• 제목/요약/키워드: Channel thickness

검색결과 555건 처리시간 0.035초

Analysis of Flat-Band-Voltage Dependent Breakdown Voltage for 10 nm Double Gate MOSFET

  • Jung, Hakkee;Dimitrijev, Sima
    • Journal of information and communication convergence engineering
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    • 제16권1호
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    • pp.43-47
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    • 2018
  • The existing modeling of avalanche dominated breakdown in double gate MOSFETs (DGMOSFETs) is not relevant for 10 nm gate lengths, because the avalanche mechanism does not occur when the channel length approaches the carrier scattering length. This paper focuses on the punch through mechanism to analyze the breakdown characteristics in 10 nm DGMOSFETs. The analysis is based on an analytical model for the thermionic-emission and tunneling currents, which is based on two-dimensional distributions of the electric potential, obtained from the Poisson equation, and the Wentzel-Kramers-Brillouin (WKB) approximation for the tunneling probability. The analysis shows that corresponding flat-band-voltage for fixed threshold voltage has a significant impact on the breakdown voltage. To investigate ambiguousness of number of dopants in channel, we compared breakdown voltages of high doping and undoped DGMOSFET and show undoped DGMOSFET is more realistic due to simple flat-band-voltage shift. Given that the flat-band-voltage is a process dependent parameter, the new model can be used to quantify the impact of process-parameter fluctuations on the breakdown voltage.

마이크로 채널 내부의 Micro-LIF 측정을 위한 마이크로 레이저 평면빔과 혼합용매의 적용 (Application of Micro-Thin Laser sheet and Mixed Solvent for Micro-LIF Measurement in a Microchannel)

  • 윤상열;김재민;김경천
    • 한국가시화정보학회:학술대회논문집
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    • 한국가시화정보학회 2004년도 추계학술대회 논문집
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    • pp.86-89
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    • 2004
  • One most feasible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having five(5) microns thickness by use of a micro focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal to noise ratio and considerably reduce the depth uncertainty. Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water $(95\%)$ and ethanol (EtOH)/methanol (MeOH) $(5\%)$ mixture. To reduce the rms errors resulted from the CCD electronic noise and other sources, an expansion of grid size was attempted from $1\times1$ to 3(3 or 5(5 pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.

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Threshold Voltage Modeling of Double-Gate MOSFETs by Considering Barrier Lowering

  • Choi, Byung-Kil;Park, Ki-Heung;Han, Kyoung-Rok;Kim, Young-Min;Lee, Jong-Ho
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제7권2호
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    • pp.76-81
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    • 2007
  • Threshold voltage ($V_{th}$) modeling of doublegate (DG) MOSFETs was performed, for the first time, by considering barrier lowering in the short channel devices. As the gate length of DG MOSFETs scales down, the overlapped charge-sharing length ($x_h$) in the channel which is related to the barrier lowering becomes very important. A fitting parameter ${\delta}_w$ was introduced semi-empirically with the fin body width and body doping concentration for higher accuracy. The $V_{th}$ model predicted well the $V_{th}$ behavior with fin body thickness, body doping concentration, and gate length. Our compact model makes an accurate $V_{th}$ prediction of DG devices with the gate length up to 20-nm.

THE DEVELOPMENT OF IR-BASED VISIBLE CHANNEL CALIBRATION USING DEEP CONVECTIVE CLOUDS

  • Ham, Seung-Hee;Sohn, Byung-Ju
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2008년도 International Symposium on Remote Sensing
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    • pp.430-432
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    • 2008
  • Visible channel calibration method using deep convective clouds (DCCs) is developed. The method has advantages that visible radiance is not sensitive to cloud optical thickness (COT) for deep convective clouds because visible radiance no longer increases when COT exceeds 100. Therefore, once DCCs are chosen appropriately, and then cloud optical properties can be assumed without operational ancillary data for the specification of cloud conditions in radiative transfer model. In this study, it is investigated whether IR measurements can be used for the selection of DCC targets. To construct appropriate threshold value for the selection of DCCs, the statistics of cloud optical properties are collected with MODIS measurements. When MODIS brightness temperature (TB) at 11 ${\mu}$ m is restricted to be less than 190 K, it is shown that more than 85% of selected pixels show COT ${\geq}$ 100. Moreover, effective radius ($r_e$) distribution shows a sharp peak around 20 ${\mu}m$. Based on those MODIS observations, cloud optical properties are assumed as COT = 200 and $r_e$ = 20 ${\mu}m$ for the simulation of MODIS visible (0.646 ${\mu}m$) band radiances over DCC targets.

