• 제목/요약/키워드: Co thickness

검색결과 2,089건 처리시간 0.04초

Co 두께가 $CoSi_2$ 에피박막 형성에 미치는 영향 (Effects of Co Thickness on the Formation of Epitaxial CoSi2 Thin Film)

  • 김종렬;배규식
    • 전자공학회논문지D
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    • 제34D권1호
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    • pp.23-29
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    • 1997
  • Effects of Co thickness on the formation of epitaxial $CoSi_2$ from the Co/Ti bilayer have been investigated. Ti and Co were sequentially deposited with the Ti thickness fixed at 5 or 10nm, while the Co thickness was varied from 5 to 30nm. The metal-deposited samples were then rapidly thermal-annealed in $N_2$ at $900^{\circ}C$ for 20 sec. Material properties of $CoSi_2$ thin films were analyzed by the 4-point probe, XRD, AES, andXTEM. When the as-deposited Co thickness was below 15nm, the $CoSi_2$ with high resistivity and rough interface was formed. On the other hand, when the Co thickness was above 15 nm, the epitaxial $CoSi_2$ with the resistivity of about 16 ~ 19 $\mu\Omega.cm$, uniform composition and thickness and flat interface was formed. Initial Ti thickness has sizable effect on the formation of $CoSi_2$, when the Co layer was very thin (~ 5 nm). But there was no significant effect of the Ti thickness for the initial Co thickness of above 15 nm.

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A study on magnetic layer thickness effects on magnetic properties of CoCrPt/Ti perpendicular media.

  • M. S. Hwang;Lee, T. D.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2000년도 International Symposium on Magnetics The 2000 Fall Conference
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    • pp.369-376
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    • 2000
  • Change of magnetic properties in CoCrPt/Ti perpendicular media with varying CoCrPt films thickness has been studied. As CoCrPt films thickness increase, the Ms(magnetization saturation) drastically increases at thinner thickness and gradually increases with further increase in thickness from 25nm. This Ms behaviour is associated with primarily the formation of "amorphous-like" reacted layer by intermixing of CoCrPt and Ti at CoCrPt/Ti interface and secondarily change of Cr segregation mode with varying the CoCrPt films thickness. Magnetic domain structure distinctively changes with increasing CoCrPt magnetic layer(ML) thickness. Also the strength of exchange coupling measured from the slope in demagnetizing region in M-H loop changes with ML thickness. Details of the above magnetic properties will be discussed. The expansion of lattice parameters a and c at thinner thickness suggests that Cr segregation mode may be connected with the residual stress of the films. Finally, negative nucleation field(Hn) behaviour with the exchange slope will be reported.

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Effects of Magnetic Layer Thickness on Magnetic Properties of CoCrPt/Ti/CoZr Perpendicular Media

  • Hwang, M.S.
    • Journal of Magnetics
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    • 제6권1호
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    • pp.19-22
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    • 2001
  • Change of magnetic properties in CoCrPt/Ti perpendicular media with varying CoCrPt film thickness has been studied. As the CoCrPt film thickness increases from 25 nm, the Ms (saturation magnetization) increases rapidly at first and then more gradually. This Ms behavior is associated primarily with the formation of an "amorphous-like"reacted layer created by intermixing of CoCrPt and Ti at the CoCrPt/Ti interface and secondarily with a change of the Cr segregation mode with varying CoCrPt film thickness. Magnetic domain structure distinctively changes with increasing CsCrPt magnetic layer (ML) thickness. Also the strength of exchange coupling measured from the slope in the demagnetizing region of the M-H loop changes with ML thickness. The expansion of lattice parameters a and c at smaller film thickness suggests that the Cr segregation mode may be connected with the residual stress of the films. Finally, the negative nucleation field (Hn) shows a unique behavior with the change of strength of the exchange interaction.teraction.

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CoCrMo/Cr 자성박막의 제조조건이 자기적성질에 미치는 영향 (The Effect of Sputtering Conditions on Magnetic Properties of CoCrMo/Cr Magnetic Thin Film)

  • 박정용;남인탁;홍양기
    • 한국자기학회지
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    • 제3권4호
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    • pp.320-324
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    • 1993
  • 스퍼터된 자기기록매체 Co-10at%Cr-2at%Mo/Cr 자성박막의 제조조건이 미세구조와 자기적특성에 미치는 영향을 조사하였다. 기판의 온도는 상온-$250^{\circ}C$로 하였으며 Cr하지층과 CoCrMo층의 두께는 각각 $1000-2500\AA$, $300-800\AA$이었다. CoCrMo층의 두께가 $500{\AA}-800{\AA}$ 증가함에 따라 결정립은 미세화 되었으며 균일한 조직을 나타냈다. 보자력은 기판의 온도, CoCrMo자성층, Cr하지층의 두께 를 증가시켰을때 향상되었다. 기판온도가 $250^{\circ}C$, 자성층의 두께가 $700\AA$, Cr 하지층의 두께가 $1000\AA$일때 880 Oe의 보자력을 나타냈다.

