• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• 한국가스학회지
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• 제11권4호
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• pp.98-103
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• 2007

발생가능성 분석은 염소공정의 염소투입설비에서 누출 가능성을 교정하는데 자주 사용되고 있다. 그리고 이러한 시설은 전형적으로 압력용기, 기화기, 배관, 측량장비, 안전장치로 등으로 구성되어 있다. 이 논문에서는 가능성 분석절차와 기계적 요소들의 고장률에 대하여 사건 시나리오를 만들 인적오류도 고려하였다. 논문의 주된 목적은 결정된 각각의 시나리오의 발생가능성을 계산하는 것으로 발생가능성분석 방법에 근거하여 기계요소의 고장률과 인적오류를 포함하여 계산하였다. 그 결과, 주요 $Cl_2$ 취급공정에서 누출이 발생할 가능성이 $5.73{\times}10^{-5}$로 예측되었으며 세정시스템의 고장확률은 $4.11{\times}10^{-2}$로 나타났다.

• 상하수도학회지
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• 제31권5호
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• pp.397-407
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• 2017

A dimensionally stable anode based on the $RuO_2$ electrocatalyst is an important electrode for generating chlorine. The $RuO_2$ is well-known as an electrode material with high electrocatalytic performance and stability. In this study, sonoelectrodeposition is proposed to synthesize the $RuO_2$ electrodes. The electrode obtained by this novel process shows better electrocatalytic properties and stability for generating chlorine compared to the conventional one. The high roughness and outer surface area of the $RuO_2$ electrode from a new fabrication process leads to increase in the chlorine generation rate. This enhanced performance is attributed to the accelerated mass transport rate of the chloride ions from electrolyte to electrode surface. In addition, the electrode with sonodeposition method showed higher stability than the conventional one, which might be explained by the mass coverage enhancement. The effect of sonodeposition time was also investigated, and the electrode with longer deposition time showed higher electrocatalytic performance and stability.

• 상하수도학회지
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• 제31권6호
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• pp.587-597
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• 2017

This study aimed to develop a method to optimize residual chlorine concentrations in the process of providing water supply. To this end, this study developed a model capable of optimizing the chlorine input into the clearwell in the purification plant and the optimal installation location of rechlorination facilities, and chlorine input. This study applied genetic algorithms finding the optimal point with appropriate residual chlorine concentrations and deriving a cost-optimal solution. The developed model was applied to SN purification plant supply area. As a result, it was possible to meet the target residual chlorine concentration with the minimum cost. Also, the optimal operation method in target area according to the water temperature and volume of supply was suggested. On the basis of the results, this study derived the most economical operational method of coping with water pollution in the process of providing water supply and satisfying the service level required by consumers in the aspects of cost effectiveness. It is considered possible to appropriately respond to increasing service level required by consumers in the future and to use the study results to establish an operational management plan in a short-term perspective.

• 한국물환경학회지
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• 제20권2호
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• pp.145-150
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• 2004

This study investigated the effect of chlorine dose and chlorine reaction time for the formation of haloacetic acids (HAAs). According to the results, HAA formation was highly affected by chlorine dose and chlorine reaction time. HAA formation reached a plateau value at 30 mg/L of chlorine dose and 24 hr of chlorine reaction time. For the speciation of formed HAAs in the test water, the concentration of brominated-HAAs was significantly lower than that of chlorinated-HAAs because of low level of bromide ion concentration in the test water. It also investigated the removal efficiency of HAA precursors by several unit processes, such as ozone alone, UV alone, and combined ozone/UV system. Of them, ozone/UV system was proved as the best process to control the HAAs formation. The increase of the brominated-HAAs was observed during ozonation with and without UV irradiation showing the slight increase of total HAA concentrations.

