• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.96-97
• /
• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• 대한수혈학회지
• /
• 제23권2호
• /
• pp.162-168
• /
• 2012

배경: 세포 내 공간에서 가장 흔한 양이온은 칼륨이며 생리적으로 중요한 역할을 한다. 칼륨 불균형 발생시 생명을 위협할 수 있는 문제가 생길 수 있으며 그 문제들은 전신 쇠약부터 심실 세동에 의한 심장마비까지 있다. 따라서 응급의학과 의사가 짧은 시간 내에 그런 문제를 찾아내야 하는 것은 매우 중요하다. 이 연구에서 우리는 전혈과 혈청의 샘플들을 서로 짝을 지어 비교 분석하여 전혈의 결과가 혈청의 결과만큼 유용하게 쓰일 수 있는지 알아보기로 했다. 방법: 227명의 환자에게서 두 종류의 샘플을 채취하여 비교했다. 하나의 샘플은 요골동맥에서 채취한 전혈을 헤파린 처리된 주사기에 담아 검사했으며 다른 하나는 혈청 샘플을 담아 검사실에서 검사했다. 그 후 샘플들을 정상, 저 칼륨, 고 칼륨의 세 그룹으로 나누어 각각의 그룹에서 혈청과 전혈의 샘플들을 비교하였다. 결과: 혈청과 전혈의 칼륨 수치들의 차이는 통계학적으로 큰 의미를 보이지는 않았으며(P<0.05) 세 그룹 내에서의 칼륨 수치들간의 연관성은 통계학적으로 의미 있게 상관관계를 보였다(P<0.05). 세 그룹 중 고 칼륨 그룹에서 전혈과 혈청의 칼륨 수치가 가장 높은 상관관계를 보였으며 저 칼륨 그룹에서 가장 낮은 상관관계를 보였다. 결론: 전혈을 이용한 응급 검사가 칼륨 이상 소견, 특히 고칼륨혈증이 의심되는 환자의 진단에 선별검사로써 유용하게 사용될 수 있을 것으로 사료된다.

• 한국환경보건학회지
• /
• 제47권5호
• /
• pp.432-445
• /
• 2021

Background: The European Centre for Ecotoxicology and Toxicology of Chemicals' Targeted Risk Assessment (ECETOC TRA) tool has been recognized by EU REACH as a preferred approach for calculating worker health risks from chemicals. Objectives: The applicability of the ECETOC TRA to occupational exposure estimation from industrial uses of methanol was studied by inputting surveyed and varied parameters for TRA estimation as well as through comparison with measured data. Methods: Information on uses of methanol was collected from seven working environment monitoring reports along with the measured exposure data. Input parameters for TRA estimation such as operating conditions (OCs), risk management measures (RMMs) and process categories (PROCs) were surveyed. To compare with measured exposures, parameters from the surveyed conditions of ventilation but no use of respiratory protection were applied. Results: PROCs 4, 5, 8a, 10, and 15 were assigned to ten uses of methanol. The uses include as a solvent for manufacturing sun cream, surfactants, dyestuffs, films and adhesives. Methanol was also used as a component in a release agent, hardening media and mold wash for cast products as well as a component of hard-coating solution and a viscosity-controlling agent for manufacturing glass lenses. PROC 8a and PROC 10 of a cast product manufacturer without LEV (local exhaust ventilation) and general ventilation as well as no respiratory protection resulted in the highest exposure to methanol. Assuming the identical worst OCs and RMMs for all uses, exposures from PROC 5, 8a, and 10 were the same and the highest followed by PROC 4 and 15. The estimation resulted in higher exposures in nine uses except one use where measured exposure approximated exposures without RMMs. Conclusions: The role of ECETOC TRA as a conservative exposure assessment tool was confirmed by comparison with measured data. Moreover, it can guide which RMMs should be applied for the safe use of methanol.

• Journal of Periodontal and Implant Science
• /
• 제38권4호
• /
• pp.699-708
• /
• 2008

Purpose: The aim of this study was to investigate the effect of tongue cleaner-equipped manual toothbrush on tooth cleanness, tongue cleanness and malodor index. Materials and methods: 504 subjects were included in this study. At 1st visit, basic information such as age, sex, smoking amount and alcohol consumption was recorded. Self assessment by individual subjects was performed regarding satisfaction to old toothbrush and toothbrushing habit. Tooth cleanness, tongue cleanness and malodor index was assessed by professional researcher. Tongue cleaner-equipped manual toothbrush was given to each subject with proper toothbrushing instruction. After 1 month passed, self assessment and researcher assessment regarding the same index were performed and analyzed statistically by chi-square test. Results: At 1st visit subjects seem to ignore tongue cleansing and showed poor tooth cleanness index, tongue cleanness index and malodor index, however the same subjects were motivated to clean their tongue and teeth and presented statistically improved distribution pattern in tooth cleanness index, tongue cleanness index and malodor index after using tongue cleaner-equipped manual toothbrush(p<0.01). Satisfaction to tongue cleaner-equipped manual toothbrush was 98%. Conclusion: Tongue cleaner-equipped manual toothbrush would be an effective tool for maintaining good oral hygiene through improving tooth and tongue cleanness and preventing malodor formation.

