• Tribology and Lubricants
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• 제38권6호
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• pp.247-254
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• 2022

Chemical mechanical polishing (CMP) is a hybrid surface-polishing process that utilizes both mechanical and chemical energy. However, the recently emerging semiconductor substrate and thin film materials are challenging to process using the existing CMP. Therefore, previous researchers have conducted studies to increase the material removal rate (MRR) of CMP. Most materials studied to improve MRR have high hardness and chemical stability. Methods for enhancing the material removal efficiency of CMP include additional provision of electric, thermal, light, mechanical, and chemical energies. This study aims to introduce research trends on CMP using ultraviolet (UV) light to these methods to improve the material removal efficiency of CMP. This method, photocatalysis-assisted chemical mechanical polishing (PCMP), utilizes photocatalytic oxidation using UV light. In this study, the target materials of the PCMP application include SiC, GaN, GaAs, and Ru. This study explains the photocatalytic reaction, which is the basic principle of PCMP, and reviews studies on PCMP according to materials. Additionally, the researchers classified the PCMP system used in existing studies and presented the course for further investigation of PCMP. This study aims to aid in understanding PCMP and set the direction of future research. Lastly, since there have not been many studies on the tribology characteristics in PCMP, research on this is expected to be required.

• 반도체공학회 논문지
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• 제2권2호
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• pp.1-9
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• 2024

반도체 소자의 집적도는 높아져 왔으며 이는 더 작고 밀도가 높은 회로 및 소자를 제조하는 것을 의미한다. 이에 따라 다양한 층간 표면을 매끄럽게 유지하여 미세한 패턴을 형성하고 고밀도 회로를 안정적으로 제작하는데 평탄화 기술이 중요한 역할을 한다. 결과적으로 반도체에서의 CMP(chemical mechanical polishing) 공정은 다층 구조 소자를 만들기 위해서 반드시 필요한 공정이 되었다. 일반적으로 CMP 공정의 슬러리 조성은 세리아(ceria), 분산제(dispersant), 물(DI water) 이렇게 3 가지 성분이 균형을 이루는 것이 중요하다. 본 연구에서는 AMP(2-Amino-2-methyle-1-propanol) 함량을 달리한 양쪽성 계면활성제를 사용한 세리아 슬러리 안정성 연구를 수행하였다. 결과적으로 AMP 함량에 따라 카복실기(-COOH) 영향으로 pH 안정화 되었으며, 세리아 슬러리 응집현상이 발생하지 않았으며 분산 안정성 문제가 없는 것으로 확인되었다.

• Journal of Mechanical Science and Technology
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• 제19권9호
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• pp.1821-1832
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• 2005

This study realizes the conceptual method to predict combustion instability in actual full-scale combustion chamber of rocket engines by experimental tests with model (sub-scale) chamber. The model chamber was designed based on the methodologies proposed in the previous work regarding geometrical dimensions and operating conditions, and hot-fire test procedures were followed to obtain stability boundaries. From the experimental tests, two instability regions are presented by the parameters of combustion-chamber pressure and mixture (oxidizer/fuel) ratio, which are customary for combustor designers. It is found that instability characteristics in the chamber with the adopted jet injectors can be explained by the correlation between the characteristic burning or mixing time and the characteristic acoustic time: In each instability region, dynamic behaviors of flames are investigated to verify the hydrodynamically-derived characteristic lengths of the jet injectors. Large-amplitude pressure oscillation observed in upper instability region is found to be generated by lifted-off flames.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.538-541
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• 2008

The carbon laden suspensions in water with no surfactants have poor stability caused by the hydrophobic layer of particles. In this study, the water-based carbon nano colloide(CNC) was successfully produced using electro-chemical one-step method without agent. The properties of CNC were characterized by using various techniques such as particle size analyzer, TEM, FT-IR, turbidity meter, viscometer, and transient hot-wire method. The average size of the suspended in the CNC was 15 nm in diameter. The thermal conductivity of CNC compared with water was increased up to 14% with 4.2wt% concentration. The CNC was stable over 600hr. The enhanced colloidal stability of CNC may be caused by the chemical structures, such as, hydroxide and carboxyl groups formed in outer atomic layer of carbon, which (i) made the carbon nanofparticles hydrophilic and (ii) prevented the aggregation among nanoparticles.

