• Transactions on Electrical and Electronic Materials
• /
• v.1 no.1
• /
• pp.6-11
• /
• 2000

The hydrogen plasma treatment of silicon wafers in the reactive ion-etching mode was studied for the application to silicon-on-insulator wafers which were prepared using the wafer bonding technique. The chemical reactions of hydrogen plasma with surface were used for both surface activation and removal of surface contaminants. As a result of exposure of silicon wafers to the plasma, an active oxide layer was found on the surface. This layer was rendered hydrophilic. The surface roughness and morphology were examined as functions of the plasma exposing time and power. In addition, the surface became smoother with the shorter plasma exposing time and power. The value of initial surface energy estimated by the crack propagation method was 506 mJ/㎡, which was up to about three times higher as compared to the case of conventional direct using the wet RCA cleaning method.

• 한국신재생에너지학회:학술대회논문집
• /
• 2009.11a
• /
• pp.331-335
• /
• 2009

A novel multi-staged waste pyrolysis & gasification system of pilot scale (~1 ton/day) is designed and constructed in Korea Institute of Industrial Technology. The pyrolysis & gasification system is composed of pyrolysis & gasification system, syngas reformer, syngas cleaning system, gas engine power generation system and co-combustion system. For each unit process, experimental approaches have been conducted to find optimal design and operating conditions. As a result, We can produce syngas with a calorific value of ~4000 kcal/$Nm^3$ and cold gas efficiency of the system is more than 55 % in case of waste plastic and oxygen as a gasifying agent.

• ETRI Journal
• /
• v.33 no.4
• /
• pp.637-640
• /
• 2011

A novel bumping material, which is composed of a resin and Sn3Ag0.5Cu (SAC305) solder power, has been developed for the maskless solder-on-pad technology of the fine-pitch flip-chip bonding. The functions of the resin are carrying solder powder and deoxidizing the oxide layer on the solder power for the bumping on the pad on the substrate. At the same time, it was designed to have minimal chemical reactions within the resin so that the cleaning process after the bumping on the pad can be achieved. With this material, the solder bump array was successfully formed with pitch of 150 ${\mu}m$ in one direction.

• Proceedings of the KIPE Conference
• /
• 2016.11a
• /
• pp.37-38
• /
• 2016

본 논문에서는 유도가열방식 세정장치의 티타늄 용기 특성을 분석하고 전력변환장치를 설계한다. 코일에 흐를 전류를 계산하기 위한 용량 산정은 기체의 온도 변화량 및 용기 가열 시간을 고려하여 증기 가열에 필요한 열량을 수학적으로 분석하고 설계한 전력변환장치를 시뮬레이션을 통해 검증한다.

• Nuclear Engineering and Technology
• /
• v.24 no.2
• /
• pp.154-162
• /
• 1992

Two major goals for chemical cleaning on the secondary side of nuclear steam generators are to remove sludge effectively and to minimize corrosion of base metals. In this work, electrochemical and sludge dissolution behaviors have been investigated in order to find out which parameters are critical and important during a copper removal process for chemical cleaning and to evaluate safety aspects and effectiveness of two major copper removal processes developed commercially in foreign countries. Hydrogen peroxide is vert effective for the process to use EDTA, NH$_4$OH and EDA at 38$^{\circ}C$ to control the potential of copper in a potential range sood for copper sludge removal. Corrosion rates for carbon steel SA 285 Gr.C and Alloy 600 are very small during this process if it is controlled properly. However, the corrosion rate of SA 285 Gr.C will be increased greatly if its corrosion potential is maintained below -450mV. The process to use EDA and ammonium carbonate is effective at 6$0^{\circ}C$ to dissolve copper sludge if the corrosion potential of copper can be controlled above -200mV. However, it is very difficult to raise the corrosion potential of copper to this range by air blowing and stirring.

• Journal of Advanced Marine Engineering and Technology
• /
• v.41 no.3
• /
• pp.216-221
• /
• 2017

Diesel engines have the highest brake thermal efficiency among internal combustion engines. Therefore, they are utilized in medium and large transportation vehicles requiring large amounts of power such as heavy trucks, ships, power generation systems, etc. However, diesel engines have a disadvantage of generating large quantities of nitrogen oxides during the combustion process. Therefore, the authors tried to reduce the amount of nitrogen oxides in marine diesel engines using a wet-type exhaust gas cleaning system utilizing the undivided electrolyzed seawater method. In this method, electrolyzed seawater in injected into the harmful gas discharge from the diesel engine using real seawater. The authors investigated the reduction of NO and NOx from the pH value, available chlorine concentration, and the temperature of electrolyzed seawater. The results of this experiment indicated that when the electrolyzed seawater is acidic, the NO oxidation rate in the oxidation tower is higher than that when the electrolyzed seawater has a neutral pH. Likewise, the NO oxidation rate increased with the increase in concentration of chlorine. Further, it was confirmed that the electrolyzed seawater temperature had no effect on the NO oxidation rate. Thus, the NOx exhaust emission value produced by the diesel engine was reduced by means of electrolyzed seawater treatment.

