Method of Data Handling) models are constructed to estimate the thermal deformation of the machine origin by measuring deformation data and temperature data. A test bar and gap sensors are used to measure the deformation data. In order to compensate the estimated error the work origin shift method is developed by implementing a digital I/O interface board between a CNC controller and an IBM PC. The method shifts the work origin as much as the amounts which are calculated by the pre-established thermal error model. The experiment results for a vertical machining center show that the thermal deformation of the machine origin is reduced within $\pm$5$mu extrm{m}$.

• 한국공작기계학회논문집
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• 제10권4호
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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• pp.154-157
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• 1995

A magnetic levitation control system is nonlinear and very unstable. Thus there should be a stabilizing compensation network and a feedback path. Due to the levitation control a noncontact photoresistor sensor is generally used. One photocell provides a certain amount of variation in length by the ball shadow casted on the cell surface. Furthermore at the boundary of the cell, the linearity of sensitivity deteriorates severely. To overcome the constraints of the length and linearity, an efficient sensor array is deviced and applied in the feedback path of a large-gap magnetic levitation control system. A number of CdS photocells and a summing circuit of the sensor output signals are used for a sensor array. The levitation length of a ball and the transient performances are main objectives of the large-gap suspension system using the sensor array.