• 펄프종이기술
• /
• 제37권3호
• /
• pp.23-32
• /
• 2005

A change of z-directional structural and surface properties by calendering has a great influence on liquid penetration into a sheet. It could be also important for multi-ply sheet because it contacts liquid dunhg coating or converting process. Therefore, this study was aimed to evaluate of a change of z-directional structure in multi-ply sheet by calendering. To do this, multi-ply sheets were prepared with various raw materials and calendered at the different pressure and temperature conditions. In multi-ply sheet which consisted of one kind of pulp fiber, thickness reductions were higher in top and bottom plies than in middle plies. And in the case of soft nip calender treatment with high temperature, top layer which was in contact with heating roll showed the highest reduction of thickness. Hard nip calender treatment showed U-shaped density profile in z-direction, but compression profile by SNC treatment was dependent on calendering condition. To examine z-directional structure of multi-ply sheet which was composed of different raw material for each layer, CLSM (Confocal Laser Scanning Microscopy) analyses were carried out on cross direction of sheet. It turned out to be a useful tool for investigating z-directional analysis. As a result, variation of thickness reduction in z-direction is dependent on ply structure, compressibility of pulp fiber, and calendering condition.

• 한국산업보건학회지
• /
• 제18권4호
• /
• pp.303-309
• /
• 2008

The reduction of risk within the workplace has long been focus of attention both through industry initiatives and legislation. Exposure matrices according to industries and processes treated DMF (N,N-Dimethylformamide) were constructed based on KOSHA (Korean Occupational Safety and Health Agency)'s 2005 exposure database which were gathered from Korean agencies of workplace hazards evaluation for business place. These exposure matrices were assessed by danger value (DV) that was calculated from combination of hazard rating, duration of use rating, and risk probability rating of exposure to chemical hazardous agents in accordance with Hallmark Risk Assessment Tool. The results of risk assessment is divided four kinds of control bands which were related with control measures. The applicability of risk assessment using exposure matrices was performed by field study and survey for high matrices group. This study found that more attentions should be paid to two industries, manufacture of sewn wearing apparel and manufacture of textiles, among 19 industries, and to 3 processes, coating, processing & mixing, and lab, among 80 processes because those were regarded as having the highest risk.

• 한국정밀공학회지
• /
• 제16권6호
• /
• pp.52-57
• /
• 1999

Funtional metal prototypes are often required in numerous industrial applications. These components are typically needed in the early stage of a project to determine form, fit and function. Recent R/P(Rapid Prototyping) part are made of soft materials such as plastics, wax, paper, these master models cannot be employed durable test in real harsh working environment. Parts by direct metal rapid tooling method, such as laser sintering, by now are hard to get net shape, pores of the green parts of powder casting method must be infiltrated to get proper strength as tool, and new type of 3D direct tooling system combining fabrication welding arc and cutting process is reported by song etc. But a system which can build directly 3D parts of high performance functional material as metal part would need long period of system development, massive investment and other serious obstacles, such as patent. In this paper, through the rapid tooling process as silicon rubber molding using R/P master model, and fabricate wax pattern in that silicon rubber mold using vacuum casting method, then we tranlsated the wax patterns to numerous metal prototypes by new investment casting process combined conventional investment casting with rapid pototyping & rapid tooling process. with this wax-injection-mold-free investment casting, we developed new investment casting process of fabricating numerous functional metal prototypes from one master model, combined 3-D CAD, R/P and conventional investment casting and tried to expect net shape measuring total dimension shrinkage from R/P part to metal part.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.75-75
• /
• 2011