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Magnetic Circular Dichroism Study of co Thin Films on Pd(111) Surface

  • Kim, Wookje;Kim, Wondong;Kim, Hyunjo;Kim, Jae-Young;Hoon Kho;Park, J.H.;Oh, S.J.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.169-169
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    • 1999
  • We studied magnetic properties of co thin films deposited on Pd (111) surface, which attracted much attention recently due to the perpendicular magnetic anisotropy, using magnetic circular dichroism(MCD). Special attention was paid on the effect of Pd capping and interface roughness on the direction of magnetic easy axis, and for that purpose MCD signals for all Co thicknesses were measured with two different ways : in-plane and out-of-plane geometry. In case of bare Co films deposited on smooth Pd(111) surface, no MCD signal was observed under 4$\AA$ co thickness. At 4$\AA$ Co thickness, MCD signal at the out-of-plane geometry was observed, and for thicker Co films, only in-plane MCD signal was measured. This type of magnetic easy axis transition has been reported for other cases like Co/Pt system. The effect of 5$\AA$ Pd capping on these bare Co films made an remarkable change on the transition of magnetic easy axis. Out-of-plane MCD signals exists up to 20$\AA$ Co thickness, and disappears at 24$\AA$ Co thickness. In-plane MCD signals first appears at 10$\AA$ Co thickness and gradually increases up to 24$\AA$ Co thickness. Between 10$\AA$ and 20$\AA$ Co thickness, in-plane and out-of-plane MCD signal coexist. The formation of multi-domain structure or the existence of tilted magnetic easy axis is an possible scenario for such an interesting coexistence. The effect of interface roughness was also tested by measuring MCD signal on Co films deposited on un-annealed Pd(111) surface. Out-of-plane MCD signal was observed up to 8$\AA$ Co thickness and the anisotropy of MCD signal at 4$\AA$ Co thickness was very large with respect to that of Co film deposited on the smooth substrate. Above 8$\AA$ thickness, there exists only in-plane MCD signal. From above results, it was concluded that both Pd capping and interface roughness induce and reenforce the perpendicular magnetic anisotropy. The large perpendicular magnetic anisotropy of Co/Pd multilayer system made by sputtering method can be well understood from our results.

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BIW 전착도장에서의 컴퓨터 시뮬레이션 적용사례 (Introduction of Computer Simulation for BIW Electrocoating Process)

  • 손대홍;정희진;안승호;김병수;김정연;최병삼
    • Corrosion Science and Technology
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    • 제15권2호
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    • pp.78-83
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    • 2016
  • The e-coating to inhibit induced corrosion can deposit a coating not only on the exterior surface but also on the inside of whole metallic components of body-in-white (BIW). But it is difficult to deposit paint films on the inside area because metallic components are multi layered. It may cause shortness of e-coating thickness. The only way to properly verify e-coating thickness is by performing the use of tear-down prototypes. When paint films' thickness is inadequate, a structural modification on each metallic component is needed. Verification of the thickness improvement for a structural modification requires much manual effort and leads to increasing development time. Recently, the simulation technology has been developed to predict the e-coating thickness in e-coating field. By applying the simulation to BIW, improvement in paint thickness quality and shortening of development period are expected. The paper explains a validated solution that allows simulating the effect of design changes to the e-coating thickness and current density, thereby delivering results within a time frame of a few days.

CoFe의 삽입과 산화조건에 따른 자기 터널 접합의 자기저항특성에 관한 연구 (CoFe Layer Thickness and Plasma Oxidation Condition Dependence on Tunnel Magnetoresistance)

  • 이성래;박병준
    • 한국자기학회지
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    • 제11권5호
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    • pp.196-201
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    • 2001
  • Si(100)/Ta(50 )/NiFe(60 )/FeMn(250 )/NiFe(70 )/Al$_2$O$_3$/NiFe(150 )/Ta(50 )구조를 가진 자기터널접합의 자기저항비 향상에 관해서 연구하였다. 자성층과 절연층 사이 계면에 CoFe을 삽입하여 5.75%에서 13.7%까지 향상시켰다. 그리고 절연층은 16 의 Al을 순수한 산소 및 산소/아르곤 혼합 분위기에서 프라즈마 산화법으로 형성하였다. 순수한 산소 분위기에서는 최적 산화시간 30초에서 13.7%의 자기저항비를 얻었지만,산소/아르곤의 혼합기체를 사용하면 최적 산화시간 40초에서 15.3%의 자기저항비를 얻었다.