• 상하수도학회지
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• 제33권1호
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• pp.17-29
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• 2019

This study developed prediction models of chlorine bulk decay coefficient by each condition of water quality, measuring chlorine bulk decay coefficients of the water and water quality by water purification processes. The second-reaction order of chlorine were selected as the optimal reaction order of research area because the decay of chlorine was best represented. Chlorine bulk decay coefficients of the water in conventional processes, advanced processes before rechlorination was respectively $5.9072(mg/L)^{-1}d^{-1}$ and $3.3974(mg/L)^{-1}d^{-1}$, and $1.2522(mg/L)^{-1}d^{-1}$ and $1.1998(mg/L)^{-1}d^{-1}$ after rechlorination. As a result, the reduction of organic material concentration during the retention time has greatly changed the chlorine bulk decay coefficient. All the coefficients of determination were higher than 0.8 in the developed models of the chlorine bulk decay coefficient, considering the drawn chlorine bulk decay coefficient and several parameters of water quality and statistically significant. Thus, it was judged that models that could express the actual values, properly were developed. In the meantime, the chlorine bulk decay coefficient was in proportion to the initial residual chlorine concentration and the concentration of rechlorination; however, it may greatly vary depending on rechlorination. Thus, it is judged that it is necessary to set a plan for the management of residual chlorine concentration after experimentally assessing this change, utilizing the methodology proposed in this study in the actual fields. The prediction models in this study would simulate the reduction of residual chlorine concentration according to the conditions of the operation of water purification plants and the introduction of rechlorination facilities, more reasonably considering water purification process and the time of chlorination. In addition, utilizing the prediction models, the reduction of residual chlorine concentration in the supply areas can be predicted, and it is judged that this can be utilized in setting plans for the management of residual chlorine concentration.

• Journal of the Korean Wood Science and Technology
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• 제44권1호
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• pp.147-155
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• 2016

본 연구는 사탕수수 부산물 펄프를 Element Chlorine Free (ECF) 표백 처리할 때 마지막 과산화수소 표백단계를 추가하여 최종 표백 펄프의 잔류 이산화염소를 제거하고, 총 이산화염소 사용량을 제거하고자 하였다. 특히 과산화수소 표백단계를 효과적으로 사용하기 위한 킬레이트 처리 단계를 반응 조건이 비슷한 이산화염소 표백 단계와 동시 진행하였을 때, 개별적으로 킬레이트 처리를 진행한 표백 펄프의 표백 특성을 비교하였다. 총 이산화염소 사용량이 4.5%(w/w oven dried pulp)일 때 EDTA의 경우 킬레이트를 동시 처리할 때 백색도와 점도는 각각 87.0% ISO와 25.8 cPs로 개별 처리하는 경우 보다 더 높은 표백 특성(86.4% ISO, 25.2 cPs)을 나타냈다. 반면 DTPA를 킬레이트 화합물로 사용하는 경우 동시처리 시(83.9% ISO, 21.9 cPs) 개별처리(86.8% ISO, 25.6 cPs) 보다 표백 특성이 낮은 수준을 나타냈다. 특히 EDTA를 킬레이트 화합물로 사용시 잔류 전이금속(망간 이온, 철 이온) 농도가 개별처리 시 0.65 ppm, 66.74 ppm으로 나타난 반면 동시 처리시 0.52 ppm과 55.68 ppm으로 킬레이트 처리 효과가 향상됨을 확인할 수 있다. DTPA는 동시 처리시 0.71 ppm과 116.88 ppm의 망간 이온, 철 이온 농도가 나타난 반면 개별 처리시 0.56 ppm, 86.17 ppm의 농도로 동시 처리 시 킬레이트 처리 능력이 감소됨을 알 수 있다. 이를 통해 킬레이트 화합물 종류와 처리 방법에 따라 킬레이트 효과의 차이가 나타나며, 효율적인 공정을 위해서는 EDTA를 킬레이트 화합물로 이산화염소 표백단계와 동시 처리하는 것이 표백 효율과 공정효율을 위해 유리한 것으로 나타났다.