전이금속(transition metal) 질화물(nitride)은 높은 경도, 내마모성, 부식 저항성 그리고 내열성 등과 같은 우수한 기계적 물성 때문에 많은 연구가 되어 왔다. 이 중 질화 티타늄은 높은 경도, 내식 및 내마모의 우수한 기계적 특성으로 공구(tool)와 같은 제품의 수명 향상을 위한 표면 코팅으로 사용되어 왔으며, 금(gold)색의 미려한 색상을 이용한 제품의 외관 표면처리, 정형외과 및 치과용 보형물의 수명 및 안정성 향상 등 다양한 분야에 응용 되고 있다. 본 연구에서는 Cathodic Arc 코팅 방식을 이용하여 질화 티타늄을 합성하였으며, 경사 코팅에 따른 단층 및 다층 피막(3-layer)의 미세조직 변화와 그 물성을 평가하였다. 아크 소스에 장착된 타겟은 99.5%의 Ti 타겟을 사용하였고, 시편과 타겟 간의 거리는 약 31 cm이며, 시편은 알코올과 아세톤으로 초음파 세척 된 냉연강판과 SUS 304를 사용하였다. 시편을 진공용기에 장착하고 ~10-6 Torr까지 진공배기를 실시하고, Ar 가스를 진공용기 내로 공급하여 ~10-4 Torr에서 시편에 bias (Pulse : 400V)를 인가한 후 아크를 발생시켜 약 5분간 청정을 실시하였다. 플라즈마 청정이 끝나면 시편에 인가된 bias를 차단하고 코팅하였다. 경사 코팅을 위한 시편의 회전각은 $30^{\circ}$, $45^{\circ}$, $60^{\circ}$이며, 질화 티타늄의 두께는 약 $3{\mu}m$로 동일하게 코팅 하였다. 경사 코팅된 박막의 경우는 동일 시간 코팅하였을 경우 경사각이 커질수록 두께가 감소하였다. 경사각에 따라 코팅 층이 성장하였고, Bias를 인가 할 경우에는 경사 입사의 효과가 상쇄됨이 관찰되었다. 또한 경사 코팅에 의해 제조된 티타늄 질화물의 경도는 저하 되었으며, $30^{\circ}$와 $60^{\circ}$에 비해 $45^{\circ}$ 경우 경도 저하가 가장 적었다. 결론적으로 Cathodic 아크 코팅 방법으로 질화티타늄을 합성하였고, 경사 코팅을 통해 박막의 미세조직 변화를 확인 하였다. 본 연구에서 얻어진 결과를 이용하여 다양한 구조로 박막의 성장을 유도 할 수 있으며, 이를 통해 경도, 내마모성, 내식성 등의 물성을 변화시킬 수 있는 장점을 가질 것으로 예상된다.

• 반도체디스플레이기술학회지
• /
• 제2권1호
• /
• pp.1-5
• /
• 2003

Plasma generator based on non-self-sustained low-pressure arc discharge has been examined as a tool for deposition of highly-adhesive hydrogenated amorphous diamond-like carbon(DLC) films. Since the discharge is stable in wide range of gas pressures and currents, this plasma source makes possible to realize both plasma-immersion ion implantation(PIII) and plasma-immersion ion deposition(PIID) in a unified vacuum cycle. The plasma parameters were measured as functions of discharge current. Discharge and substrate bias voltage parameters have been determined for the PIII and PIID modes. For PIID it has been demonstrated that hard and well-adherent DLC coating are produced at 200-500 eV energies per deposited carbon atom. The growth rates of DLC films in this case are about 200-300 nm/h. It was also shown that short(∼60$\mu\textrm{s}$) high-voltage(> 1kV) substrate bias pulses are the most favorable for achieving high hardness and good adhesion of DLC, as well as for reducing of residual intrinsic stress are.

• 한국환경과학회지
• /
• 제16권7호
• /
• pp.785-791
• /
• 2007

The current study evaluated the technical feasibility of the application of titanium dioxide ($TiO_{2}$) photo-catalytic air cleaners for the disinfection of bioaerosols present in indoor air. The evaluation included both laboratory and field tests and the tests of hydraulic diameter (HD) and lamp type (LT). Disinfection efficiency of photocatalytic oxidation (PCO) technique was estimated by survival ratio of bacteria or fungi calculated from the number of viable cells which form colonies on the nutrient agar plates. It was suggested that the reactor coating with $TiO_{2}$ did not enhance the adsorption of bioaerosols, and that the UV irradiation has certain extent of disinfection efficiency. The disinfection efficiency increased as HD decreased, most likely due to the decrease in the light intensity since the distance of the catalyst from the light source increased when increasing the HD. It was further suggested that the mass transfer effects were not as important as the light intensity effects on the PCO disinfection efficiency of bioaerosols. Germicidal lamp was superior to the black lamp for the disinfection of airborne bacteria and fungi, which is supported by the finding that the disinfection efficiencies were higher when the germicidal lamp was used compared to the black lamp in the laboratory test. These findings, combined with operational attributes such as a low pressure drop across the reactor and ambient temperature operation, can make the PCO reactor a possible tool in the effort to improve indoor bioaerosol levels.