• Title/Summary/Keyword: Channel thickness

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Heat Transfer Analysis of a Pulse Magnetron Sputtering Cathode (펄스 마그네트론 스퍼터링 음극의 열전달 해석)

  • Joo, Jung-Hoon
    • Journal of the Korean institute of surface engineering
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    • v.41 no.6
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    • pp.274-278
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    • 2008
  • 3-dimensional numerical analysis for a rectangular magnetron cathode model is done to predict cooling characteristics of high power sputtering system for ZnO deposition. It includes cooling channel design, heat transfer analysis of a target, bonding layer and backing plate. In order to model erosion profiles of a target, ion current density distribution from 3D Monte Carlo simulation is used to distribute total sputtering power to 5 discrete regions. At 3 kW of sputtering power and cooling water flow of 1 liter/min at $10^{\circ}C$, the maximum surface temperature was $45.8^{\circ}C$ for a flat new target and $156^{\circ}C$ for a target eroded by 1/3 of its thickness, respectively.

The Performance Analysis of Polymer Electrolyte Membrane Fuel Cells for Mobile Devices using CFD (CFD를 이용한 모바일기기용 고분자전해질 연료전지 성능해석)

  • Kim B.H.;Choi J.P.;Kang D.C.;Jeon B.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.553-554
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    • 2006
  • This paper presents the effects of different operating parameters on the performance of a proton exchange membrane (PEM) fuel cell by a three-dimensional computational fluid dynamics (CFD) model. The effects of different operating parameters on the performance of PEM fuel cell studied using pure hydrogen on the anode side and air on the cathode side. The various parameters are temperatures, pressures, humidification of the gas steams and various combinations of these parameters. In addition, geometrical and material parameters such as the gas diffusion layer (GDL) thickness and porosity as well as the ratio between the channel width and the land area were investigated.

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Seismic image of a new cretaceous(\ulcorner) sedimentary basin of the southwestern Korean continental shelf (한국 서남대륙붕의 새로운 백악기(\ulcorner) 퇴적분지의 탄성파 영상)

  • 오진용
    • Economic and Environmental Geology
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    • v.32 no.1
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    • pp.33-41
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    • 1999
  • A new sedimentary basin is reported from the marine multi-channel seismic data which were acquired for the hydrocarbon exploration on the southwestern Korean continental shelf in 1970. Along the southeastern part of Line 1192, the about 60-km-long basin with the thickness of 0.55~1.1 s is observed on the near-trace gather. However, both new and previous 24-fold stack sections fail to show the basin image probably due to its rugged top beneath the shallow water. The boundary contact between the basement with the velocity of about 5200m/s and the basin filling with the velocities of 4300~4700 m/s is unclear. These velocites are calculated from the corresponding shot gathers. Compared with the Haenam Basin, a neighbouring onshore Cretaceous sedimentary basin, we interpret that the new basin includes the volcanics and volcaniclastic sequences deposited in the lacustrine environment. This nonmarine basin was possibly formed as the result of the tectonic movement during the Cretaceous, implying the wide occurrence of the Cretaceous basins over the southern Korean Peninsula as well as its southwestern continental shelf.

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The Identification of Organic Vapours Using the Rheological Characteristic Analysis of Polymeric Sensitive LB Films (고분자 감응성 LB막의 유변학적인 특성분석에 의한 유기가스의 식별)

  • 강현욱;김정명;장상목;권영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.405-408
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    • 1996
  • The rheological changes in sensitive materials was investigated by using QCA. Langmuir-Blodgett method was used to transfer sensitive material to the quartz crystals because of its facility to control the thickness. To develop gas sensor using quartz crystal, the rheological change of sensitive LB films were observed using the resonant resistance concept. And the rheological changes as to adsorption of organic vapours were used to analyze the response mechanism between organic vapours and sensitive LB films. We considered with resonant frequency of quartz crystal to obtain one-channel gas sensor and analytical tools of organic vapours response. In our results, we analyzed the organic vapours response by the rheological changes and mass loading as to adsorption of organic vapours.

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Development of Metal Substrate with Multi-Stage Nano-Hole Array for Low Temperature Solid Oxide Fuel Cell (저온 고체산화물연료전지 구현을 위한 다층 나노기공성 금속기판의 제조)

  • Kang, Sangkyun;Park, Yong-Il
    • Journal of the Korean Ceramic Society
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    • v.42 no.12 s.283
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    • pp.865-871
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    • 2005
  • Submicron thick solid electrolyte membrane is essential to the implementation of low temperature solid oxide fuel cell, and, therefore, development of new electrode structures is necessary for the submicron thick solid electrolyte deposition while providing functions as current collector and fuel transport channel. In this research, a nickel membrane with multi-stage nano hole array has been produced via modified two step replication process. The obtained membrane has practical size of 12mm diameter and $50{\mu}m$ thickness. The multi-stage nature provides 20nm pores on one side and 200nm on the other side. The 20nm side provides catalyst layer and $30\~40\%$ planar porosity was measured. The successful deposition of submicron thick yttria stabilized zirconia membrane on the substrate shows the possibility of achieving a low temperature solid oxide fuel cell.

