• 한국CDE학회논문집
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• 제21권1호
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• pp.69-77
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• 2016

The purpose of this study is to estimate the energy expenditure of working in a clean room for manufacturing embedded needles by ergonomic programs. Embedding needle is one of medical devices and it should be manufactured in a clean room. 3D static strength prediction program was used to analyze the slow movements during embedding needle manufacturing in a clean room. Also the energy expenditure prediction program was used to estimate energy expenditure rates for materials handling tasks to help assure worker safety and health in clean room. The energy expenditures of the tasks were calculated using prediction equations derived from empirical data. The energy expenditure rate of 3.09 kcal/min in a clean room didn't exceed the 3.5 kcal/min action limit guideline for an average 8-hour day set by the National Institute for Occupational Safety and Health (NIOSH). Energy consumption was calculated on the same working conditions as EEPP program, using an average body weight of female 20 years old to 59 years who would be the candidates of the real workers.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.844-849
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• 2008

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.

• 한국식품위생안전성학회지
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• 제26권4호
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• pp.361-365
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• 2011

To evaluate the indoor air quality of food manufacturing plants, the presence of viable bacteria and fungi was assessed in the indoor air of the facilities at which 9 food items were manufactured. Air samples were collected from the general zone, low clean zone and clean zone of each factory with an air sampler, in combination with plate counts agar using for bacteria, and dichloran-glycerol agar for fungi. The samples were incubated at $25^{\circ}C$ for 4 to 7 days. After culture, the colony forming units (CFU) on each plate were counted and corrected with a positive hole conversion table. The average concentration of bacteria was $2.2{\times}10^3\;CFU/m^3$ in the general zone, $1.2{\times}10^3\;CFU/m^3$ in the low clean zone and $7.3{\times}10^2\;CFU/m^3$ in the clean zone. The average concentration of fungal microbes was $2.5{\times}10^3\;CFU/m^3$ in the general zone, $2.6{\times}10^3\;CFU/m^3$ in the low clean zone, and $2.0{\times}10^2\;CFU/m^3$ in the clean zone. No meaningful differences were detected between the general zone and the low clean zone, but the clean zone had significantly lower concentrations than the other zones. Additionally, the identification of the fungi was performed according to morphological method using a giant culture and slide culture. The fungi were identified as belonging to 18 genera, and the genera Cladosporium(33%), Penicillium(29%) and Aspergillus(26%), predominated. Aspergillus isolates were identified to species level, and A. ochraceus, a mycotoxigenic species, was identified. As part of the effort to control the quality of the indoor air of food manufacturing plants, our results show that continued studies are clearly warranted.

• 한국재료학회지
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• 제12권12호
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• pp.955-961
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• 2002

2.7vol%TiNi/6061 Al composites with TiNi shape memory alloy as reinforcement were fabricated by vacuum hot press. It was investigated by OM, SEM, EPMA and XRD analysis for the behavior of diffusion layer formation on various heat treatment condition. Thickness of diffusion layer was increased proportionally according to heat treatment time. The layer was formed by the mutual diffusion of TiNi and Al. The diffusion rate from TiNi fiber to Al matrix was faster than that of reverse diffusion path. The more diffused layer was formed in Al matrix. The diffusion at interface layer was consisted of $A1_3$Ti, $Al_3$Ni analyzed by EPMA, XRD results.

• 한국의류학회지
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• 제25권6호
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• pp.1037-1045
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• 2001

