• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.169-169
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• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• Particle and aerosol research
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• v.13 no.2
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• pp.79-85
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• 2017

This study identified the loss of minimum fluidization velocity and pressure in accordance with the superficial velocity of $NiO/MoO_3/MoS_2$, a rare metallic oxide and high value-added material in the lab-scale fluidized bed reactor (L=0.25 m, D=0.05 m). The average pressure loss in L/D 1, 2, and 3 of $NiO/MoO_3/MoS_2$ within the scope of superficial gas velocity between 0.07 and 0.45 m/s based on the L/D 1, 2, and 3 of the specimen was shown to be 290~1952 Pa at decreasing flux and 253~1925 Pa at increasing flux. The comparison between the theoretical value proposed by Wen and the test data showed a difference between 0.021~0.36 magnification. Based on these results, this study was able to determine the operation conditions where rare metallic oxides could be applied in real phenomena.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.8
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• pp.780-786
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• 2010

The bacterial community structure in biological reactor in wastewater treatment system was investigated by denaturing gradient gel electrophoresis (DGGE) and fluorescent in situ hybridization (FISH). Samples were collected at different three points in wastewater treatment system. Through treatment processes, BOD (biochemical oxygen demand) and COD (chemical oxygen demand) of was removal efficiency was 83.1~98.6%, 67.2~85.2% respectively. Microbial community of aerobic tank and oxic tank were similar but anoxic tank was different (RRP group was increased about tripple) by DGGE and FISH in sludge (2007 October and 2008 January). Samples in 2007 October and 2008 January were dominant ${\alpha}$-Proteobacteria and CF group respectively. Sludge in 2008 April were different comparing former results dominant others as 65~80%. Others group was dominant. Eubacteria by FISH with the probe EUB338 was about $1.7{\sim}7.6{\times}10^9\;cells/mL$. It could be successfully observed bacterial community in biological wastewater system.

• Journal of the Korean Wood Science and Technology
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• v.41 no.6
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• pp.583-593
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• 2013

The based-catalyzed depolymerization (BCD) of kraft lignin isolated from black liquor which the chemical pulping of a mixture of various Southeast Asia hardwood chips was carried out in a batch reactor in the presence of different NaOH concentrations with supercritical methanol. The S:G ratio of the kraft lignin determined by pyrolysis-GC/MS analysis turned out roughly 1.4:1 and main products were vanillic acid, syringol and 3-methoxy catechol. The diethyl ether extracts as phenolic monomers from BCD reaction were produced similar yield among different NaOH concentrations. The 21 compounds were identified by GC/MS analysis in all experiments and major products were catechol, 3-methoxycatechol, 4-methylcatechol, syringol and isovanillic acid. However, it had been shown to be different monomer contents depending on the dosage of NaOH. Catechol, 4-methylcatechol and 3-methoxycatechol were shown to be the dominant monomer from BCD reaction using 7.5 and 3.25% of NaOH concentration whereas syringol, isovanillic acid, 3-methoxycatechol and 4-methylcatechol were determined to be the most typical products under the condition of 1.63% NaOH.

• Journal of Radiation Industry
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• v.9 no.4
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• pp.217-221
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• 2015

When reactor coolant leaks occur due to cracks of a steam generator's tube, radioactive materials contained in the primary cooling water in nuclear power plant are forced out toward the secondary systems. At this time the secondary water purification resin in the ion exchange resin tower of the steam generator blowdown system is contaminated by the radioactivity of the leaked radioactive materials, so we pack this in special containers and store temporarily because we could not dispose it by ourselves. If steam generator tube leakage occurs, it produces contaminated spent resins annually about 5,000~7,000 liters. This may increase the amount of nuclear waste productions, a disposal working cost and a unit price of generating electricity in the plant. For this reasons, it is required to develop a decontamination process technique for reducing the radioactive level of these resins enough to handle by the self-disposal method. In this research, First, Investigated the structure and properties of the ion exchange resin used in a steam generator blowdown system. Second, Checked for a occurrence status of contaminated spent resin and a disposal technology. Third, identified the chemical characteristics of the waste radionuclides of the spent resin, and examined ionic bonding and separation mechanism of radioactive nuclear species and a spent resin. Finally, we carried out the decontamination experiment using chemicals, ultrasound, microbubbles, supercritical carbon dioxide to process these spent resin. In the case of the spent resin decontamination method using chemicals, the higher the concentration of the drug decontamination efficiency was higher. In the ultrasound method, foreign matter of the spent resin was removed and was found that the level of radioactivity is below of the MDA. In the microbubbles method, we found that the concentration of the radioactivity decreased after the experiment, so it can be used to the decontamination process of the spent resin. In supercritical carbon dioxide method, we found that it also had a high decontamination efficiency. According to the results of these experiments, almost all decontamination method had a high efficiency, but considering the amounts of the secondary waste productions and work environment of the nuclear power plant, we judged the ultrasound and supercritical carbon dioxide method are suitable for application to the plant and we established the plant applicable decontamination process system on the basis of these two methods.