• 한국환경보건학회지
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• 제48권3호
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• pp.167-175
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• 2022

Background: Disinfection is essential to provide drinking water from a water source. The disinfection process mainly consists of the use of chlorine and ozone, but when chlorine is used as a disinfectant, the problem of disinfection by-products arises. In order to resolve the issue of disinfection by-products, electro-chlorination technology that produces chlorine-based disinfectants from salt water through electrochemical principles should be applied. Objectives: This study surveys the possibility of optimally producing active chlorine from synthetic NaCl solutions using an electro-chlorination system through RSM. Methods: Response surface methodology (RSM) has been used for modeling and optimizing a variety of water and wastewater treatment processes. This study surveys the possibility of optimally producing active chlorine from synthetic saline solutions using electrolysis through RSM. Various operating parameters, such as distance of electrodes, sodium chloride concentration, electrical potential, and electrolysis time were evaluated. Results: Various operating parameters, such as distance of electrodes, sodium chloride concentration, electrical potential, and electrolysis time were evaluated. A central composite design (CCD) was applied to determine the optimal experimental factors for chlorine production. Conclusions: The concentration of the synthetic NaCl solution and the distance between electrodes had the greatest influence on the generation of hypochlorite disinfectant. The closer the distance between the electrodes and the higher the concentration of the synthetic NaCl solution, the more hypochlorous acid disinfectant was produced.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제16권3호
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• pp.197-207
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• 2016

It is very important to maintain a constant chlorine concentration in the post chlorination process, which is the final step in the water treatment process (hereafter WTP) before servicing water to citizens. Even though a flow meter between the filtration basin and clear well must be installed for the post chlorination process, it is not easy to install owing to poor installation conditions. In such a case, a raw water flow meter has been used as an alternative and has led to dosage errors due to detention time. Therefore, the inlet flow to the clear well is estimated by a time series neural network for the plant without a measurement value, a new residual chlorine meter is installed in the inlet of the clear well to decrease the control period, and the proposed modeling and controller to analyze the chlorine concentration change in the well is a neuro fuzzy algorithm and cascade method. The proposed algorithm led to post chlorination and chlorination improvements of 1.75 times and 1.96 times respectively when it was applied to an operating WTP. As a result, a hygienically safer drinking water is supplied with preemptive response for the time delay and inherent characteristics of the disinfection process.

• 대한환경공학회지
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• 제29권4호
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• pp.419-424
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• 2007

깨끗하고 안전한 수돗물에 대한 소비자들의 욕구가 커짐에 따라 막, 오존, 활성탄 등 다양한 고도처리공정이 정수장에 도입되고 있다. 본 연구에서는 고도처리공정의 도입으로 인한 관로 내 잔류염소 감소 및 THM 생성특성에 대하여 살펴보았다. 오존, 활성탄, 오존/GAC 공정별 DOC 제거특성과 bottle test를 이용한 잔류염소 감소 및 THM 생성특성을 평가하였다. 모든 처리공정에서 DOC 제거율보다 $UV_{254}$ 유발물질의 제거율이 우수한 것으로 나타났다. 특히, 오존공정에 의한 DOC 제거율은 기존 모래여과수 대비 약 4%에 불과하였으나, $UV_{254}$는 약 17%로 DOC 제거율보다 훨씬 더 큰 차이를 보였는데, 이는 오존에 의해 소수성 유기물이 친수성 유기물로 변환되었기 때문이다. 오존/GAC 공정이 유기물 제거에 가장 효과적이었으며, 모래여과, 오존, GAC, 그리고 오존/GAC공정을 거친 처리수의 잔류염소 감소계수는 각각 0.0230, 0.0307, 0.0117 그리고 0.0098 $hr^{-1}$ 나타났으며, 190시간 반응 이후 모래여과수는 THM이 81.8 ${\mu}g/L$ 생성된 반면, 오존, GAC, 그리고 오존/GAC의 처리수는 모래여과수에 비해 각각 6.0, 26.2, 30.3% 적게 생성되었다. 결론적으로 고도처리공정에 의해 관로 내 잔류염소의 지속성이 증대되었으며, THM 생성 또한 감소하는 것으로 나타났다.