This research is done to design and manufacture prototype clean room garments to improve the product yield of the clean room processing. To assist the research, other papers and references on the same subject were collected for analysis. Also the researcher made interviews with the workers at the clean room. The prototype garments made for this project was compared against the commercially available clean room garments used in the industry. A set of test was conducted to measure particle release from the garments. The prototype clean room garments was manufactured after having considered all the aspects stated above, and tested for the level of particle release. The test subjects performed 4 different movements(marching, arms stretch, squat and rise, and jogging) while wearing the prototype garments and commercially available clean room garments. Particle counts produced by each movement were measured. The data collected was statistically analyzed. The followings are the result of the test. 1) Overall, the prototype garments yielded less particle release.(p<0.001) 2) It showed greatest difference of particle counts for jogging(p<0.001) and squat and rise(p<0.001). In the arms stretch test. the prototype garments was also more effective in controling the particle, however, in the marching test. no significant difference was detected. 3) The prototype garments had less particle release in upper(p<0.001), middle(p< 0.001), and lower level(p<0.01) than the commercially available clean room garments. Manufacturing a new fabric for the clean room processing is important, but this research proves that the design of the clean room garments also determines the efficiency garments in the particle control. Therefore the same fabric can perform differently according to how it is designed. Improving the design will also improve the 7article control and reduce the cost of research. Eventually, the manufacturers will increase the product yield.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1306-1311
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• 2009

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.

• 설비공학논문집
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• 제22권10호
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• 지능정보연구
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• 제15권4호
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• pp.213-224
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• 2009

본 연구는 국내 300mm 웨이퍼를 이용하여 반도체 제품의 제조라인을 대상으로 수행 되었던 자동화 생산을 위한 일정계획 시스템 재 구축 프로젝트에 관한 내용이다. 본 프로젝트의 주요 목적은 반도체 제조라인 내의 세정, 확산, 포토, 증착과 같은 주요공정들을 대상으로 효율적인 일정계획 수립 알고리듬을 개발하고 그것을 실시간 일정계획 시스템에 구현함으로써 반도체 제조라인의 자동화 생산률을 향상시키는 것이다. 본 논문에서는 여러가지 주요 공정들 중 제한된 대기시간 제약과 배치공정의 특성이 존재하는 세정과 확산으로 이루어진 연속공정 구간을 대상으로 개발된 일정계획 알고리듬과 실시간 일정계획 시스템의 개발에 대한 내용에 초점을 두었다. 일정계획 시스템 재 구축 프로젝트가 시작 될 시점에 세정과 확산 공정의 자동화 생산률은 각각 50%와 10% 정도 였으나, 프로젝트 수행 완료 후에는 각각 91%와 83% 까지 자동화 생산률이 향상 되었다. 자동화 생산률의 향상은 작업자의 인건비 절감, 생산성의 향상, 지속적이고 편차 없는 생산을 의미한다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.117-119
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• 2002

A semiconductor cleaning technology has been based upon RCA cleaning which consumes vast amounts of chemicals and ultra pure water. This technology hence gives rise to many environmental issues, and some alternatives such as electrolyzed water are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed waters were obtained in anode and cathode with oxidation reduction potentials and pH of -1050mV and 4.8, and -750mV and 10.0, respectively. The electrolyzed water deterioration was correlated with $CO_2$ concentration changes dissolved from air. Overflowing of electrolyzed water during cleaning particles resulted in the same cleanness as could be obtained with RCA clean. The roughness of patterned wafer surfaces after EW clean maintained that of as-received wafers. RCA clean consumed about $9\ell$ chemicals, while electrolyzed water clean did only $400m\ell$ HCl or $600m\ell$ $NH_4$Cl to clean 8" wafers in this study. It was hence concluded that electrolyzed water cleaning technology would be very effective for releasing environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.ring.

• 한국의류학회지
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• 제24권7호
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• pp.1044-1055
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• 2000

The purpose of this study is to suggest sizing chart for a clean room wear. 3 control dimensions(Stature, Bust girth, B.N.P.∼Wrist point length) were chosen as 3 axes of clean room wear size chart. A loss function was used to determined intervals of stature, Bust girth and B.N.P.∼Wrist point length of size chart, because the loss function introduces the concept of frequency to size chart for better customer's size satisfaction. From the size table whose intervals had been determined by a loss function. The 4 sizes individually were suggested for clean room wear size chart by sex. The 3 sizes individually were suggested for clean room head cover size chart by sex too. The suggested size chart would be considered more feasible than present size chart. Also they are suggested supply reference measurement chart relevant to clean room wear manufacturing for 13 most frequent sizes.