Optimization Study on the Epitaxial Structure for 100nm-Gate MHEMTs with InAlAs/InGaAs/GaAs Heterostructure (InAlAs/InGaAs/GaAs 100 nm-게이트 MHEMT 소자의 에피 구조 최적화 설계에 관한 연구)

  • Son, Myung-Sik
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.4
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    • pp.107-112
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    • 2011
  • This paper is for improving the RF frequency performance of a fabricated 100nm ${\Gamma}$-gate MHEMT, scaling down vertically for the epitaxy-structure layers of the device. Hydrodynamic simulation parameters are calibrated for the fabricated MHEMT with the modulation-doped $In_{0.52}Al_{0.48}As/In_{0.53}Ga_{0.47}$As heterostructure grown on the GaAs substrate. With these calibrated parameters, simulations for the vertically-scaled epitaxial layers of the device are performed and analyzed for DC/RF characteristics, including the quantization effect due to the thickness reduction of InGaAs channel layer. A newly designed epitaxy-structure device shows higher extrinsic transconductance, $g_m$ of 1.556 S/mm, and higher frequency performance, $f_T$ of 222.5 GHz and $f_{max}$ of 849.6 GHz.

A Study on the Integrated Seismic Reflection and Refraction for Shallow Marine Site Survey KSEG.KGS Joint Symposium (천해저 조사를 위한 탄성파 반사법 및 굴절법 통합연구)

  • Kim, Chan-Su;Lee, Sang-Chul;Shin, Sung-Ryul;Kim, Hyun-Do;Jo, Chul-Hyun
    • 한국지구물리탐사학회:학술대회논문집
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    • 2007.06a
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    • pp.349-352
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    • 2007
  • Estimating the physical properties of the survey area and mapping the geotechnical basement play an important role in ocean engineering and construction field. In this study, we performed marine seismic reflection and refraction survey as an engineering application at shallow marine. We made use of the dual boomer - single channel streamer as a source-receiver in reflection seismic survey and air-gun source - the manufactured OBC(Ocean Bottom Cable)-type streamer in refraction survey. In the seismic reflection data, we could easily find the geological layers and basement. Moreover, seismic refraction data could present sediment thickness and velocity distribution.

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The Effect of $Y_2O_3$ Dispersoids on the High Temperature Oxidation of Ti-34wt%Al-1.5wt%Mn Alloys (Ti-34wt%Al-1.5wt%Mn 합금의 고온산화에 미치는 $Y_2O_3$ 분산입자 첨가효과)

  • Lee, Dong-Bok
    • Journal of the Korean institute of surface engineering
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    • v.39 no.6
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    • pp.288-294
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    • 2006
  • Alloys of TiAl-Mn-(0, 5, 10)wt.% $Y_2O_3$ were prepared by a powder metallurgical route, and their oxidation behavior was studied at 800, 900 and $1000^{\circ}C$ in 1 atm of air. The scale formed on the alloys consisted of $TiO_2$ and $Al_2O_3$ oxides. During oxidation, Mn tended to diffuse outward, whereas oxygen diffused inward. The dispersoids of $T_2O_3$, which segregated at the matrix grain boundaries, acted as a diffusion channel for cations and oxygen ions, nucleation sites for oxides, and vacancy annihilation sites. $T_2O_3$ increased the scale thickness, but improved the scale adherence.

A Study on the Hump Characteristics of the MOSFETs (MOSFET의 험프 특성에 관한 연구)

  • Kim, Hyeon-Ho;Lee, Yong-Hui;Yi, Jae-Young;Yi, Cheon-Hee
    • Proceedings of the Korea Information Processing Society Conference
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    • 2002.04a
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    • pp.631-634
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    • 2002
  • In this paper we improved that hump occurrence by increased oxidation thickness, and control field oxide recess$(\leq20nm)$, wet oxidation etch time(19HF, 30sec), STI nitride wet cleaning time(99 HF, 60sec + P 90min) and gate pre-oxidation cleaning time(U10min+19HF, 60sec) to prevent hump occurring at STI channel edge.

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Direct deposition technique for poly-SiGe thin film achieving a mobility exceeding 20 $cm^2$/Vs with ~30 nm thick bottom-gate TFTs

  • Lim, Cheol-Hyun;Hoshino, Tatsuya;Hanna, Jun-Ichi
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1028-1031
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    • 2009
  • High quality poly-SiGe thin films were prepared on 6-inch substrates using Reactive-thermal CVD with $Si_2H_6$ and $GeF_4$ around at $500^{\circ}C$ directly. Its thickness uniformity was ~ 3% on the entire substrate area. N-channel mobility of ~30 nm thick bottom-gate TFTs exceeded 20 $cm^2$/Vs without any further crystallization.

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