Growth of epitaxial CoSi$_2$ using Co-O-N films deposited by metallorganic chemical vapor deposition
(금속유기화학기상증착법으로 증착된 Co-O-N 박막을 이용한 CoSi$_2$ 에피층 성장)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2003.11a
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- pp.166-166
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- 2003