• Applied Chemistry for Engineering
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• v.22 no.4
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• pp.429-432
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• 2011

The feasibility of applications of the char obtained from a gasification process of municipal-waste refuse derived fuel (RDF) as an auxiliary fuel was evaluated by combustion experiments. The higher heating value of the RDF char was 3000~4000 kcal/kg and its chlorine content was below the standard requirement demonstrating its potential as an auxiliary fuel. In the combustion exhaust gas, the maximum $NO_x$ and $SO_2$ concentrations were 240 ppm and 223 ppm, respectively. If an aftertreatment is applied, it is possible to control their concentrations low enough to meet the air pollutant emission standard. The HCl concentration was relatively high indicating that a care should be taken for HCl emission from the combustion of RDF. Based on the temperature distribution within the reactor, the concentration change of $O_2$ and $CO_2$, and the amount and the loss on ignition of solid residue, it was inferred that the combustion reaction was the most reliable when the excess air ratio of 1.3 was used.

• Applied Chemistry for Engineering
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• v.34 no.6
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• pp.674-678
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• 2023

The effect of Pt was investigated to the catalytic methane decomposition of CH₄ to H₂ over Pt(1)-Fe(30)/MCM-41 and Fe(30)/MCM-41 using a fixed bed flow reactor under atmosphere. The Fe₂O₃ and Pt crystal phase behavior of fresh Pt(1)-Fe(30)/MCM-41 were obtained via XRD analysis. SEM, EDS analysis, and mapping were performed to show the uniformed distribution of nano particles such as Fe, Pt, Si, O on the catalyst surface. XPS results showed O^2-, O^- species and metal ions such as Pt⁰, Pt²⁺, Pt⁴⁺, Ft⁰, Fe²⁺, Fe³⁺ etc. When 1 wt% of Pt was added to Fe(30)/MCM-41, automic percentage of Fe2p increased from 13.39% to 16.14%, and Pt4f was 1.51%. The yield of hydrogen over Pt(1)-Fe(30)/MCM-41 was 3.2 times higher than Fe(30)/MCM-41. The spillover effect of H₂ from Pt to Fe increased the reduction of Fe particles and moderate interaction of Fe, Pt and MCM-41 increased the uniform dispersion of fine nanoparticles on the catalyst surface, and improved hydrogen yield.

• Nuclear Engineering and Technology
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• v.55 no.10
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• pp.3543-3548
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• 2023

Shutdown chemistry evolution is performed in nuclear power plants at each refueling outage (RFO) to establish safe conditions to open system and minimize inventory of corrosion products in the reactor coolant system (RCS). After hydrogen peroxide is added to RCS during shutdown chemistry evolution, corrosion products are released and are removed by filters and ion exchange resins in the chemical volume control system (CVCS). Shutdown chemistry evolution including RCS clean-up time to remove released corrosion products impacts the critical path schedule during RFOs. The estimation of clean-up time prior to RFO can provide more reliable actions for RCS clean-up operations and transients to operators during shutdown chemistry. Electric Power Research Institute (EPRI) shutdown calculator (SDC) enables to provide clean-up time by Co-58 peak activity through operational data from nuclear power plants (NPPs). In this study, we have investigated the results of EPRI SDC by shutdown chemistry data of Co-58 activity using NPP data from previous cycles and modeled the estimated clean-up time by EPRI SDC using average Co-58 activity of the NPP. We selected two RFO data from the NPP to evaluate EPRI SDC results using the purification time to reach to 1.3 mCi/cc of Co-58 after hydrogen peroxide addition. Comparing two RFO data, the similar purification time between actual and computed data by EPRI SDC, 0.92 and 1.74 h respectively, was observed with the deviation of 3.7-7.2%. As the modeling the estimated clean-up time, we calculated average Co-58 peak concentration for normal cycles after cycle 10 and applied two-sigma (2σ, 95.4%) for predicted Co-58 peak concentration as upper and lower values compared to the average data. For the verification of modeling, shutdown chemistry data for RFO 17 was used. Predicted RCS clean-up time with lower and upper values was between 21.05 and 27.58 h, and clean-up time for RFO 17 was 24.75 h, within the predicted time band. Therefore, our calculated modeling band was validated. This approach can be identified that the advantage of the modeling for clean-up time with SDC is that the primary prediction of shutdown chemistry plans can be performed more reliably during shutdown chemistry. This research can contribute to improving the efficiency and safety of shutdown chemistry evolution in nuclear power plants.

