• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.98-102
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• 2019

Direct plasma-enhanced atomic layer deposition (PEALD) are widely used for $SiO_2$ and SiON thin film process in current semiconductor industry. However, this exhibits poor step coverage for three-dimensional device structure due directionality of plasma species as well as plasma damage on the substrate. In this study, to overcome this issue, low temperature (< $300^{\circ}C$) $SiO_2$ and SiON thin film processes were studied using inductively coupled plasma (ICP) type remote PEALD with various reactant gases such as $O_2$, $H_2O$, $N_2$ and $NH_3$. It was confirmed that the interfacial properties such as fixed charge density and charge trapping behavior of thin films were considerably improved by hydrogen species in $H_2O$ and $NH_3$ plasma compared to the films grown with $O_2$ and $N_2$ plasma. Furthermore, the leakage current density of the thin films was suppressed for same reason.

• Laser Solutions
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• v.17 no.4
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3264-3269
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• 2007

Combustion instability is a serious obstacle for the lean premixed combustion of gas turbines, and can even cause fatal damage to the combustor and the entire system. Thus, improved understanding of the mechanisms of combustion instability is necessary for designing and operating gas turbine combustors. In this study, in order to understand the instability phenomena, an experimental study was conducted in a rearwardstep dump combustor with LPG and air. The fluctuations of pressure and heat release were measured by piezoelectric pressure sensor and High speed Intensified Charge Coupled Device (ICCD) camera respectively. Various types of combustion modes occurred in accordance with the equivalence ratio and the fuel supplying conditions. The unmixedness of the fuel and air can be controlled by changing the mixing distance ($L_{fuel}$). It is found that the unmixedness of the fuel and air affects the characteristics of flame behavior and pressure fluctuations in a lean premixed flame.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.853-862
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• 2012

The present study develops a method for directly measuring the temperature field in the primary deformation zone with a high spatial resolution during 2-D orthogonal machining. This is enabled by the use of a high-speed, charge-coupled device (CCD) based, infra-red (IR) imaging system which allows characteristics of the temperature field such as the location and magnitude of the highest temperature and temperature gradient in the primary deformation zone to be identified. Based on these data, the relation between the machining temperature and the cutting conditions is investigated.

• Spatial Information Research
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• v.11 no.1
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• pp.33-40
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• 2003

For effective management of information about establishment and repair of road and road facilities, we built GPS-Van mapping system that CCD Cameras, GPS receivers and INS are integrated and using it surveyed test area. Suggested a scheme that possible put acquired data into photo database systematically. Prototype of road facilities management system using the database shows us that extraction of qualitative information and management are possible through relation attribute information. And it raise cognitive faculty of user about objects using field photographs.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.5
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• pp.368-373
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• 2003

This paper presents a cost-effective 3D foot scanner system that provides the 3-dimensional point cloud foot data to design the custom footwear. To measure the 3-dimensional point cloud data of the foot, a CCD camera, a Non-Gaussian laser line projector and optical triangulation method are employed. Furthermore, the integrated system employs a measurement base, a frame grabber, a CCD moving cart, a stepping motor and a computer. The measurement result is saved as 3D dxf format and it could be converted to 2D essential data fer a shoe design. The experimental results demonstrate that the proposed system have the decent resolution of 1mm which is enough for last and shoe design.

• Bulletin of the Korean Chemical Society
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• v.34 no.6
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• pp.1668-1672
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• 2013

We developed a standoff Raman detection system for explosive molecules (EMs). Our system was composed of reflective telescope with 310 mm diameter lens, 532 nm pulse laser, and Intensified Charge-Coupled Device (ICCD) camera. In order to remove huge background noise coming from ambient light, laser pulses with nanosecond time width were fired to target sample and ICCD was gated to open only during the time when the scattered Raman signal from the sample arrived at ICCD camera. We performed standoff experiments with military EMs by putting the detector at 10, 20 and 30 m away from the source. The standoff results were compared with the confocal Raman results. Based on our standoff experiments, we were able to observe the peaks in the range of 1200 and $1600cm^{-1}$, where vibrational modes of nitro groups were appeared. The wave numbers and shapes of these peaks may serve as good references in detecting and identifying various EMs.

• Proceedings of the IEEK Conference
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• 2003.07c
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• pp.2529-2532
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• 2003

The quality of agricultural products is represented a degree of freshness and a special qualify that has a close relation to commercial value. To grade tomatoes, it used to nondestructive equipment of a charge-coupled device(CCD) camera and near-infrared(NIR) spectrum analysis method. The NIR spectrum analysis method is used to determine internal qualities such as a brix and an acidity. The CCD camera is used to measure external qualities like color and a size of tomatoes. This paper explaines the structure and movement of the automatic grade system and applies the algorithm for deformed tomtatoes and characteristics of tomatoes through image processing to the grade system.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.453-455
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• 2004

The quality of agricultural products is represented a degree of freshness and a special quality related to a commercial value. To grade cucumber, the charge-coupled device(CCD) camera is only used to measure external qualities like color. size and degree of bended cucumber The processed area of the image replaces the weigh of cucumber. That means there is no longer used the weighing beams. The system consists of Image processing system and distributing system. This paper explains the structure and movement of the automatic grade system and applies the algorithm for deformed cucumber and characteristics of cucumber through image processing to the grade system.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.3 s.168
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• pp.7-14
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• 2005

본 논고에서는 microfocus X 선 발생장치와 평판형 영상센서를 이용한 micro-CT 시스템의 개발과 그 응용에 대해 소개하였다. 개발과 관련하여서는 영상센서 및 시스템의 동작원리뿐만 아니라 성능평가 결과에 대해서도 간단히 언급하였는데, 이와 같은 성능평가는 추후 개선된 혹은 새로운 설계 및 제작을 위해서는 필수적으로 수반되어야 할 부분이다. 개발된 micro-CT 시스템의 응용분야 소개와 관련하여서는 몇 가지 획득 영상을 토대로 바이오 영상과 산업용 영상에 관하여 언급하였다. 바이오 영상분야에서는 현재 세계적으로 유수 의료기기업체에서 이미 제작하여 판매하고 있으며, 대부분 X선 영상증배관 혹은 CCD(charge-coupled device)를 X 선 영상획득 센서로 사용한 반면, 본 논고에서 소개한 시스템은 평판형 영상센서를 사용했다는 점에서 차별성이 있다. Micro-CT 시스템의 산업용 영상분야로의 적용은 이제 시작 단계이며, 기존 라미노그라피 시스템을 대체하거나 혹은 새로운 응용으로 자리매김할 것으로 기대된다.