• Title/Summary/Keyword: Channel layer

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열처리 온도 및 시간에 따른 ZTO TFT의 특성 변화

  • Han, Chang-Hun;Kim, Dong-Su;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.341-341
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    • 2011
  • 최근 AMOLED 구동이 가능한 소자에 대한 연구가 활발히 진행중이다. AMOLED구동 가능소자는 LTPS TFT, a-Si TFT, OTFT, Oxide TFT가 있으며 그 중에서 현재 대부분 LTPS TFT를 사용하고 있다. LTPS TFT는 높은 전자 이동도와 안정성을 가지고 있기 때문에 현재 각광 받는 AMOLED에 잘 맞는다. 하지만 LTPS TFT는 고비용, 250$^{\circ}C$ 이상의 공정온도, Substrate가 Glass, Metal로 제한 된다는 문제점이 있으며, 균일성이 낮고 현재 대면적 기술이 부족한 상태이다. 해결방안으로 AMOLED를 타겟으로 하는 Oxide TFT 기술이 떠오르고 있다. Oxide TFT는 이동도가 높고 저온공정이 가능하며 Substrate로 Plastic 기판을 사용할 수가 있어 차후에 Flexible 소자로서의 적용이 가능하다. 또한 기존의 진공장비 사용대신 용액공정이 가능하여 장비사용시간 및 절차를 단축시킬 수 있어 비용적인 유리함을 가지고 있다. Oxide TFT는 단결정 산화물과 다결정 복합 산화물 두 가지 범주를 가지고 있다. Oxide TFT의 재료물질은 ZnO, ZTO, IZO, SnO2, Ga2O3, IGO, In2O3, ITO, InGaO3(ZnO)5, a-IGZO이 있다. 본 연구에서는 산화물질 중 하나인 ZTO를 이용하여 TFT 소자를 제작하였다. 산화물 특성상 열처리 온도에 따라 형성되는 결정의 정도가 다르기 때문에 온도 및 시간 변수에 따른 ZTO의 특성변화에 초점을 맞추어 연구함으로서 최적화된 조건을 찾고자 실험을 진행하였다. 실험을 위한 기판으로 n-type wafer을 사용하였다. PE-CVD 장비를 이용하여 SiNx를 120 nm 증착하고, ZTO 용액을 spin-coating을 이용하여 channel layer을 형성하였다. 균일하게 형성된 ZTO의 결정을 위하여 200$^{\circ}C$, 300$^{\circ}C$, 400$^{\circ}C$, 500$^{\circ}C$에서 1시간, 3시간, 6시간, 10시간의 온도 및 시간 변수를 두어 공기 중에서 열처리 하였다. ZTO는 약 30 nm 두께로 형성되었다. Thermal evaporator를 이용하여 Source, Drain의 알루미늄 전극을 형성하고, wafer 뒷면에는 Silver paste를 이용하여 Gate전극을 만들었다. 제작된 소자를 dark room temperature에서 측정하였다.

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GeTe Thin Film의 상 변화가 저항과 Carrier Concentration에 미치는 영향