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고분자 전해질 연료전지 가스켓 및 GDL의 구조 해석 (Structural Analysis of Gasket and GDL for Enhanced Performance of PEMFC)

  • 윤진영;박정선
    • 한국항공우주학회지
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    • 제36권7호
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    • pp.642-650
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    • 2008
  • 고분자 전해질 연료전지 스택의 성능향상과 안전성 확보를 위하여 스택의 체결하중으로 인한 가스켓과 GDL의 구조적 거동을 살펴보았다. 가스켓 구조 해석의 경우 하중과 변위의 초탄성 거동을 표현하기 위하여 Mooney-Rivlin의 변형률에너지 함수를 사용하였으며, 재료물성을 구하기 위하여 단축 인장 및 등가 이축 인장 시험을 수행하였고 유한요소 해석과 비교하였다. GDL의 물성측정을 위하여 압축 하중의 변화에 따라 두께변화를 측정하였고 단위 셀을 제작하여 하중의 변화에 따른 채널의 압력차를 측정하였다. 실험 데이터를 바탕으로 채널 단면적의 변화를 계산, 유한요소 해석결과와 비교하였다.

Highly Sensitive and Transparent Pressure Sensor Using Double Layer Graphene Transferred onto Flexible Substrate

  • Chun, Sungwoo;Kim, Youngjun;Jin, Hyungki;Jung, Hyojin;Park, Wanjun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.229.2-229.2
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    • 2014
  • Graphene, an allotrope of carbon, is a two-dimensional material having a unique electro-mechanical property that shows significant change of the electrical conductance under the applied strain. In addition of the extraordinary mechanical strength [1], graphene becomes a prospective candidate for pressure sensor technology [2]. However, very few investigations have been carried out to demonstrate characteristics of graphene sensor as a device form. In this study, we demonstrate a pressure sensor using graphene double layer as an active channel to generate electrical signal as the response of the applied vertical pressure. For formation of the active channel in the pressure sensor, two single graphene layers which are grown on Cu foil (25 um thickness) by the plasma enhanced chemical vapor deposition (PECVD) are sequentially transformed to the poly-di-methyl-siloxane (PDMS) substrate. Dry and wet transfer methods are individually employed for formation of the double layer graphene. This sensor geometry results a switching characteristic which shows ~900% conductivity change in response to the application of pulsed pressure of 5 kPa whose on and off duration is 3 sec. Additionally, the functional reliability of the sensor confirms consistent behavior with a 200-cycle test.

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금속 전극에 따른 CuPc-OFET 의 전기적 특성 (Electrical Properties of CuPc-OFET with Metal Electrode)

  • 이호식;박용필
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2007년도 추계종합학술대회
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    • pp.751-753
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    • 2007
  • 최근에 유기물 전계효과 트랜지스터의 연구는 전자 소자 분야에서 널리 알려져 있다. 특히 본 연구에서는 CuPc 물질을 활성층으로 사용하여 Organic FET 소자를 제작하였다. Source와 Drain 전극을 Au와 Al을 사용하여 FET 소자의 전기적 특성을 비교하였다. CuPc FET 소자에서 CuPc 활성층의 두께는 40nm로 고정하였고, Au와 Al 전극의 두께는 200nm로 하여 소자를 제작하였다. 또한 C-V 특성을 측정하여 CuPc 유기물 층과 $SiO_2$ 절연층 계면에서의 특성 변화를 관측하였다. Au를 전극으로 사용한 FET 소자에서는 전형적인 FET 특성 곡선을 관측할 수 있었으나, Al을 전극을 사용한 FET 소자에서는 누설 전류가 흐르고 있음을 확인 할 수 있었다.