• Journal of the Semiconductor & Display Technology
• /
• v.4 no.4 s.13
• /
• pp.19-26
• /
• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Korean Journal of Heritage: History & Science
• /
• v.44 no.4
• /
• pp.142-153
• /
• 2011

'Silla Monument Stone in Jungseong-ri, Pohang' was discovered in Pohang City, Gyeongsangbuk Province of Korea in 2009. The monument stone with irregular shape has dimensions of maximum height of 105cm, width of 47.6~49.6cm, thickness of 13.8~14.7cm and weight of 115kg. The results of monument stone was found to be granitite. Conservation treatment procedure was carried out in the order of production of Weathering map, cleaning of surface pollutants, consolidation using ethyl silicate. Black pollutant(crust) that covered more than 60% of the surface was analyzed first in order to remove the pollutants on the surface of the monumental stone by cleaning of surface pollutants using laser. The purpose on analysis was not only to verify the pollutants on the stone but also to carry out preliminary cleaning by securing rocks with same pollutant as the monumental stone. As the results of analysis using p-XRF(PMI. INNOV-X, USA) on the site, high level of Mn and Fe were detected, and the analysis of small section that had been fallen off with SEM/EDX for the purpose of quantitative analysis also detected high level of Mn. The Similar contaminants on Stone secured in the manner described above were made into 10 samples ($5cm{\times}5cm$) and was subjected to preliminary cleaning by Nd-YAG Laser(Laser&Physics, Korea). The results of surface observation through portable microscope during cleaning revealed that the power of 460mJ, wavelength of 1064nm and irradiation frequency of 1,800~2,300 per $25cm^2$ were most effective. Evaluation on the preservative treatment was made through confirmation of the extent of removal through color-difference meter measurement and component analysis prior to and following removal of the pollutants. As the result of color-difference meter measurement increase in the brightness was evidenced by the increase in the brightness ($L^*$)value from 33 to 49, and it was possible to ascertain the reduction in the pollutants as the content of Mn was reduced by about 80% from $50,000{\pm}5,000ppm$ to $10,000{\pm}2,000pmm$ from the result of component analysis.

• Korean Journal of Materials Research
• /
• v.8 no.8
• /
• pp.751-756
• /
• 1998

Effects of remote hydrogen plasma cleaning process parameters on the removal of Fe impurities on Si surfaces and the Fe removal mechanism were investigated. Fe removal efficiency is enhanced with decreasing the plasma exposure time and increasing the rf-power. The optimum plasma exposure time and rf-power are 1 min and 100W. respectively, in the range below 10 min and 100W. Fe removal efficiency is better under lower pressures than higher pressures, and the optimum $\textrm{H}_2$ flow rate was found to be 20 and 60sccm, respectively, under a low and a high pressure. The post-RHP(remote hydrogen plasma) annealing enhanced metallic contaminants removal efficiency, and the highest efficiency was achieved at $600^{\circ}C$. According to the AFM analysis results Si surface roughness was improved by 30-50%, which seems to be due to the removal of particles by the plasma cleaning. Also. Fe impurities removal mechanisms by remote hydrogen plasma are discussed.

• International journal of advanced smart convergence
• /
• v.4 no.1
• /
• pp.104-113
• /
• 2015

This paper focuses on a temperature effects on a PV panel which has been installed in Thailand. The main objective is cleaning PV panels and reduce temperature of PV panel by water injects from waterway and experimental results of PV power what it is difference. This project is designed by PLC control system which water injects and control PV temperature, In addition, this project consists of hardware and software such as water pump, water injection and PLC control has been automatically and it can be control system manually. The automatic control system is working when PV temperature rises up over 45 degree Celsius after that the pumping machine would inject water to the surface of PV panels and it must be stop when the PV panel temperature comes down less than 45 degree Celsius. The result of actual experimental found that the control system has been done correctly under specify condition. The experimental has been shown electrical data before and after water injects on PV system found that the electrical power a bit increases and The energy has been taken from PV panel less than energy consumption equipment of control system which taken to operate the water injecting system.