• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.79-80
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• 2007

Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing (CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical planarization/polishing (ECMP) or electro-chemical mechanical planarization was introduced to solve the. technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.443-444
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• 2002

The uniformity of field oxide is critical to isolation property of device in STI, so the control of field oxide thickness in STI-CMP becomes enormously important. The loss of field oxide in shallow trench isolation comes mainly from dishing and erosion in STI-CMP. In this paper, the effect of slurries on the dishing was investigated with both blanket and patterned wafers were selected to measure the removal rate, selectivity and dishing amount. Dishing was a strong function of pattern spacing and types of slurries. Dishing was significantly decreased with decreasing pattern spacing for both slurries. Significantly lower dishing with ceria based slurry than with silica based slurry were achieved when narrow pattern spacing were used. Possible dishing mechanism with two different slurries were discussed based on the observed experimental results.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2015년도 추계 학술논문 발표대회
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• pp.11-12
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• 2015

This study analyzed sulfate resistance of strongly acid-resistant inorganic binder based on industrial byproducts. According to the study experiment, compared to OPC mixture, the mixture of high acid-resistant inorganic binder had excellent chemical resistance against 10% H₂SO₄ solution. In the case of ordinary portland cement, its sample with 28 days of immersion had severe corrosion on its mortar erosion part, and thus external appearance was damaged greatly, and compression strength decreased by around 57% and more.

• 대한전기학회논문지
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• 제40권6호
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• pp.574-581
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• 1991

Damage in film capacitors has been investigated, using FTIR and ESCA, aiming to elucidate the nature of electrode removal and the possibility of base films to be damaged. Also, tests were conducted to investigate the effect of a long-term thermal aging at elevated temperatures. Unsuccessful clearing or grape-clustering processes can induce a long-term degradation which involves the chemical and morphological changes. Major changes are the oxidation and the decrease in surface crystallinity possibly arising from the corona discharge. An immediate deterioration of BOPP film may occur when the air entrapped between the film layers induces an extensive autocatalytic oxidative degradation. This type of immediate damage may result in a premature failure at an early stage of qualification test. As far as the nature of electrode removal is concerned, a permanent removal of electrode materials was observed in the main erosion area.

• Journal of the Korean Wood Science and Technology
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• 제2권3호
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• pp.39-41
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• 1974

Bastard indigo, prevailing shrub species planted in erosion control work to constitute vegetation, is proved to be usefull for pulp material other than existing usage of green manure or fuel. Pulp made from bastard indigo is good enough for filler pulp though the quality of it is not remarkably excellent. (1) Sorts of paper possible to make from this pulp. Packing paper of medium grade. (general packing paper except heavy packing) (2) Traits of this pulp as for pulp material (A) It is more preferable than annual plants in these respects, ego collection, transport and storage of pulp material, and yield, freeness and chemical consumption of pulp. (B) Annual probable production of pulp material per ha from this plant is higher than that from long-term tree species or similar to that from fast growing species. (C) Its cultivation on eroded area is welcomed and consecutive annual production of material by copice method is also proved possible.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2011년도 추계 학술논문 발표대회
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• pp.161-163
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• 2011

Due to various kind of waterproof materials and methods, which is difficult to select the most appropriate to waterworks. The materials used to prevent the deterioration of the service life is short, because of the chemical erosion. So, in the 2010 Office of Waterworks Seoul Metropolitan Government has set new standards. Recently, SMC panel is a trend that is being applied to water treatment facilities. However, SMC panel has not yet implemented a performance evaluation. Therefore, this study to confirm that satisfaction for the Office of Waterworks Seoul Metropolitan Government of the performance requirements, when the applied the SMC panel to water treatment structure.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2011년도 추계 학술논문 발표대회
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• pp.217-218
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• 2011

The advantages of blast-furnace slag concrete may include lower hydration heating velocity, restraint on concrete temperature increase, long-age strength improvement due to latent hydraulic reaction, improved water tightness, and repulsion to chemical erosion. These advantages contribute to the high quality of the blast-furnace slag concrete. However, the blast-furnace slag concrete has its limitations as well. These disadvantages may include retarded setting and elongated retention of mold due to the weak strength of early-age. Nevertheless, much research is currently under way to improve the aforementioned issues. To improve activity of blast furnace slag powder, alkaline irritants has been used. In this study, we analyze effect on activity fineness and rate of substitution of Alkali Activator toward activity.

• 한국구조물진단유지관리공학회 논문집
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• 제7권2호
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• pp.141-148
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• 2003

Concrete surface is a part that resists chiefly to carbonation by carbonic acid gas, affluence of rainwater and air, deterioration by freezing thawing, salt damage by seawater, and other chemical erosion etc. Therefore, this research analyzed physical characteristic and durable characteristic of concrete eliminated glut water and bubble of concrete surface using CON-SILK that is permeated with dehydration. As a research result, concrete using CON-SILK was improved, in comparison with concrete using general formwork, in physical performance and durability of concrete, as surface hardness, carbonation resistivity, and salt content permeation resistivity etc. Therefore, we could know that it is effective to use CON-SILK in performance elevation of concrete surface.

• 한국정밀공학회지
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• 제32권7호
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• pp.627-631
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• 2015

Conventional etching technology is in the face of problems such as dishing, erosion resulting from non-uniform removal of film. Advanced printed circuit board (PCB) requires accurate wire formation with the aid of planarization by chemical mechanical polishing (CMP). Linear roll CMP is a line contact continuous process which removes the film by pressurization and rotation while slurry is supplied to polishing pad attached to the roll. This paper focuses on the design of floating nozzle on the linear roll CMP equipment which makes the slurry supply uniformly on the roll pad. Experimental results show that removal rate using the floating nozzle increases 3 times higher than that without it and non-uniformity is less than 15%.

• 한국농공학회:학술대회논문집
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• 한국농공학회 1999년도 Proceedings of the 1999 Annual Conference The Korean Society of Agricutural Engineers
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• pp.759-764
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• 1999

In intensive agriculture, exceeded chemical fertilizer application would increase the concentration of nitrate nitrogen in groundwater. Consequently, it could bring the eutrophication in lakes and streams. The present study examined runoff loading of nitrogen and phosphorus from the paddy field during non-cropping season. The runoff loading of total-N, ammonia-N, nitrate-N and total-P were 12.96kg/ha, 5.42kg/ha, 1.52kg/ha and 1.41kg/ha. When the runoff loading of nutrients was compared by runoff water and sediments. About 70-80% of total-N by runoff water and the rest 20-30% by runoff sediments were flowed into streams. But 60-70% of total-P by runoff sediments and the rest 30-40% by runoff water were flowed into streams. The phosphorus compounds, which were flowed into streams by runoff sediments and then sedimented, keep exchanging with water at water body in undelivered condition. And it moves gradually into water layer. This process can cause eutrophication continually and repeatedly in water environment. So, a sound program is needed to reduce soil erosion from farmlands.