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Thin Film Growth and Evaluation Method for Conventional Co-Cr Based Perpendicular Magnetic Recording Media: Problems and New Solutions

  • Saito, Shin;Hoshi, Fumikazu;Hasegawa, Daiji;Takahashi, Migaku
    • Journal of Magnetics
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    • 제7권3호
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    • pp.115-125
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    • 2002
  • We proposed a novel method to evaluate the magnetic properties of the initial layer and the columnar structure separately for CoCr-based perpendicular recording media. We show that the thickness of the initial layer and the intrinsic magnetocrystalline anisotropy of columnar structure can be quantitatively evaluated using the plotted product of perpendicular anisotropy to magnetic film thickness versus magnetic film thickness ($K_{u{\bot}}^{ex{p.}}$ $\times$ d$_{mag.}$ vs. d$_{mag.}$ plot). Based on the analyses, it is found that: (1) compared with CoCrPtTa media, CoCrPtB media have relatively thin initial layer, and have fine grains with homogeneous columnar structure with c-plane crystallographic orientation; (2) CoCrPtB media can be grown epitaxially on Ru or CoCr/C intermediate layer, and as the result, the magnetic properties of the media within thin thickness region of d$_{mag.}$ $\leq$ 20 nm is significantly improved; (3) the key issue of material investigation for CoCr-based perpendicular recording media will be focused on how to fabricate c-plane-oriented columnar grains well isolated with nonmagnetic substance in epitaxial-growth media, while maintaining the thermal stability of the media.

전자 주입층 $Cs_2CO_3$ 두께 변화에 따른 OLED의 효율에 미치는 영향 (Effect on Efficiency of the OLED depending on Thickness Variation of EIL $Cs_2CO_3$)

  • 한현석;김창훈;강용길;김귀열;김태완;홍진웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1438-1439
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    • 2011
  • In this paper, we studied effects on the efficiency, according to thickness of the electron injection layer(EIL) for improving efficiency of Organic Light Emitting Diodes(OLEDs). For the first time, after confirming the optimum thickness of the EIL material $Cs_2CO_3$, we designed OLED devices having a structure of ITO/TPD/$Alq_3/Cs_2CO_3$/Al. And we manufactured devices applying for the optimum thickness of the material in the simulation with thermal evaporating method. And we investigated how the EIL material $Cs_2CO_3$ effects on efficiency of OLEDs in the EIL. As the result, because the EIL material $Cs_2CO_3$ reduces energy potential barrier of the EIL, it facilitated the electron transfer. And, as blocking the hole transfer contributes to an increased recombination, we confirmed that the efficiency of OLEDs increased. And compared to the device without using the EIL material, the device using thickness 1.0 nm of $Cs_2CO_3$ in the EIL shows the excellent efficiency. Therefore, we confirmed that the luminance and the external quantum efficiency increase about 600% and 500% respectively.

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CoFeHfO 박막 재료의 두께에 따른 마이크로파 투자율 특성 (Thickness Dependence of Microwave Permeability in CoFeHfO Thin Films)

  • 이영석;김철기;김동영
    • 한국자기학회지
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    • 제20권6호
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    • pp.228-233
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    • 2010
  • 본 연구에서는 비정질 CoFeHfO 박막 재료의 두께 변화에 따른 고주파 손실 특성을 분석하기 위하여 57~1368 nm 두께의 CoFeHfO 박막 재료에 대해 마이크로파 투자율 특성을 분석하였다. 두께가 405 nm이하에서 허수부 투자율은 2.95 GHz에서 하나의 공진주파수를 보이지만, 405 nm 이상에서는 2.97 GHz와 547 MHz에서 두 개의 공진주파수를 보인다. 저자장하에서 측정한 토오크 곡선 결과로부터 547 MHz에서 발생되는 공진주파수는 CoFeHfO 재료의 자화 용이축들의 각도 분포에 기인하는 것으로 자기장의 세기에 따라서 급격하게 감소하는 특성을 보인다. 따라서 두께가 400 nm 이상의 CoFeHfO 박막 재료를 2 GHz 대역에서 작동하는 초소형 마이크로파 부품에 적용하기 위해서는 자화 용이축의 분포각도를 최소화시켜야 한다.