  • Lee, Gang-Jun;Na, Hui-Do;Kim, Jong-Gi;Jeong, Jin-Hwan;Choe, Du-Jin;Son, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.292-292
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    • 2011
  • TFT (Thin Film Transistor)에서 공정을 단순화 시키고, 가격을 하락시키기 위해서는 Poly-Si을 대체할 물질이 필요하다. 이 연구에서는 Chalcogenide Material의 하나인 GeTe 박막을 이용하여 TFT Channel으로 사용 가능한 물질인지 알아보기 위하여 Post-Annealing을 한 뒤, 상 변화에 따른 박막의 저항 변화, Carrier Concentration (cm-3)과 Mobility (cm2V-1s-1)의 변화를 알아보았다. Sputtering을 이용하여 증착한 GeTe 100 nm Thin Film 위에 Sputtering을 이용하여 SiO2 5 nm를 Capping Layer로 증착한 후, Post-Annealing을 200$^{\circ}C$, 300$^{\circ}C$, 400$^{\circ}C$, 500$^{\circ}C$로 온도를 변화 시키며 진행하였고, 이로 인하여 GeTe Thin Film에 외부의 영향을 최소화 하였다. 먼저 GeTe Thin Film의 Sheet Resistance를 측정한 결과는 300$^{\circ}C$ 까지 낮은 Sheet Resistance의 거동을 보이며 반면, 400$^{\circ}C$ 이상이 되면 높은 Sheet Resistance의 거동을 보인다. Hall Measurement를 통해, Carrier Concentration과 Mobility를 알아보았다. Carrier Concentration은 온도가 증가하면 1E+19에서 1E+21 까지 증가하며, Mobility는 감소하는 경향을 보인다. 500$^{\circ}C$ Post-Annealed GeTe Thin Film에서는 Resistivity가 상당히 높아 4 Point Probe (Range : 1 mohm/sq~2 Mohm/sq)로 측정이 불가능하다. XRD로 GeTe Thin Film을 분석한 결과 as-grown, 200$^{\circ}C$, 300$^{\circ}C$에서는 Cubic의 결정 구조를 보이며, Sheet Resistance가 급격히 증가한 400$^{\circ}C$, 500$^{\circ}C$에서는 Rhombohedral의 결정구조를 보인다. GeTe Thin Film은 400$^{\circ}C$ 이상의 Post-Annealing 온도에서 cubic 구조에서 Rhombohedral 구조로 상 변화가 일어난다. 위 결과를 통해, 결정 구조의 변화가 GeTe Thin Film의 저항, Carrier Concentration과 Mobility에 밀접한 영향이 미치는 것을 확인하였다.

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Feasibility Study for Detecting the Tropopause Folding Turbulence Using COMS Geostationary Satellite (천리안 위성 자료를 이용한 대류권계면 접힘 난류 탐지 가능성 연구)

  • Kim, Mijeong;Kim, Jae Hwan
    • Atmosphere
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    • v.27 no.2
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    • pp.119-131
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    • 2017
  • We present and discuss the Tropopause Folding Turbulence Detection (TFTD) algorithm for the Korean Communication, Ocean, Meteorological Satellite (COMS) which is originally developed for the Tropopause Folding Turbulence Product (TFTP) from the Geostationary Operational Environmental Satellite (GOES)-R. The TFTD algorithm assumes that the tropopause folding is linked to the Clear Air Turbulence (CAT), and thereby the tropopause folding areas are detected from the rapid spatial gradients of the upper tropospheric specific humidity. The Layer Averaged Specific Humidity (LASH) is used to represent the upper tropospheric specific humidity calculated using COMS $6.7{\mu}m$ water vapor channel and ERA-interim reanalysis temperature at 300, 400, and 500 hPa. The comparison of LASH with the numerical model specific humidity shows a strong negative correlation of 80% or more. We apply the single threshold, which is determined from sensitivity analysis, for cloud-clearing to overcome strong gradient of LASH at the edge of clouds. The tropopause break lines are detected from the location of strong LASH-gradient using the Canny edge detection based on the image processing technique. The tropopause folding area is defined by expanding the break lines by 2-degree positive gradient direction. The validations of COMS TFTD is performed with Pilot Reports (PIREPs) filtered out Convective Induced Turbulence (CIT) from Dec 2013 to Nov 2014 over the South Korea. The score test shows 0.49 PODy (Probability of Detection 'Yes') and 0.64 PODn (Probability of Detection 'No'). Low POD results from various kinds of CAT reported from PIREPs and the characteristics of high sensitivity in edge detection algorithm.

End-to-End Congestion Control of High-Speed Gigabit-Ethernet Networks based on Smith's Principle