• Membrane Journal
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• v.22 no.2
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• pp.95-103
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• 2012

To treat nitrate and non-biodegradable organics effectively in sewage, industrial wastewater and livestock wastewater, the activated sludge process integrated by a membrane separation and a porous electrode- electrolysis was proposed and its efficiency was investigated. The proposed system was consisted of 3 processes; activated sludge, membrane filtration and electrolysis. In the study, the membrane filtration played a role in reducing the load of the electrolysis to operate the proposed process stably. The electrolysis consisted of a porous electrode to increase the efficiency due to the extension of the specific surface area. Additionally, redox reaction in the electrolysis was induced by decomposing influent water as current was applied. As a result, hydrogen free radicals and oxygen radicals as intermediates were produced and they acted as oxidants to play a role in decomposing non-degradable organics. It was environmentally-friendly process because intermediates produced by porous electrode were used to treat waste matters without supplying external reagent. Experimental data showed that the proposed process was more excellent than activated sludge process. SS removal efficiencies of the proposed process, membrane filtration and activated sludge process were about 100%, about 100% and about 90%, respectively. COD removal efficiencies of the proposed system, membrane filtration and activated sludge process were about 92%, about 84% and about 78%, respectively. T-N removal efficiencies of the proposed system, membrane filtration and activated sludge process were about 88%, about 67%, and about 58%, respectively. The SS data showed that SS was efficiently removed in the single of the membrane filtration. The COD/T-N data showed that COD/T-N of membrane hybrid process was treated by removing a little soluble organics and SS, and that COD/T-N of electrolysis hybrid process was treated by oxidize organics with high removal rate.

• Applied Chemistry for Engineering
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• v.21 no.6
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• pp.648-652
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• 2010

Catalytic activities of the partial oxidation of methane (POM) to hydrogen were investigated over Pd(5)/Ti-SPK and Pd(5)/Zr-SPK in a fixed bed flow reactor (FBFR) under atmosphere, and the catalysts were characterized by BET, XPS, XRD. The BET surface areas, pore volume and pore width of Horvath-Kawaze, micro pore area and volume of t-plot of Pd(5)/Ti-SPK and Pd(5)/Zr-SPK were $284m^2/g$, $0.233cm^3/g$, 3.9 nm, $30m^2/g$, $0.015cm^3/g$ and $396m^2/g$, $0.324cm^3/g$, 3.7nm, $119m^2/g$, $0.055cm^3/g$, repectively. The nitrogen adsorption isotherms were type IV with hysteresis. XPS showed that Si 2p and O 1s core electronlevels of Ti-SPK and Zr-SPK substituted Ti and Zr shifted to slightly lower binding energies than SPK. The oxidation states of Pd on the surface of catalysts were $Pd^0$ and $Pd^{+2}$. XRD patterns showed that crystal structures of fresh catalyst changed amorphous into crystal phase after reaction. The conversion and selectivity of POM to hydrogen over Pd(5)/Ti-SPK and Pd(5)/Zr-SPK were 77, 84% and 78, 72%, respectively, at 973 K, $CH_4/O_2$ = 2, GHSV = $8.4{\times}10^4mL/g_{cat}{\cdot}h$ and were kept constant even after 3 days in stream. These results confirm superior activity, thermal stability, and physicochemical properties of catalyst in POM to hydrogen.