• Biotechnology and Bioprocess Engineering:BBE
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• 제9권3호
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• pp.207-211
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• 2004

Predispersed solvent extraction (PDSE) of succinic acid with Tri-n-octylamine (TOA) dissolved in 1-octanol from aqueous solutions of 50 g/L succinic acid was examined. It was found that the equilibrium data in PDSE was equal to that in conventional solvent extraction in spite of the lack of mechanical mixing in PDSE. The influence of salts on succinic acid extraction and the stability of colloidal liquid aphrons (CLAs) were also investigated. Results indicated that in the presence of sodium chloride, less succinic acid was extracted by CLAs and the stability of CLAs decreased. However, the stability of CLAs was sufficient to make PDSE practically applicable to real fermentation broth, considering the concentration range of salts in the fermentation process for succinic acid.

• Elastomers and Composites
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• 제50권1호
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• pp.30-34
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• 2015

Thermo-mechanical treatment process of a compressed open-cell rigid polyurethane foam (OC-RPUF), which was fabricated for the vacuum insulation panel (VIP), was studied to obtain an optimum condition for the dimensional stability by the relaxation of compressive stress. Thermo-mechanical deformation of the sample OC-RPUF was shown to occur from about $120^{\circ}C$. Yield stress of 0.36 MPa was shown at about 10% yield strain. And, densification of the foam started to occur from 75% compressive strain and could be continued up to max. 90%. Compression set of the sample restored after initial compression to 90% at room temperature was ca. 82%. Though the expansion occurred to about twice of the originally compressed thickness in case of temperature rise to $130^{\circ}C$, it could be overcome and the dimensional stability could be maintained if the constant load of 0.3 MPa was applied. As the result, a thermo-mechanical treatment process, i.e, annealing process at temperature of $130{\sim}140^{\circ}C$ for about 20 min as is the maximum compressed state at room temperature, should be required for dimensional stability as an optimum condition for the use of VIP core material.

• Elastomers and Composites
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• 제54권1호
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• pp.7-13
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• 2019

Recycling of waste polyvinyl chloride plastics has attracted much attention due to environmental problems, but the poor mechanical properties, low thermal stability, frequent breakage of strands, and melt cracking of the waste plastics have limited their widespread use. To overcome these disadvantages of waste PVC (W-PVC), recycled PVC powder blend was prepared by adding high-density polyethylene (HDPE) and ethylene vinyl acetate (EVA) as a heat stabilizer and compatibilizer, respectively. An intermeshing co-rotating twin screw extruder was used to prepare the blend, and the characteristics of the blend were analyzed by SEM and TGA, and by using a UTM and Izod impact tester. The impact strength was improved as the EVA content increased for the W-PVC/HDPE (80/20 wt%) blend. As the HDPE and EVA contents increased in the W-PVC/HDPE/EVA blend, the impact strength increased. SEM observations also revealed the improved interfacial adhesion for the EVA-containing blend.

• 한국전기전자재료학회논문지
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• 제15권10호
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• pp.838-843
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• 2002

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for deep sub-micron technology. The reverse moat etch process has been used for the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process with conventional low selectivity slurries. Thus, the process became more complex, and the defects were seriously increased. In this paper, we studied the direct STI-CMP process without reverse moat etch step using high selectivity slurry(HSS). As our experimental results show, it was possible to achieve a global planarization without the complicated reverse moat process, the STI-CMP process could be dramatically simplified, and the defect level was reduced. Therefore the throughput, yield, and stability in the ULSI semiconductor device fabrication could be greatly improved.

• Elastomers and Composites
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• 제50권2호
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• pp.81-86
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• 2015

In this study, natural rubber latex foam was prepared in order to replace commercialized polyurethane foams as a car seat material. Physical properties of the latex foam were investigated and the light stability was improved. The latex foam was mixed in an aqueous solution state, and the degree of foaming and the accelerator ratios were appropriately controlled. Tensile properties, hysteresis and dynamic mechanical properties of the latex foam were measured to compare with those of polyurethane foams. UV light absorbers and radical scavengers were added for improving light stability of the latex foam. Xenon lamp test was conducted to investigate the effects of the reagents on light stability. Our results revealed that the prepared latex foam including a light absorber with an antioxidant showed excellent light stable performances.

• 한국막학회:학술대회논문집
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• 한국막학회 2004년도 첨단 분리막 연구동향
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• pp.37-59
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• 2004

Advantages : - Multi-functionality of inorganic surface ㆍMetal chelating ligand $\longrightarrow$ metal recovery .Alkylation $\longrightarrow$ hydrophobicity control - Enhanced stability ㆍThermal, mechanical and chemical stability ㆍSeparation in high temperature and pressure (omitted)