  • Lee, Seung-Hyub;Cho, Kwang-Hyun
    • Proceedings of the IEEK Conference
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    • 2000.07a
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    • pp.101-104
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    • 2000
  • Nowadays, the issue of congestion control in high-speed communication networks becomes critical in view of the bandwidth-delay products for efficient data flow. In particular, the fact that the congestion is often accompanied by the data flow from the high-speed link to low-speed link is important with respect to the stability of closed-loop congestion control. The Virtual-Connection Network (VCN) in Gigabit Ethernet networks is a packet-switching based network capable of implementing cell- based connection, link-by-link flow-controlled connection, and single- or multi-destination virtual connections. VCN described herein differ from the virtual channel in ATM literature in that VCN have link-by-link flow control and can be of multi-destination. VCNs support both connection-oriented and connectionless data link layer traffic. Therefore, the worst collision scenario in Ethernet CSMA/CD with virtual collision brings about end-to-end delay. Gigabit Ethernet networks based on CSMA/CD results in non-deterministic behavior because its media access rules are based on random probability. Hence, it is difficult to obtain any sound mathematical formulation for congestion control without employing random processes or fluid-flow models. In this paper, an analytical method for the design of a congestion control scheme is proposed based on Smith's principle to overcome instability accompanied with the increase of end-to-end delays as well as to avoid cell losses. To this end, mathematical analysis is provided such that the proposed control scheme guarantees the performance improvement with respect to bandwidth and latency for selected network links with different propagation delays. In addition, guaranteed bandwidth is to be implemented by allowing individual stations to burst several frames at a time without intervening round-trip idle time.

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Fine Structure of Spermatozoa of Venus Fish, Aphyocypris chinensis (Pisces: Cyprinidae) from Korea (한국산 왜몰개 Aphyocypris chinensis 정자의 미세해부학적 구조 (Pisces: Cyprinidae))

  • Kim, Kgu-Hwan;Ahn, Sung-Ju
    • Korean Journal of Ichthyology
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    • v.31 no.4
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    • pp.208-213
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    • 2019
  • Spermatozoa of Aphyocypris chinensis was studied by transmission electron microscopy. The investiation revaled that, spermatozoa display a round head, a small midpiece and a long tail region. In the spermatozoa, the nucleus contains highly condensed homogeneous chromation with small electron lucent areas. The base of the nucleus is slightly invaginated laterally by the nuclear fossa which contains the proximal centriole. The two centrioles orientated at an obtus angle (130°) to each other. The midpiece encircles the flagellum and is completely separated from it by the cytoplasmic channel. The midpiece contains more than 12 mitochondria. The mitochondria are arranged in 4~5 layer and are asymmetrically distributed in the postnuclear cytoplasm. The mitochondria surround the proximal part of the flagellum. The flagellum has classical 9+2 axoneme and no lateral fins. The spermatozoa of A. chinensis are similar to those of other cyprinids having a spherical head with a shallow nuclear fossa, a short midpiece including the asymmetrical arrangement of mitochondria and the lateral insertion of flagellum. However, there are some differences in the orientation of centrioles and the number of the mitochondria.

Design and VLSI Implementation of Reassembly Controller for ATM/AAL Layer (ATM/AAL 처리를 위한 재조립 처리기의 설계 및 VLSI 구현)

  • 박경철;심영석
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.5
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    • pp.369-378
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    • 2003
  • This paper presents design and VLSI implementations of a reassembly processor for ATM/AAL. The assembly processor is responsible for processing ATM cells from the receive physical interface. It controls the transfer of the AAL payload to host memory and performs all necessary SAR and CPCS checks. We propose the improved structure of cell identification algorithm and smart scatter method for host memory management. The proposed cell identification algorithm quickly locates the appropriate reassembly VC table based on the received VPI./VCI channel value in the ATM header. The cell identification algorithm also allow complete freedom in assignment of VCI/VPI values. The reassembly processor uses a smart scatter method to write cell payload data to host memory. It maintains the scatter operation and controls the incoming DMA block during scatter DMA to host memory. The proposed reassembly processor can perform reassembly checks on AAL. OAM cell. For an AAL5 connection, only CPCS checks, including the CRC32, are performed. In this paper, we proposed a practical reassembly architecture. The design of reassembly processor has become feasible using 0.6${\mu}{\textrm}{m}$ CMOS gate array technology.