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Channel Recessed 1T-DRAM with ONO Gate Dielectric

  • 박진권;조원주
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.264-264
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    • 2011
  • 1T-1C로 구성되는 기존의 dynamic random access memory (DRAM)는 데이터를 저장하기 위해 적절한 커패시턴스를 확보해야 한다. 따라서 커패시터 면적으로 인한 집적도의 한계에 직면해있으며, 이를 대체하기 위한 새로운 DRAM인 1T- DRAM이 연구되고 있다. 기존의 DRAM과 달리 silicon-on-insulator (SOI) 기술을 이용한 1T-DRAM은 데이터 저장을 위한 커패시터가 요구되지 않는다. 정공을 채널의 중성영역에 축적함으로서 발생하는 포텐셜 변화를 이용하며, 이때 발생하는 드레인 전류차를 이용하여 '0'과 '1'을 구분한다. 기존의 완전공핍형 평면구조의 1T-DRAM은 소스 및 드레인 접합부분에서 발생하는 누설전류로 인해 '0' 상태의 메모리 유지특성이 열화되는 단점을 가지고 있다. 따라서 메모리의 보존특성을 향상시키기 위해 소스/드레인 접합영역을 줄여 누설전류를 감소시키는 구조를 갖는 1T-DRAM의 연구가 필요하다. 또한 고유전율을 가지는 Si3N4를 이용한 oxide-nitride-oxide (ONO)구조의 게이트 절연막을 이용하면 동일한 두께에서 더 낮은 equivalent oxide thickness (EOT)를 얻을 수 있기 때문에 보다 저 전압에서 1T-DRAM 동작이 가능하여 기존의 SiO2 단일층을 이용한 1T-DRAM보다 동일 전압에서 더 큰 sensing margin을 확보할 수 있다. 본 연구에서는 누설전류를 감소시키기 위하여 소스 및 드레인이 채널위로 올려진 recessed channel 구조에 ONO 게이트 절연막을 적용한 1T-DRAM을 제작 및 평가하고, 본 구조의 1T-DRAM적용 가능성 및 ONO구조의 게이트 절연막을 이용한 sensing margin 개선을 확인하였다.

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Structure and Vorticity of the Current Observed Across the Western Channel of the Korea Strait in September of 1987-1989

  • Byun, Sang-Kyung;Kaneko, Arata
    • Ocean and Polar Research
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    • 제21권2호
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    • pp.99-108
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    • 1999
  • With sectional data obtained in September of 1987, 1988 and 1989 by quadrireciprocal ADCP measurement and CTD cast, the current structure, volume transport and vorticity in the Western Channel of the Korea Strait were studied. The characteristics of Tsushima Current water persisted throughout the summer especially in the homogeneous water of temperature $14-16^{\circ}C$ located at the depth of 50-100m below seasonal termocline. Thickness and velocity of the homogeneous layer are about 10-170m and 20-60cm/s. and the relative vorticity for this layer is shown to be nearly constant and it is smaller than the planetary vorticity. Potential vorticity of $2.70-7.10{\times}10^{-6}m^{-1}s^{-1}$ is found to be dependent mainly on planetary rather than on the relative vorticities. The Tsushima Current water represented by the homogeneous layer R14-16^{\circ}C$ may keep the potential vorticity at the area of strong current in the Strait. The ADCP current structure is similar to geostrophic current and the core of the current with the speed of 30-50cm/s is situated in the middle layer over the deep trough. With large tidal fluctuation the volume transport has mean value of 1.17sv which was about 40% larger than that of geostrophic calculation.

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테라비트급 나노 스케일 SONOS 플래시 메모리 제작 및 소자 특성 평가 (Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories)

  • 김주연;김문경;김병철;김정우;서광열
    • 한국전기전자재료학회논문지
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    • 제20권12호
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    • pp.1017-1021
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    • 2007
  • To implement tera bit level non-volatile memories of low power and fast operation, proving statistical reproductivity and satisfying reliabilities at the nano-scale are a key challenge. We fabricate the charge trapping nano scaled SONOS unit memories and 64 bit flash arrays and evaluate reliability and performance of them. In case of the dielectric stack thickness of 4.5 /9.3 /6.5 nm with the channel width and length of 34 nm and 31nm respectively, the device has about 3.5 V threshold voltage shift with write voltage of $10\;{\mu}s$, 15 V and erase voltage of 10 ms, -15 V. And retention and endurance characteristics are above 10 years and $10^5$ cycle, respectively. The device with LDD(Lightly Doped Drain) process shows reduction of short channel effect and GIDL(Gate Induced Drain Leakage) current. Moreover we investigate three different types of flash memory arrays.