Characterization of gate oxide breakdown in junctionless amorphous InGaZnO thin film transistors (무접합 비정질 InGaZnO 박막 트랜지스터의 게이트 산화층 항복 특성)

  • Chang, Yoo Jin;Seo, Jin Hyung;Park, Jong Tae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.22 no.1
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    • pp.117-124
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    • 2018
  • Junctionless amorphous InGaZnO thin film transistors with different film thickness have been fabricated. Their device performance parameters were extracted and gate oxide breakdown voltages were analyzed with different film thickness. The device performances were enhanced with increase of film thickness but the gate oxide breakdown voltages were decreased. The device performances were enhanced with increase of temperatures but the gate oxide breakdown voltages were decreased due to the increased drain current. The drain current under illumination was increased due to photo-excited electron-hole pair generation but the gate oxide breakdown voltages were decreased. The reason for decreased breakdown voltage with increase of film thickness, operation temperature and light intensity was due to the increased number of channel electrons and more injection into the gate oxide layer. One should decide the gate oxide thickness with considering the film thickness and operating temperature when one decides to replace the junctionless amorphous InGaZnO thin film transistors as BEOL transistors.

Highly stable Zn-In-Sn-O TFTs for the Application of AM-OLED Display

  • Ryu, Min-Ki;KoPark, Sang-Hee;Yang, Shin-Hyuk;Cheong, Woo-Seok;Byun, Chun-Won;Chung, Sung-Mook;Kwon, Oh-Sang;Park, Eun-Suk;Jeong, Jae-Kyeong;Cho, Kyoung-Ik;Cho, Doo-Hee;Lee, Jeong-Ik;Hwang, Chi-Sun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.330-332
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    • 2009
  • Highly stable bottom gate thin film transistors(TFTs) with a zinc indium tin oxide(Zn-In-Sn-O:ZITO) channel layer have been fabricated by rf-magnetron co-sputtering using a indium tin oxide(ITO:90/10), a tin oxide and a zinc oxide targets. The ZITO TFT (W/L=$40{\mu}m/20{\mu}m$) has a mobility of 24.6 $cm^2$/V.s, a subthreshold swing of 0.12V/dec., a turn-on voltage of -0.4V and an on/off ratio of >$10^9$. When gate field of $1.8{\times}10^5$ V/cm was applied with source-drain current of $3{\mu}A$ at $60^{\circ}C$, the threshold voltage shift was ~0.18 V after 135 hours. We fabricated AM-OLED driven by highly stable bottom gate Zn-In-Sn-O TFT array.

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Enhancing Production Rate of Emulsion via Parallelization of Flow-Focusing Generators (유동-집속 생성기의 병렬화를 통한 에멀젼 생산속도 향상)

  • Jeong, Heon-Ho
    • Korean Chemical Engineering Research
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    • v.56 no.5
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    • pp.761-766
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    • 2018
  • Droplet-based microfluidic device has led to transformational new approaches in various applications including materials synthesis and high-throughput screening. However, efforts are required to enhance the production rate to industrial scale because of low production rate in a single droplet generator. In here, we present a method for enhancing production rate of monodisperse droplets via parallelization of flow-focusing generators. For this, we fabricated a three-dimensional monolithic elastomer device (3D MED) that has the 3D channel structures in a single layer, using a double-sided imprinting method. We demonstrated that the production rate of monodisperse droplet is increased by controlling the flow rate of continuous and dispersed phases in 3D MED with 8 droplet generators. Thus, we anticipate that this microfluidic system will be used in wide area including microparticle synthesis and screening system via encapsulation of various materials and cells in monodisperse droplets.

DSP-Based Micro-Modem for Underwater Acoustic Communications (DSP 기반 초소형 수중 음향통신 모뎀)

  • Lee, Dongsoo;Lee, Sangmin;Park, Sung-Joon
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.39C no.3
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    • pp.275-281
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    • 2014
  • Recently, the need for various underwater application systems targeting efficient resource exploration and aquatic ecosystem monitoring is rapidly increasing in littoral sea and inland waters. In this paper, we focus on the research and development of digital module of acoustic micro modem which can be used for underwater mobile communication systems and underwater sensor network systems. Specifically, a digital module of acoustic modem embedding digital signal processor is designed and implemented. On top of the developed hardware platform, physical layer frame generation and recovery and channel coding algorithms are mounted and tested in a water tank and a pond to verify its functionality and performance. According to experimental results, less than 1 percent of total computational power is consumed in the processing of frame control and convolutional code with the data rate of 1 kbps. Thus, the performance of micro modem could be improved by loading efficient baseband algorithms into the processor while maintaining the implemented hardware.